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12/2/2016 SLIM Presentation 1 SLIM: Short Cycle Time and Low Inventory in Manufacturing at Samsung Electronics Corp., (SEC)
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  • 12/2/2016 SLIM Presentation 1

    SLIM: Short Cycle Time and Low Inventory in Manufacturing

    at Samsung Electronics Corp., (SEC)

  • 12/2/2016 SLIM Presentation 2

    Introductions

    Prof. Rob Leachman, UCB IEOR Dept., technical author and SLIM project manager

    Dr. Jeenyoung Kang, Leachman & Associates LLC, technical author (UCB IEOR PhD ‘96)

    Dr. Vincent Lin, Leachman & Associates LLC, technical author (UCB IEOR PhD ‘99)

    Mr. J. W. Kim, SEC Executive VP Semiconductor Manufacturing, SLIM project sponsor

  • 12/2/2016 SLIM Presentation 3

    Introduction to SEC

    • Market share leader in DRAMs, SRAMs, TFT-LCDs

    • Design and fabrication of integrated circuits centered in Kiheung, Korea– 11 large fab lines, 20,000 employees

    – 500,000 wafers per month

  • 12/2/2016 SLIM Presentation 4

    SEC in Kiheung, Korea

  • 12/2/2016 SLIM Presentation 5

    The business problem• 1995: DRAM manufacturers enjoy record

    profits

    • At end of 1995, DRAM market changed from seller’s market to buyer’s market

    • Urgent need to reduce manufacturing cycle time

  • 12/2/2016 SLIM Presentation 6

    The business problem

  • 12/2/2016 SLIM Presentation 7

    The project

    • SLIM project initiated in March, 1996

    • Ground rules:– joint effort of SEC and outside IE/OR experts

    – cycle time reduction as early as possible

    – consensus approval and credibility of solutions

    – no diminution of yields or productivity

  • 12/2/2016 SLIM Presentation 8

    Some fab terminology

    • Cycle time (a.k.a. lead time or flow time)

    • WIP (work-in-process)

    • Fab-out schedule

    • Steppers (photolithography machines, usually the fab bottleneck)

  • 12/2/2016 SLIM Presentation 9

    The challenge

    Fabrication of advanced memory devices

    • Re-entrant manufacturing process

    • Fragile manufacturing process

  • 12/2/2016 SLIM Presentation 10

    The challenge (cont.)

    Device Step Qualified Steppers

    XC 1.0 #2, #5, #68

    ZB 1.0 #1, #2, #5

    UC 1.0 #8, #9

    SB 1.0 #1

    XC 5.0 #61, #65, #86

  • 12/2/2016 SLIM Presentation 11

    SLIM scheduling principles

  • 12/2/2016 SLIM Presentation 12

    Conventional paradigm: lot-based dispatching• Scheduling objects: lots

    • Paradigm: when machine is idle, select suitable lot

    with the highest priority

    • Determine efficient priority rules

    – Most commonly, priority is given to lots

    determined to be behind schedule

  • 12/2/2016 SLIM Presentation 13

    Problems with conventional lot dispatching

    A-1 B-1 A-2

    B-0 A-1 B-1

    Machine M1

    Machine M2

    Start of shift Note: “A-1” denotes a lot of device A

    with a slack score = 1.

    Time

    Lot dispatching systems schedule too many changeovers.

  • 12/2/2016 SLIM Presentation 14

    More problems with lot dispatching

    Cycle timeto fab out

    A-1 A-4 A-3 A-2

    B-3 B-2 B-1

    3 2 1 0

    Note: “A-1” denotesa lot of device Awith slack = 1

    A-1 is the wrong choice! Lot due dates become stale because of lots passing one another, changes to the fab out schedule, and downstream yield losses.

  • 12/2/2016 SLIM Presentation 15

    SLIM paradigm: manage WIP

    • Scheduling objects: device/steps

    • Paradigm: determine how many lots of each step of

    each device should be completed this shift, and

    allocate to machines intelligently

    • Maintain target WIP profile, maximize bottleneck

    throughput, and control frequency of recipe changes

    • Schedule non-production work, not just production

  • 12/2/2016 SLIM Presentation 16

    SLIM schedules

    A-1 A-1 A-2

    B-0 B-1 B-1

    Machine M1

    Machine M2

    Start of shift

    Time

  • 12/2/2016 SLIM Presentation 17

    Fab out schedule

    SLIM works to a target fab out schedule• Expressed through continuous-time for every

    device

    • Analyzed to be capacity-feasible and consistent with the WIP

  • 12/2/2016 SLIM Presentation 18

    Target cycle time• The target cycle time for each device is established

    according to standard learning curves:

    1

    1.5

    2

    2.5

    1 2 3 4 5 6 7 8 9 10Months since qualification

    Cyc

    le ti

    me

    / mat

    ure

    cycl

    e tim

    e

    Similar technologyDifferentVery different

    Chart1

    1.66666666672.55263157892.41025641032.1702127662.53846153851.47826086961.41860465122.0606060606

    1.54385964911.73684210532.53846153851.57446808512.53846153851.3478260871.20930232561.7272727273

    1.45614035091.76315789472.20512820511.38297872342.51.1521739131.23255813951.9393939394

    1.3508771931.92105263161.79487179491.27659574472.11538461541.08695652171.13953488372.3636363636

    1.3508771931.57894736841.56410256411.61702127661.61538461541.02173913041.13953488372.9090909091

    1.14035087721.52631578951.48717948721.27659574471.73076923081.02173913041.06976744194.0303030303

    1.08771929821.47368421051.46153846151.61702127661.84615384621.02173913041.09302325581.6666666667

    1.05263157891.42105263161.30769230771.27659574471.46153846151.06521739131.06976744191.0606060606

    1.14035087721.39473684211.23076923081.04255319151.3461538462111.0303030303

    11.184210526311.06382978721.07692307691.13043478261.18604651161

    11.05128205131.063829787211.08695652171.3255813953

    1.05263157891.102564102611.06521739131.1860465116

    1.05263157891.02127659571.1739130435

    1.0263157895

    16M DRAM UC

    16M DRAM UE

    16M sync DRAM 3rd DB

    16M sync DRAM 4th EA

    64M DRAM 3rd WB

    64M DRAM XC

    64M sync DRAM 2nd ZB

    64M sync DRAM 3rd YA

    Months since qualification

    Cycle time / Best cycle time

    Cycle time learning curves

    Chart2

    1.522.5

    1.381.812.26

    1.271.642.04

    1.171.491.84

    1.071.351.66

    11.221.5

    1.111.36

    11.22

    1.11

    1

    Similar technology

    Different

    Very different

    Months since qualification

    Cycle time / mature cycle time

    Query1

    period16M DRAM UC16M DRAM UE16M sync DRAM 3rd DB16M sync DRAM 4th EA64M DRAM 3rd WB64M DRAM XC64M sync DRAM 2nd ZB64M sync DRAM 3rd YA

    11.66666666672.55263157892.41025641032.1702127662.53846153851.47826086961.41860465122.0606060606

    21.54385964911.73684210532.53846153851.57446808512.53846153851.3478260871.20930232561.7272727273

    31.45614035091.76315789472.20512820511.38297872342.51.1521739131.23255813951.9393939394

    41.3508771931.92105263161.79487179491.27659574472.11538461541.08695652171.13953488372.3636363636

    51.3508771931.57894736841.56410256411.61702127661.61538461541.02173913041.13953488372.9090909091

    61.14035087721.52631578951.48717948721.27659574471.73076923081.02173913041.06976744194.0303030303

    71.08771929821.47368421051.46153846151.61702127661.84615384621.02173913041.09302325581.6666666667

    81.05263157891.42105263161.30769230771.27659574471.46153846151.06521739131.06976744191.0606060606

    91.14035087721.39473684211.23076923081.04255319151.3461538462111.0303030303

    1011.184210526311.06382978721.07692307691.13043478261.18604651161

    1111.05128205131.063829787211.08695652171.3255813953

    121.05263157891.102564102611.06521739131.1860465116

    131.05263157891.02127659571.1739130435

    141.0263157895

    PeriodSimilar deviceDifferentVery different

    11.522.5

    21.381.812.26

    31.271.642.04

    41.171.491.84

    51.071.351.66

    611.221.5

    71.111.36

    811.22

    91.11

    101

  • 12/2/2016 SLIM Presentation 19

    Target cycle time for steps

    • The process time plus material handling time for each step is termed the standard cycle time (sct).

    • The difference between the target cycle time and the total standard cycle time for a device is its total buffer time (TBT).

    • A key strategy of SLIM concerns how one allocates TBT among steps of the process flow...

  • 12/2/2016 SLIM Presentation 20

    Allocating buffer time

    WIP profile when there is no process or equipment trouble:

    Photo

    Layer 1

    Photo

    Layer 2

    Photo

    Layer 3

    Photo

    Layer 4

    Fab process

  • 12/2/2016 SLIM Presentation 21

    Allocating buffer time

    Photo

    Layer 1

    Photo

    Layer 2

    Photo

    Layer 3

    Photo

    Layer 4

    Fab processProcess trouble

    WIP profile when there is process trouble:

    Layer 3 photo WIP running out

  • 12/2/2016 SLIM Presentation 22

    Target cycle time for steps

    • SLIM allocates TBT to steps according to statistics

    on actual cycle time.

    • Non-bottleneck steps are not allocated buffer time.

    • Bottleneck steps are allocated buffer time in

    proportion to the discrepancy between the upstream

    actual cycle time and the standard cycle time ...

  • 12/2/2016 SLIM Presentation 23

    Target cycle time for steps

    where,ijijij btscttct +=

    , deviceon step bottleneckFor ij

    ( )( )iNB

    jijij

    ijijij TBT

    SCTACT

    SCTACTbt

    i

    ∑=

    −=

    1

    . and 1 steps bottleneckbetween timecycle standard total

    theis and timecycle actual average theis CT and

    jj

    SCTA ijij−

  • 12/2/2016 SLIM Presentation 24

    Target cycle time proposed by others

    • Use a common multiple of theoretical cycle time, or

    • Set target proportional to actual or simulated average cycle time

    • Targets set this way average over events when the WIP is dislocated from where it is needed. They do not try to concentrate as much WIP in front of bottleneck steps downstream from trouble spots as does SLIM, and consequently they require more WIP to achieve a target level of utilization.

