Opto-fluidics, a fruitful marriage between Integrated Optics and Microfluidics René Heideman, PhD CTO and co-founder [email protected]
Opto-fluidics, a fruitful marriage between
Integrated Optics and Microfluidics
René Heideman, PhD
CTO and co-founder
Our mission
• Located in Enschede, the Netherlands
• Founded in 2001
• 30 employees, > 50% PhD
• Member of the Panthera Group
LioniX is a leading provider in co-development of products and manufacturing of components based on cutting-edge micro/nano technology for its (OEM) customers
What we do?
• LioniX provides ‘design to manufacturing’ and ‘horizontal integration’ by partnering with foundries, suppliers of complementary technologies and R&D institutes
Production
phase
Realization
phase
Stabilization
phase
Optimization
phase
Demonstration
phase
Know-how
phase
* Fabrication monitoring
* Yield analysis* Process flow* Manufacturable
design* Technical
specifications
* Product design* Fabrication
plan* Product
specs* Quality criteria
* Feasibility* Preliminary
design* Preliminary
process* Shortloops
* Idea* Market Study
* Preliminary product specs
* Proof of principle
MASSFABRICATION
FABRICATIONPRODUCTDEVELOPMENT
RUNS
PRODUCTDEVELOPMENT
RUNS
demonstrator prototype B product
‘0' seriesprototype Aconcept
TESTRUNS
• LioniX offers small + medium volume manufacturing,
second sourcing as well as transfer to medium + high volume manufacturing
• MESA+Nanolab (Enschede, the Netherlands)
• LioniX specializes in applications of integrated optics,
micro-fluidics and opto-fluidics including surface functionalization
• LioniX focuses on Life Sciences, Telecom, Datacom, Industrial Process Control and Space
Opto-fluidics: combination of Integrated Optics and Microfluidics
• “On-chip optical trapping and Raman spectroscopy using aTripleX dual-waveguide trap”, M.Boerkamp,T.van Leest, J. Heldens, A.Leinse, M.Hoekman, R.G.Heideman and J. Caro, Optics Express, Vol. 22, (no. 25), pp. 30528–30537 (2014)
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optical wafer
fluidic wafer
Opto-fluidics: evanescent field sensing in micro-fluidics
Photonic Integrated Circuits
Means: Full manipulation of light on chip for: -colour combination -optical signal processing (datacom, telecom) - beam shaping -sensing (biophotonics), etc.
Connection of chip to outside world through Fiber Arrays (FA’s)
Hybrid connection of external components (lightsources (lasers)), fast modulators) in standardized packages containing electronics
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Photonic Integrated Circuits
3 mature standardized platforms commercially available through MPW services:
Indium Phosphide (InP) - TriPleX (Si3N4) - Silicon Photonics (SOI)
Therefore: Combine TriPleX with InP gain section yielding: Very high quality, widely tuneable lasers
- Ultra low loss - Applicable in almost all interesting wavelength regions - Reliable modulators (heaters, stress modulators) - But, not electro-optical, so no direct laser generation possible
Also high level hybrid integration with other gain materials (AlGaAs, GaN, etc.) is available
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TriPleXTM platform
• Adjustable polarization properties (sensors telecom)
• Low optical attenuation
• Small bend radii (small footprint!)
• Design by geometry
• Silicon and glass compatible
• Spot size converters for low loss fiber chip coupling
“TriPleX: a versatile, low loss dielectric photonic platform”, K.Worhoff, R.G.Heideman, A.Leinse and M. Hoekman, Advanced Optical Materials, March 2015
Direct flip-chip connection of Low cost lasers (VCSELs) on TriPleX chip
Low cost PIN detector (arrays) on TriPleX chip
Laser Photonics:
Tuneable laser (ICT)
Visible Light Photonics:
beam shaper (DNA seq.)
Microwave Photonics:
OBFN (5G)
Opto-fluidics:
Point-of-care (iNDx)
Biophotonics:
Medical imaging (OCT)
Opto-fluidics:
Disposable sensor chips
Applications of TriPleX PICs
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18
0
0,1
0,2
0,3
0,4
0,5
0,6
0,7
0,8
0,9
1
865 866 867 868 869 870 871
WaveLength
Tra
ns
mis
sio
n
Drop port
Add port
Refractive index based sensing platform
Refractive index based sensing platform
-size of single sensor element
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Refractive index based sensing platform
1,333
1,334
1,334
1,335
1,335
1,336
1,336
1,337
1,337
1,338
0
50
100
150
200
250
300
350
400
450
500
0 200 400 600 800 1000
Refr
acti
ve i
nd
ex
Sh
ift
(p
m)
Time (s)
Sensitivity: 110 nm/RIU
Reprinted from IEEE JSTQE, p. 1583-96, vol.18, no.5, Sept. 2012
21
Experimental resolution: 0.1 -0.01 pm Δn = 1·10 -6 to 1·10 -7 RIU
surface sensitivity: ~0.1 -1 pm layer protein!
Refractive index based sensing platform
Biosensors and Bioelectronics , May 2016 (invited)
• PICs4All: pics4all.jeppix.eu – EU Innovation Support action
– Free advice on the applicability of PIC technology
– Enable access to PIC technologies, lower barriers for applying PICs
– Create European network of Application Support Centers
– Contact: [email protected]
• JePPIX: jeppix.eu – Multi-Project Wafer service for
Photonic ICs
– Open access to InP and TriPleX technology platforms
JePPIX and PICs4All EU Innovation support
www.jeppix.eu