Nmark AGV-HP Galvanometer 1 www.aerotech.com temperature of the device under varying loads, changes in ambient temperature or beam clipping on the input aperture. Real-Time Process Visibility The location of the AGV-HP mirrors can be captured and analyzed in real time. With direct access to the positions of the scanner the user no longer has to program delay parameters to compensate for lag and tracking errors in the servo system. The process can be optimized prior to marking the part, saving time and reducing material waste. The state of the laser can also be controlled based on in- position and velocity criteria, further reducing programming complexity. Advanced Programming Features The AGV-HP utilizes all of Aerotech’s advanced motion and PSO (Position Synchronized Output) capabilities that have been developed for traditional servo-based laser processing applications. Contouring functions such as Acceleration Limiting can be used to automatically reduce speeds in tight corners or small radii to minimize overshoot. The laser can be triggered based on the position feedback of the mirrors with PSO to ensure consistent spot overlap as the scanner changes speed. Aerotech’s Infinite Field of View (IFOV TM ) function seamlessly combines servo and scanner motion to extend the marking capability of the scanner across the entire travel of the servo stages, eliminating stitching errors that can occur in a more traditional move-expose-repeat process. Design Choices The AGV-HP family is available with 10, 14, 20, and 30 mm input apertures and can be equipped with an F-Theta or telecentric lens directly from Aerotech. Users can also acquire the focusing optic directly from a trusted supplier with Aerotech supplying a spacer ring to ensure that back reflections through the optic do not damage the scanner mirrors. Mirror coatings for a wide range of UV, visible, IR and CO2 wavelengths are supported. Coatings optimized for ultra-fast lasers are also available. Nmark AGV-HP High Accuracy, Thermally Stable Galvo Scanner The Ultimate in Accuracy and Stability The highly repeatable and thermally stable feedback sensors used on the AGV-HP scanner systems can be calibrated down to single-digit, micron-level accuracy over the field of view (see figure below). With the extremely low thermal gain drift performance of the position transducers, complex, high-density laser machining applications that take long periods of time to complete will maintain consistent micron-level feature placement accuracy over the lifetime of the process. Likewise, high throughput applications will maintain consistent part-to-part quality without having to re-calibrate between parts. For the highest level of thermal stability, the AGV-HP scanners can be equipped with water cooling to stabilize the operating Highest accuracy scanner available attains single-digit, micron-level accuracy over the field of view Optical feedback technology significantly improves thermal stability Industry-best resolution of >24 bits when used with Aerotech’s Nmark CLS controller Wide range of apertures and focal lengths Many choices of mirror surface treatments for a variety of laser wavelengths AGV-HP galvo scanner offers micron-level accu- racy over the field of view. Nmark AGV-HP provides industry-best micron-level 2D accuracy over the entire field of view.
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Nmar
k AGV
-HP
Galva
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eter
1 www.aerotech.com
temperature of the device under varying loads, changes inambient temperature or beam clipping on the input aperture.
Real-Time Process VisibilityThe location of the AGV-HP mirrors can be captured andanalyzed in real time. With direct access to the positions ofthe scanner the user no longer has to program delayparameters to compensate for lag and tracking errors in theservo system. The process can be optimized prior tomarking the part, saving time and reducing material waste.The state of the laser can also be controlled based on in-position and velocity criteria, further reducingprogramming complexity.
Advanced Programming FeaturesThe AGV-HP utilizes all of Aerotech’s advanced motionand PSO (Position Synchronized Output) capabilities thathave been developed for traditional servo-based laserprocessing applications. Contouring functions such asAcceleration Limiting can be used to automatically reducespeeds in tight corners or small radii to minimize overshoot.The laser can be triggered based on the position feedback ofthe mirrors with PSO to ensure consistent spot overlap asthe scanner changes speed. Aerotech’s Infinite Field ofView (IFOVTM) function seamlessly combines servo andscanner motion to extend the marking capability of thescanner across the entire travel of the servo stages,eliminating stitching errors that can occur in a moretraditional move-expose-repeat process.