  • 12/2/2016 SLIM Presentation 25

    Ideal production quantity

    1 2 3 4 5 6 7 8 9

    Fab out scheduleTarget cycle time

    to fab out

    • IPQ of a device/step = how many units need to be

    completed by the end of the shift to meet the target

    cycle time and the target fab outs

  • 12/2/2016 SLIM Presentation 26

    Ideal production quantity• IPQ = (Target fab outs due until the target cycle time

    to fab out plus one shift)

    - (actual fab outs to date)

    - (actual downstream WIP)

    1 2 3 4 5 6 7 8 9

    Fab out scheduleTarget cycle time

    to fab out

  • 12/2/2016 SLIM Presentation 27

    Ideal production quantity

    ( )( )

    −−

    =

    ∑∫ ∫+=

    +

    ∞− ∞−ik

    N

    jkik

    TCTFO

    iiij

    ij

    AWFYdttAFOdttTFOFY

    IPQ

    iij

    1

    33.0 0)()(1

    • IPQ = (Target fab outs due until the target cycle time

    to fab out plus one shift) - (actual fab outs to date)

    - (actual downstream WIP)

  • 12/2/2016 SLIM Presentation 28

    Schedule score

    • SS of device/step = how many days early or late is

    the current production of this device/step

    • SS = - IPQ / (Avg. fab out rate over cycle time to out)

    • SLIM prioritizes device/steps by SS, and strives to

    complete the IPQ for each device/step

  • 12/2/2016 SLIM Presentation 29

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    10.00

    0

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    Wafers w/in MTTS weekWafers DUE in week

    -.53 Mean Delta .8583 Mean CR35013 Total Wafers

    08/11/06 09:06 AM - Inventory current as of 08/11/06 07:48 AM

    Base: FAB 6 U27YJ Inc.: FAB 6 U27YJRWK: Yes HOLD: Yes HOT: Yes RUN: YesMax MTAS : 10 WIP Labels: > 150Start: End:Lot # Filter: LIKE '*'

    PC Filter: LIKE '*'PC Rt. Filter: LIKE '*'Trav. Filter: LIKE '*'Part Filter: LIKE '*'Des. Filter: LIKE '*'Ven. Filter: LIKE '*'

    Cycle Time-66Line Yield-97%

    Scheduling Score Delta

  • 12/2/2016 SLIM Presentation 30

    Balance index

    According to BI, step B should be dispatched first

    Step BNext photo step

    Downstream WIP situation:

    Step ANext photo step

  • 12/2/2016 SLIM Presentation 31

    Balance index• BI of non-bottleneck step = score indicating relative

    surplus or deficit of actual WIP vs. target WIP

    downstream up to next bottleneck step:

    BI = (AW – TW)/TW

    where AW is the actual WIP summed over all steps up

    to the next bottleneck step and TW is the target WIP

    up to the next bottleneck step

    • SLIM also considers BI in addition to SS when

    prioritizing device/steps.

  • 12/2/2016 SLIM Presentation 32

    PhotoDiffusion

    ThinFilmsEtch

    Fab In Fab Out

    SLIM - S• Schedule scannersso as to complete IPQsand for maximumutilization

    SLIM - I• Control fab-insaccording totarget WIP levelsand steppercapacity

    SLIM - D• Form batchesof device/steps with low SS and low BI

    WIP

    SLIM – E,T• Schedule device/stepswith low SS and low BI

    SLIM scheduling

  • 12/2/2016 SLIM Presentation 33

    SLIM logic• Make a shift schedule, with on-line updates

    • Prioritize device/steps by SS and BI

    • First pass: Assign WIP to complete IPQs by end of shift– Choose machine based on setup avoidance,

    least candidate WIP, etc.

    • Second pass: Assign remaining WIP– Save changeovers where possible

  • 12/2/2016 SLIM Presentation 34

    SLIM-S schedule

  • 12/2/2016 SLIM Presentation 35

    Key ideas of SLIM• We can reduce total WIP and cycle time by wisely

    positioning the buffer WIP– Concentrate buffer WIP at the bottleneck steps following

    the troublesome portions of the process flow

    – Then we can lower the overall factory WIP and still achieve the same fab throughput

    • Good scheduling can increase area throughput for the same level of WIP– Then we can lower overall WIP some more

  • 12/2/2016 SLIM Presentation 36

    SLIM implementation

  • 12/2/2016 SLIM Presentation 37

    SLIM teams

    • SLIM project teams for pairs of fab lines– First team formed in March, 1996 for Lines 4 and 5

    – Team for Lines 6 and 7 started March, 1997

    – Ultimately, 8 SLIM teams were formed

  • 12/2/2016 SLIM Presentation 38

    SLIM steering committee

  • 12/2/2016 SLIM Presentation 39

    SLIM teamwork

    • Inter-disciplinary team membership– including several with graduate OR/MS training

    • Developed SLIM database and SLIM modules

    • Trained 3,000 people in SLIM logic & use

  • 12/2/2016 SLIM Presentation 40

    SLIM training

  • 12/2/2016 SLIM Presentation 41

    SLIM results

  • 12/2/2016 SLIM Presentation 42

    SEC DRAM cycle times

    20

    30

    40

    50

    60

    70

    80

    90

    100

    Dec-95 Jun-96 Dec-96 Jun-97 Dec-97 Jun-98 Dec-98 Jun-99

    Avg

    . fab

    cyc

    le ti

    me

    (day

    s)

    4M16M64M128M

    SLIMbegins

    SLIMbegins

    Standardcycle time

    SLIM beginson all lines

    Chart2

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    4M

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    64M

    128M

    Avg. fab cycle time (days)

    82.31

    72.25

    99.7

    72.54

    66.1

    94.96

    90.27

    64.59

    74.98

    64.56

    60.45

    60.25

    57.07

    71.48

    58.34

    54.67

    62.98

    63

    52.03

    62.58

    66

    49.54

    64.41

    70.84

    46.52

    59.2

    71.06

    38.82

    62.34

    78.99

    47.08

    60.19

    92.77

    41.21

    60.3

    68.23

    37.63

    57.21

    67.03

    41.29

    52.7

    64.14

    39.99

    53.38

    60.79

    42.81

    50.11

    55.56

    42.98

    48.91

    53.26

    39.47

    50.48

    53.62

    40.67

    50.3

    52.92

    38.01

    53.17

    57.11

    36.21

    53.97

    54.76

    37.95

    59.76

    53.43

    36.35

    57.7

    51.89

    35.72

    60.48

    49.56

    34.26

    51.39

    52.3

    34.38

    45.5

    52.23

    35.4

    40.36

    45.74

    32.58

    43.59

    47.56

    67.58

    28.48

    50.22

    54.77

    57.57

    30.04

    38.94

    43.56

    47.57

    34.68

    32.21

    37.88

    53.8

    36.25

    27.6

    35.26

    59.86

    41.42

    27.18

    35

    41.91

    38.43

    26.94

    31.15

    33.93

    41.05

    28.55

    31.25

    32.13

    35.52

    28.43

    31.76

    30.57

    30.12

    26.63

    32.42

    28.49

    30.58

    27.95

    33.55

    31.99

    29.35

    31.16

    32.97

    29.9

    29.89

    30.85

    37.36

    31.43

    29.19

    30.88

    36.67

    33.8

    26.59

    31.3

    32.5

    33.38

    28.88

    34.75

    34.61

    43.21

    30.54

    35.64

    35.61

    38.09

    Sheet1

    Sheet1

    35125351253512535125

    35156351563515635156

    35186351863518635186

    35217352173521735217

    35247352473524735247

    35278352783527835278

    35309353093530935309

    35339353393533935339

    35370353703537035370

    35400354003540035400

    35431354313543135431

    35462354623546235462

    35490354903549035490

    35521355213552135521

    35551355513555135551

    35582355823558235582

    35612356123561235612

    35643356433564335643

    35674356743567435674

    35704357043570435704

    35735357353573535735

    35765357653576535765

    35796357963579635796

    35827358273582735827

    35855358553585535855

    35886358863588635886

    35916359163591635916

    35947359473594735947

    35977359773597735977

    36008360083600836008

    36039360393603936039

    36069360693606936069

    36100361003610036100

    36130361303613036130

    36161361613616136161

    36192361923619236192

    36220362203622036220

    36251362513625136251

    36281362813628136281

    36312363123631236312

    36342363423634236342

    36373363733637336373

    36404364043640436404

    36434364343643436434

    36465364653646536465

    36495364953649536495

    36526365263652636526

    36557365573655736557

    36586365863658636586

    36617366173661736617

    36647366473664736647

    36678366783667836678

    36708367083670836708

    36739367393673936739

    36770367703677036770

    36800368003680036800

    36831368313683136831

    36861368613686136861

    4M

    16M

    64M

    128M

    Month

    Figure 6. DRAM Average Selling Prices

    8.6189189874

    34.1159493279

    224.402266145

    6.6710687086

    26.1751431392

    172.7018422048

    4.5434772432

    16.8767386855

    167.7301495667

    3.607123179

    13.7490849292

    135.1970134651

    3.2995598363

    12.2574365249

    101.5641420672

    2.994164871

    10.8816494018

    103.296668691

    2.8796307725

    9.4296975641

    100.0482830632

    3.2790874194

    10.1864854022

    93.3864502803

    3.0520426034

    9.3138200794

    91.2324632452

    3.0240112334

    8.0967623589

    76.3648451991

    2.686970447

    7.7633662534

    60.2871313053

    2.5361285691

    8.0354530813

    53.394728255

    2.5478292801

    8.5737730695

    50.1858396312

    2.5393124273

    9.1990837978

    46.5736019683

    2.585169303

    9.3151928059

    45.1863956102

    2.657574939

    8.8835615367

    41.585357682

    2.5173253291

    8.0913909701

    36.1653104038

    2.3908874614

    7.2827499388

    33.1692347574

    2.3117674448

    6.7544585966

    29.3706784845

    2.2492834047

    5.9656595113

    25.5943289049

    2.3212098428

    4.8746569316

    22.0403325678

    2.3178683426

    3.9278509722

    17.2152193172

    2.3177110118

    3.5694881308

    17.2120423647

    2.3746664179

    3.1096674399

    14.7079405276

    2.2143586142

    3.2097661269

    13.4621474228

    2.047979324

    3.2247677875

    12.6013619071

    1.9174326456

    2.777005529

    10.4572559315

    1.829334317

    2.5490133196

    9.4312076929

    67.27

    1.8203162332

    2.3385997243

    8.957825984

    58.06

    1.8108048285

    2.3833464114

    9.136807903

    55.48

    1.8340679034

    2.5658050567

    9.4078057239

    53.63

    1.8870303261

    2.3678773776

    9.2471834084

    46.45

    2.0507093517

    2.7791518614

    9.8622609263

    41.72

    2.1427032379

    2.9485018979

    10.4091031654

    40.29

    2.2327630467

    3.3866497059

    10.8441941181

    39.0520042193

    2.191313478

    3.3948230678

    10.6944278657

    35.94

    2.2512901758

    3.4691407905

    10.2433544503

    34.36

    2.357798585

    3.4673530009

    9.8038457626

    30.91

    2.3609031265

    3.4812302866

    9.3721446923

    28.15

    2.3095233987

    3.4795445556

    8.273567631

    23.32

    2.373170027

    3.4179323656

    7.4284240995

    18.2538620129

    2.3987058883

    3.4639774016

    7.8225804019

    16.4941280471

    2.4386837526

    3.5351936715

    9.5482715945

    18.9266274178

    2.4507705807

    3.8061519497

    11.6905423066

    24.8288711473

    2.572108573

    3.8635333464

    12.2749591881

    25.792880569

    2.572108573

    3.8635333464

    12.2749591881

    24.8489203565

    2.5924687795

    3.8240402591

    11.3089490446

    24.0821852945

    2.9670490169

    3.8714448396

    10.2138037175

    19.6372807651

    3.1350149859

    3.6704182686

    7.8178119145

    16.5982195307

    3.5130706523

    3.6440885745

    8.5590552442

    16.8925870109

    3.0386393824

    3.683839894

    9.4108489078

    18.7548805788

    3.8160968648

    3.8472534845

    10.0726868263

    18.6497508042

    3.643593646

    3.980386012

    11.1545644999

    19.554638032

    3.7521860779

    3.9466345888

    12.54473223

    20.6208153695

    3.3919621407

    3.9994272024

    12.4678745252

    18.9310457557

    3.4185716652

    3.9909331336

    11.4994161367

    15.8469063011

    3.3598292492

    4.0547228814

    9.9269736688

    11.7273758079

    3.4194500845

    3.71642657

    8.1656169354

    10.6212377692

    Sheet2

    Sheet2

    35034350343503435034

    35065350653506535065

    35096350963509635096

    35125351253512535125

    35156351563515635156

    35186351863518635186

    35217352173521735217

    35247352473524735247

    35278352783527835278

    35309353093530935309

    35339353393533935339

    35370353703537035370

    35400354003540035400

    35431354313543135431

    35462354623546235462

    35490354903549035490

    35521355213552135521

    35551355513555135551

    35582355823558235582

    35612356123561235612

    35643356433564335643

    35674356743567435674

    35704357043570435704

    35735357353573535735

    35765357653576535765

    35796357963579635796

    35827358273582735827

    35855358553585535855

    35886358863588635886

    35916359163591635916

    35947359473594735947

    35977359773597735977

    36008360083600836008

    36039360393603936039

    36069360693606936069

    36100361003610036100

    36130361303613036130

    36161361613616136161

    36192361923619236192

    36220362203622036220

    36251362513625136251

    36281362813628136281

    36312363123631236312

    36342363423634236342

    36.835.9242.61

    35.4733.4652

    36.4936.9359.86

    41.1437.3554.95

    38.6438.5651.74

    42.2739.451.08

    42.6240.2847.53

    46.6641.5854.05

    41.8341.2957.5

    48.3141.352.91

    42.3841.4353.59

    43.741.4555.93

    40.2742.0261.85

    41.6844.8366.1

    4M

    16M

    64M

    128M

    Avg. fab cycle time (days)

