EXTERNAL USE A Bridge Over Troubled Wafer… Use of design layout for systematic defect identification for New Product Introduction cycle time reduction Ehud Tzuri Chief Marketing Officer Applied Materials 4 May 2011
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EXTERNAL USE
A Bridge Over Troubled Wafer…Use of design layout for systematic defect identification for New Product Introduction cycle time reduction
Ehud Tzuri
Chief Marketing Officer
Applied Materials
4 May 2011
EXTERNAL USE2
Fastest Path to Silicon™
EXTERNAL USE3
Applied/Magma Announcement 28 Feb 2011
EXTERNAL USE4
It’s all about YieldDefectivity and process control are directly linked to yield
Modeled Yield Curve
time
prod
uctiv
ity
Shorten ramp time
Maintain and improve yield at volume production
EXTERNAL USE5
Variation-Aware Design – Why?
Design variation: the variation in parametric and die yield results caused by process, random variation, and layout dependent effects (proximity)
Source: VARIATION-AWARE CUSTOM IC DESIGN REPORT 2011, Amit Gupta President and CEO, Solido Design Automation
EXTERNAL USE6
% Systematic Defects in Ramp, Growing
130nm 65nm 32nm 2xnm0%
20%
40%
60%
80%
100%
RandomSystematic
Schematic depiction
Particle Pattern
Ran
dom
Sys
tem
atic
EXTERNAL USE7
Local area with narrow process windowWhat is a “Hot Spot”?
Die
Yie
ld
Line CD
Process window
EXTERNAL USE8
Hot Spot Example
EXTERNAL USE9
Complex Die Layout – A Sensitivity Issue
Inspection Tool Scan Image
Different densities and patterns have different optical characteristics in the eyes of the inspection tool
EXTERNAL USE10
Challenges Summary
Difficulty to reach yield entitlements fast with minimal re-spins– Increasing number of “hot spots” – Inefficient separation of random / systematic defects
Products complexity growing different sensitivity areas required for inspection
EXTERNAL USE11
Solution Outline
FAB
Litho
Magma Excalibur-
Litho™
Applied Inspection Systems
DBI (Design-based Inspection) DBB (Design-based Binning) Feedback to Design
Design
EXTERNAL USE12
Binning Separation
Binning Separation
Applied UVision™4 Magma Excalibur-Litho™
Solution Outline
EXTERNAL USE13
DBI: Design Based Inspection Using CAD data to set up complex die layouts for inspection 50% faster time to recipe due to increased automation Improved sensitivity by assigning different thresholds to
different areas
EXTERNAL USE14
DBI layout
Manual layout
Sensitivity improved by DBI recipe
Surface Particle
Damage FALSE
1
87
22
323
5
ManualDBI
DBI Case Study: SensitivityDefect die stack
EXTERNAL USE15
DBB: Design Based Binning - ConceptBinning of all defects per layout /structure
EXTERNAL USE16
DBB Case Study
Faster identification of Process-Window-Limiting-Structures Complementing Hot Spot simulation data
Bin1 Bin2 Bin3 Bin4 Bin5 Bin6
Bin7 Bin8 Bin9 Bin10 Bin11 Bin12
Bin1 Bin2 Bin3 Bin4 Bin5 Bin6
Bin7 Bin8 Bin9 Bin10 Bin11 Bin12
DBB Pareto and clips of largest bins SEM Images of Critical Structures
Bin1 Bin2 Bin3 Bin4 Bin5 Bin6
Bin7 Bin8 Bin9 Bin10 Bin11 Bin12
Bin1 Bin2 Bin3 Bin4 Bin5 Bin6
Bin7 Bin8 Bin9 Bin10 Bin11 Bin12
EXTERNAL USE17
DBB Case Study
Clear visual identification of process window
EXTERNAL USE18
Benefits of Approach: Voice of Customer
“The introduction of CAD-based inspection technology for defect analysis and monitoring at GLOBALFOUNDRIES Fab 1 has helped improve defect management efficiency and reduce cycle time for process optimization.
Both our production and development lines now rely on this technology to help guarantee process quality and yield stability."
Remo Kirsch, Manager of Contamination Free Manufacturing at GLOBALFOUNDRIES Fab 1 in Dresden, Germany
Press announcement, 28 February 2011
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