NNCI Mid - Atlantic Nanotechnology Hub (MANTH) for Research, Education, & Innovation, Award 1542153 Mark G. Allen, PI, Scientific Director, Singh Center for Nanotechnology, Engineering School of Engineering and Applied Science Kevin Turner, co - PI, School of Engineering and Applied Science Cherie Kagan, co - PI, School of Engineering and Applied Science and School of Arts and Sciences George P. Watson , Director of User Programs University of Pennsylvania • Singh Center for Nanotechnology: Enabling researchers in the industry-dense and academically-rich environment of Philadelphia and the surrounding mid-Atlantic region by providing access to a state-of-the-art fabrication and characterization facility and the associated intellectual nanotechnology expertise – Over 400 researchers from academia and industry use the facility, resulting in over 250 conference talks and papers in the past year – 10,000 sq. ft. characterization lab space • TEM, SEM, FIB, and ion beam scattering characterization • SPM, AFM, Raman/NSOM, TIRF/AFM probe techniques • Low temperature electron transport characterization – 10,000 sq. ft., class 100/1000 cleanroom • Advanced lithography: ebl, laser direct-write, nano-imprint, and contact photolithography • 4 plasma etch tools with F 2 and Cl 2 chemistries • 10 deposition tools including PVD, ALD, PEALD, PECVD, plus LPCVD and oxidation furnaces • Microfluidics fabrication • Dicing, wire bonding, wafer bonding • Laser micromachining • Outreach – Created the Innovation Seed Grant Competition, designed to encourage individuals and companies from all around the Mid-Atlantic Region to design or prototype a wide range of technologies from many different disciplines, but all utilizing nanotechnology related tools and equipment. Winners are awarded $5k to $10 grants for Singh Center equipment use. – Created and hosted the Nanoweek Conference at Upenn in order to bring together individuals from academia, government, industry and investment around the Mid-Atlantic Region to discuss and showcase the current work being produced at the Singh Center. – Host of the Nanoday@Penn for over 160 high school students with presentations, activities, and hands-on demonstrations. More than 150 Penn students assisted. – Hosted 6 REU students conducting research in nanotechnology this year. – Cleanroom staff published over 60 fabrication technical notes online with 5800 downloads worldwide. – Initiated the semi-annual Mid-Atlantic Cleanroom Managers workshop with 21 academic and government laboratories attending, and hosted the first 2 meetings in order to establish contacts, share process/equipment strengths, and exchange best practices. – Exploring efficacy of an Associates Degree with a Nanotechnology emphasis with partner Community College of Philadelphia for workforce development. Affiliation Breakdown of Singh Users USAGE BY USER AFFILIATION AND DISCIPLINE Local Site Academic Other Academic Large Company Small Company Disciplinary Breakdown of Singh Users Materials Life Science and Medicine Physics MEMS/Mechanical Eng. Other Research Process Optics 25% Outside Users 25% Life Sciences Nanoelectronics Wearable Sensors Microfluidics Mechanics
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NNCI Mid-Atlantic Nanotechnology Hub (MANTH) for
Research, Education, & Innovation, Award 1542153Mark G. Allen, PI, Scientific Director, Singh Center for Nanotechnology,
Engineering School of Engineering and Applied Science
Kevin Turner, co-PI, School of Engineering and Applied Science
Cherie Kagan, co-PI, School of Engineering and Applied Science
and School of Arts and Sciences
George P. Watson, Director of User Programs
University of Pennsylvania
• Singh Center for Nanotechnology: Enabling researchers in the industry-dense and academically-rich environment of Philadelphia and the surrounding mid-Atlantic region by providing access to a state-of-the-art fabrication and characterization facility and the associated intellectual nanotechnology expertise– Over 400 researchers from academia and industry use the facility, resulting in over 250 conference talks and
papers in the past year– 10,000 sq. ft. characterization lab space
• TEM, SEM, FIB, and ion beam scattering characterization• SPM, AFM, Raman/NSOM, TIRF/AFM probe techniques• Low temperature electron transport characterization
– 10,000 sq. ft., class 100/1000 cleanroom• Advanced lithography: ebl, laser direct-write, nano-imprint, and contact photolithography• 4 plasma etch tools with F2 and Cl2 chemistries• 10 deposition tools including PVD, ALD, PEALD, PECVD, plus LPCVD and oxidation furnaces• Microfluidics fabrication• Dicing, wire bonding, wafer bonding• Laser micromachining
• Outreach– Created the Innovation Seed Grant Competition, designed to encourage individuals and companies from all
around the Mid-Atlantic Region to design or prototype a wide range of technologies from many different disciplines, but all utilizing nanotechnology related tools and equipment. Winners are awarded $5k to $10 grants for Singh Center equipment use.
– Created and hosted the Nanoweek Conference at Upenn in order to bring together individuals from academia, government, industry and investment around the Mid-Atlantic Region to discuss and showcase the current work being produced at the Singh Center.
– Host of the Nanoday@Penn for over 160 high school students with presentations, activities, and hands-on demonstrations. More than 150 Penn students assisted.
– Hosted 6 REU students conducting research in nanotechnology this year.– Cleanroom staff published over 60 fabrication technical notes online with 5800 downloads worldwide.– Initiated the semi-annual Mid-Atlantic Cleanroom Managers workshop with 21 academic and government
laboratories attending, and hosted the first 2 meetings in order to establish contacts, share process/equipment strengths, and exchange best practices.
– Exploring efficacy of an Associates Degree with a Nanotechnology emphasis with partner Community College of Philadelphia for workforce development.
Affiliation Breakdown of Singh Users
USAGE BY USER AFFILIATION AND DISCIPLINE
Local Site Academic
Other Academic
Large Company
Small Company
Disciplinary Breakdown of Singh Users
MaterialsLife Science and Medicine
Physics
MEMS/Mechanical Eng.
Other Research
Process
Optics
25% Outside
Users25% Life
Sciences
NanoelectronicsWearable Sensors
Microfluidics Mechanics
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