    Figure 5. DRAM Cycle Time

    82.31

    72.25

    99.7

    72.54

    66.1

    94.96

    90.27

    64.59

    74.98

    64.56

    60.45

    60.25

    57.07

    71.48

    58.34

    54.67

    62.98

    63

    52.03

    62.58

    66

    49.54

    64.41

    70.84

    46.52

    59.2

    71.06

    38.82

    62.34

    78.99

    47.08

    60.19

    92.77

    41.21

    60.3

    68.23

    37.63

    57.21

    67.03

    41.29

    52.7

    64.14

    39.99

    53.38

    60.79

    42.81

    50.11

    55.56

    42.98

    48.91

    53.26

    39.47

    50.48

    53.62

    40.67

    50.3

    52.92

    38.01

    53.17

    57.11

    36.21

    53.97

    54.76

    37.95

    59.76

    53.43

    36.35

    57.7

    51.89

    35.72

    60.48

    49.56

    34.26

    51.39

    52.3

    34.38

    45.5

    52.23

    35.4

    40.36

    45.74

    32.58

    43.59

    47.56

    67.58

    28.48

    50.22

    54.77

    57.57

    30.04

    38.94

    43.56

    47.57

    34.68

    32.21

    37.88

    53.8

    36.25

    27.6

    35.26

    59.86

    41.42

    27.18

    35

    41.91

    38.43

    26.94

    31.15

    33.93

    41.05

    28.55

    31.25

    32.13

    35.52

    28.43

    31.76

    30.57

    30.12

    26.63

    32.42

    28.49

    30.58

    27.95

    33.55

    31.99

    29.35

    31.16

    32.97

    29.9

    29.89

    30.85

    37.36

    31.43

    29.19

    30.88

    36.67

    33.8

    26.59

    31.3

    32.5

    33.38

    28.88

    34.75

    34.61

    43.21

    30.54

    35.64

    35.61

    38.09

    Sheet3

    Sheet3

    3503435034350343503435034

    3506535065350653506535065

    3509635096350963509635096

    3512535125351253512535125

    3515635156351563515635156

    3518635186351863518635186

    3521735217352173521735217

    3524735247352473524735247

    3527835278352783527835278

    3530935309353093530935309

    3533935339353393533935339

    3537035370353703537035370

    3540035400354003540035400

    3543135431354313543135431

    3546235462354623546235462

    3549035490354903549035490

    3552135521355213552135521

    3555135551355513555135551

    3558235582355823558235582

    3561235612356123561235612

    3564335643356433564335643

    3567435674356743567435674

    3570435704357043570435704

    3573535735357353573535735

    3576535765357653576535765

    3579635796357963579635796

    3582735827358273582735827

    3585535855358553585535855

    3588635886358863588635886

    3591635916359163591635916

    3594735947359473594735947

    3597735977359773597735977

    3600836008360083600836008

    3603936039360393603936039

    3606936069360693606936069

    3610036100361003610036100

    3613036130361303613036130

    3616136161361613616136161

    3619236192361923619236192

    3622036220362203622036220

    3625136251362513625136251

    3628136281362813628136281

    3631236312363123631236312

    3634236342363423634236342

    3637336373363733637336373

    3640436404364043640436404

    3643436434364343643436434

    3646536465364653646536465

    3649536495364953649536495

    Line 4

    Line 5

    Line 6

    Line 7

    Line 8

    Month

    Cycle time per mask layer (days)

    Figure 4. Cycle Time at SEC Fabs

    4.5566666667

    4.5

    4.0255555556

    4.35

    3.8

    4.2

    3.4127777778

    4.3044444444

    4.2504247042

    3.8726977248

    3.1116666667

    3.9461111111

    3.9240986884

    3.3889490791

    2.9055555556

    4.01

    3.8560984536

    3.4951245937

    2.665

    3.95

    3.3359974459

    3.3087757313

    2.5677777778

    3.87

    3.7962793788

    4.3174431203

    2.4888888889

    4.0594444444

    3.7326175459

    3.1554712893

    2.1033333333

    3.7372222222

    3.6843207926

    3.4052004334

    2.59

    3.1666666667

    3.9685499423

    3.5514626219

    2.2455555556

    3.2644444444

    3.7653021963

    3.4306608884

    2.3828238719

    1.9805555556

    2.9211111111

    3.9309493988

    3.6950162514

    3.2969432314

    2.225

    2.4972222222

    4.2650238803

    3.2589382449

    3.3231441048

    2.2905555556

    2.0272222222

    3.5535404984

    3.2892741062

    3.1077147016

    2.445

    2.0733333333

    3.482246002

    3.1213434453

    3.0984958758

    2.4105555556

    2.2822222222

    3.1419351194

    3.0318626375

    2.7991266376

    2.1988888889

    2.1538888889

    3.2009965933

    2.9286815256

    2.7006307618

    2.2577777778

    2.2666666667

    2.9534748796

    2.6844430347

    2.6419213974

    2.1138888889

    2.1044444444

    2.7725764508

    2.5695059578

    2.6598738476

    1.955

    2.1011111111

    2.8063151953

    2.5560804705

    2.454633673

    2.1188888889

    2.0888888889

    2.7028753472

    2.6689302496

    2.8791848617

    2.1138888889

    1.9044444444

    2.7895026716

    2.8304809205

    2.8791848617

    2.0033333333

    1.9594444444

    2.6040662116

    2.9177009166

    2.8704512373

    1.9894444444

    1.8022222222

    2.7345907165

    2.8013551018

    2.9291606016

    1.9583333333

    1.8672222222

    2.6697317129

    2.5202730702

    2.99

    1.9594444444

    1.9733333333

    2.5826557966

    2.5618040621

    2.95

    1.8277777778

    1.7966666667

    2.7138243756

    2.48

    2.65

    1.5227777778

    1.66

    2.4285115512

    2.55

    2.68

    1.4866666667

    1.7583333333

    2.0034021611

    2.2

    2.5

    1.57

    1.9266666667

    2.2402672293

    2.44

    2.55

    1.65

    2.0138888889

    2.5903113478

    2.82

    2.89

    1.75

    2.3011111111

    1.9679101264

    2.35

    2.27

    1.85

    2.135

    1.6420166883

    1.92

    2.22

    2.05

    2.2805555556

    1.4364754353

    1.66

    2.17

    2.25

    1.9733333333

    1.4324044355

    1.58

    2.03

    2.25

    1.6733333333

    1.42

    1.52

    1.62

    1.9

    1.6988888889

    1.5005453719

    1.57

    1.53

    1.75

    1.6305555556

    1.5

    1.64

    1.42

    1.7

    1.6605555556

    1.4

    1.66

    1.36

    1.84

    1.6216666667

    1.46

    1.69

    1.42

    1.72

    1.4772222222

    1.6

    1.66

    1.31

    1.71

    1.6044444444

    1.59

    1.85

    1.33

    1.74

    1.6966666667

    1.59

    1.89

    1.32

    1.89

    1.625

    1.6

    1.57

    1.34

    2.15

    1.7933333333

    1.77

    1.61

    1.62

    2.01

    2.0094444444

    1.81

    1.67

    1.58

    1.9

    1.9816666667

    1.85

    1.65

    1.43

    1.8

    2.1066666667

    1.78

    1.5

    1.62

  • 12/2/2016 SLIM Presentation 43

    Benefits of SLIM• Faster rate of yield improvement

    • Reduction of late production deliveriesBefore After

    At Die out 30% 4%

    At Test out 26% 3%

    • Reduced lead times to customers

    • Higher selling prices ...

  • 12/2/2016 SLIM Presentation 44

    Financial impact of SLIM

    • Sales revenues for the DRAM output of the Kiheung fab lines March, 1996 - December 2000 were tallied: $21.9 billion

    • Sales revenues were re-computed assuming fab cycle times had stayed at 80 days

  • 12/2/2016 SLIM Presentation 45

    DRAM selling prices

    0.00

    20.00

    40.00

    60.00

    80.00

    100.00

    120.00

    140.00

    160.00

    180.00

    200.00

    Mar-96 Sep-96 Mar-97 Sep-97 Mar-98 Sep-98 Mar-99 Sep-99

    Ave

    rage

    sel

    ling

    pric

    e ($

    )

    4M16M64M128M

    ASP Trend

    35125351253512535125

    35156351563515635156

    35186351863518635186

    35217352173521735217

    35247352473524735247

    35278352783527835278

    35309353093530935309

    35339353393533935339

    35370353703537035370

    35400354003540035400

    35431354313543135431

    35462354623546235462

    35490354903549035490

    35521355213552135521

    35551355513555135551

    35582355823558235582

    35612356123561235612

    35643356433564335643

    35674356743567435674

    35704357043570435704

    35735357353573535735

    35765357653576535765

    35796357963579635796

    35827358273582735827

    35855358553585535855

    35886358863588635886

    35916359163591635916

    35947359473594735947

    35977359773597735977

    36008360083600836008

    36039360393603936039

    36069360693606936069

    36100361003610036100

    36130361303613036130

    36161361613616136161

    36192361923619236192

    36220362203622036220

    36251362513625136251

    36281362813628136281

    36312363123631236312

    36342363423634236342

    36373363733637336373

    36404364043640436404

    36434364343643436434

    36465364653646536465

    36495364953649536495

    4M

    16M

    64M

    128M

    Average selling price ($)

