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NA Physical Interfaces & Carriers Committee 1 SEMICON West 2010 Meeting Minutes San Francisco, CA

North America Physical Interfaces and Carriers Committee Meeting Summary and Minutes

SEMICON West 2010 Wednesday 14 July 2010

San Francisco Marriott Marquis Hotel, San Francisco, CA

Next Committee Meeting Wednesday 10 November 2010, 0800-1200 PST NA Standards Fall 2010 Meetings, San Jose, CA Table 1 Meeting Attendees Co-Chairs: Mutaz Haddadin (Intel), Matt Fuller (Entegris) SEMI Staff: Ian McLeod

Company Last First Company Last First

Acteon Komatsu Shoji Intel He Long Crossing Automation Carlson Robert Intel Quinn Tom Daifuku Yamagata Kenji ISMI Bass Eddy Daifuku America Stoner Bob ISMI Chen Yu-Chi Dainichi Shoji Oyama Koji KLA-Tencor Crockett Alan Entegris Burns John Miraial Igeta Yasuo Entegris Fuller Matt Miraial Inoue Shuichi Entegris Gregerson Barry Miraial Nagashima Tsuyoshi Entegris Lee Poshin Muratec Yamamoto Makoto Entegris Olson Eric Samsung Park Sung WookGLOBALFOUNDRIES Rothe Jan Shin Etsu Polymer Kashimoto Akira Gudeng Ku Chenwei Sinfonia Otani Mikio Gudeng Lu Jerry (P.Y.) SUMCO Nakai Tetsuya Gudeng Lu Jerry

(S.W.) T. D. Systems Davies John

Gudeng Wei Chih-An U. A. Associates Hartsough Larry Intel Davison Peter Intel Haddadin Mutaz SEMI McLeod Ian Table 2 Leadership Changes

Group Previous Leader New Leader International Reticle SMIF Pod and Loadport Reliability Task Force

None (new task force) Astrid Gettel (GLOBALFOUNDRIES)


Table 3 Ballot Results (or move to Section 4, Ballot Review) Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review. Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.

Document # Document Title Committee Action

4770A New Standard: Mechanical Specification for Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers

Passed

4967 Revision to SEMI E1-0310, Specification for Open Plastic and Metal Wafer Carriers Passed 4980 Revision to SEMI E154-0310, Mechanical Interface Specification for 450mm Load Port See Line Items Line Item 1 Change y374 thickness; add E158 to Referenced Standards Passed Line Item 2 Correct dimension text in table to match dimensions in figures Passed Line Item 3 Add section 7.7 (load port numbering) Passed Line Item 4 Revise section R1-8 Passed Line Item 5 Add text describing that a user defined front panel must allow OHV clearance Passed 4981 Revision to SEMI E158-0710, Mechanical Specification for Fab Wafer Carrier Used to

Transport and Store 450mm Wafers (450 FOUP) and Kinematic Coupling See Line Items

Line Item 1 Correct minor errors Passed Line Item 2 Change carrier depth and minor corrections Passed Line Item 3 Add sense areas for OHT and Carrier Door Passed Line Item 4 Add definitions Passed Line Item 5 Remove Related Information paragraph R2-5 Passed 4982 New Standard: Mechanical Interface Specification for 450mm FOSB Load Port Passed 4983 Reapproval of SEMI E15.1-0305, Specification for 300 mm Tool Load Port Passed 4984 Reapproval of SEMI E57-0600E2, Mechanical Specification for Kinematic Couplings

Used to Align and Support 300 mm Wafer Carriers Passed

4985 Reapproval of SEMI E63-1104, Mechanical Specification for 300mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface

Passed

1 Welcome / Call to Order

Mutaz Haddadin called the meeting to order at 8:08 AM PDT. Attendees introduced themselves. The meeting reminders on antitrust issues, intellectual property issues and holding meetings with international attendance were reviewed.

2 Review and Approval of Previous Meeting Minutes

The committee reviewed the minutes of the previous meeting. Ian McLeod displayed corrections provided by Mutaz Haddadin.

Motion: Approve the minutes of the previous meeting as corrected. By / 2nd: Alan Crockett / Eddy Bass Discussion: Vote: 16-0. Motion passed.


3 Ballot Review

3.1 Ballots Without Rejects or Comments

3.1.1 Document #4967, Revision to SEMI E1-0310, Specification for Open Plastic and Metal Wafer Carriers

As Cast Ballot Tally Summary For Document 4967

Return Percentage: 60.61% TC Member Returns: 40 TC Member Distribution: 66

Total votes Received: 46 Number of Abstains: 28 Number of Accepts: 18 Accept %: 100.00%

Number of Rejects: 0

Total Comments: 0 Total Rejects: 0 Comment Issuer(s): Reject Issuer(s):

3.1.2 Document # 4980, Revision to SEMI E154-0310, Mechanical Interface Specification for 450mm Load Port 3.1.2.1 Line Item 3, Add section 7.7 (load port numbering)

As Cast Ballot Tally Summary For Document 4980- Line Item 3





3.1.3 Document #4981, Revision to SEMI E158-0710, Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450mm Wafers (450 FOUP) and Kinematic Coupling 3.1.3.1 Line Item 5, Remove Related Information paragraph R2-5

As Cast Ballot Tally Summary For Document 4981 - Line Item 5





3.1.4 Document #4983, Reapproval of SEMI E15.1-0305, Specification for 300 mm Tool Load Port







3.1.5 Document #4984, Reapproval of SEMI E57-0600E2, Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers






3.1.6 Document #4985, Reapproval of SEMI E63-1104, Mechanical Specification for 300mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface






3.1.7 Motions and IP Check for Ballots Without Rejects or Comments

Safety Check Motion: Find that these documents are not safety documents. By / 2nd: Alan Crockett / Eddy Bass Discussion: Vote: 14-0

