Scheduling for Dedicated Scheduling for Dedicated Machine Constraint Using Integer Machine Constraint Using Integer Programming Programming Huy Nguyen Anh Pham, Arthur Shr, and Peter P. Chen Huy Nguyen Anh Pham, Arthur Shr, and Peter P. Chen Louisiana State University, Baton Rouge, LA, U.S.A. Louisiana State University, Baton Rouge, LA, U.S.A. Alan Liu Alan Liu National Chung Cheng University, Chia-Yi, Taiwan National Chung Cheng University, Chia-Yi, Taiwan
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Scheduling for Dedicated Machine Constraint Using Integer Programming Huy Nguyen Anh Pham, Arthur Shr, and Peter P. Chen Louisiana State University, Baton.
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Scheduling for Dedicated Machine Scheduling for Dedicated Machine Constraint Using Integer Constraint Using Integer
ProgrammingProgramming
Huy Nguyen Anh Pham, Arthur Shr, and Peter P. ChenHuy Nguyen Anh Pham, Arthur Shr, and Peter P. ChenLouisiana State University, Baton Rouge, LA, U.S.A.Louisiana State University, Baton Rouge, LA, U.S.A.
Dedicated Machine Constraint in Dedicated Machine Constraint in Semiconductor ManufacturingSemiconductor Manufacturing
The operations of The operations of semiconductor semiconductor manufacturing repeatedly manufacturing repeatedly make an IC product layer make an IC product layer by layer. by layer.
The The dedicated machine dedicated machine constraintconstraint is in the is in the photolithographyphotolithography process process area area
Photolithography ProcessPhotolithography Process
The most important process for the yield of IC– “Blue Print” for each photo layer
Machine A Machine B Machine CMachine X Machine Y Machine Z
Busy
Photolithography Stages
Dedicated Machine Constraint:
idle
Wafer lots
With this constraint, the wafer lots dedicated to machine X need to wait With this constraint, the wafer lots dedicated to machine X need to wait for machine X, even if there is no wafer lot waiting for machine Y. for machine X, even if there is no wafer lot waiting for machine Y.
Without this constraint, the wafer lots can be scheduled to A, B, or C.Without this constraint, the wafer lots can be scheduled to A, B, or C.
Issues and Current SolutionsIssues and Current Solutions
– Photo machines might become load unbalanced if Photo machines might become load unbalanced if the wafers are dispatched randomly to the photo the wafers are dispatched randomly to the photo machines at the first photo layer.machines at the first photo layer.
– Some photo machines will be “lost” for a while and Some photo machines will be “lost” for a while and the others will be “run” with heavy loadthe others will be “run” with heavy load
– Switch from the highly congested machines to the Switch from the highly congested machines to the idle machines. idle machines.
– Rely on experienced engineers to manually handle Rely on experienced engineers to manually handle alignment problems of the wafer lotsalignment problems of the wafer lots
OutlineOutline
Dedicated Machine Constraint in Semiconductor Dedicated Machine Constraint in Semiconductor