Metalurgies for wire Metalurgies for wire bonding bonding Ulrasonic ,Thermosonic Ulrasonic ,Thermosonic and Thermocompression and Thermocompression - - Plating processes Plating processes - - Gold based metalurgies Gold based metalurgies - - Aluminium based metalurgies Aluminium based metalurgies - - Other metals Other metals - - Other interconnection techniques Other interconnection techniques - - Long term reliability Long term reliability - - Examples Examples Rui De Oliveira 12/06/03
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-Plating processes -Gold based metalurgies -Aluminium ... · Rui De Oliveira 12/06/03. Plating processes Electro & Chemical plating Vacuum plating Thick film plating Layout/patterns.
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Metalurgies for wire Metalurgies for wire bondingbonding
Ulrasonic ,Thermosonic Ulrasonic ,Thermosonic and Thermocompressionand Thermocompression
--Plating processes Plating processes --Gold based metalurgiesGold based metalurgies--Aluminium based metalurgiesAluminium based metalurgies--Other metalsOther metals--Other interconnection techniquesOther interconnection techniques--Long term reliabilityLong term reliability--ExamplesExamples
Rui De Oliveira 12/06/03
Plating processesPlating processes
Electro & Chemical platingElectro & Chemical plating
Electro plating-Plate only on metals-Metal in salts or directly the electrodes-Metals thickness depends on time/temp/current
Chemical plating-Plate only catalysed metals-Metal in salts-Deposition by immersion or autocatalytic-thickness is not fully temperature and time dependent
Electroplating bathElectroplating bath
Rayon X
Anode Cathode
Gold bath (electro plating)Ni, Au, Cu, Pd ,AgThe bath can be re-usedby replenisching with salts or changing the anodes
Chemical plating bathChemical plating bath
Gold bath (chemical plating)
Ni , Au , Pd, Cu
You can deposit around 6 to 10 times the metal present in one bathThe bath start to be instable after that.
Vacuum Vacuum platingplating
-Amorphous deposition-Metals deposited :Ni,Cu,Al,Au,TI,Pd etc-Ductility depends on Argon pressure