Intellectual Property Check The meeting chair asked those present in person or by electronic link, if they were aware of any patented or copyrighted material in the Standard or Guideline. (Note: Such material might have become known since the Standard or Safety Guideline was last reviewed, or might become relevant due to this ballot.) X No patented or copyrighted material is known to exist in the Standard or Guideline. (no motion needed)

Final Action Motion: Pass these documents as balloted and forward them to the A&R SC for procedural review. By / 2nd: Alan Crockett / Eddy Bass Discussion: Vote: 14-0


3.2 Ballots With Rejects or Comments

3.2.1 Document # 4980, Revision to SEMI E154-0310, Mechanical Interface Specification for 450mm Load Port 3.2.1.1 Line Item 1, Change y374 thickness; add E158 to Referenced Standards Tallies


Return Percentage: 60.61% TC Member Returns: 40 TC Member Distribution: 66 Total votes Received: 46 Number of Abstains: 22 Number of Accepts: 24 Accept %: 100.00% Number of Rejects: 0

Total Comments: 1 Total Rejects: 0 Comment Issuer(s): Daifuku - Robert Stoner

Reject Issuer(s):

Rejects/Negatives

As shown in the tallies above, no rejects were received for Document 4980 Line Item 1.

Comments Comment 1

Referenced Section Figure 13 From Daifuku: Robert Stoner

Comment Figure 13, dimension “z375=163.25±0.1”: The nominal value should not have greater precision than the tolerance value. Recommend changing to “z375=163.25±0.10”.

Com

ment

Discussion The committee agreed to do one of the following actions. X *No motion is required in this step. No further action was taken by the committee. Refer to the task force for more consideration. New Business

Other

Editorial Change Case 1: No vote in this section :

Action proposed

X To be included and voted on in § 5. Summary of Editorial Changes.

Editorial Changes FROM: Figure 13 (Excerpted below)

TO: Figure 13 (change z375 to equal 163.25±0.10)

1

Justification: (If necessary) Typographical error. The number of significant digits for z375 is obvious from its starting value.

Motion To approve the above editorial changes Motion by/2nd by Larry Hartsough (U. A. Associates) / Eddy Bass (ISMI)

Discussion Vote 16-0 Motion passed


3.2.1.2 Line Item 2, Correct dimension text in table to match dimensions in figures Tallies



Total Comments: 1 Total Rejects: 0 Comment Issuer(s): MuratecAuto - Makoto Yamamoto

Reject Issuer(s):

Rejects/Negatives


Comments Comment 1

Referenced Section Table 3 and Figure 13

From Muratec: Makoto Yamamoto Comment LI 2 some slashed numbers in Table 3 and Figure 13 do not match.

Com

ment

Discussion TF Response: Ballot is correct since both the figure and the table originally had wrong numbers. The committee agreed to do one of the following actions. X *No motion is required in this step. X No further action was taken by the committee. Refer to the task force for more consideration. New Business

Action proposed

Other

Editorial Changes

No editorial changes were approved for Document 4980 Line Item 2.


3.2.1.3 Line Item 4, Revise section R1-8 Tallies



Total Comments: 1 Total Rejects: 3 Comment Issuer(s): MuratecAuto - Makoto Yamamoto

Reject Issuer(s): MuratecAuto - Masanao Murata MuratecAuto - Tatsuo Tsubaki Sinfonia - Mitsutoshi Ochiai

Rejects/Negatives Reject 1 (Muratec: Masanao Murata and Tatsuo Tsubaki) Negative 1 of Reject 1 (submitted by Masanao Murata)

*TF/Committee to fill in if necessary Referenced Section R1-8

*Original negative comment and justification should be included.

Negative Reason Section R1-8 is not correct (R1-11 is correct)

No withdrawal made Withdrawal X Withdrawal document received by staff on 2010/07/07 Negative is: X (A) withdrawn (counted under h in disposition) (B) not related (counted under i in disposition) (C) related and not persuasive (significant) (D) not significant (counted under j in disposition) (E) related and persuasive DOCUMENT FAILS

Final

Comment generated. See comment #x Negative 2 of Reject 1 (submitted by Tatsuo Tsubaki)



Negative Reason Such a description doesn't exist in R1-8.


Final

Comment generated. See comment #x


Reject 2 (Sinfonia: Mitsutoshi Ochiai) Negative 1 of Reject 2



Negative Reason Negative: The content of R1-8 in Line Item 4，5 is different from R1-8 in E154


Final


Comments Comment 1

Referenced Section R1-8

From Muratec: Makoto Yamamoto Comment Original section is not R1-8 but R1-11

Com

ment

Discussion TF Response: SEMI Staff will help TF correct it. The committee agreed to do one of the following actions. X *No motion is required in this step. No further action was taken by the committee. Refer to the task force for more consideration. New Business

Action proposed

X Other: Have SEMI Staff work with Pubs to make sure the correct section is updated.

Editorial Changes

No editorial changes were approved for Document 4980, Line Item 4.


3.2.1.4 Line Item 5, Add text describing that a user defined front panel must allow OHV clearance Tallies




Reject Issuer(s): MuratecAuto - Masanao Murata MuratecAuto - Tatsuo Tsubaki Sinfonia - Mitsutoshi Ochiai

Rejects/Negatives Reject 1 (Muratec: Masanao Murata and Tatsuo Tsubaki) Negative 1 of Reject 1 (submitted by Masanao Murata)

*TF/Committee to fill in if necessary Referenced Section R1-1.8


Negative Reason Section R1-1.8 is not correct (R1-9 is correct)


Final




Negative Reason R1-1.8 doesn't exist in E154-0310.


