D. Lim ISSCC 2007 / SESSION 30 / BUILDING BLOCKS FOR HIGH-SPEED TRANSCEIVERS / 30.3 Outline Motivation Design of a mm-Wave Static CML Frequency Divider in 65nm SOI CMOS Implementation & Measurement Extraction of Circuit Parameter Variability Conclusion Design of Frequency Divider Design concerns: fF 20 GHz 30 2 1 2 , , , , W R L Diff tot P tot P L tot P Diff m SO C C C C C C R C g f L A. Bandwidth: C. Inductive peaking: pH 330 1 . 3 , 2 tot P L C R L B. Voltage swing: 230 V 1 P - P R C R SW P P L Motivation Reduced VCO tuning range Signal power loss through interconnect Reduced operation range of frequency divider Process variation of the frequency divider must be carefully considered in an early design stage. CMOS Sub Divider PFD Charge Pump LPF f REF Frequency Divider (/2) VCO Layout and Die Photo GND GND GND GND RF OUT CLK CLKB VDD VDD Stab inductor Divider Core OP load resistor Area-minimized layout for reduced parasitic Divider Schematic VBIAS CLK CLKB Q1 Q2 Q3 Q4 R5 R6 R1 VDD R2 R3 R4 Q5 Q6 Q9 Q10 Q7 Q8 Q11 Q12 Q13 OUTPUT (90GHz) C1 C2 CC CB L C Bias-tee Master Latch Slave Latch L1 L2 L3 L4 Inductive peaking Selected Technology Cross-section of a 65nm SOI CMOS: f T 330GHz SUBSTRATE CA POLY Si SiO 2 BOX 8t M10 M9 M6 M5 M4 M1 4X 2X 1X Cu BEOL FEOL 2t 1t M7 M8 8X 4t See Digest page 542 30.3 Performance Variability of a 90GHz Static CML Frequency Divider in 65nm SOI CMOS 1 Massachusetts Institute of Technology, Cambridge, MA, 2 IBM, Hopewell Junction, NY A static CML divide-by-2 frequency divider is integrated in 65nm SOI CMOS. The maximum operating frequency is 90GHz while dissipat- ing 52.4mW. The self-oscillation frequency is 92GHz with 0.57pJ switching energy. Measurement of self-oscillation frequency at multiple bias conditions enables estimation of the variation in threshold voltage, capacitance, and resistance. Daihyun Lim 1 , Jonghae Kim 2 , Jean-Olivier Plouchart 2 , Choongyeun Cho 2 , Daeik Kim 2 , Robert Trzcinski 2 , Duane Boning 1 446 • 2007 IEEE International Solid-State Circuits Conference 1-4244-0852-0/07/$25.00 ©2007 IEEE.