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    Physics World Archive

    Single-electron transistorsMichel H Devoret, Christian Glattli

    From

    Physics WorldSeptember1998

    IOP Publishing Ltd 2014

    ISSN: 0953-8585

    Downloaded on Wed Oct 15 16:32:56 GMT 2014 [131.193.117.248]

    Institute of Physics Publishing

    Bristol and Philadelphia

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    FEATURES

    While the e lectronics industry wonders w hat

    will

    happen when transistors becom e

    so sma ll tha t quantum effects become im portan t, researchers are building

    new transistors tha t actively exploit the quan tum properties of electrons

    Sin g le-elec tro n tran s is to rs

    M ichel Devoret and Christ ian Glatt l i

    THE INVENTION of the transistor

    b y

    Joh n Bardeen

    and William Shockley in 1948 triggered a new era in

    electronics. Originally designed simply to emulate

    the vacuum tube , scientists soon found tha t

    this

    solid-

    state device could offer m uch m ore. T he great poten-

    tial of the transistor for speed, miniaturization and

    reliability has been fully exploited since well con-

    trolled m aterials suchasp ure single-crystal silicon b e-

    came available. According to the latest roa d-m ap

    for the microelectronics industry, microchips con-

    taining one billion transistors and operating with a

    clock cycle of a billionth of a second will be on the

    market jus t a few

    years

    into the new millennium.

    As

    transistors continue to shrink, a question natur-

    ally arises: will the qu antu m nature of electrons an d

    atoms become important in determining how the

    devices are b uilt? In o ther words, what will hap pen

    when a transistorisreducedtothe size of a few atom s

    or a single molecule?

    Researchers seeking

    to

    answ er these questions have

    devised the so-called single-electron tunnelling tran-

    sistor - a device that exploits die quan tum effect of

    tunnelling to control and measure the movement of

    single electrons. Experim ents

    have

    shown that charge

    does not flow continuously in these devices but in a

    quantizedway. Inde ed, single-electron transistors are

    so sensitive to charge that they can be used as

    extremely precise electrometers.

    1 O pe r a t io n o f a c o n v e n t i o n a l t r a n s i s t o r

    channel

    energy

    At the beginning

    Th e m ost common transistor

    in

    today's microchips

    is

    the metal-o xide-s em icond uctor field-effect transis-

    tor (MO SFE T). Its operation

    is

    surprisingly simple: not much

    quantum mechanicsisrequired to unde rstand how it works,

    even thoug h die size of a typical deviceisnow justafew thou -

    sand atom s placed sidebyside.

    Two con ducting electrodes, called the source and drain, are

    connected together by a channel of material in which the

    density of free electrons can b e varied

    in practice a semi-

    con duc tor (figure

    1). Avoltageis

    applied to the semiconduct-

    ing chan nel through the gate , a third electrode that is

    separa ted from the channel by a thin insulatinglayer.When

    the gate voltage is zero, the channel does not contain any

    cond uction electrons a nd is insulating. But as die voltage is

    increased, the electricfieldat the gate attracts electrons from

    the source and drain, and the channel b ecomes conducting.

    P H Y S I C S W O R L D S E P T E M B E R 1 9 9 8

    distance

    The metal-cxide-sem iconduc tor field-effect transistor

    MOSFET)is the

    basic switching

    and am plification device of

    digital

    e lectronics.

    The

    current between the source

    and

    drain

    electrodes

    is

    controlled

    by the

    gate

    voltage, (a)

    Whenthe gatevoltage is

    zero,

    no

    conduction electrons are presentin the

    channel,

    (b) Whenthe gateis at a positive

    voltage,

    electrons fromthe source and drain accumulate in the areaof the channel

    closeto the gate, (c) As the gate

    voltage is increased further, the num ber of electrons in

    the channel increases until saturation is

    reached. The

    potential

    seenby the

    electrons is

    alsoshown along

    a

    linegoing fromthe gate

    to

    the

    channel.

