Microsystems Laboratory UC-Berkeley, ME Dept. 1 Liwei Lin, University of California at Berkeley Micro/Nano Mechanical Systems Lab – Class#1 Liwei Lin Professor, Dept. of Mechanical Engineering Co-Director, Berkeley Sensor and Actuator Center The University of California, Berkeley, CA94720 e-mail: [email protected]http://www.me.berkeley.edu/~lwlin
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Micro/Nano Mechanical Systems Lab –Class#1 · 9 Lab #1 –Fabrication. Microsystems Laboratory UC-Berkeley, ME Dept. Lab #2, Micro Robots
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Microsystems LaboratoryUC-Berkeley, ME Dept.
1Liwei Lin, University of California at Berkeley
Micro/Nano Mechanical Systems Lab – Class#1
Liwei Lin
Professor, Dept. of Mechanical Engineering Co-Director, Berkeley Sensor and Actuator CenterThe University of California, Berkeley, CA94720