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ed Double Hydroxides on Si(100) Surface by ed Double Hydroxides on Si(100) Surface by
SolvothermalSolvothermal TreatmentTreatment
이종현 , 이석우 , 송여진 , 정덕영 *
성균관대학교
Abstract
Synthetic MgAl-CO3 layered double hydroxides(LDHs) are inorganic layer-structured materials having homogeneous chemical composition and sub-micron size. They crystallize in a hexagonal systems with structural anisotropy. SEM and AFM images of the film showed that LDHs particles were deposited on Si(100) with high order by solvothermal treatment in toluene.
The surface coverage on Si(100) of LDHs particles increases as the positive charge of layer decreases. The X-ray diffraction spectra of the MgAl-CO3 LDHs deposited on Si(100) showed only the sharp and intense (00l) reflections, suggesting that the LDHs layers are parallel to the plane of Si(100). This work is an important evidence for the direct chemical reaction between Si(100) surface and LDHs particles.
We have seen that it was possible for MgAl-CO3 LDHs-nano size particles to be deposited on Si(100) without intermediates and to be micro-patterned on the CP-TMS region prepared by cp. LDHs particles were deposited on Si(100) at unique temperature( 140C ) by solvothermal treatment in toluene.
SEM and AFM images of the film showed that LDHs particles were deposited on Si(100) with high order by solvothermal treatment in toluene. The surface coverage on Si(100) of LDHs particles increases as the positive charge of layer decreases. This work is an important evidence for the direct chemical reaction between Si(100) surface and LDHs particles.
AcknowledgementWe acknowledge support by the Korean Science and Engineering Foundation through Grant R02-2000-00065.