OPTICAL MONITORING FOR HIGH PRECISION THIN FILM … · lower unit costs to satisfy manufacturing targets for mass market applications. Within our next generation mobile networks and

GSMOPTICAL MONITORING FOR HIGH

PRECISION THIN FILM DEPOSITION

OPTICAL MONITORING TECHNOLOGIES ENABLING OUR NEW WORLD!

THE GSM1101MAKING YOUR LIFE EASIER

2 3

� TC SAW filter

technologies for wireless

communications

WIRELESS

� Photopic filters,

bandpass filters

CONSUMER DEVICES

From the high reflectivity DBR mirrors required for maximising light output in our HBLEDs to the

new gesture recognition and 3D imaging technologies for our next generation smart phones, our

world relies on the cost effective deposition of optical interference coatings that demand both new

levels of optical performance or repeatability from component to component and at the same time

lower unit costs to satisfy manufacturing targets for mass market applications.

Within our next generation mobile networks and power devices too, thin film processes

increasingly call for deposition of custom dielectrics or metal stacks at accuracies which

traditional control techniques cant achieve.

Advanced Process Control Technologies (APC) like Evatec’s GSM Optical Monitoring System

are designed to do just that – improving precision in the deposition process for new levels of

repeatability and production yield for the most demanding optical interference coatings.

- ACHIEVING MORE DEMANDING THIN FILM SPECIFICATIONS

- DRIVING DOWN UNIT COSTS

- SPEEDING UP YOUR PROCESS DEVELOPMENT

- ENABLING TIGHTER MANUFACTURING TOLERANCES

- RAISING MANUFACTURING YIELDS

- LOWERING UNIT COSTS IN MASS PRODUCTION

GSM

� Ultrathin metal layers

� DBR reflector layers

OPTOELECTRONICS

� Multibandpass filters,

mirrors, laser coatings

PHOTONICS

Evatec’s GSM 1101 Broadband Optical

Monitoring System in combination with

the Evatec’s Optics Toolbox delivers

accelerated process development

and production capability for thin film

monitoring in the UV, VIS or IR spectral

ranges. Starting with industry standard

thin film design software, Optics

Toolbox integrates all the steps

required generating a complete recipe

with monitoring strategy for each layer

and even uploading it to your coating

tool ready for execution.

THIN FILM DESIGN

SOFTWARE

COATING TOOL

THE GSM VERSATILITY COMES AS STANDARD The GSM1101 comes ready prepared for a wide range

of coating tools and measurement modes, measuring on

test glasses or direct on the substrate using a choice of

monitoring algorithms.

Additional built in flexibility gives you the power to

select quartz, optical monitoring or power / time as your

termination method on a layer by layer basis.

NOW WITH “IN-SITU“ REOPTIMISATIONFor the first time, new techniques like “in-situ”

reoptimisation also now offer automatic recipe tuning mid

process to guarantee reproducibility and yield for even the

most complex optical designs.

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BAK EVAPORATORS

CLUSTERLINE® RAD SPUTTER CLUSTER

MSP SPUTTER SYSTEM

A CHOICE OF COATING TOOLS

SOLARIS IN LINE SPUTTER

TRANSMISSION � Available on the BAK and CLUSTERLINE® RAD

REFLECTION � Available on BAK, MSP, SOLARIS and CLUSTERLINE® RAD

Receiver

Sender ReceiverSender

Receiver

Sender ReceiverSender

A CHOICE OF MEASUREMENT MODES

MONOCHROMATIC � Select single wavelength according to process / layer

� Compatible with existing, production proven processes

BROADBAND � Spectrometer measures performance over spectral range

� Built In compensation for variation in rate or refractive index

BROADBAND + REOPTIMISATION � Real time adjustment mid process for enhanced yields

� Recover from unforeseen events e.g. power outage

� Reduce new process development times

A CHOICE OF MONITORING ALGORITHMCLUSTERLINE® RAD with integrated GSM optical monitoring

DIRECT MONITORING � For BAK, MSP and CLUSTERLINE® RAD

� Real time during deposition

TEST GLASS MONITORING � Available for BAK � GTC621 with 6 glasses � GTC1100 with 140 heated glasses

A CHOICE OF DIRECT OR INDIRECT MONITORING

CLOSED LOOP CONTROL � Available for SOLARIS � In-line analysis and correction of deposited thicknesses

Uncoated substrate

Deposition

Correcteddeposition times

In-linespectral

measurement

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Here are just a few examples of how Evatec platforms and deposition processes

using optical monitoring can cut your production cost and keep you at the front of the

pack. For more information about Evatec’s Optics Toolbox, Optical Monitoring and

how techniques like “in-situ” reoptimisation can help you with fast track development

of new processes or increase your coating yields simply visit www.evatecnet.com

or contact your local Evatec sales and service representative.

