Overview of Semiconductor Technologies

Overview of Semiconductor Technologies

• Key Semiconductor Technologies.- Bulk silicon, SOI, III-V and II-VI semiconductors.

• Economic Impacts of Semiconductor Industry.• Comparison of SIA Technology Node.• Photovoltaic Technology and Market Analysis.• Photonic Devices: LEDs and LDs.

Comparison of SIA Technology Node Introduction Projections in 94 vs. 97

94’ Roadmap 98 01 04 07 10________97”Roadmap 97 99 03 06 09________Min feature(m) 0.25 0.18 0.13 0.08 0.05Lithography 248nm 248/193 193 EUV EUV?DRAM bits/chip 256M 1G 4G 16G 64GP xstrs/chip 28M 64M 150M 350M 800M P xstrs/cm2 7M 13M 25M 50M 90M

New Materials for the New Millennium:• Copper metallization replaces Al-Cu interconnects.• New dielectric materials such as Ta2O5, BaSrTiO3 are being used to replace SiO2, Si3N4 to handle the increase of DRAM density. Thinner oxide requires higher dielectric materials.• New SOI technology to replace bulk Si- technology for higher packing density, higher speed and lower power consumption.

Economic Impact of Semiconductor Industry (S.I.)

• Global S.I. growth rate at 15%/year reaching $140 B in 97, which reached to $300 B by early 2000 because of strong demand of communications equipment and computers.

• S.I. growth holds down inflation: S.I. price index: -4.5%/yr vs. +3%/yr for the rest of economy.

• S. I. offers higher wages and lower inflation.• Faster technology diffusion (25%): Auto:60 yrs, Tel:35, TV:25, PC:13,

Internet:< 10 yrs.• Drivers of semiconductor market growth: declining prices and

increasing performance: price/DRAM bit reduced by 25 to 30%/yr, while IC complexity double every 18 months (Moore’s Law).

• Less’s Law: improvements in reliability have accompanied increases in chip complexity:transistors/die increases from 2x103 in 71 to 108 in 98.

Current Status, Issues, and Trends in Semiconductor Technologies

• Bulk Silicon Technologies:- scaled down submicron VLSIs- larger wafer size, 8, 10, 12”.. - copper interconnects

- high dielectric insulating materials - Si/SixGe1-x technologies• Silicon-On-Insulator (SOI) technologies:

- SIMOX and wafer bonding (WB).- low power, low voltage, high-speed, and high density ULSIs.

3-D IC’s• III-V and II-VI Compound Semiconductor Technologies.

- LEDs, LDs, detectors, MESFETS, HBTs, HEMTs, quantum effect devices (QWIPs). - photovoltaic devices (solar cells) technology- wide band gap and high temperature devices (InGaN, GaN, AlGaN, SiC, diamond)

Comparison of the World Semiconductor Industry

Delay Time vs. Power Dissipation for CMOS and Other Devices

Exponential Increase of DRAM Density vs. Year(Based on SIA Road Map)

Microprocessor Computational Power vs. Year

Key Silicon-On-Insulator (SOI) Technologies

• Separation by Implantation of Oxygen (SIMOX) Process• Wafer Bonding and SIMOX- WB Process• Zone Melting Recrystallization (ZMR) Process• Epitaxial Lateral Overgrowth (ELO) Process (3-D IC’s)• Fully Isolation of Porous Silicon (FIPOS) Process

Band Gap Energy vs. Lattice Constant for Elemental and Compound Semiconductors

A Bright Future for Blue/Green LEDs(Highly luminous III-V nitride based LEDs)

Color Wavelength (nm)

Violet < 450Blue 450 - 490(InGaN/AlGaN LED)

Green 490 - 560(InGaN/AlGaN or ZnSe LED)

Yellow 560 - 590(AlInGaP LED)

Orange 590 - 630Red > 630(AlGaAs LEDs)

Photovoltaic (PV) Market Analysis

• PV Market Growth Rate:Solar cell module production average increase: 14% per year 90-97, and production jumped by 38% in 1997 to 122 MWp. Growth rate is expected to increase at a rate of 20%/year over the next 15 years with potential annual module shipments of around 2,25 GWp (about $3billions per year by 2010) in the year 2010.

• PV Markets:- consumer electronic products (14%): calculators, watches, lanterns...- off-grid residential power systems (35%): cottages, rural village,

homes and offices.- off-grid industrial power system (33%) : telecom.repeaters.- off-grid connected PV systems (18%):government and/or utility

demons.

Key PV Technologies• Single crystal Si solar cells.• Poly Si solar cells.• a- Si thin film solar cells.• Ribbon Si solar cells.• CdTe thin film solar cells.• CIGS (CuInGaSe) thin film solar cells.• III-V semiconductor (GaAs, InP, GaInP..) solar cells

- single and multi-junction solar cells• Concentrator solar cells.