    With

    no

    gatevoltage,

    electrons in the channelexperience a potential that is higherthanthe bias po tential,

    shown by the dashed line (d). As thegatevoltage increases, the potential in the channel

    gradually lowers and electrons accumulate there( e - f ) .

    This field effect leads to an amplification mechanism in

    which die gate voltage can control the current flowing

    b etween die source and d rain when a bias voltage is applied

    across these two electrodes (figure 2). The source-drain cur-

    rentisdetermined b y the conductance of the channel, which

    in turn depends on

    two

    factors: die density of the cond uction

    electrons and their mobility. The mobility of electrons

    depends on how often the electrons collide with crystal

    imperfections, and

    is

    essentially inde pend ent of the gate volt-

    age. In contrast, the density of electronsiscontrolled direcdy

    by the gate voltage.

    The transistor therefore works like a tap controlling the

    flow of water between two tanks, where the opening of the

    tap

    is

    set by the pressure of the w ater

    in

    a third tank. Th e dif-

    2 9

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    gate voltage

    The

    current in

    a

    field-effect transistor varies with gate

    voltage

    and

    with the bias voltage between the source and

    drain.

    For

    a

    fixed bias voltage, the current

    is

    turned on when

    the gate voltage is positive,and turned offwhen

    th e

    gate

    voltage is negative.

    ference is that electrons in the

    channel behave as a compressible

    fluid with a local density that

    depends strongly on the electric

    potential at that point. In other

    words, the electric field produced

    by the gate does not generate a

    hard

    wall

    for electrons inside the

    channel, but a smoothly varying

    potential that is modified by the

    presence of electrons (figure 1

    d-f .

    Note that

    we

    have ma de no refer-

    ence to the wave-like properties of

    electrons, nor to the fact that the

    channel is made from individual

    atoms.

    Th e only quantum property

    that comes into play is the Pauli

    exclusion principle, which dictates

    that each possible state in the chan -

    nel can be occupied by only one

    electron. This means that only a

    certain num b er of electrons can accumulate in the channel,

    and this sets a limit on the cur rent flow.

    However, the quantum properties of electrons and atoms

    willplayamore importantroleas transistors are made smaller.

    For example, the wave-like nature of electrons will influence

    the way in which they travel through the channel. When the

    width of the channel b ecomes comparab le to the wavelength

    of electrons (around 100 nm), electron propa gation b ecomes

    more sensitive to the atom ic disorder in the device, which is

    createdinthe fabrication

    process.

    This will poseamajor prob -

    lem if the reduction insizeisnot accompaniedbyan improve-

    men t in the atomic structure of the fabricated devices.

    The technological constraints of moving towards the

    atomic scale may force us to adopt a new physical principle

    for achieving the transistor's function. Alternatively, a new

    principle might be found that can provide functions that are

    no t

    possible

    with cu rrent devices.

    Towards single-electron devices

    In 1985 DmitriAverinand Kon stantin Iikharev, then working

    at the University of Moscow, proposed the idea of a new

    three-te rminal device called a single-electron tunnelling (SET)

    transistor.Two yearslater Theodore Fulton and Gerald Dolan

    at Bell Labs in the US fabricated such a device and demon-

    strated how it operates.

    Unlike field-effect transistors, single-electron devices are

    based on an intrinsically quantum phenomenon: the tunnel

    effect. This is observed when two metallic electrodes are sep-

    arated by an insulating barrier about 1nm thick - in other

    words, just 10atomsin a row. Electrons atthe Fermi energy can

    tun nel throu gh the insulator, even thoug h in classical terms

    their energy would be too low toovercomethepotential barrier.

