MKS offers an Equivalent to New (ETN) Refurbishment Program for RF Power Generators and Matching Networks. Performed by MKS factory trained technicians and using refurbishment and test processes developed by the original product design engineers, MKS’ certified refurbishment program extends the life of your process tool and minimizes disruption to your existing process. Trust the original manufacturer to guarantee your RF Generators and Matching Networks operate at peak performance, ensuring you get the most value from your high capital investment dollars. Scope of Work Our Commitment MKS’ highly skilled engineers and technicians understand your needs and ensure your success by keeping your equipment up and running at peak performance. • Only MKS original parts used for all repairs • MKS trained technicians use current, proven methods and techniques • All repairs qualified on an MKS-designed test stand • 1-year warranty • Evaluate for operational and physical condition • Incorporate applicable Service Bulletins and software upgrades • Customer-specific settings are reloaded upon refurbishment completion • Replace faulty parts including those with a high risk of future failure based on our repair database analytics • Chassis and cover cleaned, touched up, or repainted as needed • Each unit undergoes a comprehensive set of diagnostic, functional and quality tests, as well as extended burn-in, to ensure the generator operates like new • Comprehensive test report RF Power Generators and Impedance Matching Networks Equivalent to New Refurbishment Program
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MKS offers an Equivalent to New (ETN) Refurbishment
Program for RF Power Generators and Matching Networks.
Performed by MKS factory trained technicians and
using refurbishment and test processes developed by
the original product design engineers, MKS’ certified
refurbishment program extends the life of your process
tool and minimizes disruption to your existing process.
Trust the original manufacturer to guarantee your RF
Generators and Matching Networks operate at peak
performance, ensuring you get the most value from your
high capital investment dollars.
Scope of Work
Our Commitment
MKS’ highly skilled engineers and technicians
understand your needs and ensure your success
by keeping your equipment up and running at peak
performance.
• Only MKS original parts used for all repairs
• MKS trained technicians use current, proven
methods and techniques
• All repairs qualified on an MKS-designed
test stand
• 1-year warranty
• Evaluate for operational and physical condition
• Incorporate applicable Service Bulletins and software upgrades
• Customer-specific settings are reloaded upon refurbishment completion
• Replace faulty parts including those with a high risk of future failure based on our repair database analytics
• Chassis and cover cleaned, touched up, or repainted as needed
• Each unit undergoes a comprehensive set of diagnostic, functional and quality tests, as well as extended burn-in, to ensure the generator operates like new
• Comprehensive test report
RF Power Generators and Impedance Matching NetworksEquivalent to New Refurbishment Program
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CERTIFIED CALIBRATIONISO9000/SEMI STANDARDS
Qualifying Products
MKS offers comprehensive refurbishment
services to improve the reliability and longevity of
the following RF Generator models:
• ACG RF Power Generator
• GHW RF Plasma Generator
• KEINOS™ RF Plasma Generator
• MWD Impedance Matching Network
• NOVA® RF Plasma Generator
• OEM RF Power Generator
• Spectrum® RF Plasma Generator
• SurePower® RF Generator
RF Power Generators Refurbish_11/20
©2019-2020 MKS Instruments, Inc.
Specifications are subject to change without notice.
www.MKSINST.comMKS products provided subject to the US Export Regulations. Export, re-export, diversion or transfer contrary to US
law (and local country law) is prohibited. mksinst™ and KEINOS™ are trademarks and NOVA® , Spectrum® and
SurePower® are registered trademarks of MKS Instruments, Inc. or a subsidiary of MKS Instruments, Inc. All other
trademarks cited herein are the property of their respective owners.
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CUSTOMIZED TRAINING
ACG GHW KEINOS
MWD NOVA® OEM
Spectrum® SurePower®
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