    8.6189189874

    34.1159493279

    224.402266145

    6.6710687086

    26.1751431392

    172.7018422048

    4.5434772432

    16.8767386855

    167.7301495667

    3.607123179

    13.7490849292

    135.1970134651

    3.2995598363

    12.2574365249

    101.5641420672

    2.994164871

    10.8816494018

    103.296668691

    2.8796307725

    9.4296975641

    100.0482830632

    3.2790874194

    10.1864854022

    93.3864502803

    3.0520426034

    9.3138200794

    91.2324632452

    3.0240112334

    8.0967623589

    76.3648451991

    2.686970447

    7.7633662534

    60.2871313053

    2.5361285691

    8.0354530813

    53.394728255

    2.5478292801

    8.5737730695

    50.1858396312

    2.5393124273

    9.1990837978

    46.5736019683

    2.585169303

    9.3151928059

    45.1863956102

    2.657574939

    8.8835615367

    41.585357682

    2.5173253291

    8.0913909701

    36.1653104038

    2.3908874614

    7.2827499388

    33.1692347574

    2.3117674448

    6.7544585966

    29.3706784845

    2.2492834047

    5.9656595113

    25.5943289049

    2.3212098428

    4.8746569316

    22.0403325678

    2.3178683426

    3.9278509722

    17.2152193172

    2.3177110118

    3.5694881308

    17.2120423647

    2.3746664179

    3.1096674399

    14.7079405276

    2.2143586142

    3.2097661269

    13.4621474228

    2.047979324

    3.2247677875

    12.6013619071

    1.9174326456

    2.777005529

    10.4572559315

    1.829334317

    2.5490133196

    9.4312076929

    67.27

    1.8203162332

    2.3385997243

    8.957825984

    58.06

    1.8108048285

    2.3833464114

    9.136807903

    55.48

    1.8340679034

    2.5658050567

    9.4078057239

    53.63

    1.8870303261

    2.3678773776

    9.2471834084

    46.45

    2.0507093517

    2.7791518614

    9.8622609263

    41.72

    2.1427032379

    2.9485018979

    10.4091031654

    40.29

    2.2327630467

    3.3866497059

    10.8441941181

    39.0520042193

    2.191313478

    3.3948230678

    10.6944278657

    35.94

    2.2512901758

    3.4691407905

    10.2433544503

    34.36

    2.357798585

    3.4673530009

    9.8038457626

    30.91

    2.3609031265

    3.4812302866

    9.3721446923

    28.15

    2.3095233987

    3.4795445556

    8.273567631

    23.32

    2.373170027

    3.4179323656

    7.4284240995

    18.2538620129

    2.3987058883

    3.4639774016

    7.8225804019

    16.4941280471

    2.4386837526

    3.5351936715

    9.5482715945

    18.9266274178

    2.4507705807

    3.8061519497

    11.6905423066

    24.8288711473

    2.572108573

    3.8635333464

    12.2749591881

    25.792880569

    2.572108573

    3.8635333464

    12.2749591881

    24.8489203565

    Sheet1

    `95.9`95.1095.1195.12`96.196.296.396.496.596.696.796.896.9`96.1096.1196.12`97.197.297.397.497.597.697.797.897.9`97.1097.1197.12`98.198.298.398.498.598.698.798.898.9`98.1098.1198.12`99.199.299.399.499.599.699.799.899.9`99.1099.1199.12`00.1`00.2`00.3`00.4`00.5`00.6`00.7`00.8`00.9`00.10`00.11`00.12

    CT4M3L89.1476.1791.82109.6939.9048.9852.05

    [days]4L82.0272.4689.9161.4356.0152.3047.9746.2244.8037.8646.6240.4235.6540.0541.2344.0143.3939.5840.6438.0535.1938.1438.0536.0635.8135.2535.2732.9027.4126.76

    5L77.4871.0388.41104.64110.2873.0767.2757.0058.7652.5844.9536.4937.3241.0838.7740.8037.8837.8237.6034.2835.2732.4433.6135.5232.3429.8831.6534.6836.2541.4238.4341.0535.5230.1230.5829.3529.8929.1926.5928.8830.5429.2532.2836.1735.6737.9245.0747.2448.3650.8750.1648.4148.2046.9445.0555.1959.35

    82.3172.5490.2764.5657.0754.6752.0349.5446.5238.8247.0841.2137.6341.2939.9942.8142.9839.4740.6738.0136.2137.9536.3535.7234.2634.3835.4032.5828.4830.0434.6836.2541.4238.4341.0535.5230.1230.5829.3529.8929.1926.5928.8830.5429.2532.2836.1735.6737.9245.0747.2448.3650.8750.1648.4148.2046.9445.0555.1959.35

    16M5L73.0874.1872.1764.1361.2255.4155.7655.4256.2250.7049.5842.9642.9844.6546.8839.0238.6837.1634.6034.0536.85

    6L80.3881.1577.9171.5671.6864.1277.1478.2379.4584.8778.1273.5371.0167.8367.2461.6370.6362.1156.6555.6651.5652.8051.5464.1065.4361.0251.3945.5040.3643.5950.2238.9432.2127.6027.1826.9428.5528.4326.6327.9531.1630.8530.8831.3034.7535.6436.8035.4736.4941.1438.6442.2742.6246.6641.8348.3142.3843.7040.2741.68

    7L71.4962.5664.5261.0879.7058.2562.8665.5663.3368.2160.1660.7257.6255.2053.1350.2546.8247.7649.1753.5356.7455.3546.9658.44

    77.3778.2772.1772.2566.1064.5960.4571.4862.9862.5864.4159.2062.3460.1960.3057.2152.7053.3850.1148.9150.4850.3053.1753.9759.7657.7060.4851.3945.5040.3643.5950.2238.9432.2127.6027.1826.9428.5528.4326.6327.9531.1630.8530.8831.3034.7535.6436.8035.4736.4941.1438.6442.2742.6246.6641.8348.3142.3843.7040.2741.68

    64M6L99.7094.9674.9860.2558.3463.0066.0070.8471.2279.88100.4770.2268.9063.3961.5556.4951.6054.0253.4855.7047.9945.3642.9043.5061.7667.7636.6244.7452.7139.7832.9829.7730.4329.8936.57

    7L70.2662.9653.1154.6851.4755.2255.9556.1954.9652.1350.1451.3652.2744.8547.5355.0045.1436.6031.7030.5529.7730.7532.7434.2134.8735.1940.8539.4033.2334.3835.7936.5733.2336.6437.1237.9439.0640.2841.5841.2941.3041.4341.4542.0244.83

    8L49.1167.9568.4964.0563.8657.6955.6654.4554.8250.5959.3459.3459.1660.3759.7658.9753.1451.1650.2348.7155.4343.9043.8044.5742.7134.0032.0929.7528.6230.9728.7329.2129.1329.5135.6134.6831.3935.5539.3939.4244.2049.26

    99.7094.9674.9860.2558.3470.8471.0678.9992.7768.2367.0364.1460.7955.5653.2653.6252.9257.1154.7653.4351.8949.5652.3052.2345.7447.5654.7743.5637.8835.2635.0031.1531.2531.7632.4233.5532.9737.3636.6732.5034.6135.6135.9233.4636.9337.3538.5639.4040.2841.5841.2941.3041.4341.4542.0244.83

    EDS TPT4M1.471.291.361.221.611.831.992.083.6922.7020.8010.90

    [days]16M4.405.194.256.733.305.351.636.4910.094.166.036.132.724.812.751.851.601.621.701.882.021.941.932.571.852.131.741.831.831.761.801.892.309.403.802.502.50

    64M2.713.283.343.853.506.363.106.035.564.516.924.744.304.412.332.881.911.731.772.252.432.633.074.031.443.835.386.936.364.153.715.207.213.103.602.803.25

    B/E TPT4M15.8913.9210.469.129.559.009.208.895.366.345.585.446.936.387.457.457.498.438.117.8213.548.227.2510.3817.0513.5411.179.0715.2313.6911.5616.4518.8112.9934.0952.9021.471.931.781.611.771.932.112.122.48

    [days]16M8.888.187.298.9610.4011.7911.0111.049.529.238.435.796.115.795.825.785.745.195.165.145.145.074.935.844.584.475.746.867.618.435.546.265.616.126.144.274.944.536.346.456.185.655.174.655.684.344.774.824.916.04

    64M10.508.287.538.9712.9613.0010.998.699.427.837.836.846.857.557.207.417.086.696.835.495.635.895.856.706.095.555.306.686.225.494.634.404.845.485.044.724.394.435.665.275.495.644.874.264.104.405.315.345.215.79

    CTPL4M3L4.954.235.106.090.000.002.222.722.89

    [days]4L4.564.035.003.413.112.912.672.572.492.102.592.251.982.232.292.452.412.202.262.111.962.122.112.001.991.961.961.831.521.49

    5L4.303.954.915.816.134.063.743.173.262.922.502.032.072.282.152.272.102.102.091.901.961.801.871.971.801.661.761.932.012.302.142.281.971.671.701.631.661.621.481.601.701.631.792.011.982.112.502.622.692.832.792.692.682.612.503.073.30

    4.574.035.023.593.173.042.892.752.582.162.622.292.092.292.222.382.392.192.262.112.012.112.021.981.901.911.971.811.581.671.932.012.302.142.281.971.671.701.631.661.621.481.601.701.631.792.011.982.112.502.622.692.832.792.692.682.612.503.073.30

    16M5L3.964.023.913.473.323.003.023.003.052.752.692.332.332.422.542.112.102.011.871.842.00

    6L4.354.404.223.883.883.474.184.244.304.604.233.983.853.673.643.343.833.363.073.022.792.862.793.473.503.232.702.392.122.292.642.051.701.451.431.421.501.501.401.461.601.591.591.601.771.811.851.781.852.031.932.082.072.322.072.342.022.081.921.98

    7L3.873.393.503.314.323.163.413.553.433.703.263.293.122.992.882.722.542.592.662.903.073.002.563.25

    3.113.232.702.392.122.292.642.051.701.451.431.421.501.501.401.461.601.591.591.601.771.811.851.781.852.031.932.082.072.322.072.342.022.081.921.98

    64M6L4.844.613.642.922.833.063.203.443.463.884.873.413.343.082.992.742.502.622.592.702.332.202.042.072.943.231.742.132.511.891.571.421.451.421.74

    7L3.413.052.582.652.502.682.712.732.672.502.412.482.552.202.442.822.351.921.661.581.521.571.641.661.691.661.851.891.571.611.671.651.501.661.691.721.781.841.901.891.901.901.901.922.04

    8L2.383.303.323.113.102.802.702.642.662.452.882.882.872.932.992.952.652.682.502.552.892.272.222.172.031.621.531.421.361.421.311.331.321.341.621.581.431.621.791.792.012.24

    2.532.402.562.562.252.442.792.221.941.771.741.551.551.571.561.601.541.701.741.521.611.661.621.511.671.701.741.801.841.901.891.901.901.901.922.04

    Layer 수4M18181818181818181818181818181818181818181818181818181818181818181818181818181818181818181818181818181818181818181818181818

    [ea]16M18.4618.4618.4618.4618.4618.4618.4618.4618.4618.4618.4618.4618.4618.4618.4618.4618.4618.4618.4618.4618.4618.4618.4618.4618.4618.4618.7119191919191919191919191919.0219.0519.1919.2219.1619.2819.3319.4219.6619.6519.6219.8819.8720.2220.4119.9420.0920.6121212121

    64M20.6120.6120.6120.6120.6120.6120.6120.6120.6120.6120.6120.6120.6120.6120.6120.6120.6120.6120.6120.6120.6120.6120.6120.6120.6120.6120.7420.4820.4120.3519.5419.6119.6219.5419.7619.9520.0120.0520.2320.6520.9221.4222.0621.0221.3321.4221.522.0922.0822.0121.922.0621.8821.8721.8521.8221.7721.7921.7721.8321.93

    FAB IN3L4M10,5009,300------------------------------------------------------

    [wafers]Other------33,70250,53540,47433,895------------------------------------------------------

    TOT33,70250,53550,97443,195

    4L4M21,60020,30421,45423,90431,10443,20040,89629,08813,96813,53621,88825,05621,60020,88019,15218,00017,71213,68010,6569,2167,8667,5005,5506,0007,5004,200--------------------------------

    Other------35,28040,32030,57822,61412,9881,65611,42414,25619,94428,64721,70833,02422,58425,78026,52019,51232,63831,48844,18441,16940,98241,75038,94024,17422,53718,423--------------------------------