    Th e electrical b ehaviour of the tunne l junctio n depe nds on

    how effectively the barrier transmits electron waves, which

    decreases exponentially withits thickness, and on the num b er

    of electron-wave modes that impinge on the b arrier, which is

    given by the area of the tunnel junc tion dividedbythe square

    of the electron wavelength. A single-electron transistor exploits

    the fact thatthe transfer of charge throughthe b arrier becomes

    quan tized when t he junc tion

    is

    m ade sufficiently resistive.

    This qu antization process

    is

    shown particularly clearly in a

    2 Ampl ificat ion in a f ie ld-effec t t ran sisto r

    simple system known as a single-

    electron box (figure 3). If a voltage

    source charges a capacitor, C

    g

    ,

    through an ordinary resistor, the

    charge on the capacitor is strictly

    proportional to the voltage and

    shows no sign of charge quantiza-

    tion. But if the resistance is re-

    placed by a tunnel junction, the

    metallic area b etween the capacitor

    plate and one side of the junction

    forms a conducting island sur-

    rounded by insulating materials. In

    this case the transfer of charge on to

    the island becom es quantized

    as

    the

    voltage increases, leading to the so-

    called Cou lomb staircase (figure

    3c).

    This effect was first observed by

    Philippe Lafarge and collaborators

    in our lab oratory in 1991.

    This Coulomb staircase is only

    seen under certain con ditions. Firstly, the en ergy of the elec-

    trons due to therma lfluctuationsmustbe significantly sm aller

    than the Coulomb energy, which is the energy needed to

    transferasingleelectron onto the island when the applied volt-

    age iszero.This Coulomb energyisgivenby e

    2

    /2C,where

    e

    is

    the charge of an electron and Cis the total capacitance of the

    gate capacitor,C

    g

    ,and the tunneljunc tions. Secondly, the tun-

    nel effect itself should be weak enoughtopreventthe charge of

    the tunnelling electrons from b ecom ing delocalized over the

    two electrodes of the junctio n, as happ ens in chemical bon ds.

    According to recent work by theorists at the universities of

    Freiburg and Karlsruhe in Germany , this means that the con-

    ductance of the tunnel junction should b e much

    less

    than the

    quantum of conductance,

    2e

    2

    /h ,

    where

    h

    is

    Planck's constant.

    Wh en b oth these conditions are met, the steps observed in

    the charge are somewhat analogous to the quantization of

    charge on oil droplets observed by Millikan in 1911. In a

    single-electron b ox, however, the ch arge on the island is not

    random but

    is

    controlled by the applied voltage. As the tem-

    perature or the conductance of the ba rrier is increased, the

    steps become rounded and eventually merge into the straight

    line typical of an ord inary resistor.

    Asingle-electron trans istor

    Th e S ET transistor can b e viewedasan electron box that has

    two separate junctions for the entrance and exit of single elec-

    trons (figure

    4).

    It can also b e viewed

    as

    afield-effect ransistor

    in which the channel is replaced by two tunnel junctions

    forming a metallic island. The voltage applied to the gate

    electrode affects the amount of energy needed to change the

    num b er of electrons on the island.

    Th e SE T transistor comes in two versions that have been

    nicknamed metallic and semiconducting . These names

    are slightly m isleading, however, since the principle of b oth

    devicesisb ased on the use of insulating tunnel b arriers to sep-

    arate cond ucting electrodes.

    In the original metallic version fabricated by Fulton and

    Dolan, a metallic material such as a thin aluminium film is

    used to make all of the electrodes. Th e m etal isfirstevapor-

    ated through a shadow mask to form the source, drain and

    gate electrodes. The tunnel junctions are then formed by

    30

    P H Y S I C S W O R L D S E PT E M B E R 1 9 9 8

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    3 A n e l e c t r o n in a bo x

    capacitor resistor

    /

    \

    capacitor

    /

    tunnel

    / junction

    E 0

    ra o

    3

    1

    0

    -

    , j

    ft

    1

    e

    O

    3e

    voltage

    5e

    2 0 ,

    a) Whena cap acitor is charged through a resistor, the charge onthe

    capacitor is proportional to the app lied voltage and shows no sign of

    quan tization, (b) When a tunnel junction replaces the resistor, a

    condu cting island is formed between the junction and the cap acitor plate.

