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Unit for nanoscience and Theme Unit ofExcellence in Nanodevices
S.N. Bose National Centre for Basic SciencesKolkata-700098
www.bose.res.in
Basics of Scanning probe microscopy
A.K. Raychaudhuri
SNBNCBS and Bruker School
December 14-15, 2011
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Basic concepts
Simple components of SPM
Cantilever Statics and Dynamics
The different modes of SPM
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I will assume:
You have used SPM in some form before andhave some acquaintance with it.
However, the talk is not for experts.
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SPM
The Scanning Probe Microscope
What are the basic components of a SPM
Localized Probethat has an
interactionwith
the substrate tobe imaged
A nano-positioningmechanism that canposition the probe in
close proximity
of the surface
A system tomeasure the
interaction of theprobe with the
substrate
A mechanism toscan the probe
relative to thesubstrate andmeasure the
interaction as
function of position
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STM- Quantum mechanical tunneling between atip and the substrate. The contrast comes fromspatial variation of local electronic desnsity of
states.
AFM- Localized mechanical (attraction orrepulsion) interaction between tip and surface.
Physical mechanism and contrast
Any microscopy will depend on some physicalmechanism to create a contrast spatially.
It will also need a way to measure the contrastwith spatial resolution.
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If the process of scanning does not measure thecontrast that has a spatial dependence you will not
get any image in any scanning microscope.
Being a computer operated system, any periodic
noise in the system can create images because thescanning process can add it up to the main signal.These are plain artifacts.
How to detect artifacts ? A quick thumb rule
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In contrast to TEM or Optical microscope there isno diffraction and reconstruction of diffracted wave
front in SPM.
Advantage:
Resolution is not diffraction limited.
Here the limitation comes from the tip size thatinterrogates and of course some fundamentallimitations on detection process and electronics.
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Different SPMs and different modesThe nature of the tip surface interaction gives
different types of microscopy.
The way we detect the response gives us thedifferent modes of SPM.
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SPM
The Scanning Probe Microscope (SPM) family
STM (Tunneling) SFM (Force)
Scanning ThermalMicroscope (Local
Temperature)
STS,STP,ScanningElectrochemical
Microscope
Scanning Near FieldOptical Microscope(Optical imaging)
Atomic ForceMicroscope (AFM)
Lateral Force (LFM)
Magnetic Force
(MFM)
Electrostatic Force
(EFM)
C-AFM
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Scanning Force Microscope
It is nothing but a spring balance (the cantilever)
that is scanned over a surface.
The cantilever is the precision force detectionelement- we can detect atomic forces
Type of force of interaction between the tip andsubstrate will determine what we are measuring andthe mechanism that makes the contrast.
How large are the atomic forces and can we reallydetect them by a cantilever that is much larger?
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How big is the Atomic Force
The atomic spring constant
What is the value of the springconstant of the bond connecting to
atoms ?
2 keff/M
- Is typically in IR range for atomic vibration
~ 1013 - 1014cps, M ~ 5 x 10-26 Kg,
keff= 2
M ~5 x (1-102
) N/m
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3
3
Et wk =
4L
1 kf =
2 m*
One can make a cantilever as a force measuring elementthat can have the same order of k as that of a molecule.
w
L L
Si elastic modulus (E)[111] Young's modulus= 185GPa
[110] Young's modulus=170 GPa
[100] Young's modulus= 130 Gpa
Si3N4~300 Gpa
For a Si cantilever :
t = 5m, w= 20 m, L= 200 mk=10N/m
It can be softer than atomic
spring constant
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L2
b
w
L1
t: thickness
m*~0.24(mass of the cantilever)
3 3 3
3
1 2 2
Et wbk =2b(L -L ) + 6wL
Engineering cantilevers with different springconstant k- need for different applications
Advantages:
1.Less prone to vibrationalnoise.
2. Can go to lower k orresonance frequency.
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Estimated radius of curvature of the tip Rt ~ 30 nm
Kc=0.1 N/m
Tip
Engineering cantilevers with different springconstant k-a real triangular cantilever
Much softer than an
atomic spring !!!!
Cantilever
What ever you do with SFM,the cantilever is the key.
You need to know it.
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Some feeling for numbers
We have a cantilever as a force measuring element.F = k.
If I want to measure F=1nN, k=1N/m. I should beable to measure a displacement =1 nm.
Entering the world of nano
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At the heart of all scanning probe microscope is thecantilever with a tip.
How we position the tip?How we scan the tip?How we measure deflection of the cantilever?
