1 1 Progress of Integration in MEMS and Progress of Integration in MEMS and New Industry Creation New Industry Creation Prof. Susumu Sugiyama Scientific Expert, JSPS/JAICA Director, Research Institute for Nanomachine System Tech nology Professor, Ritsumeikan Global Innovation Research Organi zation Ritsumeikan University Japan http://www.ritsumei.ac.jp/se/~sugiyama/index.html 18, September 2009
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Progress of Integration in MEMS and New Industry Creation
Progress of Integration in MEMS and New Industry Creation
Prof. Susumu Sugiyama
Scientific Expert, JSPS/JAICA Director, Research Institute for Nanomachine System Technology Professor, Ritsumeikan Global Innovation Research Organization Ritsumeikan University Japan
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Progress of Integration in MEMS and New Progress of Integration in MEMS and New Industry CreationIndustry Creation
Progress of Integration in MEMS and New Progress of Integration in MEMS and New Industry CreationIndustry Creation
Prof. Susumu Sugiyama
Scientific Expert, JSPS/JAICADirector, Research Institute for Nanomachine System Technology
Professor, Ritsumeikan Global Innovation Research Organization
Ritsumeikan UniversityRitsumeikan UniversityFounded in 1869.• Spirit of the school: “Intellectual Freedom and Innovation”• Concept for education: “Peace and Democracy.”
Kinugasa Campus (Kyoto)Students : 15,300, Staff : 430• Faculties of Humanities and Social Science• College of Law• College of Social Sciences• College of International Relations• College of Policy Science• College of Letters
Biwako ・ Kusatsu Campus (Kusatsu City, Shiga Prefecture)Students : 17,000, Staff : 460• College of Economics• College of Business Administration• College of Science and Engineering• College of Information Science and Engineering• College of Life Sciences• College of Pharmaceutical Sciences
Japan
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College of Science and EngineeringCollege of Science and Engineering
• Department of Mathematical Science
• Department of Physical Science
• Department of Electrical and Electronic Engineering
• Department of Photonics
• Department of VLSI System Design
• Department of Mechanical Engineering
• Department of Robotics
• Department of Micro System Technology
• Department of Civil Engineering
• Department of Environmental Systems Engineering
• Department of Architecture and Urban Design
Biwako ・ Kusatsu Campus (Kusatsu City, Shiga Prefecture)
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Micro/Nano Fabrication
System Integration
Micro/Nano Materials
Evaluation
Design and Simulation
Research Institute for Nanomachine System Technology (RINST)
CAD Photolithography Electron beam Micro process Synchrotron radiation
Completion: 31st March 2002, Total Floor Space: 1350 m2 (Clean Room:325 m2)
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Nanomachine System Technology
Consortium(60 Companies)
Nanomachine System Technology
Consortium(60 Companies)
Research Institute for Nanomachine System
Technology(RINST)
Research Institute for Nanomachine System
Technology(RINST)
Industry, Government and Academia
Industry, Government and Academia
MEMS R & D and
Commercialization
MEMS R & D and
Commercialization
2121stst Century COE Program Century COE Program in the Ministry of Education, Culture, Sports, Science and Technology
2002 ~ 2006
Research Office
Research Office
MITSUBISHIHITACHI
PANASONICNEC
FUJITSUSUMITOMO E.
DENSOCANON
KONICA MINORUTARICHOEPSONOMRON
OLYMPUSBROTHER
SHIMADZU………
MITSUBISHIHITACHI
PANASONICNEC
FUJITSUSUMITOMO E.
DENSOCANON
KONICA MINORUTARICHOEPSONOMRON
OLYMPUSBROTHER
SHIMADZU………
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OutIn
....