    Inthis case the average charge on the island increases in steps as the

    voltage is increased (c). The steps are sharper for m ore resistive barriers

    an d

    at lower temperatu res.

    introducing oxygen into the chamber so that the metal

    b ecomes coated by a thin layer of its natural

    oxide.

    Finally , a

    second layer of the metal - shifted from the first by rotating

    the sample - isevaporated to form the island.

    In the semiconducting versions, the source, drain and

    island are usually ob tained by cutting regions in a two-

    dimensional electrongasformed at the interface b etween two

    layersof semiconductors suchasgallium aluminium arsenide

    and gallium arse nide. In this case the condu cting regions are

    definedbymetallic electrodes pattern ed on the top semicon-

    ducting layer. Negative voltages applied to these electrodes

    deplete the electron gas just b eneath them, and the depleted

    regions can b e ma de sufficiently narrow to allow tunnelling

    between the source, island and drain . Moreover, the electrode

    that shapes the island can b e usedasthe gate electrode.

    In this semiconducting version of the SET, the island is

    often referred to as a qua ntu m dot, since the electrons in the

    dot are confined in all three directions. In the last few years

    researchers at the Delft University of Technology in the

    Netherlands and at NT TinJapa n have shown that quantum

    dots can b ehavelikeartificial

    atoms.

    Indeed, it has b een poss-

    ible to construct a new periodic table tha t describ es dots con-

    taining different num b ers of electrons (see Qu an tum d ots

    by LeoKouwenhoven and Charles Marcus

    hysics Worldjune

    pp35-39).

    Operat ion ofa S Tt rans is tor

    So how does a SET transistor work? The key point is that

    charge passes through the island in quantized units. For an

    electron to hop onto the island, its energy must equal the

    Coulomb energy

    e

    2

    /2C.

    When b oth the gate and

    bias

    voltages

    are zero, electrons do not have enough energy to enter the

    island and curre nt does not flow. As the b ias voltage b etween

    the source and drainisincreased, an electron canpassthrough

    the island when the energy inthe system reaches the Co ulomb

    energy.This effectisknownasthe Coulomb blockade, and the

    critical voltage needed to transfer an electron on to the island,

    equal to

    e/C

    iscalled the Cou lomb gap voltage.

    Now imagine diat the bias voltage is kept below die

    Coulomb gap voltage. If the gate voltage is increased, the

    energy of the initial system (with no electrons on the island)

    gradually increases, while the energy of the system with one

    excess electron on die island gradually decreases. At die gate

    voltage corresponding

    to

    die point of m aximum slope on the

    Coulom b staircase, b om of these configurations equally qual-

    ify as me lowest energy states of the system. This lifts the

    Coulom b b lockade, allowing electrons to tunnel into and out

    of die island.

    The C oulomb b lockadeislifted w hen die gate capacitance

    ischarged widi exacdy m inus half an electron, whichisnot as

    surprisingasit may seem. T he islandissurroundedbyinsula-

    tors,which mean s that the charge on it must b e quandze d in

    units ofe but the gate is a metallic electrode connected to a

    plentiful supply of electrons. Th e charge on die gate capaci-

    tor merely represents a displacement of electrons relative to a

    background of positive ions.

    If

    we

    furmer increase the gate voltage

    so

    that die gate capa-

    citor b ecomes charged w idi

    -e ,

    die island again has only one

    stable configuration separated from die next-lowest-energy

    states by the Coulom b energy. Th e Co ulomb b lockade is set

    up a gain, b ut the island now contains a single excess electron.

    The conductance of die SET transistor dierefore oscillates

    b etween m inima for gate charges ma t are integer multiples of

    e

    and maxima for half-integer multiples ofe(figure 5 ).

