Optical MEMS Laboratory - OML

Optik MEMS Laboratuvar

Optical MEMS Laboratory - OMLProf. Dr. Hakan reyKo University, Electrical Engineering

RESEARCH AREAS2D/3D Display and Imaging SystemsMEMS/NEMS sensors and actuators Micro-optics and screen technologies Optical system designInfrastructureOML is well-equipped for electrical, optical, mechanical design, test, and characterization

Office AreaTest AreaMeasurement CleanroomMeeting RoomTest AreaInfrastructureOML is well-equipped for electrical, optical, mechanical design, test, and characterization

Office AreaTest AreaMeasurement CleanroomFabricationCleanroomProjects-Industrial Funding (>10 projects)Microvision (USA, since 2002), Aselsan (TR), Fraunhofer IPMS (DE), OPET (TR), Inventram (TR), Fotoniks (TR)

- EC Funded Projects (7 projects)ERC-Advanced (2014-2019)FP7 STREP projects (MEMFIS, HELIUM3D)FP7 IAPP ProjectFP6 Networks (NEMO, 3DTV, MINOS)

- TBTAK (8 projects)5 projects completed3 projects on-going

3D displays (3D laser TV, wearable displays, head-worn projection displays); Pico-projectors and Laser scanners (world leader in MEMS scanners); Micro-optics (head-up-displays, exit pupil expanders); MEMS Spectrometers (MEMS-based Fourier transform infrared spectrometer, Lamellar grating interferometers, FR4 based interferometers); Thermal imaging (MEMS based thermal detector array with optical readout; CMOS optical ROIC); Portable Nano-Biosensor (MEMS sensor array for multi-analyte screening for diagnostics applications).Patents and Spin-OffsPatent Licensing Agreements (consists a portfolio of about 25 patents)Microvision Inc. (USA): MEMS and FR4 scanners, 3D displays, novel micro-optical screensFraunhofer IPMS (DE): MEMS spectrometersAselsan Inc. (TR): Thermal imaging sensor arrayInventram Inc. (TR): Biosensors for point-of-care diagnostics of multiple diseases.Opet Inc. (TR): Tagging and identification of functional fluids

Spin-off companies from the labTarabios (bio-tech)Quantag (energy)

Wearable DisplaysPico-projectors3D PicopDynamic Pupil Tracker3D HMPDAR BidirectionalScreensMulti-viewer 3D3D TelepresenceOML Research on Emerging Display Tech., 3D, AR, and Human-Computer Interaction

Eyewear displaysOML Research on MEMS Laser Scanners for Displays and Imaging

(Electrostatic MEMS) Arslan, JMEMS, 2010

(Piezoelectric, MEMS) Baran, JMEMS, 2012

(Thin Film Magnetic, FR4) Yalcinkaya, Sens&Act:A, 2007(Electromagnetic, MEMS) Yalcinkaya, JMEMS, 2006

(Microlens array on 2D MEMS Stage Gokce, JMEMS, 2010(Rotary Electrostatic, MEMS) Baran, JMEMS, 2012

(Integrated Electromagnetic, FR4) Isikman, Phot. Tech. Lett., 2009Biosensors for POC Diagnostics: Immunosassay, Viscosity & Coagulation TestsCakmak et al, Methods, 2013

Cartridge

MEMS ChipReader

Virus DetectionTimurdogan et al, Biosens & Bioelec, 2011Coagulation Measurement8Thermal Imaging Using Thermo-Mechanical Pixels and Optical Readout

Sensor Input1st order0th orderMEMS/CMOS Integration

Array (35um and 50um pixel sizes)Single pixel

Image and video acquisitionusing discrete opticsOML Research on MEMS FT Spectrometers70m 217m 438m 585m 658m

-3m Comb actuators on the springsGrating fingers70217364511 658 fRES =462Hz

Ataman, JMM, 2006 - Seren, JMEMS, 2012 - Ferhanoglu, Opt. Exp., 2010FP7-Strep Project: MEMFISPartners: Bruker, KOC, FhG-IPMS, VIGO, SOPRALAB, CTR, Teknikon

SummaryWere open to collaboration in photonics, MEMS, and human-computer interaction related projectsPhotonics KET2014, suitable topics:Biophotonics for screening of diseasesSensing for safety and securityFET-Open projectsYou can visit our lab today (Eng Z16)

Contact: Prof. Dr. Hakan UreyE-mail: hurey@ku.edu.tr Group Web Site: http://mems.ku.edu.tr