Noise Reduction Of Si x Ge 1-x and Si x Ge 1- x O y Bolometers by Forming Gas Passivation Mukti Rana and Donald Butler University of Texas at Arlington Electrical Engineering Dept. Arlington, TX 76019 Based in part by work supported by the National Science Foundation ECS-0322900
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Noise Reduction Of Si x Ge 1-x and Si x Ge 1-x O y Bolometers by Forming Gas Passivation
Noise Reduction Of Si x Ge 1-x and Si x Ge 1-x O y Bolometers by Forming Gas Passivation. Mukti Rana and Donald Butler University of Texas at Arlington Electrical Engineering Dept. Arlington, TX 76019 Based in part by work supported by the National Science Foundation ECS-0322900. - PowerPoint PPT Presentation
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Noise Reduction Of SixGe1-x and SixGe1-xOy Bolometers by Forming Gas Passivation
Mukti Rana and Donald Butler
University of Texas at Arlington
Electrical Engineering Dept.
Arlington, TX 76019
Based in part by work supported by the National Science Foundation
• Bolometers are the optical sensors whose resistivity varies with temperature. When lights fall on the bolometer surface the sensing material of the bolometer absorbs heat and there by changes it’s resistance.
• The Bolometer’s noise was measured in a shielded probe station with the help of SRC560 low noise preamplifier, HP 3562 dynamic signal analyzer and a computer. The noise spectra of same device was measured before and after the passivation to compare the noise.
• An AXIC Jet First Rapid Thermal Anneal (RTA) was used for annealing the sample. The sample was kept inside the chamber at a forming gas flow of 500 SCCM for different intervals of time.