page 1 Roll-to-roll Technology for Transparent High Barrier Films Presented at the AIMCAL Fall Technical Conference, October 19 - 22, 2008, Myrtle Beach, SC, USA Nicolas Schiller, John Fahlteich, Matthias Fahland, Waldemar Schönberger Fraunhofer FEP, Germany Institut Elektronenstrahl- und Plasmatechnik a Fraunhofer FEP
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page 1
Roll-to-roll Technology for Transparent High Barrier Films
Presented at the AIMCAL Fall Technical Conference,October 19 - 22, 2008, Myrtle Beach, SC, USA
Nicolas Schiller, John Fahlteich, Matthias Fahland, Waldemar SchönbergerFraunhofer FEP, Germany
InstitutElektronenstrahl- undPlasmatechnik
aFraunhofer
FEP
page 2
Outline
Motivation and Approach
Magnetron PECVD process
Layer properties
Summary and Conclusion
Roll-to-roll Technology for Transparent High Barrier FilmsPresented at the AIMCAL Fall Technical Conference 2008
page 3
Outline
Motivation and Approach
Magnetron PECVD process
Layer properties
Summary and Conclusion
Roll-to-roll Technology for Transparent High Barrier FilmsPresented at the AIMCAL Fall Technical Conference 2008
page 4
"Be flexible:" Flexible displays, signage, lightning, and solar cells
offer unique application and cost saving potentials.
Source: PolymerVision
Source: Konarka
Roll-to-roll Technology for Transparent High Barrier FilmsPresented at the AIMCAL Fall Technical Conference 2008
page 5
Flexible substrates
Potential benefits for designers and users
• thin,
• low weight
• new design concepts
• Ultra low cost applications
Potential benefits for producers
• Roll-to-roll production scheme
However, Encapsulation is needed to protect the device from water vapor and oxygen
Roll-to-roll Technology for Transparent High Barrier FilmsPresented at the AIMCAL Fall Technical Conference 2008
page 6
water vapor oxygen
Electronic devicepermeation barrier
flexible solar cell
flexible OLED
today:• Ultra-High-Barrier olny
with glass• not flexible
future:• thin film encapsulation for
ultra-high-barrier• low cost• flexible
Roll-to-roll Technology for Transparent High Barrier FilmsPresented at the AIMCAL Fall Technical Conference 2008
page 7
Direct Encapsulation vs. Barrier Foil
Direct Encapsulation Barrier Foil
• All encapsulation processes must be compatible
• Substrate exposed to (plasma) process• All in vacuum roll-to-roll encapsulation
possible
• Free choice for processes (combine vacuumand non-vacuum processes)
• OLED and barrier development independent• Additional process: lamination
Roll-to-roll Technology for Transparent High Barrier FilmsPresented at the AIMCAL Fall Technical Conference 2008
page 8
14.10.2008
Requirements and coating technologies for transparent barriers
10010110-110-210-310-410-510-6
Water Vapour Transmission [g / m² day]
Food Packaging
Solar Modules
Organic Electronic Devices
Polymers (intrinsic)
Evaporation
Sputtering
Combination Processes
Roll-to-roll Technology for Transparent High Barrier FilmsPresented at the AIMCAL Fall Technical Conference 2008
page 9
barrier layer
Substrate(polymer film, OLED, solar cell…)
defect in barrier layer
Models suggest that barrier performance is controlled by defects in the barrier layer. (The layer itself is supposed to be impermeable.)
All concepts to improve barrier performance are focused to hinder the growth of defects.
Challenge of thin film encapsulation
Roll-to-roll Technology for Transparent High Barrier FilmsPresented at the AIMCAL Fall Technical Conference 2008
page 10
Concept: dense single layer
Virtually defect free or low defect single barrier layer
• Atomic Layer Deposition – thin layer by layer deposition[1]
• Ion-beam assisted sputter deposition[2]
[2] R. Dunkel: High Performance low cost single layer barrier coatingson plastic, General Atomics Produktpräsentation
[1] P. F. Carcia et al.: APPLIED PHYSICS LETTERS 89, 031915 (2006)
sputtered Al2O3
GA - Super Sapphire
[2]
barrier layer
Substrate
page 11
Concepts: graded single layer
Graded (organic/inorganic/organic) layer
Substrate(polymer film, OLED, solar cell…)
[1] A. G. Erlat et al.: Ultra-High Barrier Coatings for Flexible OrganicElectronics, SVC – 48th Technical Conference Proceedings, p. 116 (2005)
inorganicorganic
[1]
• Variation of film composition by changing process gas
• Batch-process not applicable for roll-to-roll encapsulation
page 12
interlayerbarrier layer
Substrate(polymer film, OLED, solar cell…)
barrier layer
Multi-layer barrier
defect in barrier layer
• defect decoupling: tortuous path for moisture and oxygen diffusion
• increased lag time of diffusion
• decoupling of mechanical stress
Roll-to-roll Technology for Transparent High Barrier FilmsPresented at the AIMCAL Fall Technical Conference 2008
page 13
Example: multi-layer barrier with ORMOCER®s
ORMOCER®
barrier layer ("PVD-layer")
Substrate(polymer film, OLED, solar cell…)
barrier layer ("PVD-layer")
Roll-to-roll Technology for Transparent High Barrier FilmsPresented at the AIMCAL Fall Technical Conference 2008
page 14
Outline
Motivation and Approach
Magnetron PECVD process
Layer properties
Summary
Roll-to-roll Technology for Transparent High Barrier FilmsPresented at the AIMCAL Fall Technical Conference 2008
page 15
All-in-vacuum approach: interlayer by Magnetron PECVD
Roll-to-roll Technology for Transparent High Barrier FilmsPresented at the AIMCAL Fall Technical Conference 2008
page 32
Outline
Motivation and Approach
Magnetron PECVD process
Layer properties
Summary
Roll-to-roll Technology for Transparent High Barrier FilmsPresented at the AIMCAL Fall Technical Conference 2008
page 33
Summary
InstitutElektronenstrahl- undPlasmatechnik
aFraunhofer
FEP
A novel concept for the all-in-vacuum, roll-to-roll deposition of multilayer barrier stacks has been developed. The basis of the concept is the in-line combination of magnetron sputtering and a magnetron PECVD-process.
The magnetron PECVD process offers several benefitslow working pressure of 0.5 Pa up to few Pa, thus allowing the in-line combination with sputtering processwide range of properties for SiOxCy layers high potential for large area processing by using dual magnetrons as power sourcehigh coating rates (> 400 nm•m/min)
Our basic concept allows an all-in-vacuum roll-to-roll deposition of multilayer barrier stacks. The process has been installed in a pilot-scale multi-chamber pilot roll-to-roll coater.