    TOT56,88060,62452,03246,51844,09244,85652,32043,34433,91242,18343,59658,08044,18446,66045,67237,51250,35045,16854,84050,38548,84849,25044,49030,17430,03722,623

    5L4M2,10035,0751,6008001,6002,5002,4002,6002,0005,1006,4004,3004,0005,5005,8006,7007,5007,6006,7008,9007,0007,1006,2006,9006,9007,2003,1003,2002,5001,9003,1003,9003,1003,6002,9002,8503,5001,2253,6003,1252,0002,0001,8251,7001,2001,1001,0006001,4001,3001,000900100--900

    16M30,90031,77526,52526,67526,00021,67525,02522,15020,60021,10010,00011,70011,50010,20012,0007,1001,000-----------------------------------------

    Other------400- 31,7754,9853,3824,1754,1194,8435,00010,5008,20014,35012,67512,45017,40016,30018,00019,75021,25025,55023,45023,00024,90026,57518,20020,12514,15011,42516,67523,42626,84123,59324,48721,95426,57427,00025,39425,401-27,86155,47525,68426,60124,70824,28229,51126,38127,90724,57424,73630,16730,28432,59630,01829,80831,84030,14427,04523,145

    TOT33,40035,07531,51031,65730,97527,39432,36829,55033,70031,30029,45030,77528,25031,60033,80030,90027,45028,75033,15030,15031,90031,90033,67524,40027,02521,05018,62519,77526,62629,34125,49327,58725,85429,67430,60028,29428,25131,36156,70029,28429,72626,70826,28228,08128,08129,10725,67425,73630,76731,68433,89631,01830,70831,94030,14427,04524,045

    6L16M37,80043,10033,25012,75016,70013,17513,85030,82526,92518,60018,9009,7508,8509,90016,90024,15019,95026,25032,25022,95012,00012,30020,25028,10030,75030,47524,60015,00017,10014,62515,70032,47528,65035,97527,55022,65027,77527,50025,47524,00025,05028,47525,12522,57524,90025,20025,80017,57519,65017,70020,55011,70014,25010,80012,60012,00014,300

    64M5,45010,20013,40019,05020,10020,65027,52510,10015,30023,85024,57533,60028,95026,75024,30025,20023,10021,30022,20021,30024,45019,50013,1001,9506,60010,20015,45014,85015,15012,15013,5006,3004,500-------------------------

    Other------6251,0001,2004,0505,100250251,3001,20075256001,6505,4001,075-4,8004,2004,3509,60010,45011,90013,77515,15013,32511,52511,0007,9506,6507,72514,90018,67521,75028,07531,37523,05330,925-38,47538,65042,95035,06136,82537,30041,27545,07541,55039,20054,42550,92558,60048,57546,55048,27559,52552,60053,60051,758

    TOT43,87554,30047,85035,85041,90034,07541,40042,22543,42542,52543,50043,95039,45042,05042,27549,35047,85051,75058,80053,85046,90043,70047,12545,20050,67552,20051,05037,80038,90034,50044,10057,45054,90064,05058,92545,70358,70065,97564,12566,95060,11165,30062,42563,85069,97566,75065,00072,00070,57576,30069,12558,25062,52570,32565,20065,60066,058

    7L16M30,15040,50045,90045,90039,60029,40045,60048,45049,35046,80031,80040,95026,55031,05030,15031,35032,25028,35031,35021,90013,5008,700------------------------------------

    64M13,20012,90014,70016,50019,35021,75024,90022,65025,50037,80042,42538,85048,75048,60037,50036,30032,20039,95048,15050,85056,60053,15042,05046,05046,05037,77548,32547,00046,05049,82544,70044,65037,20042,75048,15051,47551,42556,82551,77543,32544,55042,50040,32533,550

    Other------2,0001,050--1,8001,050251007502,46318,90010,80013,5003,1503,6004,9503,9004,3509,7508,10012,3009,20012,1006,0256009509001,2001,3502,2504,2505,0251,2751,8003,0506,4007,800-12,2756,85011,8509,75010,80011,70014,85020,85027,07515,47519,20016,52515,62517,72516,47520,42527,75022,75021,92528,050

    TOT32,15041,55045,90045,90041,40030,45045,62548,55050,10049,26350,70051,75040,05047,40046,65051,00052,65052,05062,85054,90048,45043,40049,90048,45039,45049,70049,50038,70037,65034,45044,20053,17552,12558,40056,20048,45053,85058,32544,62560,17556,75056,85061,52559,55065,50064,27558,22567,35068,00067,05074,55068,25063,75072,30065,25062,25061,600

    8L64M8,17511,27514,87516,62514,70017,90018,90021,17521,15024,05031,47528,35027,25016,2301,90029,55029,40032,10032,25024,45023,25023,10026,70029,60023,20029,85036,95020,10023,50019,90016,60011,70010,9506,7507,5506,1004,6005,4003,900----------

    Other-----------------------------1,8003,4755,0004,0004,0006,4504,8503,1006,37512,1509,6503,32516,87516,650-23,87526,60035,90031,35035,92533,65031,65029,25034,15031,250----------

    TOT8,17511,27514,87516,62514,70017,90018,90021,17521,15024,05031,47528,35027,25016,2301,90031,35032,87537,10036,25028,45029,70027,95029,80035,97535,35039,50040,27536,97540,15043,77543,20047,60042,30042,67541,20037,75033,85039,55035,150

    FAB OUT3L4M1,5001,94612,9064,295----------------------------------------------------

    [wafers]Other------55,69551,18051,88351,86937,60043,572----------------------------------------------------

    TOT57,19551,18051,88353,81550,50647,867

    4L4M25,75026,33221,31222,68822,01229,53236,23234,52044,15919,01010,51313,07023,54222,72923,03520,51218,74615,98615,4018,8138,4338,9786,6055,1086,7738,2773,457-------------------------------

    Other------31,08332,66340,02439,24229,66619,84515,50913,68412,36320,24615,39424,15120,49224,31021,12820,41224,15725,35234,44038,08533,20837,52138,10137,27140,72833,29017,128------------53,076-53,435-57,386--55,53051,897----------

    TOT56,83358,99561,33661,93051,67849,37751,74148,20456,52239,25625,90737,22144,03447,03944,16340,92442,90341,33849,84146,89841,64146,49944,70642,37947,50141,56720,58553,07653,43557,38655,53051,897

    5L4M1,0002,0091,5022,2011,3211,0161,2191,5962,0002,5133,5554,6115,1574,8983,5804,5315,14710,0228,1337,2336,4117,6747,2825,4918,8976,3535,9216,6113,0382,2793,0802,5223,5923,7203,0283,5183,0532,997323,3383,3443,0242,0641,9581,1171,9281,0071,0811,1559317821,2131,2901,019520--

    16M29,29131,35031,26129,64128,26623,28624,51824,05528,79021,88416,95814,21510,83813,36810,39611,8086,3002,548----------------------------------------

    Other------2,2371,6651,2413,0242,4304,1705,3614,4883,8284,6408,55812,82212,24912,80916,08213,49115,86715,17423,47421,84821,43922,16822,62621,44818,75917,03715,00012,98610,09719,38321,56230,06622,56822,48724,43022,44823,41927,31424,48423,04421,74621,87419,04925,02124,26524,67223,58223,09624,06525,51427,07225,78825,89524,59129,76428,48027,24732,832

    TOT32,52835,02434,00434,86632,01728,47231,09830,13934,61829,03729,07131,64828,24431,07530,05829,83027,31427,74431,60729,08127,85029,84229,90826,93927,65623,39020,92119,59713,13521,66224,64232,58826,16026,20727,45825,96626,47227,31427,48123,07625,08425,21822,07327,08526,22325,78925,51024,10325,14626,66928,00326,57027,10825,88130,78329,00027,24732,832

    6L16M45,08444,25340,71432,05327,99019,66316,62615,20514,53214,24924,46322,75417,88510,17510,19214,87520,42420,93228,44124,41224,82116,64216,92914,77232,75434,69325,91621,56022,62017,18620,05021,19431,57729,42532,93024,95525,29621,84925,48422,83222,63223,52927,04424,67121,87121,33625,29522,26917,89216,96520,38817,43413,40814,5859,59712,6318,949

    64M2,3003,0835,02110,67711,08714,69821,37217,99721,89213,49916,78218,78220,58530,20329,69128,76722,49623,59823,74719,86416,92523,00522,32018,6532,0021,66711,4729,72413,99518,10816,14317,3984,3154,40975-----------------------

    Other------8841192987551410322432328111,146285892644831813564094389334042,2544,5555,5529,31116,16414,73015,0888,1907,7056,3739,19316,73815,07120,81024,81025,29225,25952,38326,72234,60637,66959,09836,57932,98935,33538,14031,65133,59241,26244,11046,47350,32746,61045,36348,56147,32246,34349,098

    TOT48,26847,45546,03342,80539,59134,46438,22233,52536,70538,89441,53041,62538,73440,86140,06443,99843,32944,96853,12144,68044,00044,20244,80142,73650,92051,09052,47639,47444,32041,66745,38655,33050,96354,64457,81550,24750,55552,38348,57160,09060,50181,73060,10860,03360,00660,01152,98758,88763,53162,00263,43870,71564,04458,77163,14656,91958,97458,047

    7L16M22,50024,95428,21333,52936,00830,17240,55639,56446,55145,06338,41346,63843,38239,27229,38233,12530,94527,17931,68824,53021,75716,33612,7206,353----------------------------------

    64M4,33311,77811,60012,29714,40416,32614,68317,73423,89624,92628,80146,80746,97346,43234,61541,27336,33746,08751,73749,43551,06051,26545,36044,76838,68142,14742,24542,03542,10343,46145,55242,73938,86634,69941,50443,70143,28653,27049,31342,95546,87837,70839,81142,074

    Other-------588318625492387445314407,5981,0402,3033,8143,8561,8421,5823,4384,9626,1955,5406,6238,5737,4252183806,044902231505493866954848691,6613,27548,4915,5305,4647,7929,96810,1279,6029,46912,31616,64016,80118,53216,65616,89211,79210,90511,83714,38015,55616,38812,296

    TOT22,50025,01228,29633,71536,03330,22140,79440,30847,08245,50346,01147,67845,68547,41945,01646,56744,82445,02152,97645,40845,03146,85546,21942,57947,02547,35352,47634,70541,49636,48746,63652,12350,13051,54452,13447,02148,04348,49144,21147,61150,03752,00352,23053,06355,02155,05555,50651,50060,03660,35760,17865,06260,21854,79261,25853,26456,19954,370

    8L64M1551,0885,3208,95112,17513,77615,53217,03416,65918,14621,85120,11020,33421,50424,88224,75829,50130,85631,41024,73129,29125,33023,22829,34031,93226,67538,13022,11821,15420,19618,26115,54510,1549,1638,1976,6154,6864,6163,8934,6871,477--------

    Other-----------------------------3426501,1712,6901,4432,8843,8794,0027,7195,56911,3331,51913,78715,05439,01018,83020,74121,43324,97424,91822,59427,13126,30731,10221,44925,19231,716--------

    TOT1551,0885,3208,95112,17513,77615,53217,03416,65918,14621,85120,11020,33421,50424,88225,10030,15132,02734,10026,17432,17529,20927,23037,05937,50138,00839,64935,90536,20839,01039,02639,00236,97835,12834,08130,79133,74630,99335,71825,34229,87933,193

    Spot Price4M

    [$]16M55.5535045423628201412.512101297.56.57.5910987.56.56543.5333.32.52.31.651.41.52.11.92.12.62.62.62.52.32.11.621.61.521.543.64.013.523.522.763.173.974.715.445.655.725.565.375.334.934.83

