S e r i e s Reference Manual Precision Piezo Stage (Open and Closed Loop Versions) PPS-20
S e r i e s
Reference ManualPrecision Piezo Stage
(Open and Closed Loop Versions)
PPS-20
PPS-20 Piezo Positioner Stage
Reference Manual Rev 3.10
MICRONIX USA, LLC
15375 Barranca Parkway, E-106
Irvine, CA 92618
Tel: 949-480-0538
Fax: 949-480-0538
Email: [email protected]
http://micronixusa.com
PPS-20 Piezo Positioner Stage
1
Rev: 3.10
MICRONIX USA,LLC Irvine, California
www.micronixsusa.com
Reference Manual
Contents 1. Introduction 2
1.1 Product Description ....................................................................................................................................................................................... 2 1.2 Recommended Controllers ............................................................................................................................................................................ 3 1.3 Technical Data ............................................................................................................................................................................................... 3 1.4 Load Characteristics ...................................................................................................................................................................................... 3
2. Model Configurations 4 2.1 PPS-20 Order Numbers ................................................................................................................................................................................. 4
3. Preparing to Install the PPS-20 5 3.1 Installation Preparation ................................................................................................................................................................................. 5 3.2 Package Contents .......................................................................................................................................................................................... 5
4. Installing the PPS-20 6 4.1 PPS-20 Installation ......................................................................................................................................................................................... 6
4.1.1 General Mounting ................................................................................................................................................................................ 6 4.1.2 X-Y Mounting ....................................................................................................................................................................................... 7
5. Connecting the PPS-20 7 5.1 Atmospheric Environments ........................................................................................................................................................................... 7
5.1.1 Open Loop Installation & Wiring Diagram ........................................................................................................................................... 7 5.1.2 Closed Loop/Encoder Installation & Wiring Diagram .......................................................................................................................... 8
5.2 Vacuum Environments .................................................................................................................................................................................. 9 5.2.1 Handling and Preparation .................................................................................................................................................................... 9 5.2.2 Open loop Installation & Wiring Diagram ............................................................................................................................................ 9 5.2.3 Closed Loop/Encoder Installation & Wiring Diagram .......................................................................................................................... 9
6. Dimensions 11 6.1 PPS-20 with Digital Encoder ........................................................................................................................................................................ 11 6.2 PPS-20 with Analog Encoder ....................................................................................................................................................................... 11
7. Stacking Configurations 13 7.1 Configurations Examples ............................................................................................................................................................................. 13
8. Supplementary Information 14 8.1 Maintenance ............................................................................................................................................................................................... 14 8.2 Units and Conventions ................................................................................................................................................................................ 14
A. Appendix 15 A.1 DB-9 Standard Male Motor Connector........................................................................................................................................................ 15 A.2 2 Phase Piezo Motor Wiring Diagram .......................................................................................................................................................... 15 A.3 Open Loop Vacuum Wiring Diagram ........................................................................................................................................................... 16
A.3.1 Straight Through 9-Pin Feed Through ................................................................................................................................................ 16 A.4 Using the Digital Encoder Module ............................................................................................................................................................... 17
A.4.1 Encoder Module Pin-out .................................................................................................................................................................... 17 A.4.2 Operating and Electrical Specifications.............................................................................................................................................. 18 A.4.3 Output Signals & Signal Termination for A quad B, Index and limits ................................................................................................. 18 A.4.4 Resolution .......................................................................................................................................................................................... 18 A.4.5 Digital Encoder Wiring Diagram ......................................................................................................................................................... 19 A.4.6 Straight Through 25-Pin Feed Through .............................................................................................................................................. 19
A.5 Using an Analog Encoder ............................................................................................................................................................................. 20 A.5.1 Analog Encoder Overview .................................................................................................................................................................. 20 A.5.2 Encoder Pin-out ................................................................................................................................................................................. 20 A.5.3 Operating and Electrical Specifications.............................................................................................................................................. 20 A.5.4 Analog Output (Pins 1,2,6, and 7) ...................................................................................................................................................... 20 A.5.5 Index Window (Pins 3) ....................................................................................................................................................................... 20 A.5.6 Resolution .......................................................................................................................................................................................... 21 A.5.7 Analog Encoder Wiring Diagram ........................................................................................................................................................ 21 A.5.8 Straight Through 15-Pin Feed Through .............................................................................................................................................. 21
PPS-20 Piezo Positioner Stage
2
Rev: 3.10
MICRONIX USA,LLC Irvine, California
www.micronixsusa.com
Reference Manual
1. 0BIntroduction
1.1 Product Description
The PPS-20 is a high-precision, long travel linear piezo stage. Miniature cross-roller
bearings assure high stiffness and guiding accuracy for loads up to 20N
(Horizontal orientation). It utilizes our patent-pending multi-phase piezo motor
resulting in high speed (>2mm/s) and high blocking force (>2N). The PPS-20 is
available in travel lengths of up to 50mm, and an optional linear encoder
provides nanometer repeatability. Vacuum, Ultra High Vacuum (10-9 torr) and/or
Cryo (<4 Kelvin) compatible versions are available.
