NC Applications in Manufacturing GSNU. GSNU- Dept. of Mechanical and Aerospace Engineering CMP (Chemical Mechanical Polishing) Toyoda Float Polishing.

NC Applications in Manufacturing

GSNU

GSNU- Dept. of Mechanical and Aerospace Engineering GSNU

CMP (Chemical Mechanical Polishing)

Toyoda Float Polishing Machine

Table Speed: 100 RPM

Wafer Carrier Speed: 75 RPM

Down Pressure: 5 psi

Polishing plate

Wafer carrier

GSNU- Dept. of Mechanical and Aerospace Engineering GSNU

Process Setup

Side view Wafer carrier view

Polishing Tool Strasbaugh 6ECWafers 5 Patterned Oxide

Pressure (3, 5, 8) psiTable/Carrier Speed (30/27, 50/45, 80/72) rpm

Slurry Type Cabot Semi-sperse D7000Slurry Flowrate 150 ml/min

Elapsed Polish Time (15, 60 Seconds) Relative Hersey

Number(0.8, 1.2, 2.1, 3.5, 5.6)

GSNU- Dept. of Mechanical and Aerospace Engineering GSNU

Wafer-Pad ContactSmall Film Thickness

Increasing Line Density

Large Film Thickness

GSNU- Dept. of Mechanical and Aerospace Engineering GSNU

고에너지빔 공정 레이저빔 (LBM) 전자빔가공 (EBM) 플라즈마빔가공 (PBM)

GSNU- Dept. of Mechanical and Aerospace Engineering GSNU

레이저빔가공레이저빔가공(LBM)

Laser Beam Machining

<< 주요 특징주요 특징 >>(1) 정확도 , 반복도 , 자동화의 용이성(2) 광섬유의 활용으로 유연화(3) 간단한 고정구 , 짧은 설치시간 , 컴퓨터제어(4) 사용에 주의

GSNU- Dept. of Mechanical and Aerospace Engineering GSNU

< 적용분야 >(1) 전자 , 자동차산업 – 절단 , 드릴링(2) 용접작업(3) 표면처리(4) 마킹

GSNU- Dept. of Mechanical and Aerospace Engineering GSNU

레이저 유형 동작모드 [W]사용전력루비 P 50

Nd:유리 P 50Nd:YAG, CW/P 600

Alexandrite, CW/P 100CO2 CW/P 25000

* P : , CW: 펄스파 연속파* Nd : Niodimium

* YAG : Ytrium-Aluminium-Garnet

용도 공작물 재료 레이저종류절삭 금속 PCO2, CWCO2, Nd:YAG, 루비

플라스틱 CWCO2

세라믹 PCO2

드릴링 금속 PCO2, CWCO2, Nd: , 유리 루비플라스틱 엑시머

마킹 금속 PCO2, Nd :Y A G플라스틱 엑시머세라믹 엑시머

표면처리 금속 CWCO2

용접 금속 PCO2, CWCO2, Nd:YAG, Nd: , 유리 루비

GSNU- Dept. of Mechanical and Aerospace Engineering GSNU

cutting

welding Cladding( 피복 )

Heat treating

GSNU- Dept. of Mechanical and Aerospace Engineering GSNU

perforatingMarking-rubber

kiss-cutting

engraving

Applications

GSNU- Dept. of Mechanical and Aerospace Engineering GSNU

Web-processing

showerheadslitting

Applications

GSNU- Dept. of Mechanical and Aerospace Engineering GSNU

NC Control

GSNU- Dept. of Mechanical and Aerospace Engineering GSNU

Laser - Galvanometer Control

GSNU- Dept. of Mechanical and Aerospace Engineering GSNU

Backlight Unit Patterns

가공 영역 : 13”, 14”, 15” 등

폭 : 50 ㎛ ~ 250 ㎛

깊이 : 25 ㎛ ~ 125 ㎛

프리즘 각도 : 90 도 가 광학적으로 이상적

GSNU- Dept. of Mechanical and Aerospace Engineering GSNU

Groove Shapes : V-cut vs. Laser

V-cut Laser

GSNU- Dept. of Mechanical and Aerospace Engineering GSNU

Material Effect on Pattern

압출성형 사출성형

GSNU- Dept. of Mechanical and Aerospace Engineering GSNU

243.8 266.3318.2

42.2 46.0 57.1 68.7103.9

193.4 212.3

0

100

200

300

400

5 7.5 10 12.5 15

Output P ower (W)

Dim

ensi

on (

μm)

Width Depth

Source CO2

Wavelength ( m )

10.6

Output Power (W)

0~50

Power Stability 5%

Beam Size (mm)

0.34

Operation Mode

Continuous Wave

Mode Quality TEM00

Power SupplyAC200V+10%,

50Hz

Power Consumption

(kW)2.2

Test Result

GSNU- Dept. of Mechanical and Aerospace Engineering GSNU

Optical Properties

050

100150

200250

300

20

30

40

50

60

70

1000

1500

2000

2500

X

Luminance Measured Data

Y

Lum

inan

ce

050

100150

200250

300

20

30

40

50

60

70

0

5000

10000

X

Luminance Measured Data

YLu

min

ance

- 인쇄 방식에 비해 약 2~3 배의 휘도

- 균일도는 패턴조정으로 달성가능