Design Choices The AGV-HP family is available with 10, 14, 20, and 30 mminput apertures and can be equipped with an F-Theta ortelecentric lens directly from Aerotech. Users can alsoacquire the focusing optic directly from a trusted supplierwith Aerotech supplying a spacer ring to ensure that backreflections through the optic do not damage the scannermirrors. Mirror coatings for a wide range of UV, visible, IRand CO2 wavelengths are supported. Coatings optimizedfor ultra-fast lasers are also available.
The Ultimate in Accuracy and StabilityThe highly repeatable and thermally stable feedbacksensors used on the AGV-HP scanner systems can becalibrated down to single-digit, micron-level accuracy overthe field of view (see figure below). With the extremely lowthermal gain drift performance of the position transducers,complex, high-density laser machining applications thattake long periods of time to complete will maintainconsistent micron-level feature placement accuracy over thelifetime of the process. Likewise, high throughputapplications will maintain consistent part-to-part qualitywithout having to re-calibrate between parts. For thehighest level of thermal stability, the AGV-HP scanners canbe equipped with water cooling to stabilize the operating
Highest accuracy scanner available attainssingle-digit, micron-level accuracy over thefield of view
Notes:1. Uni-directional; 3-sigma from mean position.2. After initial 4 hour warm-up, ambient temperature variation <0.5°C.3. Without -AC air cooling option.4. Measured with galvo motors mounted in scan head.5. 0.1° mechanical step, settling to within 0.001° of final position.6. Typical performance with f = 160 mm F-Theta objective.7. In traditional scanning systems the tracking error is used to set the delays between laser pulses in order to compensate for the lag between command and response. The Nmark CLSfeatures Position Synchronized Output (PSO) capability that permits laser pulse commands to be tied directly to the position feedback of the galvo motors, thus providing laser scannercontrol with 0 (or near 0) tracking error.8. All angles are optical unless otherwise noted.9. All specifications are per axis unless otherwise noted.
Notes:1. Partial listing of supported wavelengths. Please consult Aerotech for a complete list of available mirrors.2. Values shown use the same mirror coating for both 10.6 µm and 9.4 µm wavelengths. 3. With -AC air cooling option; maximum average laser power is 1/3 this value without air cooling.
AGV-HP Series Galvanometer ScannerAGV-10HP 2-axis galvanometer scanner with 10 mm diameter beam aperture and integral high-precision feedbackAGV-14HP 2-axis galvanometer scanner with 14 mm diameter beam aperture and integral high-precision feedbackAGV-20HP 2-axis galvanometer scanner with 20 mm diameter beam aperture and integral high-precision feedbackAGV-30HP 2-axis galvanometer scanner with 30 mm diameter beam aperture and integral high-precision feedback
-1552 Mirrors for 1552 nm wavelength; no focal lens -
-1064 Mirrors for 1064 nm wavelength; no focal lens
-1030 Mirrors for 1030 nm wavelength; no focal lens -
-532 Mirrors for 532 nm wavelength; no focal lens
-515 Mirrors for 515 nm wavelength; no focal lens -
-355 Mirrors for 355 nm wavelength; no focal lens
-343 Mirrors for 343 nm wavelength; no focal lens -