Features:
Travel ranges of 11mm, 18mm, 26mm, 38mm, and 51mm
Load capacity up to 2kg
Optional linear encoder
Bearings
PPS-20 20mm Open Loop
(Shown in center position)
Carriage
Base
Encoder Bracket
Scale Bracket
Encoder Head
Encoder Bracket
Scale Bracket
Encoder Head
PPS-20 20mm Closed Loop
with 2nm digital encoder
(Shown in center position)
PPS-20 20mm Closed Loop
with 10nm Analog encoder
(Shown in center position)
PPS-20 Piezo Positioner Stage
3
Rev: 3.10
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www.micronixsusa.com
Reference Manual
1.2 Recommended Controllers
The following controllers are available from MICRONIX USA for piezo stages:
MMC-100
MMC-110
1.3 Technical Data
Motor PM-002
Speed Max. (mm/sec) 2 (MMC-100), 10(MMC-110)
Resolution Typical (nm) <1 (open loop), 2 (digital encoder),
10 (analog encoder)
Bi-directional Repeatability (nm) N/A (open loop), ± 20 (digital encoder),
±50 (analog encoder)
Uni-directional Repeatability (nm) N/A (open loop), 20 (digital encoder),
50 (analog encoder)
Accuracy (µm) +/- 3 (+/- 1 on request)
1.4 Load Characteristics
Load Characteristics Fx(N) Fy(N) Fz(N) Mx(Nm) My(Nm) Mz(Nm)
PM-002 2 20 20 0.7 0.7 0.7
PPS-20 Piezo Positioner Stage
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Rev: 3.10
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Reference Manual
2. 1BModel Configurations
2.1 13BPPS-20 Order Numbers
Contact MICRONIX USA for custom applications and stacking configurations.
Order No. PPS-20- 1 0
Piezo Motor PM-002 1
12mm Travel 1
18mm Travel 2
26mm Travel 3
51mm Travel 5
Open Loop 0
Analog (1Vpp), 10nm 2
Digital Encoder, 2nm 3
No Limit Switch 0
Non-vacuum 0
Vacuum prepared, 10-6 mbar 6
Vacuum prepared, 10-9 mbar 9
PPS-20 Piezo Positioner Stage
5
Rev: 3.10
MICRONIX USA,LLC Irvine, California
www.micronixsusa.com
Reference Manual
3. 2BPreparing to Install the PPS-20
3.1 14BInstallation Preparation
When mounting the stage it is important to consider the flatness of the mounting
surface, as the stage will conform to the shape of that mounting surface. A
surface that is not flat can adversely affect the performance and structural
integrity of the stage.
The stage is calibrated and guaranteed to be within specification at 20°C ±5°C
unless otherwise specified. Be sure to use the stage under the following
conditions:
Mount to a clean and flat surface which is free of debris, burrs or dings
An indoor atmosphere free of corrosive gases, excessive dust, and
condensation
Temperature range of 0-40°C
Relative humidity between 20-80%
Locate away from water, heat, and electrical noise
3.2 15BPackage Contents
If product is damaged or there are missing components, contact MICRONIX USA
immediately. Do not discard product packaging in case of return shipment.