Final






Negative Reason The content of R1-8 in Line Item 4，5 is different from R1-8 in E154


Final


Comments Comment 1

Referenced Section Figure 5

From Daifuku: Robert Stoner

Comment Figure 5, dimension “y104=321.25 +10/-5”: The nominal value should not have greater precision than the tolerance value. Recommend changing to “y104=321.25 +10.00/-5.00”.

Com

ment

Discussion The committee agreed to do one of the following actions. X *No motion is required in this step. No further action was taken by the committee. Refer to the task force for more consideration. New Business

Other


Action proposed


Editorial Changes FROM: Figure 5 (excerpted)

TO: Figure 5 (change the value of y104 to equal 321.25 +10.00/-5.00) Text should read: Y104=321.25 (Nominal) with +10.00/-5.00 adjustability

1

Justification: (If necessary) Formatting for consistency. The number of significant digits for y104 is obvious from its starting value.

Motion To approve the above editorial changes Motion by/2nd by Eddy Bass (ISMI) / Alan Crockett (KLA-Tencor) Discussion Vote 16-0 Motion passed


3.2.1.5 Motions and IP Check for Document 4980

Safety Check Motion: Find that this document is not a safety document. By / 2nd: Eddy Bass / John Davies Discussion: Vote: 13-0


Final Action Motion: Pass these line items as balloted or with editorial changes as applicable and forward them to the A&R SC for

procedural review. By / 2nd: Eddy Bass / Alan Crockett Discussion: Vote: 16-0


3.2.2 Document #4982, New Standard: Mechanical Interface Specification for 450mm FOSB Load Port Tallies



Total Comments: 1 Total Rejects: 7 Comment Issuer(s): Entegris - Barry Gregerson

Reject Issuer(s): Acteon - Shoji Komatsu Brooks - Daniel Babbs MuratecAuto - Makoto Yamamoto MuratecAuto - Masanao Murata MuratecAuto - Tatsuo Tsubaki Sinfonia - Mitsutoshi Ochiai TDSystems - John Davies

Rejects/Negatives Reject 1 (Muratec: Masanao Murata, Tatsuo Tsubaki, and Makoto Yamamoto) Negative 1 of Reject 1 (submitted by Masanao Murata)

*TF/Committee to fill in if necessary Referenced Section


Negative

Reason Difference between LP for FOUP/MAC and the one for FOSB is only f234. It will be better the LP for FOSB is included in E154. No withdrawal made Withdrawal X Withdrawal document received by staff on 2010/07/12 Negative is: X (A) withdrawn (counted under h in disposition) (B) not related (counted under i in disposition) (C) related and not persuasive (significant) (D) not significant (counted under j in disposition) (E) related and persuasive DOCUMENT FAILS

Final




Negative

Reason Difference between LP for FOUP/MAC and the one for FOSB is only f234. It will be better the LP for FOSB is included in E154. No withdrawal made Withdrawal X Withdrawal document received by staff on 2010/07/12 Negative is: X (A) withdrawn (counted under h in disposition) (B) not related (counted under i in disposition) (C) related and not persuasive (significant) (D) not significant (counted under j in disposition) (E) related and persuasive DOCUMENT FAILS

Final



Negative 3 of Reject 1 (submitted by Makoto Yamamoto) *TF/Committee to fill in if necessary Referenced

Section *Original negative comment and justification should be included.

Negative Reason This should be in 4980 as a part of requirement.


Final

Comment generated. See comment #x Disposition of Reject 1 3 Original number of Negatives (g) 3 # of Negatives withdrawn (h) 0 # of Negatives found not related (i) 0 # of Negatives found not significant (j)

X g-(h+i+j)=0 � Reject is Not Valid and is not included in the denominator of § VI. Approval Conditions Check

g-(h+i+j)>0 � Reject is included in the denominator of § VI. Approval Conditions Check Final

Reject without a Negative � Not Valid

Reject 2 (Brooks: Daniel Babbs) Negative 1 of Reject 2

*TF/Committee to fill in if necessary Referenced Section 6.2


Negative

Reason f234 value of 390N is too high and will require a unique load port design. The standards do not allow the use of latch keys to assist in closing the door. Testing is required to understand the full impact of wafer carriers with this level of door closure force on a load port. No withdrawal made Withdrawal X Withdrawal document received by staff on 2010/07/12 Negative is: X (A) withdrawn (counted under h in disposition) (B) not related (counted under i in disposition) (C) related and not persuasive (significant) (D) not significant (counted under j in disposition) (E) related and persuasive DOCUMENT FAILS

Final



Disposition of Reject 2 1 Original number of Negatives (g) 1 # of Negatives withdrawn (h) 0 # of Negatives found not related (i) 0 # of Negatives found not significant (j)







Negative Reason This ballot should be included in E154 as one of types of the load port standard


Final






Reject 4 (Acteon: Shoji Komatsu) Negative 1 of Reject 4



Negative

Reason This document is interface standard, however the dimensions, Force and Torque of specific interface aren't mentioned in main body. No withdrawal made Withdrawal X Withdrawal document received by staff on 2010/07/14 Negative is: X (A) withdrawn (counted under h in disposition) (B) not related (counted under i in disposition) (C) related and not persuasive (significant) (D) not significant (counted under j in disposition) (E) related and persuasive DOCUMENT FAILS

Final





Reject 5 (T D Systems: John Davies) Negative 1 of Reject 5 (NOTE FROM SEMI STAFF: At the time that this reject was reviewed, the other four rejects had all been withdrawn, and so the accept rate for this document was above 90%. Therefore, significance findings were not addressed, as they would have no bearing on the approval for the document.)


*Original negative comment and justification should be included. N

egative

Reason

I reject document 4982 on the grounds that it lacks an essential requirement and so cannot be implemented; thus it is not ready for publication as a SEMI Standard. The only essential difference between this document and the published standard E154 is the door closing force, but this requirement is not specified in a publically available document. If this information is made explicitly available (e.g. by providing a value for the closing force in the document, or by reference to another published standard), then I would accept the document. This would require a non-editorial modification and reballot.

