This document is posted to help you gain knowledge. Please leave a comment to let me know what you think about it! Share it to your friends and learn new things together.
Cambridge University Press978-1-107-40894-4 - Micro- and Nanosystems—Materials and Devices: Materials Research SocietySymposium Proceedings: Volume 872Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie and Somuri PrasadFrontmatterMore information
Cambridge University Press978-1-107-40894-4 - Micro- and Nanosystems—Materials and Devices: Materials Research SocietySymposium Proceedings: Volume 872Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie and Somuri PrasadFrontmatterMore information
Cambridge University Press978-1-107-40894-4 - Micro- and Nanosystems—Materials and Devices: Materials Research SocietySymposium Proceedings: Volume 872Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie and Somuri PrasadFrontmatterMore information
This publication is in copyright. Subject to statutory exceptionand to the provisions of relevant collective licensing agreements, no reproduction of any part may take place without the written permission of Cambridge University Press.
This publication has been registered with Copyright Clearance Center, Inc.For further information please contact the Copyright Clearance Center,Salem, Massachusetts.
First published 2005 First paperback edition 2012
Single article reprints from this publication are available throughUniversity Microfilms Inc., 300 North Zeeb Road, Ann Arbor, mi 48106
CODEN: MRSPDH
isbn 978-1-107-40894-4 Paperback
Cambridge University Press has no responsibility for the persistence oraccuracy of URLs for external or third-party internet websites referred to inthis publication, and does not guarantee that any content on such websites is,or will remain, accurate or appropriate.
Cambridge University Press978-1-107-40894-4 - Micro- and Nanosystems—Materials and Devices: Materials Research SocietySymposium Proceedings: Volume 872Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie and Somuri PrasadFrontmatterMore information
Materials Research Society Symposium Proceedings xvi
METROLOGY AND MATERIALSCHARA CTERIZA TION
Modification of Deposition Process of PiezoelectricPolycrystalline Film by Hydrothermal Method-Improvement of the Deposition Process by Pre-TreatmentUsing Hydrogen Peroxide 3
Akito Endo, Norimichi Kawashima, Shinichi Takeuchi,Mutsuo Ishikawa, and Minoru Kurosawa
Micromirror Arrays for High Temperature Operation 9Mahmoud F. Almasri and Bruno A. Frazier
SURFACES AND INTERFACES
Anchoring of Organic Molecules on Cu(OOl) SurfaceThrough S-Headgroup 17
P. Monachesi, L. Chiodo, F. Bussolotti, M.G. Betti,and C. Mariani
In Situ Pretreatment Approach for Surface DeteriorationAlleviation Amidst Thermal Desorption of Si(100) 23
Significance of Surface Topography on Performance andLifetime of MEMS Switches and Relays 29
Lior Kogut and Kyriakos Komvopoulos
RELIABILITY AND PACKAGING
Effects of Hydrogen Annealing Process Conditions onNano Scale Silicon (Oil) Fins 37
Rownak J. Zaman, Weize Xiong, Rudy Quintanilla,Thomas Schulz, C. Rinn Cleavelin, Rick Wise,Mike Pas, Paul Patruno, Klaus Schruefer, andSanjay K. Banerjee
Cambridge University Press978-1-107-40894-4 - Micro- and Nanosystems—Materials and Devices: Materials Research SocietySymposium Proceedings: Volume 872Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie and Somuri PrasadFrontmatterMore information
Detection of Residual Stress in Silicon Carbide MEMS byli-Raman Spectroscopy 43
John C. Zingarelli, Michael A. Marciniak, and Jason R. Foley
Strain Transduction in Conductor-Modified Polymers 49Eerik T. Hantsoo, Vanessa B. Chial, Yanan Zhao,Kevin C. Chan, Klint A. Rose, Kenneth S. Wu, andBeth L. Pruitt
TRIBOLOGY
Characterization of Ti/TiN and TiN Conductive Layer forHigh Temperature MEMS Devices 57
Peter Lange, Birger Ohlsen, Sebastian Puls, and Joerg Syre
Exchange Spring Type Magnet Realized in FePt/FeMultilayers Deposited by Magnetron Sputtering 63
Cambridge University Press978-1-107-40894-4 - Micro- and Nanosystems—Materials and Devices: Materials Research SocietySymposium Proceedings: Volume 872Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie and Somuri PrasadFrontmatterMore information