Package Should Contain:
PPS-20 Linear Stage
Reference Manual
Any other previously agreed upon components such as a controller
PPS-20 Piezo Positioner Stage
6
Rev: 3.10
MICRONIX USA,LLC Irvine, California
www.micronixsusa.com
Reference Manual
4. 3BInstalling the PPS-20
All mounting patterns require M2 screws for mounting and M1.5 x 5mm dowel
pins for precision alignment. Additional brackets and screws may be needed for
custom applications.
4.1 16BPPS-20 Installation
4.1.1 28BGeneral Mounting
For general mounting configurations, mount the base to the mounting surface.
Align carriage with clearance holes to access base mounting pattern. (Please
note, it is possible to move the carriage manually without damaging the stage)
Travel A B
12mm 20 16
18mm 30 16
26mm 40 36
51mm 80 50
Requires:
2x M1.5 x 5mm Dowel Pins
2x M2 x 5mm Socket Head Cap Screws
(optional) 2x M2 x 5mm Socket Head Cap
Screw for ear mounts
2. Align carriage with a
clearance hole and install an
M2 Socket Head Cap Screw
Direction
of Travel
Clearance Hole
Optional Side
Mounting screws
Customer Supplied
Base Plate or
Mounting Surface
1. Align carriage with remaining
clearance hole and install
second M2 Socket Head Cap
Screw
Optional Ear
Mount Screws
PPS-20 Piezo Positioner Stage
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Rev: 3.10
MICRONIX USA,LLC Irvine, California
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Reference Manual
4.1.2 29BX-Y Mounting
For X-Y mounting, follow the instructions for mounting the X-axis stage, outlined in
section 4.1.1 General Mounting, then proceed to mount the Y-axis stage, as
shown below(Please note, It is possible to move the carriage manually without
damaging the stage):
Note: For stages assembled in an XY configuration in factory do not require disassembly for
base mounting
5. 4BConnecting the PPS-20
5.1 17BAtmospheric Environments For controller information refer to the appropriate MMC controller manual.
5.1.1 30BOpen Loop Installation & Wiring Diagram
Connecting the PPS-20 in an open loop configuration only requires that the D-
sub 9 Pin male Motor Cable be connected to a compatible controller. No other
cables or components are needed.
Requires:
2x M1.5 x 4mm Dowel Pins
4x M2 x 4mm Socket Head Cap Screws
2. Align Carriage with remaining
clearance hole and install second
M2 Socket Head Cap Screw
1. Align Y- Axis Stage Carriage with
Clearance Hole. Install M2 Socket
Head Cap Screw
Direction
of Travel
Y-Axis Stage
PPS-20 Piezo Positioner Stage
8
Rev: 3.10
MICRONIX USA,LLC Irvine, California
www.micronixsusa.com
Reference Manual
5.1.2 31BClosed Loop/Encoder Installation & Wiring Diagram
Using the PPS-20 stage with an encoder requires a closed loop compatible
controller (MMC-100 or MMC-110) that recognizes encoder feedback. Connect
the stage as shown below.
5.1.2.1 Analog Encoder Wiring Diagram
5.1.2.2 Digital Encoder Wiring Diagram
For a PPS-20 with a digital encoder, connect the stage as shown below
using the supplied 15 to 9 pin cable to connect the Encoder Module to
the Controller.
PPS-20 Piezo Positioner Stage
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Rev: 3.10
MICRONIX USA,LLC Irvine, California
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Reference Manual
5.2 18BVacuum Environments
5.2.1 32BHandling and Preparation
When preparing the stage for vacuum environments, take the necessary
precautions (such as wearing gloves, clean room clothing, etc.) when handling
the stage as to avoid any contaminants. Maximum Bake-out temperature is
100°C. MICRONIX USA supplies the stage with vacuum compatible connectors:
9-pin female PEEK connectors for open loop, 15-Pin female PEEK connector for
closed loop with analog encoder, 25-pin female PEEK connector for closed loop
with digital encoder.
5.2.2 33BOpen loop Installation & Wiring Diagram
Connecting an open loop PPS-20 in a vacuum chamber requires the use of a
feed through connector at the vacuum chamber wall. The vacuum compatible
PPS-20 will be supplied with wiring for a straight through feed through not a cross
over gender changer. MICRONIX USA supplies test connectors that simulate the
vacuum feed through to allow functionality test prior to installation in a vacuum
chamber. For details regarding the pin-out and feed through specifications see
the Appendix A.3.