    64M4845413832302822181613.5118.57.47.69.49.39.510.210.210.19.88.97.56.24.85.77.214.614.410.98.88.56.15.656.536.518.138.798.457.075.53.943.3

    Avg Selling Price4M14.1914.1114.1113.9912.4411.688.626.674.543.613.302.992.883.283.053.022.692.542.552.542.592.662.522.392.312.252.322.322.322.372.212.051.921.831.821.811.831.892.052.142.232.192.252.362.362.312.372.402.442.452.572.572.592.973.143.513.043.823.643.753.393.423.363.42

    [$]16M51.5250.9250.1149.3645.5043.0734.1226.1816.8813.7512.2610.889.4310.199.318.107.768.048.579.209.328.888.097.286.755.974.873.933.573.113.213.222.782.552.342.382.572.372.782.953.393.393.473.473.483.483.423.463.543.813.863.863.823.873.673.643.683.853.983.954.003.994.053.72

    64M405.85352.43310.19311.60285.52281.86224.40172.70167.73135.20101.56103.30100.0593.3991.2376.3660.2953.3950.1946.5745.1941.5936.1733.1729.3725.5922.0417.2217.2114.7113.4612.6010.469.438.969.149.419.259.8610.4110.8410.6910.249.809.378.277.437.829.5511.6912.2712.2711.3110.217.828.569.4110.0711.1512.5412.4711.509.938.17

    EDS Out4M10,456,82510,237,8009,124,7209,247,0179,951,59113,406,44113,076,07114,598,99213,186,66110,467,4937,111,07510,324,36813,319,94711,597,99211,645,09911,569,03312,314,81410,479,92212,977,48011,949,8468,174,12910,396,0089,864,1216,961,82010,371,7349,092,6966,773,3745,085,5343,484,0862,065,1412,710,6631,964,3403,305,1253,341,0362,573,1283,012,2672,534,1822,500,0003,096,8572,680,9842,880,1773,014,1742,124,5281,498,4611,066,0202,249,554637,1761,014,716712,577679,5621,138,0421,509,0201,260,308654,118867,300812,6201,360,059-

    [ea]16M20,164,13925,702,25222,519,95723,736,79522,190,68718,055,57223,466,31022,746,39127,856,93526,700,22227,547,93428,554,96923,870,69426,579,70822,194,11417,994,89823,608,87923,913,07125,058,79623,910,88123,151,26220,377,02121,748,12019,883,92117,348,94122,534,66522,178,14214,060,23311,256,84514,612,04510,851,57312,937,59917,805,34016,944,51119,992,10121,435,21016,548,24816,000,00015,483,59016,294,41515,803,06215,216,60215,080,94115,465,14815,818,08719,114,11514,593,95117,598,25616,682,13116,395,92015,217,32817,148,96412,885,12012,285,72912,474,5829,841,91412,361,32911,648,006

    64M44,87571,290203,670667,622647,023725,2121,374,356913,4101,307,6991,471,1342,196,5813,175,3023,565,1524,140,8715,971,4757,936,1417,495,7137,546,7068,441,8076,967,51211,776,4199,845,36811,915,37311,848,39214,920,01913,077,70116,834,86714,501,03016,067,05316,748,88514,610,88823,658,10420,838,15922,404,37425,801,58721,197,14322,523,93421,000,00019,294,18618,145,58417,282,09517,487,88614,300,29316,758,77719,153,74720,343,91615,560,05213,436,77814,831,80616,390,39219,446,32224,310,36920,936,12320,286,07519,090,00217,807,58716,750,91014,710,820

    `95`96`97`98`99`0090,126,527.5468,297,067.2341,457,957.6733,355,129.3632,835,869.9740,141,094.6937,654,256.4347,871,371.0040,246,251.1731,653,816.4219,107,248.3726,183,924.6433,936,950.9829,450,925.2230,104,552.4730,745,572.1731,000,393.2025,056,314.1130,000,915.7826,878,590.3018,973,868.6924,096,577.8322,862,181.8616,532,000.1622,966,738.5318,621,653.4112,987,488.439,303,141.876,342,138.303,739,567.294,971,540.013,706,769.156,777,850.757,158,848.665,745,185.116,600,821.285,705,179.045,894,496.467,311,379.376,191,795.286,835,149.737,230,116.925,181,051.923,672,384.142,741,919.185,786,097.131,651,858.893,010,712.112,233,939.572,387,349.323,458,099.245,758,566.494,592,050.222,454,372.452,941,848.762,777,999.714,569,566.01- 0

    Total Sales100 million Won81,30056,95460,03074,80299,680141,818687,918,744.37672,760,125.10380,063,429.50326,359,210.40272,000,937.35196,474,404.25221,280,206.25231,705,779.87259,454,480.55216,185,352.46213,864,701.17229,452,113.64204,661,913.37244,508,961.21206,742,451.07159,858,783.73191,028,670.35174,152,916.36169,258,600.06142,644,174.66112,854,459.7880,037,901.7577,629,656.2161,832,381.7155,686,043.1672,669,061.7961,588,822.9635,839,721.1926,325,254.6134,825,565.0127,843,020.8830,634,647.9949,483,743.8049,960,922.8467,706,242.9772,768,745.3757,408,202.1555,477,648.0153,901,942.4556,697,143.0054,013,797.0952,709,965.4653,314,047.1858,862,703.2161,113,706.6073,848,020.6955,807,856.1668,130,677.3861,230,398.3859,748,184.7456,058,199.9765,976,411.5151,287,751.4148,487,283.0249,891,182.5939,278,420.6850,121,763.5443,288,958.99

    [$]Avg exchange rate7678019471,3971,1891,13010,070,051.6912,311,914.3334,161,599.5690,260,500.5265,714,335.8974,911,983.69137,501,958.1285,300,117.55119,304,600.95112,342,920.18132,425,567.17169,544,387.42178,920,146.53192,855,277.76269,829,431.73330,027,262.10271,084,787.34250,318,462.96247,941,599.23178,328,793.78259,556,191.22169,490,169.38205,087,904.87174,265,444.88200,855,495.33164,796,843.21176,046,512.79136,762,225.69143,925,864.85153,031,344.83137,456,395.76218,770,826.78205,511,361.28233,209,440.32279,797,417.98226,691,316.77230,720,639.58205,880,761.02180,827,902.91150,128,716.43128,378,730.99136,800,394.30136,543,081.45195,919,191.53235,111,462.72249,720,738.63175,967,835.20137,240,613.09115,952,269.66140,286,270.60183,006,398.15244,870,733.57233,533,334.38254,483,378.87238,011,749.62204,776,853.30166,285,842.50120,122,920.92

    Million $10,6007,1106,3395,3548,38412,550788,115,323.60753,369,106.65455,682,986.73449,974,840.28370,551,143.21311,527,482.64396,436,420.80364,877,268.43419,005,332.68360,182,089.06365,397,516.71425,180,425.70417,519,010.88466,815,164.19506,676,435.26520,631,618.00493,113,850.90449,527,693.43447,201,115.07347,851,558.73391,384,519.69273,624,648.96305,579,742.94252,629,826.76279,508,277.02256,087,558.41250,622,824.18181,905,088.75176,593,257.77191,596,477.14170,270,956.64253,112,243.93261,772,955.83290,329,211.82353,248,846.07306,060,883.42293,834,020.76267,252,905.49242,041,224.74213,017,654.71189,227,677.80196,740,476.67195,038,180.54258,454,278.87298,967,088.51329,354,856.45233,427,550.25208,382,002.57179,416,607.62202,421,804.66242,522,697.36316,605,711.56289,413,136.01305,425,034.35290,844,780.98246,833,273.69220,977,172.05163,411,879.91

    Profit [$]4,669,721,994.075,104,923,557.50

    SAMSUNG CONFIDENTIAL

    Data For Edelman Award

    Cycle Time

    Cycle Time

    35034350343503435034

    35065350653506535065

    35096350963509635096

    35125351253512535125

    35156351563515635156

    35186351863518635186

    35217352173521735217

    35247352473524735247

    35278352783527835278

    35309353093530935309

    35339353393533935339

    35370353703537035370

    35400354003540035400

    35431354313543135431

    35462354623546235462

    35490354903549035490

    35521355213552135521

    35551355513555135551

    35582355823558235582

    35612356123561235612

    35643356433564335643

    35674356743567435674

    35704357043570435704

    35735357353573535735

    35765357653576535765

    35796357963579635796

    35827358273582735827

    35855358553585535855

    35886358863588635886

    35916359163591635916

    35947359473594735947

    35977359773597735977

    36008360083600836008

    36039360393603936039

    36069360693606936069

    36100361003610036100

    36130361303613036130

    36161361613616136161

    36192361923619236192

    36220362203622036220

    36251362513625136251

    36281362813628136281

    36312363123631236312

    36342363423634236342

    36.835.9242.61

    35.4733.4652

    36.4936.9359.86

    41.1437.3554.95

    38.6438.5651.74

    42.2739.451.08

    42.6240.2847.53

    46.6641.5854.05

    41.8341.2957.5

    48.3141.352.91

    42.3841.4353.59

    43.741.4555.93

    40.2742.0261.85

    41.6844.8366.1

    4M

    16M

    64M

    128M

    Avg. fab cycle time (days)

    SEC Cycle Time Trends

    82.31

    72.25

    99.7

    72.54

    66.1

    94.96

    90.27

    64.59

    74.98

    64.56

    60.45

    60.25

    57.07

    71.48

    58.34

    54.67

    62.98

    63

    52.03

    62.58

    66

    49.54

    64.41

    70.84

    46.52

    59.2

    71.06

    38.82

    62.34

    78.99

    47.08

    60.19

    92.77

    41.21

    60.3

    68.23

    37.63

    57.21

    67.03

    41.29

    52.7

    64.14

    39.99

    53.38

    60.79

    42.81

    50.11

    55.56

    42.98

    48.91

    53.26

    39.47

    50.48

    53.62

    40.67

    50.3

    52.92

    38.01

    53.17

    57.11

    36.21

    53.97

    54.76

    37.95

    59.76

    53.43

    36.35

    57.7

    51.89

    35.72

    60.48

    49.56

    34.26

    51.39

    52.3

    34.38

    45.5

    52.23

    35.4

    40.36

    45.74

    32.58

    43.59

    47.56

    67.58

    28.48

    50.22

    54.77

    57.57

    30.04

    38.94

    43.56

    47.57

    34.68

    32.21

    37.88

    53.8

    36.25

    27.6

    35.26

    59.86

    41.42

    27.18

    35

    41.91

    38.43

    26.94

    31.15

    33.93

    41.05

    28.55

    31.25

    32.13

    35.52

    28.43

    31.76

    30.57

    30.12

    26.63

    32.42

    28.49

    30.58

    27.95

    33.55

    31.99

    29.35

    31.16

    32.97

    29.9

    29.89

    30.85

    37.36

    31.43

    29.19

    30.88

    36.67

    33.8

    26.59

    31.3

    32.5

    33.38

    28.88

    34.75

    34.61

    43.21

    30.54

    35.64

    35.61

    38.09

    CTPL

    350343503435034350343503435034

    350653506535065350653506535065

    350963509635096350963509635096

    351253512535125351253512535125

    351563515635156351563515635156

    351863518635186351863518635186

    352173521735217352173521735217

    352473524735247352473524735247

    352783527835278352783527835278

    353093530935309353093530935309

    353393533935339353393533935339

    353703537035370353703537035370

    354003540035400354003540035400

    354313543135431354313543135431

    354623546235462354623546235462

    354903549035490354903549035490

    355213552135521355213552135521

    355513555135551355513555135551

    355823558235582355823558235582

    356123561235612356123561235612

    356433564335643356433564335643

    356743567435674356743567435674

    357043570435704357043570435704

    357353573535735357353573535735

    357653576535765357653576535765

    357963579635796357963579635796

    358273582735827358273582735827

    358553585535855358553585535855

    358863588635886358863588635886

    359163591635916359163591635916

    359473594735947359473594735947

    359773597735977359773597735977

    360083600836008360083600836008

    360393603936039360393603936039

    360693606936069360693606936069

    361003610036100361003610036100

    361303613036130361303613036130

    361613616136161361613616136161

    361923619236192361923619236192

    362203622036220362203622036220

    362513625136251362513625136251

    362813628136281362813628136281

    363123631236312363123631236312

    363423634236342363423634236342

    363733637336373363733637336373

    364043640436404364043640436404

    364343643436434364343643436434

    364653646536465364653646536465

    364953649536495364953649536495

    Line 3

    Line 4

    Line 5

    Line 6

    Line 7

    Line 8

    Month

    Cycle time per mask layer (days)