Cambridge University Press978-1-107-40894-4 - Micro- and Nanosystems—Materials and Devices: Materials Research SocietySymposium Proceedings: Volume 872Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie and Somuri PrasadFrontmatterMore information
Cambridge University Press978-1-107-40894-4 - Micro- and Nanosystems—Materials and Devices: Materials Research SocietySymposium Proceedings: Volume 872Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie and Somuri PrasadFrontmatterMore information
Cambridge University Press978-1-107-40894-4 - Micro- and Nanosystems—Materials and Devices: Materials Research SocietySymposium Proceedings: Volume 872Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie and Somuri PrasadFrontmatterMore information
Cambridge University Press978-1-107-40894-4 - Micro- and Nanosystems—Materials and Devices: Materials Research SocietySymposium Proceedings: Volume 872Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie and Somuri PrasadFrontmatterMore information
Diode Laser Bonding of Planar MEMS, MOEMS, andMicrofluidic Devices 309
Jie-Wei Chen, Jerry Zybko, and James Clements
SENSORS AND MA TERIALS
Investigating Narrow Plasmons in Nanoparticle ArraysFabricated Using Electron Beam Lithography 317
Erin M. Hicks, Linda Gunnarrsson, Tomas Rindevicius,Shengli Zou, Bengt Kasemo, Mikael Kail, Goerge C. Schatz,Kenneth G. Spears, and Richard P. Van Duyne
MicroChannel Arrays in Borophosphosilicate Glass forPhotonic Device and Optical Sensor Applications 323
Claire L. Callender, Patrick Dumais, Chantal Blanchetiere,Christopher J. Ledderhof, and Julian P. Noad
Development of Humidity Sensors Using Layer-by-LayerNanoAssembly of Polypyrrole 329
R. Nohria, Y. Su, R.K. Khillan, R. Dikshit, Y. Lvov, andK. Varahramyan
Stabilized Pd-AUoy/AlN/Si Hydrogen Sensors 337Linfeng Zhang, Ibrahim Al-Homoudi, Md.H. Rahman,Erik F. McCullen, Lajos Rimai, Ronald J. Baird,Ratna Naik, Golam Newaz, Gregory W. Auner, andK.Y. Simon Ng
NANOSYSTEMS AND DEVICES
Multi-Technology Measurements of Amorphous Carbon Films 345Jingmin Leng, Jon Opsal, Heath Pois, Osman Sorkhabi,Xiaoping Liu, and Stephen J. Morris
POSTER SESSION
Towards Novel Light-Activated Shape Memory Polymer:Thermomechanical Properties of Photo-responsive Polymers 353
Cambridge University Press978-1-107-40894-4 - Micro- and Nanosystems—Materials and Devices: Materials Research SocietySymposium Proceedings: Volume 872Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie and Somuri PrasadFrontmatterMore information
Cambridge University Press978-1-107-40894-4 - Micro- and Nanosystems—Materials and Devices: Materials Research SocietySymposium Proceedings: Volume 872Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie and Somuri PrasadFrontmatterMore information
Cambridge University Press978-1-107-40894-4 - Micro- and Nanosystems—Materials and Devices: Materials Research SocietySymposium Proceedings: Volume 872Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie and Somuri PrasadFrontmatterMore information
Cambridge University Press978-1-107-40894-4 - Micro- and Nanosystems—Materials and Devices: Materials Research SocietySymposium Proceedings: Volume 872Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie and Somuri PrasadFrontmatterMore information
Symposium J, " Micro- and Nanosystems—Materials and Devices," held March 28-April 1 atthe 2005 MRS Spring Meeting in San Francisco, California, provided an active forum in the areasof (a) microsystems, including micromachines and micro-electro-mechanical systems (MEMS) aswell as micro-optical-electro-mechanical systems (MOEMS), and (b) nanosystems, also referred toas nano-electro-mechanical systems (NEMS) or molecular machines, including devices thatincorporate nanotubes, nanocantilevers, and molecular or atomic manipulators. A wide range ofphysical and chemical sensor applications have been addressed with these technologies, such asinertial, magnetic, environmental, chemical, and biological detection. In addition, the symposiumgave an overall perspective about the technology requirements for taking a leap from conventionalmicro- and nano- systems towards bio-nano systems for realizing functional materials and systemsfor applications such as drug delivery.