X No withdrawal made GO TO “Related” section Withdrawal Withdrawal document received by staff on XXXX GO TO “Final” (A)

“Related” is mutually agreed upon. X *This motion can be appended to the motion for Persuasive (See Persuasive

Section)

Related

Motion and Reason

Negative is related (needs over 1/3 votes to pass)


Negative is not related (needs 2/3 or more votes to pass) Reason XXXX Negative is related and persuasive (needs over 1/3 votes to pass) X Negative is related and not persuasive (needs 2/3 or more votes to pass) Motion and

Reason Reason John Davies said that the committee can approve sending the document for procedural review with [an amendment to the motion] to delay publication until the 450mm FOSB document (4760) is published.

Motion by/2nd by Larry Hartsough (U A Associates) / Alan Crockett (KLA-Tencor) Discussion

16-0 [Negative is related and persuasive] > 1/3 [Negative is related and not persuasive] < 2/3

GO TO “Final” (E)

2/3=


Comments Comment 1

Referenced Section *TF/Committee to fill in if necessary From Entegris: Barry Gregerson

Comment We believe that it is preferable to have single 450mm load port specification that is compatible with all carrier types ie.. FOUP, FOSB and MAC.

Com

ment

Discussion

TF Response: It was not possible to build consensus in the ISB TF for FOSB closing force to be the same as the FOUP and MAC, hence a separate LP document was developed to address the need for the FOSB higher closing force to avoid creating problems for the FOUP, equipment suppliers and end users. The FOSB LP was discussed and agreed upon by the Load Port team and the IPIC TF and the ballot was reviewed by the PIC technical editor.

The committee agreed to do one of the following actions. X *No motion is required in this step. X No further action was taken by the committee. Refer to the task force for more consideration. New Business

Action proposed

Other

Editorial Changes

No editorial changes were approved for Document 4982.

Approval Conditions Check

Approval Rate: 18 [Accepts] / 19 [Accepts + Valid Rejects] = 94.7% >= 90%

Safety Check Motion: Find that these documents are not safety ballots. By / 2nd: Alan Crockett / Eddy Bass Discussion: Vote: 16-0. Motion passed.


Final Action Motion: Pass this document as balloted and forward it to the A&R SC for procedural review, with request that the

document be held from publishing until 450mm FOSB is approved for publication. By / 2nd: Tom Quinn / Alan Crockett Discussion: Vote: 17-0. Motion passed.


3.2.3 Document #4981, Revision to SEMI E158-0710, Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450mm Wafers (450 FOUP) and Kinematic Coupling 3.2.3.1 Line Item 1, Correct minor errors Tallies



Total Comments: 3 Total Rejects: 0 Comment Issuer(s): Gudeng - Jerry Lu Daifuku - Robert Stoner KLA - Alan Crockett

Reject Issuer(s):

Rejects/Negatives


Comments Comment 1

Referenced Section Table 1 From Gudeng: Jerry Lu

Comment Correct Table 1 "Datum Measured From" reference for r7 to match figure 16" Correct from "x28, y29" to "x28, y38"

Com

ment

Discussion TF Response: EDITORIAL CHANGE -- FIGURE 16 IS OK; TABLE NEEDS CORRECTION. The committee agreed to do one of the following actions. X *No motion is required in this step. No further action was taken by the committee. Refer to the task force for more consideration. New Business

Other


Action proposed


Comment 2

Referenced Section *TF/Committee to fill in if necessary From KLA-Tencor: Alan Crockett

Comment This standard was developed with the constraint that 450 mm equipment should fit into a 300 mm facility with 12 foot ceilings. This constraint did not allow sufficient space within the carriers for the anticipated amount of process-induced wafer deformation.

Com

ment

Discussion TF Response: Understood. End user constraints due to existing fab designs. NO ACTION The committee agreed to do one of the following actions. X *No motion is required in this step. X No further action was taken by the committee. Refer to the task force for more consideration. New Business

Action proposed

Other


Comment 3 Referenced Section Figure 17 From Daifuku: Robert Stoner

Comment Figure 17, dimension “Θ3=30.0°±2”: The nominal value should not have greater precision than the tolerance value. Also the tolerance value should be followed by the degree symbol. Recommend changing to “Θ3=30.0°±2.0°” or “Θ3=30°±2°”.

Com

ment

Discussion TF Response: TF prefers “Θ3=30°±2°”. Editorial change - “Θ3=30°±2°” conforms to existing practice in document. Fix in Table 1 as well.

The committee agreed to do one of the following actions. X *No motion is required in this step. No further action was taken by the committee. Refer to the task force for more consideration. New Business

Other


Action proposed


Editorial Changes

FROM: Table 1, r7 row, “Datum Measured From” cell x26 x28, y29 TO: Table 1, r7 row, “Datum Measured From” cell x26 x28, y29 y38

1

Justification: (If necessary) Typographical error. Figure 16 of E158 shows that r7 is measured from x28, y38.

FROM: Figure 17 Θ3=30.0°±2 TO: Figure 17 Θ3=30±2 2

Justification: (If necessary) Typographical error. The latter expression of the value range for Θ3 is consistent with E158. FROM: Table 1, Θ3 row, “Value Specified” cell 30.0 ± 2 degrees TO: Table 1, Θ3 row, “Value Specified” cell 30 ± 2 degrees 3

Justification: (If necessary) Typographical error. The latter expression of the value range for Θ3 is consistent with E158.

