Plasma Cleaner

23-Aug-06 mgbersch

Plasma Cleaner

Instructions for Use

23-Aug-06 mgbersch

Fischione 1020 Plasma Cleaner

23-Aug-06 mgbersch

General• Most of the cleaning process with the 1020 are

automatic.• The process is started by entering a cleaning

time.• Once the process starts the specimen chamber

will automatically pump and initiate plasma cleaning. The chamber will remain under vacuum until vented by the user.

• VENTING TAKES 3 – 4 MINUTES. TURBO PUMP MUST SPIN DOWN.

23-Aug-06 mgbersch

Gas Supply• Make sure the gas

supply is on and there is gas.

• Gas is an Argon – Oxygen mixture.

• NOTE, just check the gauge. Do NOT adjust ANY valves.

23-Aug-06 mgbersch

Check Control Panel• Normally the

specimen holder will be under vacuum.

• First check the control panel.

• If the “HIGH VACUUM” light is illuminated, you must vent the specimen chamber.

23-Aug-06 mgbersch

Venting the Specimen Chamber• Press VENT on the

control panel.

• The VENTING LED will illuminate.

• It takes 3 – 4 minutes to vent the chamber.

23-Aug-06 mgbersch

Chamber at Atmosphere• Wait until the ATMOSPHERE LED is illuminated

before opening chamber.

23-Aug-06 mgbersch

Remove the plug• After the chamber is

vented, remove the plug from the TEM specimen port.

• Place the plug in the plastic bag on top of the plasma cleaner.

• The chamber is now ready for insertion of the TEM specimen holder.

23-Aug-06 mgbersch

Insert TEM Specimen Holder

• Insert the TEM specimen holder into the chamber.

• The specimen holder may come to a stop but may not be fully inserted (see image). Do not push on the specimen holder at this time. WAIT.

23-Aug-06 mgbersch

Set Cleaning Time• Using the number pad

on the control panel input the cleaning time. Cleaning time for most TEM specimens is 30 sec to 5 minutes.

• Press SET to start the pump down and cleaning cycle.

23-Aug-06 mgbersch

Check Holder and Clean Cycle• When the pumping

cycle starts the holder should then move into the specimen chamber. CHECK THIS.

• When cleaning is underway, the gas mixture will luminesce. This can be observed through the window.

23-Aug-06 mgbersch

Clean cycle end and vent• The timer will count

down as the cleaning cycle continues. At zero cleaning will end but the chamber remains under vacuum.

• To Vent, press VENT.• REMEMBER: 3 to 4

minutes to vent chamber.

23-Aug-06 mgbersch

Shut Down # 1• Remove the holder

from the specimen chamber.

• Replace the Plug

23-Aug-06 mgbersch

Shut Down # 2• Press PUMP to pump

down the chamber.• Chamber is left under

vacuum

• Wait and make sure the chamber returns to HIGH VACUUM

23-Aug-06 mgbersch

APPENDIX• An accessory is

available for inserting SEM stubs (FEI type).

• A vacuum pumping station for TEM holders is also avaible.

23-Aug-06 mgbersch

Remove the TEM Port• The TEM port must be

removed before the SEM specimen holder can be placed in the cleaning chamber.

• Unscrew the black retaining ring and remove.

• Take out the TEM port and place on a clean surface. Be careful of, and check the large O-ring

23-Aug-06 mgbersch

Insert the SEM specimen holder• Insert the SEM

specimen holder. Be careful of the large O-ring.

• The holder sits flushin the opening when fully inserted.

23-Aug-06 mgbersch

High Vacuum Docking Stations• TEM holders can be

kept under vacuum in the TEM Docking station.

• To use:– Contact CAF

personnel.