The symposium was initiated with a tutorial titled BioMEMS—Materials, Fabricationand Devices, and taught by Rashid Bashir (Purdue University), Kevin Turner (MIT) andDavid A. LaVan (Yale University). Besides overviewing surface and bulk microfabricationtechniques, they placed a special emphasis on methods of fabricating polymer micro- and nano-systems and applications in drug delivery and single molecule detection. The symposium providedan exciting environment to discuss some of the latest progress in fabrication and characterization ofrelated technologies. We would like to list the following highlights from our symposium:Joseph Michael from Sandia National Laboratories discussed the application of focused ion beammilling in characterizing MEMS devices, which is becoming a conventional tool for this purpose.James Kelly from Sandia National Laboratories discussed the electrodeposition of structuresthrough high aspect ratio features in thick resists, which is a new and powerful trend in MEMSfabrication. Xuan Zhang from UCR discussed the use of nanostructured substrates anddemonstrated neurite guidance and growth using vertical carbon nanotube arrays. Roya Maboudianfrom UCB talked about surface and materials issues for reliability of MEMS devices and providedan insight into how characterization schemes for evaluating MEMS reliability can be developed.AH Gokirmak from Cornell University demonstrated a CMOS compatible integrated fluidicchannel system for the analysis of oligonucleotides. Cedric Meier from UCSB discussed thefabrication of GaN photonic crystal membrane cavities.
The organizers express their gratitude to all the invited and contributed speakers and posterpresenters for their participation. It is expected that further developments in the field will provideadditional stimulating symposia in the future.
Cengiz S. OzkanDavid A. LaVanMark McNieSomuri Prasad
Cambridge University Press978-1-107-40894-4 - Micro- and Nanosystems—Materials and Devices: Materials Research SocietySymposium Proceedings: Volume 872Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie and Somuri PrasadFrontmatterMore information
Cambridge University Press978-1-107-40894-4 - Micro- and Nanosystems—Materials and Devices: Materials Research SocietySymposium Proceedings: Volume 872Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie and Somuri PrasadFrontmatterMore information
Volume 828— Semiconductor Materials for Sensing, S. Seal, M-I. Baraton, N. Murayama, C. Parrish, 2005,ISBN: 1-55899-776-8
Volume 829— Progress in Compound Semiconductor Materials IV—Electronic and OptoelectronicApplications, GJ. Brown, M.O. Manasreh, C. Gmachl, R.M. Biefeld, K. Unterrainer, 2005,ISBN: 1-55899-777-6
Volume 830— Materials and Processes for Nonvolatile Memories, A. Claverie, D. Tsoukalas, T-J. King,J. Slaughter, 2005, ISBN: 1-55899-778-4