-1064/532/355 Mirrors for 1064, 532, and 355 nm wavelengths; no focal lens - -
-1030/515/343 Mirrors for 1030, 515, and 343 nm wavelengths; no focal lens - -
F-Theta Included Options(1, 2)
Option AGV-10HP AGV-14HP AGV-20HP AGV-30HP
-355-53T
355 nm Wavelength53 mm Focal Length17.2 x 17.2 mm FOV
Telecentric
355 nm Wavelength53 mm Focal Length8.2 x 8.2 mm FOV
Telecentric
- -
-343-53T
343 nm Wavelength53 mm Focal Length16.8 x 16.8 mm FOV
Telecentric
343 nm Wavelength53 mm Focal Length8.0 x 8.0 mm FOV
Telecentric
- -
-1064-100
1064 nm Wavelength100 mm Focal Length66.9 x 66.9 mm FOV
Non-Telecentric
1064 nm Wavelength100 mm Focal Length37.0 x 37.0 mm FOV
Non-Telecentric
- -
-532-100
532 nm Wavelength100 mm Focal Length57.2 x 57.2 mm FOV
Non-Telecentric
- - -
-CO2-100T -
10.6 µm Wavelength100 mm Focal Length50.0 x 50.0 mm FOV
Telecentric
10.6 µm Wavelength100 mm Focal Length38.6 x 38.6 mm FOV
Telecentric
-
-1552-100T
1552 nm Wavelength100 mm Focal Length55.2 x 55.2 mm FOV
Telecentric
1552 nm Wavelength100 mm Focal Length49.4 x 49.4 mm FOV
Telecentric
- -
-1064-100T
1064 nm Wavelength100 mm Focal Length69.8 x 69.8 mm FOV
Telecentric
1064 nm Wavelength100 mm Focal Length61.6 x 61.6 mm FOV
Telecentric
1064 nm Wavelength100 mm Focal Length44.0 x 44.0 mm FOV
Telecentric
-1030-100T
1030 nm Wavelength100 mm Focal Length41.6 x 41.6 mm FOV
Telecentric
1030 nm Wavelength100 mm Focal Length34.8 x 34.8 mm FOV
Telecentric
- -
-532-100T
532 nm Wavelength100 mm Focal Length64.6 x 64.6 mm FOV
Telecentric
532 nm Wavelength100 mm Focal Length57.0 x 57.0 mm FOV
Telecentric
- -
-515-100T
515 nm Wavelength100 mm Focal Length41.4 x 41.4 mm FOV
Telecentric
515 nm Wavelength100 mm Focal Length34.6 x 34.6 mm FOV
Telecentric
- -
-355-100T
355 nm Wavelength100 mm Focal Length51.6 x 51.6 mm FOV
Telecentric
- - -
-343-100T
343 nm Wavelength100 mm Focal Length51.2 x 51.2 mm FOV
Telecentric
- - -
Nmark AGV-HP ORDERING INFORMATION
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F-Theta Included Options(1, 2) (Continued)
Option AGV-10HP AGV-14HP AGV-20HP AGV-30HP
-CO2-160 -
10.6 µm Wavelength160 mm Focal Length89.2 x 89.2 mm FOV
Non-Telecentric
10.6 µm Wavelength160 mm Focal Length76.0 x 76.0 mm FOV
Non-Telecentric
-
-1064-160
1064 nm Wavelength160 mm Focal Length
107.6 x 107.6 mm FOVNon-Telecentric
1064 nm Wavelength160 mm Focal Length78.4 x 78.4 mm FOV
Non-Telecentric
- -
-532-160
532 nm Wavelength160 mm Focal Length
107.0 x 107.0 mm FOVNon-Telecentric
532 nm Wavelength160 mm Focal Length77.2 X 77.2 mm FOV
Non-Telecentric
- -
-355-160
355 nm Wavelength160 mm Focal Length92.4 x 92.4 mm FOV
Non-Telecentric
- - -
-343-160
343 nm Wavelength160 mm Focal Length92.4 x 92.4 mm FOV
Non-Telecentric
- - -
-1064-163 - -
1064 nm Wavelength163 mm Focal Length72.4 x 72.4 mm FOV
Non-Telecentric
-
-1552-163T
1552 nm Wavelength163 mm Focal Length93.8 x 93.8 mm FOV
Telecentric
1552 nm Wavelength163 mm Focal Length87.2 x 87.2 mm FOV
Telecentric
- -
-1064-163T
1064 nm Wavelength163 mm Focal Length92.0 x 92.0 mm FOV
Telecentric
1064 nm Wavelength163 mm Focal Length85.2 x 85.2 mm FOV
Telecentric
1064 nm Wavelength163 mm Focal Length71.6 x 71.6 mm FOV
Telecentric
-
-1030-163T
1030 nm Wavelength163 mm Focal Length92.0 x 92.0 mm FOV
Telecentric
1030 nm Wavelength163 mm Focal Length85.0 x 85.0 mm FOV
Telecentric
- -