5.2.3 34BClosed Loop/Encoder Installation & Wiring Diagram
Closed loop installation of the PPS-20 stage in vacuum environments requires an
intermediate feed through connector at the vacuum chamber wall that can
accommodate both the motor cable, and the encoder cable.
The vacuum compatible PPS-20 will be supplied with wiring for a straight through
feed through not a cross over gender bender. MICRONIX USA supplies test
connectors that simulate the vacuum feed through to allow functionality test
prior to installation in a vacuum chamber. For details regarding the pin-out and
feed through specifications see the Appendix A.4.5, A.5.5.
PPS-20 Piezo Positioner Stage
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Rev: 3.10
MICRONIX USA,LLC Irvine, California
www.micronixsusa.com
Reference Manual
5.2.3.1 Analog Encoder Wiring Diagram
5.2.3.2 Digital Encoder Wiring Diagram
PPS-20 Piezo Positioner Stage
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Rev: 3.10
MICRONIX USA,LLC Irvine, California
www.micronixsusa.com
Reference Manual
6. 5BDimensions
6.1 19BPPS-20 with Digital Encoder
L Travel A B C D E
20 12mm 6 1 2 15 16
30 18mm 6 1 2 25 16
40 26mm 10 3 6 35 36
80 51mm 18 7 14 75 36
* Grey parts for external closed loop
only
PPS-20 Piezo Positioner Stage
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Rev: 3.10
MICRONIX USA,LLC Irvine, California
www.micronixsusa.com
Reference Manual
6.2 20BPPS-20 with Analog Encoder
7.
L Travel A B C D E
20 12mm 6 1 2 15 16
30 18mm 6 1 2 25 16
40 26mm 10 3 6 35 36
80 51mm 18 7 14 75 36
* Grey parts for external closed loop
only
PPS-20 Piezo Positioner Stage
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Rev: 3.10
MICRONIX USA,LLC Irvine, California
www.micronixsusa.com
Reference Manual
6BStacking Configurations
7.1 Configurations Examples (Additional Configurations available upon request)
Using Z-Adapter (P/N: 430509)
X-Y X-Y
No carriage X-Y
Back to back
X-Y
18mm-12mm
X-Y
18mm (no carriage) -12mm
X-Y (back to back)
38mm (X-Axis) – 26mm (Y-Axis)
X-Y
PPS-28
PPS-20 XYZ
X-38mm, Y-18mm, Z-26mm X-Y-Z X-Y-Z
PPS-20 Piezo Positioner Stage
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Rev: 3.10
MICRONIX USA,LLC Irvine, California
www.micronixsusa.com
Reference Manual
8. 7BSupplementary Information
8.1 21BMaintenance
The PPS-20 series of linear piezo stages utilizes a maintenance free design. Do not
modify the stage or perform any maintenance unless specifically instructed to do
so by MICRONIX USA personal. If the stage is not performing up to the original
specifications, please contact MICRONIX USA.
The PPS-20 linear piezo stage is a precision mechanical device and
should be handled with care. Do not drop or mishandle the stage.
Do not touch the bearings, as this will contaminate the lubrication and jeopardize
the longevity of the stage.
Follow the Installation Preparation requirements and use proper cable
management to ensure a clean and safe operating environment.
8.2 22BUnits and Conventions
All measurements in this document are in the metric system of units.