    Accurate measures of cha rge

    Such a rapid variation in cond uctanc e m akes die single-elec-

    tron transistor an ideal device for high-precision electrometry.

    In this type of application the SET has two gate electrodes,

    and the b ias voltage is kept close to the Co ulom b b lockade

    voltage to enh ance the sensitivity of the curre nt to changes in

    die gate voltage.

    The voltage of the first gate is initially tuned to a point

    where the variation in current reaches a maximum. By

    adjusting the gate voltage around this point, the device can

    measure die charge of a capacitor-like system connected to

    die second gate electrode.Afraction of this measured cha rge

    is shared by the second gate capacitor, and a variation in

    charge of Vieisenough to change die current by ab out half

    the maximum current diat canflowhrough the transistor at

    the Coulom b blockade voltage. Th e variation in current can

    be as large as 10 billion electrons per second, which means

    that tiiese devices can achieve a charge sensitivity that out-

    performs other instruments by several orders of m agnitude.

    Indeed, a collaboration between researchers at Yale Uni-

    versity in the US and Chalmers University in Gothenburg,

    Sweden, recendy showed diat charge variations smaller tiian

    10~

    5

    e

    can be detected in a measurement period of just one

    second andwidia b andwiddi of several hundred megahertz.

    SET transistors have already been used in mesoscopic

    physics experiments that have required extreme charge sen-

    sitivity. For example, earlier this year R ob ert W estervelt and

    co-workers at Harva rd University in the US used this type of

    device to measure the rounding of steps observed in a

    Coulom b staircase.

    Electrometers b ased on S ET transistors could also be used

    to measure die delicate quantum superpositions of charge

    states in a supercond ucting island connectedbya tunnel

    junc-

    P H V S I C S W O R L D S L P I I M B E R 1 9 9 8

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    4 Pr inc i pl e of th e SET t ran s i s to r

    ion to a superconductor. Such an

    island can accommodate not only

    several charge states corresponding

    to different numbers of Cooper

    pairs,

    but also coherent quantum

    superpositions of these

    states.

    Super-

    conducting islands could therefore

    provide a means for implementing

    the quantum bits needed for a quan -

    tum compu ter (see Fundam entals

    of quantum information

    by

    Anton

    Zeilinger hysics M^rWMarchpp35-

    40).

    The feasibility of the idea has

    been shown b y experiments at Delft

    University, the State University of

    New York at Stony Brook, the PTB

    Laboratory in Germany, the NEC

    Lab oratory in Japan and in our lab.

    As we have seen, the charge sen-

    sitivity of the SET is ultimately

    linked to the fact that electrons tra-

    verse the island one at a time. In

    1990 Bart Geerligs, Valerie Ande-

    regg, Peter Holweg and H ans Mooij

    at Delft, together with Hugues

    Pothier, Daniel Esteve, Cristian U r-

    bina and one of us (MD) at CEA

    Saclay showed that electrons can

    be counted one b y one by creating

    devices that combine several SET

    transistors. An d in

    1996

    John Mar-

    tinis and colleagues at the National

    Institute for Standards and Tech nol-

    ogy in Boulder, Colorado, showed

    that a device called the electron

    pump can count electrons with an

    accuracy of 15parts in a billion. Th e

    same group is now attempting to

    measure the charge of the electron

    with an accuracy better than 1 part

    pe r1 millionbycomb ining an elec-

    tron pum p with a specially calibra-

    ted capacitor. Oth er m etrology labs

    are aiming to use arrays of single-

    electron transistors to establish a

    standa rd for electric curren t.

    The precision with which elec-

    trons can be counted is ultimately

    limited by the quantum delocal-

    ization of charge that occurs when

    the tunnel-junction conductance be-

    comes comparable with the conductance quantum,

    2e

    2

    /h .