Concept of MEMSConcept of MEMS (Micro Electro Mechanical Systems)
Integrated devices.Inputs and outputs are not only electrical signal but also thermal, electrical, chemical, biological information, etc.Moving devices.Fundamental devices following ICs. ICs : rice, MEMS : beans.Expected to come into practical use for human society in the near future.
enMEMS market exceeds semiconductor market in growth(MEMS will be alternative of ICs as advanced intelligent parts)
MEMS Market and Semi. MarketMEMS Market and Semi. Market
Fiscal Yera
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Successful Applications Using Successful Applications Using MEMS/NEMS TechnologyMEMS/NEMS Technology
Previous Previous
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Success in Automobile - Sensors - Success in Automobile - Sensors -
Full-production began from the 1980s.Production of pressure sensors and accelerometers become more than 10 million/month in scale at present.
Accelerometer for Airbag
System
(Denso)3 × 3 mm2
Pressure Sensor for Electronic Fuel Injection Control System for Engine, Toyota CRDL
Gyro ScopeTire Pressure Sensor
Rotation Sensor Gas Sensor
etc.
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““DMD”DMD”
Projector System
Texas Instruments DLP (Digital Light Processing)
Success in IT - Digital Mirror Device -Success in IT - Digital Mirror Device -Full-production began from the latter half of the 1990s undergo developing for over 10 years.It is competing with LC projector in the digital projection market at present.
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R & D AppliedR & D AppliedMEMS/NEMS TechnologyMEMS/NEMS Technology
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Application into Robotics and AutomationApplication into Robotics and Automation
Rotated Motor Combining Latch Mechanism with Rotated Motor Combining Latch Mechanism with Comb Drive Electrostatic ActuatorComb Drive Electrostatic Actuator
Outer ratchet ring
Gear
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Straight module
T-Junction module
Turning module
Departure module
Directional-switching leverComb actu
ator
Si Micro Transportation SystemSi Micro Transportation SystemIn Biotechnology / Medical Science, very-small-quantity substances such as
bio-cells and molecular samples under the microscope inspection
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Straight movement Turning movement
28.559.5
138.75
234.67
320392
738
0
100
200
300
400
500
600
700
800
900
1000
0 2 4 6 8 10 12 14 16 18 20
Frequency (Hz)V
elo
city
(u
m/s
)
Calculation
Measurement
T-Junction Module
- In order to guarantee the movement of microcar, x must be larger than pitch of ratchet tooth p = 10m. In other word, if L =150m, from (5): y 10.9m- When L =150m; V = 100(V) y = 24m From (5), we have: x = 19.5mFrom (6), velocity of microcar: v = 2.x.f = 39f (m/s)
Movement of Micro Container in MTSMovement of Micro Container in MTS
MEMS/NEMS Devices Production Utilized Bio-based Polymer MEMS/NEMS Devices Production Utilized Bio-based Polymer (Green (Green MEMS/NEMSMEMS/NEMS))
・ Adaptation to global issues such as progress of global warming and climate change・ Establishment of sustainable production system ・ Breakaway from extreme oil dependence of energy resources・ Recyclable resources, carbon-neutral production system
< Background of the Research >・ Reduction of nanotechnology research results to the society ・ Since MEMS production uses the same system as a semiconductor/IC, the cost is high ( down to 1/10 )・ Bio-compatibility of a device, and disposable problem in medical use
Shift to the bio-base material originated plant from petrochemicals
Progress of micro/nano process technologyConformity to a limited production with a wide variety
Research for MEMS Devise Production Utilized Bio-based Polymer
+
Comparison to Si of PMMA
Young's modulus 1/50Density 1/2
Thermal expansion coefficient X15
Insulating propertyTransparency
20µm
5µm
High aspect ratio (15 (2µm×30µm ) structures by Nano-imprinting
• The hot embossing molding machine for high precision MEMS was made.• The high precision hot embossing molding technology using Si mold was established. Mini
mum size: 2um, maximum aspect ratio: 15• A polymer MEMS fabrication process has been established.• The PMMA comb drive electrostatic micro-actuator was manufactured, and operation was de