NIR BANDPASS FILTER BY SPUTTER

TYPICAL APPLICATION: � Consumer electronics

MEASUREMENT MODE: � Direct on substrate in reflection

KEY DRIVERS � Repeatabiility across whole 8 inch wafer � Enanced yields and throughput for reduced unit costs in mass production

SIO2 LAYER BY SPUTTER

TYPICAL APPLICATION: � TC-SAW for Wireless Applications

MEASUREMENT MODE: � Direct on substrate in reflection

KEY DRIVERS � Critical accuracy of layer thickness and run to run reproducibility

� Reduction in production costs

DBR DIELECTRIC BROADBAND MIRROR BY EVAPORATION

TYPICAL APPLICATION: � HBLEDs

MEASUREMENT MODE: � Reflection on test glass

KEY DRIVERS � Run to run reproducibility � Maximum reflection for enhanced device performance

MULTI BANDPASS FILTER BY SPUTTER

TYPICAL APPLICATION: � Consumer electronics

MEASUREMENT MODE: � Direct on substrate in reflection with Reoptimisation

KEY DRIVERS � Shortened process development times for complex designs � Yield management in production

THIN METAL LAYERS BY EVAPORATION

TYPICAL APPLICATION: � Semiconductor & Optoelectronics

MEASUREMENT MODE: � Reflection on test glass

KEY DRIVERS � Significant change in reflection spectrum with small thickness variation of gold layer provides excellent production control

� Enhanced final device performance

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OPTICAL MONITORING PUTTING YOU AT THE FRONT OF THE PACK

USES REOPTIMISATION

GSM OPTICAL MONITORING FOR HIGH PERFORMANCE OPTICAL LAYERS

TYPICAL COATING TOOL LAYOUT

MSP Sputter Tool

Sender

Drum with substrates

SputterSources

Optical Head

Receiver

Receiver Sender(reflection)

BAK Evaporator

Optical Head

Sender (direct monitoring)

Sender (transmission)

Calottewith Substrate

Test glass

Test GlassChanger

EvaporationSources

CLUSTERLINE® RAD Cluster Tool

Sources

Table withsubstrates

PVD PSC

For more information visit us at www.evatecnet.com or contact our head office.

SYSTEM DATA

Light Sources 2 Quartz-Tungsten Halogen lamps, Plug & Play, 6000hrs life

Detectors Temperature stabilized, CCD array, 1024 pixels

Wavelength RangeStandard: 380nm to 980nm

Custom: According to customer specification

Measurement Modes Reflection, transmission on test glass or directly on substrates

GTC 621 test glass changer 6 measurement positions, transmission or reflection

GTC 1100 test glass changer 140 heated test glasses, mixed measurement

Monitoring algorithms Monochromatic, Broadband, Broadband with "in-situ" reoptimisation

Evatec AGHauptstrasse 1aCH-9477 TrübbachSwitzerland

Tel: + 41 81 403 80 00Fax: + 41 81 403 80 [email protected]

Product descriptions, photos and data are supplied within the brochure for general information only and may be superseded by any data contained within Evatec quotations, manuals or specifications.

Edition 3: Printed November 2017. (Edition 2 first printed May 2016, Edition 1 first printed November 2009).

ABOUT EVATEC

Evatec offers complete solutions for thin film deposition and etch in the Advanced Packaging, Power Devices, MEMS, Wireless Communication, Optoelectronics and Photonics markets.

Our technology portfolio includes a range of advanced sputter technologies, plasma deposition & etch as well as standard and enhanced evaporation.

Our team is ready to offer process advice, sampling services and custom engineering to meet our customers individual needs in platforms from R&D to prototyping and true mass production.

We provide sales and service through our global network of local offices. For more information visit us at www.evatecnet.com or contact our head office.