Metric Unit English Unit
1 millimeter 0.0394 inches
1 micron 0.0000394 inches
1 Newton 0.2248 lbs
1 Newton-meter 8.85 in-lbs
PPS-20 Piezo Positioner Stage
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Rev: 3.10
MICRONIX USA,LLC Irvine, California
www.micronixsusa.com
Reference Manual
A. 8BAppendix
A.1 DB-9 Standard Male Motor Connector
A.2 24B2 Phase Piezo Motor Wiring Diagram
Pin Description Color
1 Phase 1 Red
2 Phase 2 Yellow
3 N/C N/C
4 Not In Use N/C
5 Ground Black& Green
6 N/C N/C
7 N/C N/C
8 N/C N/C
9 Ground N/C
X-Y-Z
PP-22
PPS-20 Piezo Positioner Stage
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Rev: 3.10
MICRONIX USA,LLC Irvine, California
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Reference Manual
A.3 25BOpen Loop Vacuum Wiring Diagram
A.3.1 35BStraight Through 9-Pin Feed Through
PPS-20 Piezo Positioner Stage
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Rev: 3.10
MICRONIX USA,LLC Irvine, California
www.micronixsusa.com
Reference Manual
A.4 26BUsing the Digital Encoder
Module
When using the digital external encoder
configuration, the Encoder Module
should display two green LED’s
indicating a power source and proper
encoder alignment. A Red or Yellow
Signal Level LED indicates misalignment
of the Encoder Head, if this occurs
contact MICRONIX USA. Do not adjust
the Encoder Head or scale. For more
information refer to MicroE Systems
Mercury Encoders.
A.4.1 36BEncoder Module Pin-out
*-Limits must be specified at the time of order, and
calibrated at the factory.
Note: Tri-state alarm: A and B are tri-stated if the encoder
signal becomes too low for reliable operation.
Pin Description Pin Description
1 *Right Limit+ 9 Ground
2 Ground 10 *Left Limit+
3 *Right Limit- 11 *Left Limit-
4 Index- 12 Index+
5 B- 13 B+
6 A- 14 A+
7 +5V 15 (not used)
8 +5V
PPS-20 Piezo Positioner Stage
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Rev: 3.10
MICRONIX USA,LLC Irvine, California
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Reference Manual
A.4.2 37BOperating and Electrical Specifications
A.4.3 38BOutput Signals & Signal Termination for A quad B, Index and limits
*Output signals are differential. Inverse signals are not shown for clarity.
**Note: At some interpolations values the index pulse may be aligned with other states of A or B
than the ones shown.
***Above are with reference to the sensor’s optical centerline
A.4.4 39BResolution
All closed loop stages are supplied with 20µm scales. The digital encoder
module interpolates to a higher resolution as specified in the order. With a
digital encoder the MMC-100 has an achievable resolution of 2nm.
Power Supply 5VDC ±5% @ 140mA (No outputs terminated)
@ 180mA (A, B, I, and both limits
terminated); 50mA at the sensor
Operating Temperature 0 to 70°C
Humidity 10 - 90% RH non-condensing
PPS-20 Piezo Positioner Stage
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Rev: 3.10
MICRONIX USA,LLC Irvine, California
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Reference Manual
A.4.5 Digital Encoder Wiring Diagram
A.4.6 41BStraight Through 25-Pin Feed Through
A
C
D
E
BJ1
J2 J3J4
J5 J6
J7 J8
Standard Cable Descriptions:A. PPS-20 Motor Cable - Vacuum Side (Female Dsub 25 Pin Peek Connector, 1.5m, Silver Braided Cable)
B. PPS-20 Encoder Cable - Vacuum Side (Female Dsub 25 Pin Peek Connector, 1.5m, Silver Braided Cable)C. Encoder Module Breakout Cable (Female Dsub 25 Pin to MII 6000 Interpolator Module, 1m, Black Cable)D. Motor Breakout Cable (Female Dsub 25 Pin to Male Dsub 9 Pin, 1.5m, W hite Cable)E. Encoder Module Adapter Cable (Female Dsub 15 Pin to Female Dsub 9 Pin, .5m, W hite Cable)
