Modified Nodal Analysis for MEMS Design Using SUGAR Ningning Zhou, Jason Clark, Kristofer Pister, Sunil Bhave, BSAC David Bindel, James Demmel, Depart. of CS, UC Berkeley Sanjay Govindjee, Depart. of CEE, UC Berkeley Zhaojun Bai, Depart. of CS, UC Davis Ming Gu, Jianlin Xia, Depart. of Mathematics, UC Berkeley January, 2001
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Modified Nodal Analysis for MEMS Design Using SUGAR
Modified Nodal Analysis for MEMS Design Using SUGAR. Ningning Zhou, Jason Clark, Kristofer Pister, Sunil Bhave, BSAC David Bindel, James Demmel, Depart. of CS, UC Berkeley Sanjay Govindjee, Depart. of CEE, UC Berkeley Zhaojun Bai, Depart. of CS, UC Davis - PowerPoint PPT Presentation
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Modified Nodal Analysis for MEMS Design Using SUGAR
Ningning Zhou, Jason Clark, Kristofer Pister, Sunil Bhave, BSAC
David Bindel, James Demmel, Depart. of CS, UC Berkeley
Sanjay Govindjee, Depart. of CEE, UC Berkeley
Zhaojun Bai, Depart. of CS, UC Davis
Ming Gu, Jianlin Xia, Depart. of Mathematics, UC Berkeley
January, 2001
Outline
• Background• SUGAR introduction• Netlist input• Algorithms with examples• Element models• More examples• Conclusion
IntroductionCurrent simulation approaches for MEMS devices:• FEM, BEM MEMCAD, AutoBEM, ANSYS etc.
– Device/Process oriented;
– Not well integrated with other domains such as circuits;
– Poorly suited to do higher level design and optimization.
• System level simulation NODAS, SUGAR
SUGAR SPICENetlist simulator
SUGAR• Simulation package for MEMS devices
implemented in MATLAB.• Using Modified Nodal Analysis method modeled
on SPICE. • Ability to perform simulation in multi-energy
domains such as electrical circuits, mechanical, thermal etc.
• Implemented static(DC), steady state (SS), modal frequency, transient and sensitivity analysis in different versions of SUGAR.
SUGAR(cont.)
• Four versions released free on the web since June 1998. http://www-bsac.eecs.berkeley.edu/~cfm
• Hundreds of downloads from all over the world. For example, in the period of 02/2000 ~ 04/2000,
121 downloads from universities(~40%), industries(10~20%), research labs(5~10%) etc..
• Active interaction with users.
SUGAR Release History
V0.5 V1.01 V1.1 V2.0Release time 06/98 11/99 07/00 Now
2D(DC, SS, Modal, TA)
3D(DC, SS, Modal, TA)
Mechanical (beams, anchors, gaps)
Simple electrical elements
Open framework for new models, New netlist input allowing subnets
• Elements: Beams Anchors Plate mass Electrostatic gaps Circuits elements (resistor, voltage source) ……
• Models: Beam Linear mechanical model Nonlinear mechanical model Mechanical-electrical model etc. Gap Nonlinear electro-mechanical model Anchor Mechanical model Electro-mechanical model ……