Nanotechnology to produce Light Emitting Diodes (LED) and Solar Cells Nanotechnology to produce Light Emitting Diodes (LED) and Solar Cells Prof. Dr. M. Heuken, AIXTRON AG, Fon: +49 (241) 8909-154, Fax: +49 (241) 8909-149, Email: [email protected]RWTH Aachen, University of Technology, Templergraben 55, D-52074 Aachen, Germany
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Nanotechnology to produce Light Emitting Diodes (LED) and Solar Cells
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Nanotechnology to produce Light Emitting Diodes (LED) and Solar
Cells
Nanotechnology to produce Light Emitting Diodes (LED) and Solar
White LED with Phosphor ConverterWhite LED with Phosphor Converter
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Date:06.10.2009
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(Processed, not diced)
MQW Based Blue and Green LEDMQW Based Blue and Green LED
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Date:06.10.2009
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Illustration of the structure and key growth conditions for thegrowth of the demonstration LED structureIllustration of the structure and key growth conditions for thegrowth of the demonstration LED structure
� Temperatures were 530ºC, 1040ºC and 925ºC for the GaN nucleation layer, high temperature GaN layers and p-GaN respectively.
� The MQWs were grown using QW temperatures of ~740ºC for blue (470nm) and ~690ºC for green (535nm). In both cases the barriers were grown 120ºC above the QW temperature.
� The process was transferred from 2” to 3” by only adjusting temperatures to compensate for the increased wafer thickness and different thermal contact due to the increased wafer bow. No structural changes were introduced to achieve the uniformity presented.
� The Integrated Concept (IC) design offers a common platform for AIXTRON CRIUS® Close-Coupled-Showerhead and Planetary Reactor®systems. It is optimized for low CoOand features digital control and component standardization.
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Date:06.10.2009
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Mean on-wafer σσσσ = 2.9nmWafer-to-wafer σσσσ = 1.4nm
No edge exclusion
12x3” CP Wavelength Uniformity Green LED12x3” CP Wavelength Uniformity Green LED
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Date:06.10.2009
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13%
6%
64%
17%
Based on VLSI RESEARCH Inc. 2008
14%4%
20%
62%
Global MOCVD Market SharesGlobal MOCVD Market Shares
Veeco
Others
Nippon Sanso
AIXTRON
2007Total: $289m
2005Total: $156m
2006Total: $202m
10%2%
70%
18%
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Date:06.10.2009
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Looking Forward: Future Energy SupplyLooking Forward: Future Energy SupplyPossible Scenario for Europe in 2050