Integrating Micro Nano Technology James Wylde, PhD Applications Engineer Micro Nano Breakthrough Conference July 27, 2005
Integrating Micro Nano Technology
James Wylde, PhD
Applications Engineer
Micro Nano Breakthrough ConferenceJuly 27, 2005
Outline
• Introduce Zyvex
• Government & University Collaborations
• Nanotechnology
• Microtechnology
• NanoKids
Corporate Overview
• Privately held company founded in 1997
• Located in Richardson, Texas (near Dallas)
• 20 Products
• 5 active government grants
• Aggressive IP strategy - 18 issued patents, 46 in process
• Headcount: 60 and increasing— 15 Ph.D.s, 7 M.S.
— 33 Engineers, scientists, technical management
• 44,000 sq. ft. facility
• Equipment: SEMs (with nano-manipulators), TEM, AFM, SPM, UHV STM, MEMS motion analyzer, MEMS probing station
Science Technology Development
Molecularly
Precise
Manufacturing
Molecular
Assembler
Molecular
Devices &
Materials
Molecular
Manipulation
Nanotube
Dispersion
Control &
Automation
Patterned
Atomic Layer
Epitaxy Nanotube
Super
Fibers
Molecularly
Precise
Tips
Mechano
Chemistry
Molecular
Binding
Sites
Potential
Products
Control &
Automation
MEMS
Devices
MEMS
Design
Tools
MEMS
Assembler
MEMS
Parallel
Assembler
Nano
Assembler
Nano
Fabrication
Process
NIST-ATP
Nano-
manipulator
Nano
Parallel
Assembler
1998 2000 2002 2004 2006 2008 20122010
Top Down
Bottom Up
Government Programs
NIST-ATP, Five-year (Oct 2001-Dec2006),
$25M research award
Title: Assemblers for Nanotechnology
Applications and Manufacturing: Enabling the
Nanotechnology Era
Zyvex and partners will develop low-cost,
computer controlled, microscale assemblers
that operate in parallel to assemble three-
dimensional, microscale components.
Team consists of Honeywell as our Joint
Venture Partner; University of Texas at
Dallas, and University of Virginia as sub-
contractors.
Nanomanipulator Systems
• 3-Dimensional control
• Illuminated keypad
• Control software runs on Windows
Nanomanipulator Systems
• Install in an Scanning Electron Microscope, Focused Ion Beam System, or Optical Microscope
• Collaboration with UTD to add life science capability
• Assembly by TSTC interns
Integrated Circuit Probing
Silicon Microgrippers
• Actuation ~ 14 μm
• In-Plane per Arm:
• Gripper Stiffness ~ 400 μN/μm
• Gripping Force ~ 5.6 mN
• Mechanical Potential~3.9e-8 J
• Allowable Deflection ~ 20 μm
• Out-of-Plane per Arm:
• Gripper Stiffness ~ 450 μN/μm
• Allowable Deflection ~ 15 μm
Assembled Systems
Examples:
• Miniature SEM
column
• Variable optical
attenuator
• Variable inductor
• Linear micromotor
• MechTiles™
TEM Coupon Lift-Out
Core Competence - Functionalizing
• Two distinct functions:
— Non-damaging binding
— Customizable
• Binding applicable to CNMs (SWNTs, MWNTs, CNFs)
• Functionality may be customized for different applications:
— Dispersion in solvents
— Adhesion to composites
— Other chemical functionalityFunctionalization
technology
CNT Manipulation
Attaching a
CNT to a
MEMS
Actuator
Nano-Wire Electrical Probing
Mechanical Resonance
Life Sciences: Collagen Fiber
Loose collagen pulled taut by the nanomanipulator using a MEMS gripper and Tungsten probe as end-effectors. The collagen is
grasped by the probe from the left and is super glued to the probe on the right. Both end effectors are free to move to apply the
tension. This fiber snapped at the kink shown in the bottom left image.