Motion To approve the above editorial changes Motion by/2nd by Tom Quinn (Intel) / Shoji Komatsu (Acteon) Discussion Vote 17-0 Motion passed


3.2.3.2 Line Item 2, Change carrier depth and minor corrections Tallies




Reject Issuer(s):

Rejects/Negatives


Comments Comment 1


From Daifuku: Robert Stoner

Comment Figure 35, dimension “y4=246.25±0.5”: The nominal value should not have greater precision than the tolerance value. Recommend changing to “y4=246.25±0.50”.

Com

ment

Discussion TF Response: Editorial change as specified in comment. Fix Table 1 as well. The committee agreed to do one of the following actions. X *No motion is required in this step. No further action was taken by the committee. Refer to the task force for more consideration. New Business

Other l C Case 1: No vote in this section :

Action proposed


Comment 2

Referenced Section *TF/Committee to fill in if necessary

From Daifuku: Robert Stoner Comment Figure 36, FROM: drawing, callout bubble says “r19≥R228”. It should say “y19≥228”.

Com

ment

Discussion TF Response: NO ACTION NEEDED - "To" figure is correct. The committee agreed to do one of the following actions. X *No motion is required in this step. X No further action was taken by the committee. Refer to the task force for more consideration. New Business

Action proposed

Other


Editorial Changes FROM: Figure 35 (excerpted)

TO: Figure 35 y4=246.25±0.50

1

Justification: (If necessary) Typographical error. The number of significant digits for y4 is obvious from its starting value. FROM: Table 1, y4 row, “Value Specified” cell 246.25±0.5 TO: Table 1, y4 row, “Value Specified” cell 246.25±0.50 2

Justification: (If necessary) Typographical error. The number of significant digits for y4 is obvious from its starting value.

Motion To approve the above editorial changes Motion by/2nd by Tom Quinn (Intel) / Shoji Komatsu (Acteon)



3.2.3.3 Line Item 3, Add sense areas for OHT and Carrier Door Tallies As Cast Ballot Tally Summary For Document 4981- Line Item 3


Total Comments: 2 Total Rejects: 0 Comment Issuer(s): Gudeng - Jerry Lu Daifuku - Robert Stoner

Reject Issuer(s):

Rejects/Negatives

As shown in the tallies above, no rejects were received for Document 4981, Line Item 3.

Comments Comment 1

Referenced Section Table 1

From Gudeng: Jerry Lu

Comment Correct Table 1 "Datum Measured From" reference for r28 to match figure 21" Correct from "x38, z31" to "x49, z31"

Com

ment

Discussion TF Response: EDITORIAL CHANGE -- FIGURE 21 IS OK; TABLE NEEDS CORRECTION. The committee agreed to do one of the following actions. X *No motion is required in this step. No further action was taken by the committee. Refer to the task force for more consideration. New Business

Other


Action proposed


Comment 2


From Daifuku: Bob Stoner

Comment add note stating that the vacuum pads must be opaque . . .(This was proposed in non-ballot section ii but was not shown in the figure)

Com

ment

Discussion TF Response: NO ACTION NEEDED. Line item text has requirement defined. Note for figure not necessary.

The committee agreed to do one of the following actions. X *No motion is required in this step. X No further action was taken by the committee. Refer to the task force for more consideration. New Business

Action proposed

Other


Editorial Changes FROM: Table 1, r28 row, “Datum Measured From” cell x38, z31

TO: Table 1, r28 row, “Datum Measured From” cell x49, z31

1

Justification: (If necessary) Typographical error. Figure 21 of E158 shows that r28 is measured from x49, z31.

Motion To approve the above editorial changes Motion by/2nd by Tom Quinn (Intel) / Shoji Komatsu (Acteon) Discussion Vote 17-0 Motion passed


3.2.3.4 Line Item 4, Add definitions Tallies




Reject Issuer(s):

Rejects/Negatives As shown in the tallies above, no rejects were received for Document 4981, Line Item 4. Comments Comment 1

Referenced Section 5.2 From Daifuku: Bob Stoner Comment For inserted definitions, the terms should be in italics font, as in original ballot.

Com

ment

Discussion TF RESPONSE: No action needed. Pubs will fix. The committee agreed to do one of the following actions. X *No motion is required in this step. X No further action was taken by the committee. Refer to the task force for more consideration. New Business

Action proposed

Other Editorial Changes No editorial changes were approved for Document 4981, Line Item 4.

3.2.3.5 Motions and IP Check for Document 4981

Safety Check Motion: Find that this document is not a safety document. By / 2nd: Alan Crockett / Shoji Komatsu Discussion: Vote: 17-0. Motion passed. Intellectual Property Check The meeting chair asked those present in person or by electronic link, if they were aware of any patented or copyrighted material in the Standard or Guideline. (Note: Such material might have become known since the Standard or Safety Guideline was last reviewed, or might become relevant due to this ballot.) X No patented or copyrighted material is known to exist in the Standard or Guideline. (no motion needed) Final Action Motion: Pass these line items as balloted or with editorial changes as applicable and forward them to the A&R SC for

procedural review. By / 2nd: Alan Crockett / Eddy Bass Discussion: Vote: 17-0. Motion passed.