    However, the curren t through a SE T transistor increases with

    the conductance of the junctions,soitisimportant to under-

    stand how the single-electron effects a nd C oulom b b lockade

    disappear when the tunnel co nductance is increased b eyond

    2e

    2

    /h .In 1991Ko nstantin Matveev, nowatDukeUniversityin

    North Carolina, drew a parallel between the suppression of

    the Coulomb b lockade and the Kond o effect, in which mag-

    netic impurities in metals are screened by conduction elec-

    trons.

    Experiments b y Philippe Joyez and co-workers in our

    lab, and by Leonid Kuzmin and collaborators at Chalmers

    tunnel

    y

    junctions

    Like

    a

    MOSFET. the single-electron tunn elling

    (SET)

    transistor consistsof a gate electrode that electrostatically

    influences electrons travelling between the source

    and

    drain electrodes. H owever, the elec trons in the SET

    transistor need to cross two tunnel junctions that form

    an

    isolated conducting electrode called the island. E lectrons

    passing through the island charge and discharge it, and

    the

    relative energies of systems containin g 0

    or 1

    extra

    electrons depends on the gate voltage. At

    a

    low

    sou rce-d rain vo ltage, a current will only flow through the

    SET transistor if these two charge configurations

    have

    the

    same energy.

    5 C o u n ti n g e le c t r o n s w i th a s i n g l e -

    e l e c tr o n t r a n s i s t o r

    current

    i

    bias

    ~ = v o l ta g e

    voltage

    2C

    g

    2C

    g

    2C

    g

    2C

    g

    The current flowing in a single-electron transistor increases

    with the bias voltage between the source and

    drain,

    an d

    varies periodically with th e gate voltage. For low bias

    voltages, current flows when th e charge on the gate

    capacitoris ahalf-integer multipleo fe , but issuppressed

    for integer mu ltiples of e.Eachtime an electron isaddedto

    the

    gate, an electron

    tunnels

    intothe island,

    which

    sets

    the

    field

    in

    the gatecapacitor back

    to

    its initial

    value.

    Peaks in

    the conductance are observed for half-integer multiples of

    e,and minima are seenat integer m ultiples of e. For bias

    voltages largerthan e/C, conduction occurs independently

    of

    the

    gatevoltage.

    University have confirmed that

    quantum fluctuations in the charge

    of the tunnelling electrons reduce

    the Coulomb energy.

    Towardsroomtemperature

    Until recently single-electron tran-

    sistors had to be kept at tempera-

    tures of a few hundred millikelvin

    to maintain the thermal energy of

    the electrons below the Coulomb

    energy of the device. Most early

    devices had Cou lomb energies of a

    few hundred microelectronvolts

    b ecause diey were fabricated using

    conventional electron-beam litho-

    graphy, an d

    thesize

    and capacitance

    of the island were relatively large.

    For

    a SET transistor

    to

    work at room

    tempera ture, the capacitance of the

    island must b e less than 10~

    17

    F and

    therefore its size must be smaller

    than 10 nm .

    This year two experiments have

    demonstrated that SET transistors

    can work at room temperature.

    Lei Zhuang and Lingjie Guo of

    the University of Minnesota, and

    Stephen Chou of Princeton Uni-

    versity in the US fabricated a SET

    transistor in a similar way to a field-

    effect transistor with a channel just

    16 nm

    wide.

    Th e fabrication process

    generated variations in the chann el

    that act as tunne l junc tions defining

    several different islands, and the

    behaviour of the device is domin-

    ated b y the smallest island.

    As expected from theory, the

    conductance of the device shows a

    series of peaks as a function of g ate

    voltage. The Coulomb energy of

    the device is aroun d 100 meV,

    which is large enough to reveal

    single-electron effects at room tem-

    perature. However, the Coulomb

    energy istoo smalltoprovide a large

    Coulomb gap, so the transistor is

    not sensitive enough to be used as

    an electrometer. Interestingly, the

    wavelength of electrons is com par-

    able with the size of the dot, which means that their con-

    finement energy makes a significant contribution to the

    Coulomb energy.