-532-163T
532 nm Wavelength163 mm Focal Length79.6 x 79.6 mm FOV
Telecentric
532 nm Wavelength163 mm Focal Length66.0 x 66.0 mm FOV
Telecentric
- -
-515-163T
515 nm Wavelength163 mm Focal Length79.2 x 79.2 mm FOV
Telecentric
515 nm Wavelength163 mm Focal Length65.8 x 65.8 mm FOV
Telecentric
- -
-355-163T
355 nm Wavelength163 mm Focal Length80.8 x 80.8 mm FOV
Telecentric
355 nm Wavelength163 mm Focal Length74.6 x 74.6 mm FOV
Telecentric
- -
-343-163T
343 nm Wavelength163 mm Focal Length80.4 x 80.4 mm FOV
Telecentric
343 nm Wavelength163 mm Focal Length74.0 x 74.0 mm FOV
Telecentric
- -
-1064-170 -
1064 nm Wavelength170 mm Focal Length
110.8 x 110.8 mm FOVNon-Telecentric
- -
-532-170 -
532 nm Wavelength170 mm Focal Length
103.8 x 103.8 mm FOVNon-Telecentric
- -
-1064-200 - - -
1064 nm Wavelength200 mm Focal Length68.0 x 68.0 mm FOV
Non-Telecentric
-CO2-255 - -
10.6 µm Wavelength255 mm Focal Length
163.8 x 163.8 mm FOVNon-Telecentric
10.6 µm Wavelength255 mm Focal Length
104.4 x 104.4 mm FOVNon-Telecentric
Nmark AGV-HP ORDERING INFORMATION
Galvanometer
Nmark AGV-HP
14www.aerotech.com
F-Theta Included Options(1, 2) (Continued)
Option AGV-10HP AGV-14HP AGV-20HP AGV-30HP
-1064-255 - -
1064 nm Wavelength255 mm Focal Length
154.2 x 154.2 mm FOVNon-Telecentric
1064 nm Wavelength255 mm Focal Length91.6 x 91.6 mm FOV
Non-Telecentric
-532-255 - -
532 nm Wavelength255 mm Focal Length
148.0 x 148.0 mm FOVNon-Telecentric
-
-355-255
355 nm Wavelength255 mm Focal Length143 x 143 mm FOV
Non-Telecentric
355 nm Wavelength255 mm Focal Length
119.4 x 119.4 mm FOVNon-Telecentric
- -
-343-255
343 nm Wavelength255 mm Focal Length142 x 142 mm FOV
Non-Telecentric
343 nm Wavelength255 mm Focal Length
118.4 x 118.4 mm FOVNon-Telecentric
- -
-1064-500 - - -
1064 nm Wavelength500 mm Focal Length
233.2 x 233.2 mm FOVNon-Telecentric
Mounting Option-MP Optional mounting plate with integral flanges for bridge/gantry installation
Cooling Options-NC No air cooling of mirrors and no water cooling of beam entrance plate and motors (standard)-AC Air cooling of mirrors for high-powered laser applications-WC Water cooling of beam entrance plate and motors for high-powered laser, high duty cycle and thermal drift
intolerant applications-AC-WC Air cooling of mirrors and water cooling of beam entrance plate and motors for high-powered laser, high duty
cycle and thermal drift intolerant applications
Lens Mounting Adapters (order as separate line item)LM10HP-XXX Lens mount adapter for AGV-10HP and AGV-10HPO; standard versions support the lens configurations offered
by Aerotech; custom versions available on requestLM14HP-XXX Lens mount adapter for AGV-14HP and AGV-14HPO; standard versions support the lens configurations offered
by Aerotech; custom versions available on requestLM20HP-XXX Lens mount adapter for AGV-20HP and AGV-20HPO; standard versions support the lens configurations offered
by Aerotech; custom versions available on requestLM30HP-XXX Lens mount adapter for AGV-30HP and AGV-30HPO; standard versions support the lens configurations offered
by Aerotech; custom versions available on request
Nmark AGV-HP ORDERING INFORMATION
Notes:1. Input beam diameter is assumed to be equal to scan head entrance aperture at 1/e2 Gaussian profile.2. Reported field size is minimum achievable based on zero beam vignetting.