3.2.4 Document #4770A, New Standard: Mechanical Specification for Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers Tallies

As Cast Ballot Tally Summary For Document 4770A


Total votes Received: 46 Number of Abstains: 21

Number of Accepts: 22 Accept %: 88.00% Number of Rejects: 3

Total Comments: 4 Total Rejects: 4

Comment Issuer(s): Daifuku - Robert Stoner Gudeng - Jerry Lu ITSdI - Rafael Vargas-Bernal KLA - Alan Crockett

Reject Issuer(s): Miraial - Tsuyoshi Nagashima Shimizu - Yasuhiro Shimizu Shin-Etsu Polymer - Akira Kashimoto Shin-Etsu Polymer - Mikio Furukawa

Rejects/Negatives Reject 1 (Miraial: Tsuyoshi Nagashima) NOTE FROM SEMI STAFF: On July 14, Mr. Nagashima withdrew his reject AND requested that his vote be changed to Accept with Comment, in accordance with Regulations ¶ 9.5.2. All 4 of his negatives were therefore reviewed by the committee as comments. Disposition of Reject 1 4 Original number of Negatives (g) 4 # of Negatives withdrawn (h) 0 # of Negatives found not related (i) 0 # of Negatives found not significant (j)

X g-(h+i+j)=0 � Reject is Not Valid and is not included in the denominator of § VI. Approval Conditions Check g-(h+i+j)>0 � Reject is included in the denominator of § VI. Approval Conditions Check Final


Reject 2 (Shimizu Consulting: Yasuhiro Shimizu) NOTE FROM SEMI STAFF: On July 13, Mr. Shimizu withdrew his reject AND requested that his vote be changed to Accept with Comment, in accordance with Regulations ¶ 9.5.2. All 48 of his negatives were therefore reviewed by the committee as comments. Disposition of Reject 2 48 Original number of Negatives (g) 48 # of Negatives withdrawn (h) 0 # of Negatives found not related (i) 0 # of Negatives found not significant (j)

X g-(h+i+j)=0 � Reject is Not Valid and is not included in the denominator of § VI. Approval Conditions Check g-(h+i+j)>0 � Reject is included in the denominator of § VI. Approval Conditions Check Final



Reject 3 (Shin-Etsu Polymer: Mikio Furukawa and Akira Kashimoto) Negative 1 of Reject 3 (submitted by Mikio Furukawa)



Negative Reason Drop Assumption should be change to "Requirement".


Final

Comment generated. See comment #x Negative 2 of Reject 3 (submitted by Akira Kashimoto)

*TF/Committee to fill in if necessary Referenced Section 8 (after 7)


Negative

Reason

Negative Drop Height Assumption should be indicated as Requirement. Rationale: TF decided to recognize ISTA-3E(210mm palletized) as only the drop assumption for 450MAC. Mentioning at Related Documents can not express it as the required assumption. No withdrawal made Withdrawal X Withdrawal document received by staff on 2010/07/14 Negative is: X (A) withdrawn (counted under h in disposition) (B) not related (counted under i in disposition) (C) related and not persuasive (significant) (D) not significant (counted under j in disposition) (E) related and persuasive DOCUMENT FAILS

Final






Comments

Due to the large number of comments reviewed, the full text of each comment is not included. See Attachment 01 for the full text of each comment.

Submitter (Company: Name) # of Comments Committee Action(s) Miraial: Tsuyoshi Nagashima

4 Editorial Change: 1, 4 New Business: 2 No Further Action: 3

Shimizu Consulting: Yasuhiro Shimizu

48 Editorial Change: 1, 5, 10, 13, 14, 20, 22, 25, 26, 33, 34, 35, 47, 48 New Business: 6, 18*, 29*, 31, 36, 38, 44, 45, No Further Action: 2, 3, 4, 7, 8, 9, 11, 12, 15, 16, 17, 18*, 19, 21, 23, 24, 27, 28, 29*, 30, 32, 37, 39, 40, 41, 42, 43, 46,

Gudeng: Jerry Lu 5 Editorial Change: 2, 3, 5 New Business: 1, 4,

ITSdI: Rafael Vargas-Bernal 3 No Further Action (all comments) KLA-Tencor: Alan Crockett 1 No Further Action Shin-Etsu Polymer: Akira Kashimoto

8 Editorial Change: 5 New Business: 1, 3, 4, 8 No Further Action: 2, 6, 7,

Daifuku: Bob Stoner 5 Editorial Change: 5 New Business: 2, 3, 4 No Further Action: 1

Editorial Changes FROM: Section 4.1 NOTE 2: SEMI is developing a Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers, intended to be used in conjunction with this document. TO: Section XXX(Related Standards) SEMI M76 — Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers 1

Justification: (If necessary) No change in technical content. Changes to Notes are editorial by definition, as are additions or deletions from the Related Standards section. FROM: Following Section 2.3 (add note as shown below) TO: Following Section 2.3 NOTE: The carrier dimensions and door force have been developed based on the assumption for a shipping system and drop height as called out in ISTA-3E (unitized loads).

2

Justification: (If necessary) No change in technical content. Changes to notes are editorial by definition. FROM: Section 6.2 NOTE 4: The top surfaces of the Kinematic Coupling Pins are not the surfaces on which the carrier rests. Appendix 3 shows how test fixtures can be made to rest on the KCPs to duplicate the position of a carrier. TO: Section 6.2 NOTE 4: The top surfaces of the Kinematic Coupling Pins are not the surfaces on which the carrier rests. Appendix 1 shows how test fixtures can be made to rest on the KCPs to duplicate the position of a carrier.

3

Justification: (If necessary) Typographical error. The information in question is found in Appendix 1.


FROM: Section 14.2 14.2 The carrier door is on the front of the 450 MAC. The door and its frame must be designed to mate with a loadport that conforms to the Mechanical Interface Specification for 450 mm Load Port. The MAC door and its frame must have surfaces that mate with seal areas, the MAC door sensing area, and reserved spaces for vacuum application. See Figures 19, 21 & 23. TO: Section 14.2 14.2 The carrier door is on the front of the 450 MAC. The door and its frame must be designed to mate with a loadport that conforms to the Mechanical Interface Specification for 450 mm Load Port [SEMI E154]. The MAC door and its frame must have surfaces that mate with seal areas, the MAC door sensing area, and reserved spaces for vacuum application. See Figures 19, 21 & 23.

4

Justification: (If necessary) Editorial style. SEMI E154 is the “Mechanical Interface Specification for 450 mm Load Port”. FROM: (multiple sections)

TO: (multiple sections)

5

Justification: (If necessary) PDF Conversion error. The picture to be removed is a duplicate of Figure 4, so no change in technical content occurs due to its removal.


