Salvatore Tudisco Salvatore Tudisco The new generation of SPAD The new generation of SPAD Single Photon Avalanche Diodes Single Photon Avalanche Diodes arrays arrays I Workshop on Photon Detection I Workshop on Photon Detection - - Perugia Perugia 2007 2007 LNS LNS
LNS. The new generation of SPAD Single Photon Avalanche Diodes arrays. Salvatore Tudisco. I Workshop on Photon Detection - Perugia 2007. - The Silicon Photomultiplier - Arrays for imaging. Microelectronics. - PowerPoint PPT Presentation
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Salvatore TudiscoSalvatore Tudisco
The new generation of SPADThe new generation of SPAD
Single Photon Avalanche Diodes Single Photon Avalanche Diodes arraysarrays
I Workshop on Photon Detection I Workshop on Photon Detection - - Perugia 2007Perugia 2007
The collaboration The collaboration started in started in the 2004the 2004 to realise single to realise single device and first array device and first array prototypesprototypes
- - The Silicon PhotomultiplierThe Silicon Photomultiplier - - Arrays for imagingArrays for imaging
SPADSPAD
Si <100> Si <100>
cathodecathode
CMOS planar technologyCMOS planar technology
PP++
NN--
High Boron (PHigh Boron (P++) concentration ) concentration reduce the Breakdown voltagereduce the Breakdown voltage
• PP- - high Breakdown voltage high Breakdown voltage to prevent peripheral effects to prevent peripheral effects
• PP+ + to reduce the series resistance to reduce the series resistance substrate insulation substrate insulation integration of many elements integration of many elements
PP+ + sinkers: reduce the contact sinkers: reduce the contact resistance of the anode and provide a resistance of the anode and provide a low resistance path to the avalanche low resistance path to the avalanche currentcurrent
Diffusion tail carrier diffusion in neutral carrier diffusion in neutral layer layer delay to avalanche trigger delay to avalanche trigger
S. Tudisco et al. S. Tudisco et al. Nuclear Physics B – proc. supl. 150(2006)317 Nuclear Physics B – proc. supl. 150(2006)317 Finocchiaro et al. Finocchiaro et al. IEEE Trans. on Nucl. Scie. 52(2005)3040IEEE Trans. on Nucl. Scie. 52(2005)3040