    Figure 4. Cycle Time at SEC Fabs

    4.9522222222

    4.5566666667

    4.5

    4.2316666667

    4.0255555556

    4.35

    4.05

    3.8

    4.2

    3.8

    3.4127777778

    4.3044444444

    4.2504247042

    3.8726977248

    3.2

    3.1116666667

    3.9461111111

    3.9240986884

    3.3889490791

    2.9

    2.9055555556

    4.01

    3.8560984536

    3.4951245937

    2.2166666667

    2.665

    3.95

    3.3359974459

    3.3087757313

    2.7211111111

    2.5677777778

    3.87

    3.7962793788

    4.3174431203

    2.8916666667

    2.4888888889

    4.0594444444

    3.7326175459

    3.1554712893

    2.1033333333

    3.7372222222

    3.6843207926

    3.4052004334

    2.59

    3.1666666667

    3.9685499423

    3.5514626219

    2.2455555556

    3.2644444444

    3.7653021963

    3.4306608884

    2.3828238719

    1.9805555556

    2.9211111111

    3.9309493988

    3.6950162514

    3.2969432314

    2.225

    2.4972222222

    4.2650238803

    3.2589382449

    3.3231441048

    2.2905555556

    2.0272222222

    3.5535404984

    3.2892741062

    3.1077147016

    2.445

    2.0733333333

    3.482246002

    3.1213434453

    3.0984958758

    2.4105555556

    2.2822222222

    3.1419351194

    3.0318626375

    2.7991266376

    2.1988888889

    2.1538888889

    3.2009965933

    2.9286815256

    2.7006307618

    2.2577777778

    2.2666666667

    2.9534748796

    2.6844430347

    2.6419213974

    2.1138888889

    2.1044444444

    2.7725764508

    2.5695059578

    2.6598738476

    1.955

    2.1011111111

    2.8063151953

    2.5560804705

    2.454633673

    2.1188888889

    2.0888888889

    2.7028753472

    2.6689302496

    2.8791848617

    2.1138888889

    1.9044444444

    2.7895026716

    2.8304809205

    2.8791848617

    2.0033333333

    1.9594444444

    2.6040662116

    2.9177009166

    2.8704512373

    1.9894444444

    1.8022222222

    2.7345907165

    2.8013551018

    2.9291606016

    1.9583333333

    1.8672222222

    2.6697317129

    2.5202730702

    2.99

    1.9594444444

    1.9733333333

    2.5826557966

    2.5618040621

    2.95

    1.8277777778

    1.7966666667

    2.7138243756

    2.48

    2.65

    1.5227777778

    1.66

    2.4285115512

    2.55

    2.68

    1.4866666667

    1.7583333333

    2.0034021611

    2.2

    2.5

    1.57

    1.9266666667

    2.2402672293

    2.44

    2.55

    1.65

    2.0138888889

    2.5903113478

    2.82

    2.89

    1.75

    2.3011111111

    1.9679101264

    2.35

    2.27

    1.85

    2.135

    1.6420166883

    1.92

    2.22

    2.05

    2.2805555556

    1.4364754353

    1.66

    2.17

    2.25

    1.9733333333

    1.4324044355

    1.58

    2.03

    2.25

    1.6733333333

    1.42

    1.52

    1.62

    1.9

    1.6988888889

    1.5005453719

    1.57

    1.53

    1.75

    1.6305555556

    1.5

    1.64

    1.42

    1.7

    1.6605555556

    1.4

    1.66

    1.36

    1.84

    1.6216666667

    1.46

    1.69

    1.42

    1.72

    1.4772222222

    1.6

    1.66

    1.31

    1.71

    1.6044444444

    1.59

    1.85

    1.33

    1.74

    1.6966666667

    1.59

    1.89

    1.32

    1.89

    1.625

    1.6

    1.57

    1.34

    2.15

    1.7933333333

    1.77

    1.61

    1.62

    2.01

    2.0094444444

    1.81

    1.67

    1.58

    1.9

    1.9816666667

    1.85

    1.65

    1.43

    1.8

    2.1066666667

    1.78

    1.5

    1.62

    Sheet3

    `95.9`95.1095.1195.12`96.196.296.396.496.596.696.796.896.9`96.1096.1196.12`97.197.297.397.497.597.697.797.897.9`97.1097.1197.12`98.198.298.398.498.598.698.798.898.9`98.1098.1198.12`99.199.299.399.499.599.699.799.899.9`99.1099.1199.12`00.1`00.2`00.3`00.4`00.5`00.6`00.7`00.8`00.9`00.10`00.11`00.12

    CTPL4M3L4.954.235.106.092.222.722.89

    [days]4L4.564.035.003.413.112.912.672.572.492.102.592.251.982.232.292.452.412.202.262.111.962.122.112.001.991.961.961.831.521.49

    5L4.303.954.915.816.134.063.743.173.262.922.502.032.072.282.152.272.102.102.091.901.961.801.871.971.801.661.761.932.012.302.142.281.971.671.701.631.661.621.481.601.701.631.792.011.982.112.502.622.692.832.792.692.682.612.503.073.30

    4.574.035.023.593.173.042.892.752.582.162.622.292.092.292.222.382.392.192.262.112.012.112.021.981.901.911.971.811.581.671.932.012.302.142.281.971.671.701.631.661.621.481.601.701.631.792.011.982.112.502.622.692.832.792.692.682.612.503.073.30

    16M5L3.964.023.913.473.323.003.023.003.052.752.692.332.332.422.542.112.102.011.871.842.00

    6L4.354.404.223.883.883.474.184.244.304.604.233.983.853.673.643.343.833.363.073.022.792.862.793.473.503.232.702.392.122.292.642.051.701.451.431.421.501.501.401.461.601.591.591.601.771.811.851.781.852.031.932.082.072.322.072.342.022.081.921.98

    7L3.873.393.503.314.323.163.413.553.433.703.263.293.122.992.882.722.542.592.662.903.073.002.563.25

    3.113.232.702.392.122.292.642.051.701.451.431.421.501.501.401.461.601.591.591.601.771.811.851.781.852.031.932.082.072.322.072.342.022.081.921.98

    64M6L4.844.613.642.922.833.063.203.443.463.884.873.413.343.082.992.742.502.622.592.702.332.202.042.072.943.231.742.132.511.891.571.421.451.421.74

    7L3.413.052.582.652.502.682.712.732.672.502.412.482.552.202.442.822.351.921.661.581.521.571.641.661.691.661.851.891.571.611.671.651.501.661.691.721.781.841.901.891.901.901.901.922.04

    8L2.383.303.323.113.102.802.702.642.662.452.882.882.872.932.992.952.652.682.502.552.892.272.222.172.031.621.531.421.361.421.311.331.321.341.621.581.431.621.791.792.012.24

    2.532.402.562.562.252.442.792.221.941.771.741.551.551.571.561.601.541.701.741.521.611.661.621.511.671.701.741.801.841.901.891.901.901.901.922.04

    FAB OUT3L4M1,5001,94612,9064,295----------------------------------------------------

    [wafers]Other------55,69551,18051,88351,86937,60043,572----------------------------------------------------

    TOT57,19551,18051,88353,81550,50647,867

    4L4M25,75026,33221,31222,68822,01229,53236,23234,52044,15919,01010,51313,07023,54222,72923,03520,51218,74615,98615,4018,8138,4338,9786,6055,1086,7738,2773,457-------------------------------

    Other------31,08332,66340,02439,24229,66619,84515,50913,68412,36320,24615,39424,15120,49224,31021,12820,41224,15725,35234,44038,08533,20837,52138,10137,27140,72833,29017,128------------53,076-53,435-57,386--55,53051,897----------

    TOT56,83358,99561,33661,93051,67849,37751,74148,20456,52239,25625,90737,22144,03447,03944,16340,92442,90341,33849,84146,89841,64146,49944,70642,37947,50141,56720,58553,07653,43557,38655,53051,897

    5L4M1,0002,0091,5022,2011,3211,0161,2191,5962,0002,5133,5554,6115,1574,8983,5804,5315,14710,0228,1337,2336,4117,6747,2825,4918,8976,3535,9216,6113,0382,2793,0802,5223,5923,7203,0283,5183,0532,997323,3383,3443,0242,0641,9581,1171,9281,0071,0811,1559317821,2131,2901,019520--

    16M29,29131,35031,26129,64128,26623,28624,51824,05528,79021,88416,95814,21510,83813,36810,39611,8086,3002,548----------------------------------------

    Other------2,2371,6651,2413,0242,4304,1705,3614,4883,8284,6408,55812,82212,24912,80916,08213,49115,86715,17423,47421,84821,43922,16822,62621,44818,75917,03715,00012,98610,09719,38321,56230,06622,56822,48724,43022,44823,41927,31424,48423,04421,74621,87419,04925,02124,26524,67223,58223,09624,06525,51427,07225,78825,89524,59129,76428,48027,24732,832

    TOT32,52835,02434,00434,86632,01728,47231,09830,13934,61829,03729,07131,64828,24431,07530,05829,83027,31427,74431,60729,08127,85029,84229,90826,93927,65623,39020,92119,59713,13521,66224,64232,58826,16026,20727,45825,96626,47227,31427,48123,07625,08425,21822,07327,08526,22325,78925,51024,10325,14626,66928,00326,57027,10825,88130,78329,00027,24732,832

    6L16M45,08444,25340,71432,05327,99019,66316,62615,20514,53214,24924,46322,75417,88510,17510,19214,87520,42420,93228,44124,41224,82116,64216,92914,77232,75434,69325,91621,56022,62017,18620,05021,19431,57729,42532,93024,95525,29623,57321,84925,48422,83222,63223,52927,04424,67121,87121,33625,29522,26917,89216,96520,38817,43413,40814,5859,59712,6318,949

    64M2,3003,0835,02110,67711,08714,69821,37217,99721,89213,49916,78218,78220,58530,20329,69128,76722,49623,59823,74719,86416,92523,00522,32018,6532,0021,66711,4729,72413,99518,10816,14317,3984,3154,40975-----------------------

    Other------8841192987551410322432328111,146285892644831813564094389334042,2544,5555,5529,31116,16414,73015,0888,1907,7056,3739,19316,73815,07120,81024,81025,29225,25928,81126,72234,60637,66959,09836,57932,98935,33538,14031,65133,59241,26244,11046,47350,32746,61045,36348,56147,32246,34349,098