Description: Color J1 J2 J3 Color J4 J7
Phase 1 Red 1 1 13 Red 13 1Phase 2 Yellow 2 2 12 W hit e (Green TP) 12 2Ground Black/Green 14 14 25 Black/Green 25 5
Shield - 15 15 24 - 24 Cas ing
+ 5VDC Red 4 4 10 Red 10
GND Black 17 17 22 Black 22DCLK - Gray 5 5 9 Gray 9
DCLK + W hit e (Gray TP) 18 18 21 W hit e (Gray TP) 21M I SO - Violet 6 6 8 Violet 8M I SO + W hit e (Violet TP) 19 19 20 W hit e (Violet TP) 20
M OSI - Blue 7 7 7 Blue 7M OSI + W hit e (Blue TP) 20 20 19 W hit e (Blue TP) 19
nSS - Green 8 8 6 Green 6nSS + W hit e (Green TP) 21 21 18 W hit e (Green TP) 18CLK - Brow n 9 9 5 Brow n 5
CLK + W hit e (Brow n TP) 22 22 17 W hit e (Brow n TP) 17Shield - 16 16 23 - NC
Female PEEK Dsub25 Connect or - Rear View
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Wiring Diagram:
Description: J5 Color J6 J8I ndex - 4 W hit e (Purple TP) 4 8B - 5 W hit e (Yellow TP)5 7
A - 6 W hit e (Brow n TP) 6 6+ 5VDC 7 Red 7 5
Ground 2 Black 2 4I ndex + 12 Purple 12 3B + 13 Yellow 13 2
A + 14 Brow n 14 1
12345
6789
Male Dsub9 Connect or - Rear View
54321
9876
Female Dsub9 Connect or - Rear View
PPS-20 Piezo Positioner Stage
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Rev: 3.10
MICRONIX USA,LLC Irvine, California
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Reference Manual
A.5 27BUsing an Analog Encoder
A.5.1 42BAnalog Encoder Overview
A PPS-20 with Analog encoder will need to be paired with an appropriate controller.
The MMC-100 has an Analog option. The PPS-20 with an analog encoder will be
supplied with a 15 pin connector that incorporates both motor and encoder signals.
A.5.2 43BEncoder Pin-out
Pin Color Description
1 Brown Cos+
2 Yellow Sin+
3 Violet Index +
4 Black Ground
5 Red +5V
6 Orange Cos-
7 Green Sin-
8 Blue Index -
9 Not in Use Not In Use
A.5.3 Operating and Electrical Specifications
A.5.4 Analog Output (Pins 1,2,6, and 7)
A.5.5 Index Window (Pins 3)
Power Supply 5VDC ±5% @ 330mA (60mA for sensor)
Operating Temperature 0 to 70°C
Humidity 10 - 90% RH non-condensing
PPS-20 Piezo Positioner Stage
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Rev: 3.10
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Reference Manual
A.5.6 47BResolution
All closed loop stages are supplied with 20µm scales. The interpolation is done
in the MMC-100 to a higher resolution as specified in the order. With an
analog encoder the MMC-100 has an achievable resolution of 10nm.
A.5.7 Analog Encoder Wiring Diagram
A.5.8 49BStraight Through 15-Pin Feed Through
Wiring Diagram:
AC
DB
J1J2 J3
J4
J6J5
Description: Color J1 J2 J3 Color J4 J5 J6Phase 1 Red 1 1 8 Red 8 1
Phase 2 Yellow 2 2 7 W hit e (Green TP) 7 2Ground Black/Green 9 9 15 Black/Green 15 5Shield - 10 10 14 - 14 Cas ing
GND Black 8 8 1 Black 1 4Cos+ Brow n 7 7 2 Brow n 2 1
+ 5V Red 6 6 3 Red 3 5Cos- Orange 5 5 4 W hit e (Brow n TP) 4 6
Sin+ Yellow 4 4 5 Yellow 5 2Sin- Green 12 12 12 W hit e (Yellow TP)12 7I ndex- Blue 13 13 11 Violet (W hit e TP) 11 8
I ndex+ Violet 14 14 10 Violet 10 3Shield - 15 15 9 - 9 Cas ing
Cable Descriptions:A. PPS-20 Encoder Cable - Vacuum Side (Female Dsub 15 Pin Peek Connector, 1.5m, Silver Braided Copper Cable)B. PPS-20 Motor Cable - Vacuum Side (Female Dsub 15 Pin Peek Connector, 1.5m, Silver Braided Copper Cable)C. Encoder Cable (Female Dsub 15 Pin to Female Dsub 9 Pin, 1.5m, White Teflon Cable)D. Motor Cable (Female Dsub 15 Pin to Male Dsub 9 Pin, 1.5m, W hite Teflon Cable)
Female PEEK Dsub15 Connect or - Rear View
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