FROM: Section 17.5 17.5 The carrier shall have features to constrain the wafer along all axes so the wafer will be within the wafer pickup volume after the door is opened. See Error! Reference source not found. & 32. TO: Section 17.5 17.5 The carrier shall have features to constrain the wafer along all axes so the wafer will be within the wafer pick-up volume after the door is opened. See Figure 31 & 32.

6

Justification: (If necessary) PDF Conversion error. Wafer pick-up volume details are illustrated in Figures 31 (Wafer Pick-Up Volume (Between Wafer Supports)) and 32 (Wafer Pick-Up Side View), as is obvious from their titles. FROM: Figure 36 (excerpted)

TO: Figure 36

R229R229

7

Justification: (If necessary) Typographical error. r38’s value range is correctly specified as “≥R229” in Figures 28 and 34. FROM: Table 1, row r38

TO: Table 1, row r38

8

Justification: (If necessary) Typographical error. r38 clearly appears in Figures 28, 34, and 36. (Columns 1 and 2 are “Symbol Used” and “Figure” respectively.) FROM: Table 1, rows y15 ,y16, and y18, 3rd cells

TO: Table 1, rows y15, y16, and y18, 3rd cells y15 row: 3rd cell value should be 194.00 ± 0.05 y16 row: 3rd cell value should be 115.50 ± 0.05 y18 row: 3rd cell value should be 145.00 ± 0.05

9

Justification: (If necessary) Consistency of formatting. The number of significant digits for each value is obvious from the tolerance expressed for each.


FROM: Table 2, rows z44 and z45

TO: Table 2, rows z44 and z45

10

Justification: (If necessary) Typographical error. z34 is correctly shown as ≤181 in Figure 20 and Table 1, and z42 is correctly shown as ≤13 in Figure 20, Table 1, and Table 2.

Motion To approve the above editorial changes Motion by/2nd by Alan Crockett (KLA-Tencor) / John Burns (Entegris)


Safety Check Motion: Find that this document is not a safety document. By / 2nd: Alan Crockett / Eddy Bass Discussion: Vote: 16-0. Motion passed. Intellectual Property Check The meeting chair asked those present in person or by electronic link, if they were aware of any patented or copyrighted material in the Standard or Guideline. X Patented or copyrighted material is known to exist in the Standard or Guideline but release for some of the material(s) has

NOT been obtained or presented to the committee. The committee moves to: X Wait for the release of the patented or copyrighted material.

By/2nd: Alan Crockett / Eddy Bass Disc: Vote: 16-0. Motion passed Final Action Motion: Pass this document with editorial changes and forward it to the A&R SC for procedural review. By / 2nd: Alan Crockett / Eddy Bass Discussion: Vote: 17-0. Motion passed.

Attachment: 01, Procedural Review File for Document 4770A


3.2.4.1 IP Disposition for Document 4770A

Tom Quinn presented information on intellectual property that could be material to Document 4770A. (See Attachment 02.)

Motion: Find the cited intellectual property to be potentially material to Document 4770A and ask SEMI to issue requests for Letters of Assurance from the companies owning said intellectual property.

By / 2nd: Alan Crockett (KLA-Tencor) / Peter Davison (Intel) Discussion: Vote: 14-0. Motion passed.

Action Item: 2010Jul-01, Standards staff to issue request for Letters of Assurance to the owners of the IP found to be potentially material to Document 4770A.

Attachment: 02, Related Patents for 4770A


4 Subcommittee & Task Force Reports

4.1 EUV Reticle Task Force

Long He reported for the EUV Reticle Task Force. (See Attachment 03.) The task force plans to ballot an update to SEMI E152; proposed revisions include adding purging ports (# and location) and door bottom sensor pads (#, location, and size). (Full details of the proposal are included in the attachment.)

Discussion of the proposal: Slide 4:

The drawing is reference only – Mutaz Haddadin and Robert Carlson said it should NOT be used. Matt Fuller said that “purge ports” should be called “port exclusion areas”. Also, there should be 4 of these

areas, not 2. Mutaz Haddadin and Robert Carlson said “sensing pad” should be “sensing area” and should encompass

pod lock mechanism area. Matt Fuller said the task force should refer to E158 for an example of how to define exclusion areas and

sensing areas.

Slide 5: Alan Crockett noted that ergonomic considerations are not limited to weight, but are also determined by reach.

Slide 6: Consensus from the meeting attendees that there should be no top manual handle.

Slide 11: It was noted that the task force needs to check E111 to ensure input from end users with regard to info pad definitions.

Slide 13: Robert Carlson noted that info pads are not currently available. Long He noted that info pad sensing for RFID is implicitly included.

Action Item: 2010Jul-02, Long He to submit SNARF for E152 revision for GCS review.

Attachment: 03, E152 Revision Proposal

4.2 450mm Assembly & Test Die Prep (ATDP) Task Force

No report was provided. Ian McLeod noted that the task force met earlier in the week and discussed drafts of ballots in development by the Japan 450mm ATDP Task Force.

4.3 450mm International Physical Interfaces & Carriers (450IPIC) Task Force

Mutaz Haddadin reported for the 450mm IPIC Task Force. (See Attachment XX.) The task force conducted ballot review for revisions to E154 and E158 and for a new standard on 450mm front opening shipping box (FOSB) loadports. Mutaz noted that the 450mm FOSB loadport standard, though approved by the committee, will not be published until the FOSB standard is published, and also that if the FOSB standard changes (e.g. closing force value changes, clamping force changes, etc.), the NA PIC Committee will revisit the FOSB loadport standard to ensure that compatibility is still valid.