    TOT48,26847,45546,03342,80539,59134,46438,22233,52536,70538,89441,53041,62538,73440,86140,06443,99843,32944,96853,12144,68044,00044,20244,80142,73650,92051,09052,47639,47444,32041,66745,38655,33050,96354,64457,81550,24750,55552,38348,57160,09060,50181,73060,10860,03360,00660,01152,98758,88763,53162,00263,43870,71564,04458,77163,14656,91958,97458,047

    7L16M22,50024,95428,21333,52936,00830,17240,55639,56446,55145,06338,41346,63843,38239,27229,38233,12530,94527,17931,68824,53021,75716,33612,7206,353----------------------------------

    64M4,33311,77811,60012,29714,40416,32614,68317,73423,89624,92628,80146,80746,97346,43234,61541,27336,33746,08751,73749,43551,06051,26545,36044,76841,72538,68142,14742,24542,03542,10343,46145,55242,73938,86634,69941,50443,70143,28653,27049,31342,95546,87837,70839,81142,074

    Other-------588318625492387445314407,5981,0402,3033,8143,8561,8421,5823,4384,9626,1955,5406,6238,5737,4252183806,044902231505493866954848691,6613,2756,7675,5305,4647,7929,96810,1279,6029,46912,31616,64016,80118,53216,65616,89211,79210,90511,83714,38015,55616,38812,296

    TOT22,50025,01228,29633,71536,03330,22140,79440,30847,08245,50346,01147,67845,68547,41945,01646,56744,82445,02152,97645,40845,03146,85546,21942,57947,02547,35352,47634,70541,49636,48746,63652,12350,13051,54452,13447,02148,04348,49144,21147,61150,03752,00352,23053,06355,02155,05555,50651,50060,03660,35760,17865,06260,21854,79261,25853,26456,19954,370

    8L64M1551,0885,3208,95112,17513,77615,53217,03416,65918,14621,85120,11020,33421,50424,88224,75829,50130,85631,41024,73129,29125,33023,22829,34031,93226,67538,13022,11821,15420,19618,26115,54510,1549,1638,1976,6154,6864,6163,8934,6871,477--------

    Other-----------------------------3426501,1712,6901,4432,8843,8794,0027,7195,56911,3331,51913,78715,05439,01018,83020,74121,43324,97424,91822,59427,13126,30731,10221,44925,19231,716--------

    TOT1551,0885,3208,95112,17513,77615,53217,03416,65918,14621,85120,11020,33421,50424,88225,10030,15132,02734,10026,17432,17529,20927,23037,05937,50138,00839,64935,90536,20839,01039,02639,00236,97835,12834,08130,79133,74630,99335,71825,34229,87933,193

    Sep-95Oct-95Nov-95Dec-95Jan-96Feb-96Mar-96Apr-96May-96Jun-96Jul-96Aug-96Sep-96Oct-96Nov-96Dec-96Jan-97Feb-97Mar-97Apr-97May-97Jun-97Jul-97Aug-97Sep-97Oct-97Nov-97Dec-97Jan-98Feb-98Mar-98Apr-98May-98Jun-98Jul-98Aug-98Sep-98Oct-98Nov-98Dec-98Jan-99Feb-99Mar-99Apr-99May-99Jun-99Jul-99Aug-99Sep-99Oct-99Nov-99Dec-99Jan-00Feb-00Mar-00Apr-00May-00Jun-00Jul-00Aug-00Sep-00Oct-00Nov-00Dec-00

    3L4.954.234.053.803.202.902.222.722.89

    4L4.564.033.803.413.112.912.672.572.492.102.592.251.982.232.292.452.412.202.262.111.962.122.112.001.991.961.961.831.521.491.571.651.751.852.052.252.251.901.751.701.841.721.711.741.892.152.011.901.801.902.09

    5L4.504.354.204.303.954.013.953.874.063.743.173.262.922.502.032.072.282.152.272.102.102.091.901.961.801.871.971.801.661.761.932.012.302.142.281.971.671.701.631.661.621.481.601.701.631.792.011.982.112.502.62

    6L4.253.923.863.343.803.733.683.973.773.934.273.553.483.143.202.952.772.812.702.792.602.732.672.582.712.432.002.242.591.971.641.441.431.421.501.501.401.461.601.591.591.601.771.811.851.781.852.031.932.082.072.322.072.342.022.081.921.98

    7L3.873.393.503.314.323.163.413.553.433.703.263.293.123.032.932.682.572.562.672.832.922.802.522.562.482.552.202.442.822.351.921.661.581.521.571.641.661.691.661.851.891.571.611.671.651.501.661.691.721.781.841.901.891.901.901.901.922.04

    8L2.383.303.323.113.102.802.702.642.662.452.882.882.872.932.992.952.652.682.502.552.892.272.222.172.031.621.531.421.361.421.311.331.321.341.621.581.431.621.791.792.342.182.012.252.392.202.232.332.572.75

    Sheet2

    4M - 4.0 CTPL

    MonthMar-96Apr-96May-96Jun-96Jul-96Aug-96Sep-96Oct-96Nov-96Dec-96Jan-97Feb-97Mar-97Apr-97May-97Jun-97Jul-97Aug-97Sep-97Oct-97Nov-97Dec-97Jan-98Feb-98Mar-98Apr-98May-98Jun-98Jul-98Aug-98Sep-98Oct-98Nov-98Dec-98Jan-99Feb-99Mar-99Apr-99May-99Jun-99Jul-99Aug-99Sep-99Oct-99Nov-99Dec-99Jan-00Feb-00Mar-00Apr-00May-00Jun-00Jul-00Aug-00Sep-00Oct-00Nov-00Dec-00

    EDS Outs10,456,82510,237,8009,124,7209,247,0179,951,59113,406,44113,076,07114,598,99213,186,66110,467,4937,111,07510,324,36813,319,94711,597,99211,645,09911,569,03312,314,81410,479,92212,977,48011,949,8468,174,12910,396,0089,864,1216,961,82010,371,7349,092,6966,773,3745,085,5343,484,0862,065,1412,710,6631,964,3403,305,1253,341,0362,573,1283,012,2672,534,1822,500,0003,096,8572,680,9842,880,1773,014,1742,124,5281,498,4611,066,0202,249,554637,1761,014,716712,577679,5621,138,0421,509,0201,260,308654,118867,300812,6201,360,059-350,508,824

    New Cycle Time64.5657.0754.6752.0349.5446.5238.8247.0841.2137.6341.2939.9942.8142.9839.4740.6738.0136.2137.9536.3535.7234.2634.3835.4032.5828.4830.0434.6836.2541.4238.4341.0535.5230.1230.5829.3529.8929.1926.5928.8830.5429.2532.2836.1735.6737.9245.0747.2448.3650.8750.1648.4148.2046.9445.0555.1959.3560

    Old Cycle Time72727272727272727272727272727272727272727272727272727272727272727272727272727272727272727272727272727272727272727272

    Old EDS Outs7863532.47736080.88948685.213333338362632.603666678656597.5219470328.2393333411386537.222666714162103.452666713512959.547333312839412.26033339289976.9268467544.37210160569.354666714030908.825666711219124.261333310663028.984333312038209.219333311189837.534333310095167.31613248145.14611451251.478713565.659333339424955.6066666710040804.337935706.3348646609.9248251645.478666678170830.562666676544982.138666674057173.1462692998.090666672428020.162333332224704.7972653422.12731892.7442916674.197333332721598.473666672781389.784333332455464.800666672573604.787666673099252.5432952433.055333332833377.6642717204.8781895607.1511132290.7012233749.221055148.06133333988545.262666667762434.507333333788185.5926666661150921.849333331447056.381107555.77733333634582.0693333331136406.426666671241905.52833333573491.545350508824

    ASP8.626.674.543.613.302.992.883.283.053.022.692.542.552.542.592.662.522.392.312.252.322.322.322.372.212.051.921.831.821.811.831.892.052.142.232.192.252.362.362.312.372.402.442.452.572.572.592.973.143.513.043.823.643.753.393.423.363.42

    Delta Revenue22,351,378.8316,689,140.67799,810.053,190,083.464,272,908.4711,785,370.564,865,233.461,432,595.74(995,877.07)(7,172,710.49)(5,854,645.08)4,709,143.458,049,554.87(6,177,935.93)1,101,216.822,407,773.57696,304.22(1,697,328.15)6,663,236.63(2,920,242.72)(7,606,888.93)3,899,679.841,017,858.47(7,311,560.69)5,394,238.85913,575.06(2,834,485.99)(5,644,038.88)(5,571,798.93)(3,607,181.43)32,398.64(874,978.53)2,215,627.811,473,352.53(354,484.05)209,473.80(421,928.87)(663,460.44)1,514,264.85247,994.80(519,903.51)148,098.37(1,728,660.16)(2,986,861.64)(2,133,788.22)2,873,722.51(4,139,066.23)(119,963.91)(865,164.64)(291,136.97)1,063,087.461,366,537.23(680,435.21)(1,701,382.92)789,370.41(1,106,887.10)396,975.49(1,961,025.71)34,626,184.5034,626,184.50

    Avg. Layers18181818181818181818181818181818181818181818181818181818181818181818181818181818181818181818181818181818181818181818

    16M - 4.0 CTPL

    MonthMar-96Apr-96May-96Jun-96Jul-96Aug-96Sep-96Oct-96Nov-96Dec-96Jan-97Feb-97Mar-97Apr-97May-97Jun-97Jul-97Aug-97Sep-97Oct-97Nov-97Dec-97Jan-98Feb-98Mar-98Apr-98May-98Jun-98Jul-98Aug-98Sep-98Oct-98Nov-98Dec-98Jan-99Feb-99Mar-99Apr-99May-99Jun-99Jul-99Aug-99Sep-99Oct-99Nov-99Dec-99Jan-00Feb-00Mar-00Apr-00May-00Jun-00Jul-00Aug-00Sep-00Oct-00Nov-00Dec-00

    EDS Outs20,164,13925,702,25222,519,95723,736,79522,190,68718,055,57223,466,31022,746,39127,856,93526,700,22227,547,93428,554,96923,870,69426,579,70822,194,11417,994,89823,608,87923,913,07125,058,79623,910,88123,151,26220,377,02121,748,12019,883,92117,348,94122,534,66522,178,14214,060,23311,256,84514,612,04510,851,57312,937,59917,805,34016,944,51119,992,10121,435,21016,548,24816,000,00015,483,59016,294,41515,803,06215,216,60215,080,94115,465,14815,818,08719,114,11514,593,95117,598,25616,682,13116,395,92015,217,32817,148,96412,885,12012,285,72912,474,5829,841,91412,361,32911,648,006001,093,448,171

    New Cycle Time72.2566.1064.5960.4571.4862.9862.5864.4159.2062.3460.1960.3057.2152.7053.3850.1148.9150.4850.3053.1753.9759.7657.7060.4851.3945.5040.3643.5950.2238.9432.2127.6027.1826.9428.5528.4326.6327.9531.1630.8530.8831.3034.7535.6436.8035.4736.4941.1438.6442.2742.6246.6641.8348.3142.3843.7040.2741.68

    Old Cycle Time76767676767676767676767676767676767676767676767676767676767676767676767676.0876.276.7676.8876.6477.1277.3277.6878.6478.678.4879.5279.4880.8881.6479.7680.3682.4484848484

    Old EDS Outs17643621.62519741026.21522436609.847666719998313.237333331150862.233666713562850.593333320805165.574666724455964.61721044740.456333330142604.51625187673.86628128963.10823863449.76820887146.128666726103325.25733331919966