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UV LEDs: A Measurement Update Joe May, Jim Raymont, and Mark Lawrence May 2016
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Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

Nov 11, 2018

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Page 1: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

UV LEDs: A Measurement Update

Joe May, Jim Raymont, and Mark Lawrence

May 2016

Page 2: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

Presentation Overview

1. Measurement Fundamentals/Variables

2. UV LEDs

3. Measurement of UV LEDs

Page 3: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

Communication:• Between stakeholders (equipment, chemistry, end users,

substrate, same company with multiple locations)• Wide range of technical knowledge (chemists, suppliers, users)

Why is UV Measurement Important?

• Repeat tests and experiments across multiple facilities

• Transfer production and processes• Troubleshoot applications• Speak the same language• Understand differences between instruments

Bottom Line: Measurement saves time and money

Page 4: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

Arc Lamps

Images Courtesy: Dymax, Heraeus, Miltec, Nordson Corporation

Microwave Lamps

Spot Sources

Broadband UV Sources

Page 5: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

Hg Spectra & Hg Modified with Additives

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200 250 300 350 400 450 500

wavelength [nm]

rela

tive

spec

tral

rad

ianc

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Hg Ga Fe

Mercury

Gallium

Iron

Broadband Spectral Output

Page 6: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

Instrument Responses

The traditional approach has been to define the ban d response based ONLY on the filter response

Page 7: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

1. Radiometers• Absolute units• Want a “number”

2. Profiling Radiometers• Measure the peak irradiance and total

energy density• X-Axis: Time / Y-Axis: Irradiance

UV Measurement Strategies

3. Spectral Radiometer • Profile of UV irradiance as a

function of bandwidth• R&D vs. Production

4. Relative Instruments• Signal proportional to

lamp brightness (%)• Sensor & Display• Continuous feedback &

monitoring of UV conditions

Page 8: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

Past efforts to improve & understand UV measurement:

• 3M, Heraeus, International Light, EIT

• RadTech Measurement CD

• Educate & Communicate

Challenges Measuring Broadband UV Sources

Page 9: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

Challenges Measuring Broadband UV Sources

Why are there differences between instruments?

Calibration Sources/Points• One source type does not

always fit

Data Collection Techniques• User Errors

User Expectations• Fraction of a percent?

Optics• Different Bands/Manufacturers • Define response by 10% Power

Point or 50% Power Point (FWHM)

Electronics• Dynamic range• Sampling rates• RMS vs Instantaneous Watts• Threshold Differences

Page 10: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

Instrument Cleanliness

UV Measurement Challenges

Irradiance W/cm 2

Band Before After Difference

UVA 1223 983 -19.6%

UVB 1066 888 -16.7%

UVC 277 257 -7.2%

UVV 889 757 -14.9%

Energy Density J/cm 2

Band Before After Difference

UVA 349 282 -19.2%

UVB 284 239 -15.9%

UVC 75 68 -9.33%

UVV 309 264 -14.6%

Data collected 3/24/16

Before: Data collected with contaminated optics

After: Data collected after cleaning

Page 11: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

Images courtesy Baldwin, Dymax, Integration Techno logy, Excelitas & Phoseon Technology

UV LEDs

Wide variety of UV LED sources • Multiple suppliers with wide level of expertise,

support, finances� More than someone with SMT equipment?

• Experience in industrial UV, visible lighting, semiconductor industry?

• Ties to formulators? • Match source to your application & process• Economics of source selected (ROI)

Page 12: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

UV LED Power Output vs. Wavelength

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240 260 280 300 320 340 360 380 400 420

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395

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365

Mercury Lamp

Increasing types of LED chips available

Increasing UV LED power

Page 13: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

• What do you want to measure?– Individual LED– Array– Production system

• What values do you want? • Industrial UV: W/cm2 & J/Cm2

• Visible LEDs: Flux?/Color?

What do you want to measure?

UV LEDs: Measurement

Page 14: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

Courtesy of Integration Technology

• Where is the proper location for the UV Irradiance Value?• How do we compare systems and communicate values?

UV LEDs: Measurement

Where do you measure?

Page 15: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

Source Irradiance & UVA and V Responsivity

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200 250 300 350 400 450 500 550 600

LED395nm

UVA

UVV

Radiant Power data is for 395nm Nichia LED.UVA and V Responsivity obtained from EIT LLC.

Spectral Irradiance is grouped in 10-nm bands.

Measurement of 395 nm LED

Is the instrument response matched to the source?

EIT UVA EIT UVV

Page 16: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

Δ = 60%

Measurement of 395 nm LED

Δ = 95%

Using UVA to measure a 385 nm or 395 nm LED

Page 17: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

• Study completed by Dr. Robert F. Berg, NIST

• Looked at three LED units with two different radiometers

• No surprise there were differences

• CORM Meeting at NIST on May 18th

• Path forward?

NIST comparison of high power UV LED sources

From NIST report (Figure 9)

Page 18: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

EIT UVA2 Bandwidth Response

Added UVA2 (380-410 nm)

Page 19: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

395 nm LED array output measured on a spectral radiometer Courtesy EIT

UV LED Emission Spectra

• Width of the LED at the 50% Power Point

• Variations between suppliers:• Binning• Longer wavelengths• Sold as +/- 5 nm from center

wavelength (CWL)• Overall spread of UV LED made us

rethink width of UVA2 band

Page 20: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

Proposed “L” Bands

Band Name Identifier

Approximate Wavelength Range

UVA 315-400nm

UVB 280-315nm

UVC 240-280nm

UVV 400-450nm

EIT Band Wavelengths, CpMeasurement

RangeL405 400-410nm 380-430 nmL395 390-400nm 370-420 nmL385 380-390nm 360-410 nmL365 360-370nm 340-390nm

Broadband Source Ranges

Proposed “L” LED Bands

Page 21: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

L395 LED Output Spectra Showing + 5nm Spread of Cp A long with Required Filter Response to Obtain 2% Measurem ent

Proposed UV L395 nm Band

• “Wide” (+/- 100 nm) vs. “Narrow” (+/- 50 nm) Approach

• Advantages & Disadvantages to each approach

• Goal: Flat Response

Idealized

Page 22: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

• Control of overall optics to flatten OVERALL response of instrument

• ALL Optical Components NOT just the filter

Total Instrument Response

Page 23: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

Instrument Response

Total Measured Optics Response

Page 24: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

Total Measured Optics Response

Instrument Response

Page 25: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

LED-R™ Series

LEDCure™ Profiling Radiometer• 40 Watt Dynamic Range• Display Plus Profiler Option• L395 Total Optics Response • Additional L-Bands coming soon

Page 26: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

Calibration Challenges

• Industrial LED sources have exceeded 50W/cm 2

• Typical irradiance levels, sources and standards that NIST has worked with are much lower (mW/cm2-µW/cm2)

• Reduce variation and errors introduced in transfer process � Fixtures� Direct evaluation of EIT master unit

by NIST from 220 nm past visible region

• Uniformity of UV LED source used with working standard and unit under test

Page 27: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

Instrument Features for LEDs

Desired Instruments Features

• Cover LED Source and natural variations

• High dynamic range

• Easy to use

• Cosine response

• Stable method of value transfer/calibration

• Other: TBD

Page 28: Radtech May 2016 LED - EIT LLC 2016 Presentation... · Communication: • Between stakeholders (equipment, chemistry, end users, substrate, same company with multiple locations) •

EIT Instrument Markets108 Carpenter Drive

Sterling, VA 20164 USA Phone: 703-478-0700

[email protected]

Thank You.