Volume 831— GaN, A1N, InN and Their Alloys, C. Wetzel, B. Gil, M. Kuzuhara, M. Manfra, 2005,ISBN: 1-55899-779-2
Volume 832— Group-IV Semiconductor Nanostructures, L. Tsybeskov, D.J. Lockwood, C. Delerue,M. Ichikawa, 2005, ISBN: 1-55899-780-6
Volume 833— Materials, Integration and Packaging Issues for High-Frequency Devices II, Y.S. Cho,D. Shiftier, C.A. Randall, H.A.C. Tilmans, T. Tsurumi, 2005, ISBN: 1-55899-781-4
Volume 834— Magneto-Optical Materials for Photonics and Recording, K. Ando, W. Challener, R. Gambino,M. Levy, 2005, ISBN: 1-55899-782-2
Volume 835— Solid-State Ionics—2004, P. Knauth, C. Masquelier, E. Traversa, E.D. Wachsman, 2005,ISBN: 1-55899-783-0
Volume 836— Materials for Photovoltaics, R. Gaudiana, D. Friedman, M. Durstock, A. Rockett, 2005,ISBN: 1-55899-784-9
Volume 837— Materials for Hydrogen Storage—2004, T. Vogt, R. Stumpf, M. Heben, I. Robertson, 2005,ISBN: 1-55899-785-7
Volume 83 8E—Scanning-Probe and Other Novel Microscopies of Local Phenomena in NanostructuredMaterials, S.V. Kalinin, B. Goldberg, L.M. Eng, B.D. Huey, 2005, ISBN: 1-55899-786-5
Volume 839— Electron Microscopy of Molecular and Atom-Scale Mechanical Behavior, Chemistry andStructure, D. Martin, D.A. Muller, E. Stach, P. Midgley, 2005, ISBN: 1-55899-787-3
Volume 840— Neutron and X-Ray Scattering as Probes of Multiscale Phenomena, S.R. Bhatia, P.G. Khalifah,D. Pochan, P. Radaelli, 2005, ISBN: 1-55899-788-1
Volume 841— Fundamentals of Nanoindentation and Nanotribology III, D.F. Bahr, Y-T. Cheng, N. Huber,A.B. Mann, KJ. Wahl, 2005, ISBN: 1-55899-789-X
Volume 842— Integrative and Interdisciplinary Aspects of Intermetallics, MJ. Mills, H. Clemens, C-L. Fu,H. Inui, 2005, ISBN: 1-55899-790-3
Volume 843— Surface Engineering 2004—Fundamentals and Applications, J.E. Krzanowski, S.N. Basu,J. Patscheider, Y. Gogotsi, 2005, ISBN: 1-55899-791-1
Volume 844— Mechanical Properties of Bioinspired and Biological Materials, C. Viney, K. Katti, F-J. Ulm,C. Hellmich, 2005, ISBN: 1-55899-792-X
Volume 845— Nanoscale Materials Science in Biology and Medicine, C.T. Laurencin, E. Botchwey, 2005,ISBN: 1-55899-793-8
Volume 846— Organic and Nanocomposite Optical Materials, A. Cartwright, T.M. Cooper, S. Kama,H. Nakanishi, 2005, ISBN: 1-55899-794-6
Volume 847— Organic/Inorganic Hybrid Materials—2004, C. Sanchez, U. Schubert, R.M. Laine, Y. Chujo,2005, ISBN: 1-55899-795-4
Volume 848— Solid-State Chemistry of Inorganic Materials V, J. Li, M. Jansen, N. Brese, M. Kanatzidis, 2005,ISBN: 1-55899-796-2
Volume 849— Kinetics-Driven Nanopatterning on Surfaces, E. Wang, E. Chason, H. Huang, G.H. Gilmer,2005, ISBN: 1-55899-797-0
Volume 850— Ultrafast Lasers for Materials Science, MJ. Kelley, E.W. Kreutz, M. Li, A. Pique, 2005,ISBN: 1-55899-798-9
Volume 851— Materials for Space Applications, M. Chipara, D.L. Edwards, S. Phillips, R. Benson, 2005,ISBN: 1-55899-799-7