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Demystifying AFM-A simple AFM(Home made)
Laser
QPD
Inertial drive piezo
Scan Piezo
Electronics
L. K. Brar, Mandar Pranjape,Ayan Guha and
A.K.RaychaudhuriDesign and development of
the scanning forcemicroscope for imaging and
force measurement with
sub-nanonewtonresolution
Current Science , 83,1199 (2002) X-Y micrometer stage
h i f
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Schematic of SFM
DEFLECTION
SENSOR
FEEDBACK
LOOP
CANTILEVER
Z-PIEZO
PROBE
TIP
COMPUTER
XY-PIEZO SCANNER
Keeps cantileverdeflection or oscillation
amplitude constant
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Practical Considerations for AFM/SFM
1. Cantilever deflection detection system.
2. Type of cantilevers that can be used.3. Coarse and fine approach mechanism.4. No net relative motion between sample, cantilever and
detection system.
5. Scanner range and type of encoder for large sizescanner.6. Data acquisition system ,processing and display
software.7. Accessibility to all the parts of the SFM and capability of
using image processing software on stored data.
Where do the SPM sold by different vendors
differ?
B i h ti f SPM
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Scanner
Feedback
A-B
Pre-Amplifier
A B
Quadrant
Photo Detector
Tip &
Cantilever
Basic schematic for SPM
To Z-Piezo
Laser
ADC
DAC
Need for
calibration
Keeping something
constant, need for feed back
X-Y scanner
Z-scanner
Coarse approach vs fine approach
Pixels
bits
PID
C lib i f i f SFM i i l
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Calibration of scanning stage of SFM using commercial2-D grating
The grating has 2160 lines/mm
1000m/2160=0.46mThe calibration: 40nm/V
Brar et.al
(2002)
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Topography
Can take care of
image distortion
Arranging spheres of PS in an array by self-assembly
Sub 500nm level calibration, works fine to 20nm
Can find the size by Electron microscope or DLS
Soma Das
(2008)
C lib ti i t i
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Mica
Freshly cleaved
7 nm x 7 nm
Calibration in atomic range-A freshly cleaved surface
Can we assume a linear calibration ?
The piezo -scanner is non-linear and
has hysteresis
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Other calibrations:Z-Calibration- large scale vs small scale
Force calibration-detection of exact k?
O ti l h d d D t ti l t i f i
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Optical head and Detection electronics for scanning
Scanner
Feedback
A-B
Pre-Amplifier
A B
Quadrant
Photo Detector
Tip &
Cantilever
To Z-Piezo
Laser
ADC
DAC
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Optical lever =
= 500 -100(for l=100mm)
L(Length of the laser path)
l(Length of the cantilever)
Main components of the optical
stage:
1. Laser diode
2. Cantilever
3. Quadrant photo-detector (QPD)
4. Collimating lenses5. Mirror
QPD is used as a position
sensitive detector, its output
signal is proportional to the
position of the laser spot.
Why we need smaller cantilever ?
C lib ti f th ti l t
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Calibration of the optical stage.
0 1 2 3
-2
0
2
A-B(V)
Z-displacement(cm)
Region of Gradient: 1000m
Detects 4V for 1000m movement
1mV electrical noise , positional reolution~1/4m
Using optical lever of 100, we can detect cantilever deflectionof ~ 1/400 m=2.5 nm.
Source of noise in AFM
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Atomically resolved steps in Ti terminated SrTiO3substrate-reaching the limits
Size of step (1/2 unit cell) ~0.38nm
Courtesy Dr. Barnali Ghosh.
Taken in CP-II
Resolution from optical detection
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Resolution from optical detection
0 1 2 3
-2
0
2
A-B(V)
Z-displacement(cm)
Region of Gradient: 1000m
Detects 4V for 1000m movement, 1mV electrical noise~1/4m.
Reduce noise to 0.1 mV,
Using optical lever of 100, we can detect cantilever deflection
of ~ 1/4000 m=0.25 nm.
Often it is good to have acantilever tip rest on asurface and record the
output as a function of time
We have the base responseof the QPD, need to enhance
optical lever and reduceelectrical noise to get better
resolution
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Quadrant photo-detectors
Why use 4 quadrant detector ?
Vertical deflection of cantilever-Topography
Lateral deflection of cantilever-
Lateral Force Microscopy (LFM)
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Thermal Noise limited resolution
If k is reduced the force sensitivity is increased
Cantilever displacement = Force/k
K ~ 0.1N/m , displacement of 1nm will come from aforce of 100pN
Does any thing limit us ?
Yes it is the thermal noise.
