Standard Operating Procedure Film Sense (FS-1) Multi- Wavelength Ellipsometer Contents Overview............................................................. 2 Operations........................................................... 2 Start-up............................................................2 Sample Measurements.................................................4 Shutdown............................................................4 Troubleshooting/FAQs................................................. 5 Contact.............................................................. 5 About this document.................................................. 5 Film Sense (FS-1) v1.0 09/30/2016
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Standard Operating ProcedureFilm Sense (FS-1) Multi-
Wavelength EllipsometerContentsOverview.....................................................................................................................................................2
Operations...................................................................................................................................................2
Start-up....................................................................................................................................................2
Sample Measurements............................................................................................................................4
Shutdown................................................................................................................................................4
Troubleshooting/FAQs.................................................................................................................................5
Contact........................................................................................................................................................5
About this document...................................................................................................................................5
Film Sense (FS-1) v1.0 09/30/2016
OverviewThe Film Sense FS-1™ Multi-Wavelength Ellipsometer uses long-life LED’s and a no-moving-parts ellipsometric detector to provide fast and reliable thin film measurements in an easy-to-use, compact system. The film thickness of most transparent thin films from 0 – 1000 nm can be determined with excellent precision and accuracy by a simple 1 second measurement. Optical constants, n & k, and other film properties can also be measured for many samples.
Operations
Start-up1. Enable the tool in Badger.2. Press the black On/Off button on back of the FS-1 Detector. The green Power light should come
on immediately.
3. After 15-25 seconds, the green Ready light should come ON. After the Ready light in ON, a flickering white beam of light should be emitted from the front aperture of the FS-1 Source unit
Film Sense (FS-1) v1.0 09/30/2016
Film Sense (FS-1) v1.0 09/30/2016
4. Open a web browser on the control computer and navigate to http://169.254.1.1 to open the Film Sense control interface.
5. Centering the beam on detector aperturea. make sure the Source Lever is in the RUN position
b. If the beam is not centered, turn the height knob until the beam is centered on the detector aperture.
Left: beam not centered. Right: beam centered.
Film Sense (FS-1) v1.0 09/30/2016
Sample Measurements1. Sample alignment
a. To acquire accurate data from the Ellipsometer, it is important that Align Y value is near zero.
b. In the control software, select Mode: Single Measurement and click Align Sample. c. Turn the height knob until the AlignY value is within ±0.02o of zero.
2. Sample measurementa. In the control software, make sure that Mode: Single Measurement is selected.b. Make sure the Source lever is in RUN position.c. select Model: SiO2 on Si (Choose the model based on your material)d. click the Measure Sample buttone. The following screen displays a typical measurement result:
f. The value in Fit_Diff indicates how well the model fits your measured data.
ShutdownAfter your measurements are completed, shut down the instrument by following this procedure.
1. Remove your sample2. turn Off the equipment by pressing the black On/Off button on the FS-1 detector3. Disable the tool on Badger
Film Sense (FS-1) v1.0 09/30/2016
Troubleshooting/FAQsIf encountering a problem, report it on Badger and send an email to Shiva.
If you want to know more about setting up the models or how to interpret your data, please contact Shiva.
ContactShiva Bhaskaran [email protected] list [email protected]
About this document1.0 09/30/2016 Shiva Bhaskaran Initial Document
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Film Sense (FS-1) v1.0 09/30/2016
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