    Meanwhile, Jun-ichi Shirakashi and colleagues at die

    Electrotechnical Laboratory and the Tokyo Institute of

    Technology fabricated a metallic SE T from a very thin layer

    of niob ium. Tunnel junctionswerecreated b y oxidizing areas

    of the niobium with die tip of a scanning electron micro-

    scope. The tip had almost atomic resolution, allowing the

    researchers to make very n arrow oxide barriers b etween the

    island and the source and drain, and a wider b arrier b etween

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    PHYSICS WORLD S E P T E M I E I 1998

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    the island and gate.

    The team measured the current through the device asa

    function of b oth b ias and gate voltages, and the results closely

    match theoretical predictions. The Coulomb energy ofthe

    device is 25 0 meV, which mean s that single-electron effects

    can readily be seen at room temperature. However, tunnel

    barriers fabricated inthis wayare highly resistive, which

    means that the current isab out 100 times smaller th anin

    devices operating atlowtemperatures. This problemalsolim-

    its die usefulness of th e device for electrom etry

    Perspectives onthe future

    Researchers have long considered whether SET transistors

    couldbeusedfordigital electronics. Although the current

    varies

    periodically with

    gate

    voltage in contrast

    to

    the thresh-

    old behaviour of the

    field effect

    ransistor a S ET could still

    form a co mp act an d efficient mem ory device. However, even

    the latest SET transistors suffer from offset charges , which

    means that the gate voltage needed

    to

    achieve maxim um c ur-

    rent

    varies

    random ly from device to device. Such fluctuatio ns

    make it impossible to build complex circuits.

    One way to overcome this problem might be to combine

    the island, two tunnel junctions and the gate capacitor that

    comprisea single-electron transistor inasingle m olecule

    after

    all,

    the intrinsically q uantum b ehaviour of a SE T tran-

    sistor should not b e affected at the molecu lar

    scale.

    In prin-

    ciple, the reproduc ibility ofsuch futuristic transistors would

    be determ ined b y chemistry, and not by the accuracy ofthe

    fabrication process. Last yearateam led by Cees Dekker at

    Delft and Richa rd SmaJley at Rice Universityinthe US m ade

    a crucial step in this direction b y ob serving Coulom b block-

    ade in an island consisting of a single carb on nano tub e.

    It is not yet clear whether electronics based on individual

    molecules andsingle-electron effects will replace c onven-

    tional circuits based on scaled-down versionsof field-effect

    transistors. Only one thing is certain:ifthe paceofminia-

    turization continues unabated, the quantum propertiesof

    electrons will become crucialindetermining the designof

    electronic devices before the end of the next decade.

    Further read ing

    M HDevoret, DEsteve and CUrbina 1 992 Single-electron transfer inmetallic

    nanostructures Nature36 0547

    D CGlattli,M

    Sanquer

    and J Tran Thanh Van

    (ed) 1994

    Coulomb and

    Interference Effects in Small Electronic Structures(Moriond

    series,

    Editions

    Frontieres, Gif-sur-Yvette)

    HGrabert andM H Devoret ed)1992 Single Charge Tunnelling{Nat oseries,

    Plenum,

    New York)

    JShirakashi eta/. 19 98 Single-electron charging effectsinNb/Nb oxide-based

    single-electron transistors atroomtemperature Appl

    Phys Lett

    721893

    L

    LSohn,

    L PKouwenhoven and GSchoen 1997 M esoscopic Electron

    Transport Natoseries, Kluwer, Dordrecht)

    MTinkham 1996Introduction to Superconductivity(McGraw-Hill, New York)

    L

    Zhuang,

    L Guo and S Y Chou1998 Siliconsingle-electron quantum-dot

    transistor

    switch operating at room

    temperature

    Appl Phys Lett

    721205

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