It can be very high for soft cantilevers (those withvery small k)
Th l N i li i d l i
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Thermal Noise limited resolutionFor any oscillatory system we can apply
Equi-partition theorem
2/12/1
2
2*2
2*2
,,
2
1
k
Tkz
Vmzksystemharmonic
VmzkTk
B
B
For a 0.1N/m cantilever the thermal noise inducedroot mean-square amplitude 0.14 nm.For a deflection of 1nm of the cantilever it is asubstantial amount.
Force uncertainty~(10014)pN
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I have discussed some of the basic concepts of theSFM and the main components that go with it and
their functions as well as limitations.
Cantilevers and force detection, Scanner
calibrations, Optical detections and sources ofnoise
It will be best if your reflect upon your experienceof using SFM and connect to this presentation
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Cantilever Statics and Dynamics
The different modes of SPM
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Source: PhD thesis Soma Das , SNBNCBS
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Statics and Dynamics of cantilever
Interaction between the tip and the substrate willdecide the nature of force and hence the statics and
dynamics of the cantilever
Tip sampleinteraction model
D i f til
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Dynamics of cantilever
Any force velocity willadd to damping andreduce amplitude of
vibration-dissipation
Any force displacement will change
the frequency ofvibration
Different types of force microscopy depends onthe dynamics of cantilever and the mode of
detection
tjFekzdtdz
dtzdm 2
2
Simple ball and spring model
Driving term
for dynamicmode
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Static mode (contact mode)
AFM
tjFekz
dt
dz
dt
zdm
2
2
Fkz=0
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Static mode:
Mostly for contact-mode the cantilever deflection
is such that the bending force is balanced by theforce of interaction:
F(z) =-U/z=-k.z
U = Total energy that includes the surface as well aselastic deformation energy.
26)(
z
HR
zf
tTS
5.10
0
)( )(*3
4
62
zaREa
HRf t
tzTS
a0~Atomic dimension (hard sphere)
E*~ Effective elastic constant
Rt- Tip radius of curvature.
H=Hamakar cosntant
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26
)(z
HRzf tTS
5.10
0
)( )(*3
4
62
zaREa
HRf t
tzTS
Elastic force winsover. The deformation
of the surface shouldbe larger than thefeatures you would
like to see
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Si tip pressingon Si substrate
One can evaluatethe contact radius
Herzian contact
The contact areadepends on Elastic
modulus
A th b l t l t til i t t
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A thumb rule to select cantilever in contactmode imaging
Cantilever touching a surface is like two springsconnected back to back, The force applied isbalanced by displacement
The softer spring wins
substratecantilevereff
eff
appl
substrate
appl
cantilever
appl
substratecantilevertotal
kkk
kF
kF
kF
111
.
A th b l t l t til i t t
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A thumb rule to select cantilever in contactmode imaging
A surface with mixed k (elastic constants) like acomposite of soft and hard matter will not image thetopography. What you image is actually a mixtureof both
substratekeffkcantileverksubstratek
cantileverk
effk
cantileverk
substratek
,
,
Correctcondition fortopography incontact mode
The softer spring wins
Will image theelasticallydeformed surface
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Some tips for good contact mode imaging
Get a soft cantilever that is realistically needed.
Do a force spectr0scopy (F-d) curveHave some idea about the elastic modulus of the
surface you image.
For soft materials when you cannot have verysoft cantilever use LFM
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ODT self-assembled monolayer on Ag
Sai and AKR, J.Phys.D Appl. Phys. 40, 3182 (2007)
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Some useful applications of
contact mode AFM
Force spectroscopy
Piezo-force spectroscopy
Conducting AFM
Local charge measurements
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tj
Fekxdt
dx
dt
xdm
2
2
Dynamic mode
Driving force
Controlled byexperimenter
Force of interaction oftip with substrate and
surrounding
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Dynamic mode (all non-contact modes):
Cantilever is modulated at resonance frequency and
the shift in resonance frequency , phase oramplitude measures the force gradient
-F/z=-k+(2U/z2)
2)(6
))((tz
HRtzf tTS
5.10
0
))(( ))((*3
4
62
tzaREa
HRf t
ttzTS
i d h d d
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Dynamic mode -what do we do ?
