Silicon Sensing is a joint venture between Atlantic Inertial - Ploran

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

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Important: Information contained in this presentation is for information only, for the definitive information please refer to

Technical Datasheet (CRMxxx-00-0100-131)


www.pinpoint-gyro.com

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New silicon MEMS vibrating ring single-axis angular

rate sensor from Silicon Sensing Systems.

Developed to meet requirements for a lower cost,

low-power digital gyro for next generation

automotive, industrial, commercial and consumer

applications.

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Applications

AutomotiveAutomotive In-Dash Navigation Dead reckoning (DR),

Electronics Stability Control (ESC), Adaptive Cruise Control, Roll-over Detection, Vehicle Telematics and Headlamp Steering.

PinPoint® is an excellent yaw, roll or pitch rate sensor perfect for use in car and commercial vehicle environments. It has undergone rigorous automotive testing (AEC Q100) to confirm its high reliability for use in embedded automotive electronic modules and systems.

The precision, robustness and reliability of the unique vibrating ring technology, combined with Silicon Sensing’s ten year pedigree as an automotive gyro supplier, mean PinPoint® is a totally dependable solution.

Industrial & CommercialIndustrial & Commercial Machine Control, Autonomous

Vehicle Guidance, Precision Agricultural Machinery, Construction Equipment and Robotics.In fact any machine, tool or other apparatus which needs angular rate sensing for navigation, guidance, stabilisation, control or safety will benefit from the small size, low-power consumption and class-leading bias performance of PinPoint®.

Consumer Consumer Personal Navigation, Pointing Devices, Camera

Stabilisation, Robotic Floor Cleaners, Sports Equipment and Medical Devices.If precision, accuracy and dependability are key requirements, PinPoint®’sperformance-to-power ratio opens up new possibilities for high-end consumer products.





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Features

CRM100

CRM200

CRM120

• Proven and robust 5th generation vibrating structure gyro technology (VSG)

• Class-leading bias and noise over temperature for precise dead reckoning navigation and pointing

• Planar, orthogonal and 20°inclined packages (CRM100, CRM200, CRM120)

• User selectable dynamic ranges; 75°/s, 150°/s, 300°/s, 900°/s (max 1,000°/s)

• Bandwidth selectable:

• Analogue to 160Hz

• Digital to 150Hz

• Analogue and Digital (SPI®) output modes

• Low power, 3V supply, 4mA

• Excellent shock and vibration rejection

• Hermetically sealed SMD package

• Integral temperature sensor

• RoHS compliant

• AEC Q100 tested





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Performance

CRM100

CRM200

CRM120





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Physical (P/N: CRM100 – planar package)

Dimensions in millimetres





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Physical (P/N: CRM200 – orthogonal package)






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Physical (P/N: CRM120 – 20°Inclined Gyro Assy)


Other inclination angles up to 30°possible





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Construction (P/N: CRM100 Shown)

Note - CRM200 construction is similar in principle, but has an ‘upright’ or ‘orthogonal’ package base





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MEMS (Silicon Ring)

• Silicon Ring Resonator

– 3mm overall diameter, 65µm thick

– Eight pairs of ‘dog-leg’ support spokes

– DRIE bulk silicon process – no small gaps leading to risk

of stiction

– Excited into a ‘Cos2θ’ vibration mode at 22kHz

– Innovative spoke design for greatly reduced quad bias

variation. Inherently good bias over temperature

– Shock and vibration insensitive due to balanced ring

design (not a simple ‘tuning fork’)

• Strain Film Transducers

– Transducer segments bonded onto Si ring periphery

– Low noise output

– Drives: Bending moment excites Cos2θ operation

– Pickoffs: EMF output in response to strain input

– Four secondary pick-offs for maximum signal:noise





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ASIC (Functional Block Diagram)

• 3mm x 3mm

• 0.35µm CMOS process





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Standard Configurations (Part Numbers CRM100 [In-Plane] & CRM200 [Orthogonal])

• Ceramic Single Cavity

– Faraday shield for excellent EMC

– Small size reduces thermal effects

• Package Lid

– Kovar metal lid

– Resistance seam welded to base

– Fully hermetic seal

• Package Base

– LCC ceramic multi-layer aluminium oxide base

– Multi-level tungsten interconnects

– Pads designed to ensure good solder filet

• Bond Wires

– MEMS and ASIC connected via bond wires

– No internal tracking reduces noise pick-up





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20°Inclined Gyro Assy(Part Number CRM120)

• Application – Automotive in-car navigation dead reckoning

• Supplied as a single assembly:

– Moulded Interconnect Device (LCP)

– Standard CRM100 gyro

– Wedge

• Presents a horizontal surface for standard Pick & Place assembly

• Supplied in tape & reel

• Can be reflow soldered to host PCBA using standard Pb-free solder process

• Fully interchangeable with CRM100 (same pad layout) enabling single Head Unit PCBA design for multiple angles





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Electrical Interface (CRM100)

Analogue Output Digital Output





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Electrical Interface (CRM200)

Analogue Output Digital Output





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Gyro Evaluation Boards

12mm sq

12mm sq





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Operating Principle (1)

PD Actuator to drive the ring into its primary Cos2θelliptical vibration mode at 22kHz about the primary

axis

PPO Transducer to detect the ring’s elliptical vibration about

the primary axis

SPO Transducers to detect the ring’s vibration about the secondary axis at 45°





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PPO

PPO

SPO

SPOSPO

SPO

PD PD

Simplified schematic diagram of the ring when unpowered

The primary drive actuator and pick-off transducer locations,

and the secondary pick-off transducer locations,

are shown





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ν

ν

ν

ν

Zero Radial

MotionSPO

Cos2θVibration Mode at 22kHz

This shows the ring when powered and

vibrating in its elliptical mode about the

primary axes

In this view the gyro is not rotating and

therefore the nodes on the secondary axes (at 45°) are

effectively stationary.





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ν

ν

ν

ν

ν

ν

ν

ν

Fc

Fc

Fc

Fc = Coriolis Force

Resultant

Radial Motion Proportional to Applied rate

Applied Rate

This view now shows the gyro rotating

The applied angular rate induces coriolis

forces which act tangentially to the ring

causing radial motion of the nodes on the secondary axes





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VSG 5 2010

Over 25 Years of Vibrating Structure Gyro (VSG)Over 10 Years of MEMS Gyros

CRM100

CRM200

CRM120

CRG20SGH01

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Over 18 million supplied for ESC

<0.9ppm in 3yr warranty

Gyro

Sensor

Pedigree®





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Gyro Pedigree

Nearly 100 Years of Gyroscope and Inertial SystemsDesign, Development & Manufacture





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Automotive Pedigree

ISO 9001:2000TS 16949:2002

ISO 14001:2004ISO 17025





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Silicon Sensing is a joint venture between Atlantic Inertial - Ploran

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