Attachment: 04, 450IPIC Task Force minutes

4.4 450mm International Shipping Box (450ISB)Task Force

The task force reviewed Document 4760, which was failed and returned to task force by the North America Silicon Wafer Committee. The task force will re-work and re-ballot the document for balloting in cycle 7 and adjudication in Japan.


4.5 450mm North America Shipping Box Task Force.

The task force reviewed Document 4770A. There are some new items to work on. The task force will resume meeting at the end of September.

4.6 Global PIC Maintenance Task Force

John Davies reported for the Global PIC Maintenance Task Force. All of the ballots for which the task force was responsible for review made it through voting with no rejects or comments, so the task force did not meet. New business for the task force includes 1 document that needs 5-year review, but that will not be a pressing matter until November.

5 Liaison Reports 5.1 Europe Equipment Automation Committee

A report was not available at the time of the meeting. It is included as an attachment to these minutes.

Attachment: 05, Europe Equipment Automation Committee Report

5.2 Japan Physical Interfaces and Carriers Committee

Tsuyoshi Nagashima reported for the Japan Physical Interfaces and Carriers Committee. Of note:

Tsutomu Okabe (TDK) joins Shoji Komatsu and Tsuyoshi Nagashima as committee co-chair. The International E84 Revision Task Force was sunsetted. Next meeting: 10 September 2010 at SEMI Japan in Tokyo. There will be a STEP on 450mm Standards on 16 September 2010 at SEMI Japan in Tokyo. Committee

members are considering holding another step on 450mm standards at SEMICON Japan 2010 as well.

Attachment: 06, Japan Physical Interfaces and Carriers Committee Report

5.3 SEMI Staff Report

Ian McLeod gave the SEMI Staff Report. Of note:

The NA Standards Fall 2010 Meetings will be held the week of November 8, at or near SEMI HQ in San Jose, CA.

Cycle 5 ballots are due July 30; cycle 6 ballots are due August 30. The Standards Department is expanding into new regions and technical areas, and is asking for the help of

Program Members in communicating the value of standards development and usage to parties in those areas. Interested members should contact Standards staff.

Attachment: 07, SEMI Staff Report

6 Old Business

6.1 Reticle SMIF Pods and Loadports

Jan Rothe addressed the committee on this topic. He had presented a proposal in April, and held an industry alignment meeting in June, along with distributing a survey. The participants supported the proposed activity. Jan Rothe proposed forming a task force, and presented a TFOF.


Motion: Approve this TFOF as amended in meeting, forward to GCS By / 2nd: Jan Rothe / Larry Hartsough Discussion: Vote: 13-0. Motion passed.

Attachment: 08, TFOF for International Reticle SMIF Pod and Load Port Interoperability Task Force

6.2 Previous Action Items

Table 4 Previous Meeting Actions Items

Item # Assigned to Details

2009Nov-01 Paul Trio, Trevor Sanders

Obtain update from Japan Assembly and Test Die Preparation Task Force -- Closed

2009Nov-03 Paul Trio, Ian McLeod

Follow up with IP holders on LOA response for 450 mm ballots-- Closed

2009Nov-04 Paul Trio, Ian McLeod

Close on the 300 mm Wafer Shipping Box TF-- Open

2010Mar-01 Mutaz Haddadin / Shoji Komatsu

Prepare SNARFs for the revisions to E154 and 4570B for submission to the Physical Interfaces and Carriers GCS -- Closed

7 New Business

7.1 Upcoming Ballots

Table 5 Authorized Ballots # When SC/TF/WG Details

TBD Cycle 7-10 or 1-11

EUV Reticle Handling Task Force

Revisions to SEMI E152, Mechanical Specification of EUV Pod for 150 mm EUVL Reticles

Motion: Authorize issuing the ballots as shown. By / 2nd: Discussion: John Davies / Robert Carlson Vote: 15-0. Motion passed.

7.2 Draft Schedule for Fall Meetings

Monday, 8 November 2010 8-12 450 ISB 1-5 450 NASB 5-6 PIC Maintenance Tuesday, 9 November 2010 8-12 450 IPIC 1-3 Reticle SMIF 3-5 EUV Reticle Wednesday, 10 November 2010 8-12 PIC Committee


7.3 New Action Items

Ian McLeod reviewed the new action items. These can be found in the New Action Items table at the beginning of these minutes.

Table 6 New Action Items (or move to Section 8, Action Item Review)

Item # Assigned to Details

2010Jul-01 Standards staff Issue request for Letters of Assurance to the owners of the IP found to be potentially material to Document 4770A

2010Jul-02 Long He Submit SNARF for E152 revision for GCS review

8 Next Meeting and Adjournment

The next meeting of the North America Physical Interfaces and Carriers committee is scheduled for Wednesday 10 November 2010 at the North American Standards Fall 2010 Meetings in San Jose, CA.

Motion: Adjourn the meeting. By / 2nd: Discussion: Alan Crockett / Peter Davison Vote: Motion passed unanimously.


Respectfully submitted by: Ian McLeod Manager, NA Standards Committees SEMI NA Phone: 1.408.943.6996 Email: [email protected] Minutes approved by: Mutaz Haddadin (Intel), Co-chair Matt Fuller (Entegris), Co-chair Table 7 Index of Available Attachments #1

# Title # Title

01 Procedural Review File for Document 4770A 05 Europe Equipment Automation Committee Report 02 Related Patents for 4770A 06 Japan Physical Interfaces and Carriers Committee

Report 03 E152 Revision Proposal 07 SEMI Staff Report 04 450IPIC Task Force minutes 08 TFOF for International Reticle SMIF Pod and Load

Port Interoperability Task Force

#1 Due to file size and delivery issues, attachments must be downloaded separately. A .zip file containing all attachments for these minutes is available at www.semi.org. For additional information or to obtain individual attachments, please contact [SEMI Staff Name] at the contact information above.