Oscillate the cantilever at close to resonance
frequency
Interaction with the substrate will change theresonance frequency and /or amplitude of
oscillation (through the viscous force on thesurface)
Detect the departure from resonance or damping
detected by amplitude, phase or frequency shift asthe cantilever scans the surface
This leads to contrast and the imaging
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Dynamics of cantilever
22222
0
0
22222
0
22
00
0
2
2
)(
)/)(()Im(
)(
))(/()Re(
)(
mFz
mFz
eztz
Fekzdt
dz
dt
zd
m
j
tj
In dynamic mode spectroscopy the resonance curve
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In dynamic mode spectroscopy the resonance curveand its modifications during imaging provides the
image
what happens to resonance frequency in dynamic
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what happens to resonance frequency in dynamicmode when there is additional force
z
Uf
z
fk
z
Ukkeff
,)( 02
2
0
eff
omk0Start with a cantilever that is free
Shift in resonance frequency when the interaction is turned on
eff
effeffeff
eff
m
f
m
f
m
f
m
k
2
0
'
0
'
0
20
'
0
'
2
0
'
0
2
1
2
11
Force derivative is theimportant parameter in
dynamic mode
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NC
Tapping
55
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Force Derivative
NC
Tapping
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Two paradigms of dynamic mode
Detection by amplitude modulationIf the resonant frequency of a cantilever shifts, then theamplitude of cantilever vibration at a given frequencychanges. Near a cantilevers resonant frequency, this changeis large.
Non-contact (tip does not touch the substrate,) -This also encompasses the EFM and MFM.
Tapping or IC mode (the tip touches the surface atsome part of the swing)
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The set frequency is somewhat larger than the freeresonance frequency.
Non-contact
IC/tapping-mode
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The set frequency is somewhat smaller than the free
resonance frequency.
F i l ti f d t h t h t th
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From simulation of data-what happens to theresonance curve in Tapping mode
Das, Sreeram,AKR , Nanotechnology 18, 035501 (2007),Nanotechnology21, 045706 (2010),Journal of Nanoscience and Nanotechnology 7, 2167
(2007)
Sample: MicaK= 0 68N/m
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-1.0 -0.5 0.0 0.5 1.0 1.5 2.00.000000000
10.000000475
20.000000950
30.000001425
40.000001900
50.000002375
60.000002850
70.000003325
80.000003800
Sample:Mica
Amplitude(nm)
Tip-sample separation (m)
approach(41nm)
retract(41nm)
approach(70nm)
retract(70nm)
approach(90nm)
retract(90nm)
Amplitude vs. distance curves for mica for three different free vibration amplitude of
the cantilever.
K= 0.68N/mResonance Frequency = 86KHz
61
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Amplitude vs Height
(in absence of feedback)
Application of Non contact mode
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Application of Non-contact mode
Magnetic Force Microscopy
MFM
Measuring long-range force
Any force that decays slower than
inverse square
26
)(z
HRzf tTS
2,)( nz
Azf
nlong
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26
)(z
HRzf tTS
This mode is realized by employing suitable probes
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This mode is realized by employing suitable probes(magnetic tip) and utilizing their specific dynamicproperties.
MFM is an important analytical tool whenever thenear-surface stray-field variation of a magneticsample is of interest.
MFM can be used to image flux lines in low- andhigh-Tc superconductors . MFM have evenextended local detection of magnetic interactions
to eddy currents and magnetic dissipationphenomena .
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The interpretation of images acquired bymagnetic force microscopy requires some basicknowledge about the specific near-fieldmagnetostatic interaction between probe andsample.
How to take care of the topography ???
The magnetic stray field produced by a magnetized
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g y p y gmedium and the contrast mechanism
effm
F2
0
'
0
'
0
2
1
The shift in frequency the
MFM detects is the gradient
of the magnetic force
Magnetic Force Microscopy of hard disk
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g py
(No applied field)
MFM maps themagnetic domains on
the sample surface
Stored data in a
hard disk
The stray field is maximumwhen the anisotropy is
perpendicular
Magnetic Force Microscopy (with applied field)
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g py ( pp )
Requirements for MFM tips
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Requirements for MFM tipsThese tips can be coated with a thin layer of magneticmaterial for the purpose of MFM observations.
A lot of effort has been spent on the optimization ofmagnetic tips in order to get quantitative information fromMFM data .
The problem is that in the coating of conventional tips, apattern of magnetic domains will arrange, which reducesthe effective magnetic moment of the tip. The exact domainstructure is unknown and can even change during MFM
operation.Best tip is the one that has a single mono-domainmagnetic particle !!!!!
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Lorentz Microscopy of fieldaround a tip
Effect of tip sharpness
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Stray field line scan
Observed
Simulated
Ordinary tip Mono-domain
tip
In SFM , what ever you do the most significant
role is played by the tip and the cantilever
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I have tried to give a basic introduction to SFM andsome of its different modes and shared my
experience with you.SFM images are not just picture gallery
The more knowledge you acquire and morequantitative you become you can get more value
from your SFM.
Thank you