Volume 852— Materials Issues in Art and Archaeology VII, P. Vandiver, J. Mass, A. Murray, 2005,ISBN: 1-55899-800-4
Volume 853E—Fabrication and New Applications of Nanomagnetic Structures, J-P. Wang, PJ. Ryan,K. Nielsch, Z. Cheng, 2005, ISBN: 1-55899-805-5
Volume 854E—Stability of Thin Films and Nanostructures, R.P. Vinci, R. Schwaiger, A. Karim, V. Shenoy,2005, ISBN: 1-55899-806-3
Volume 855E—Mechanically Active Materials, KJ. Van Vliet, R.D. James, P.T. Mather, W.C. Crone, 2005,ISBN: 1-55899-807-1
Cambridge University Press978-1-107-40894-4 - Micro- and Nanosystems—Materials and Devices: Materials Research SocietySymposium Proceedings: Volume 872Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie and Somuri PrasadFrontmatterMore information
Volume 856E—Multicomponent Polymer Systems—Phase Behavior, Dynamics and Applications, K.I. Winey,M. Dadmun, C. Leibig, R. Oliver, 2005, ISBN: 1-55899-808-X
Volume 858E—Functional Carbon Nanotubes, D.L. Carroll, B. Weisman, S. Roth, A. Rubio, 2005,ISBN: 1-55899-810-1
Volume 859E—Modeling of Morphological Evolution at Surfaces and Interfaces, J. Evans, C. Orme, M. Asta,Z. Zhang, 2005, ISBN: 1-55899-811-X
Volume 860E—Materials Issues in Solid Freeforming, S. Jayasinghe, L. Settineri, A.R. Bhatti, B-Y. Tay, 2005,ISBN: 1-55899-812-8
Volume 86IE—Communicating Materials Science—Education for the 21st Century, S. Baker, F. Goodchild,W. Crone, S. Rosevear, 2005, ISBN: 1-55899-813-6
Volume 862— Amorphous and Nanocrystalline Silicon Science and Technology—2005, R. Collins, P.C. Taylor,M. Kondo, R. Carius, R. Biswas, 2005, ISBN 1-55899-815-2
Volume 863— Materials, Technology and Reliability of Advanced Interconnects—2005, P.R. Besser,A.J. McKerrow, F. Iacopi, C.P. Wong, J. Vlassak, 2005, ISBN 1-55899-816-0
Volume 864— Semiconductor Defect Engineering—Materials, Synthetic Structures and Devices, S. Ashok,J. Chevallier, B.L. Sopori, M. Tabe, P. Kiesel, 2005, ISBN 1-55899-817-9
Volume 865— Thin-Film Compound Semiconductor Photovoltaics, W. Shafarman, T. Gessert, S. Niki,S. Siebentritt, 2005, ISBN 1-55899-818-7
Volume 866— Rare-Earth Doping for Optoelectronic Applications, T. Gregorkiewicz, Y. Fujiwara, M. Lipson,J.M. Zavada, 2005, ISBN 1-55899-819-5
Volume 867— Chemical-Mechanical Planarization—Integration, Technology and Reliability, A. Kumar, J.A. Lee,Y.S. Obeng, I. Vos, E.C. Jones, 2005, ISBN 1-55899-820-9
Volume 868E—Recent Advances in Superconductivity—Materials, Synthesis, Multiscale Characterization andFunctionally Layered Composite Conductors, T. Holesinger, T. Izumi, J.L. MacManus-Driscoll,D. Miller, W. Wong-Ng, 2005, ISBN 1-55899-822-5
Volume 869— Materials, Integration and Technology for Monolithic Instruments, J. Theil, T. Blalock, M. Boehm,D.S. Gardner, 2005, ISBN 1-55899-823-3
Volume 870E—Giant-Area Electronics on Nonconventional Substrates, M.S. Shur, P. Wilson, M. Stutzmann,2005, ISBN 1-55899-824-1
Volume 871E— Organic Thin-Film Electronics, A.C. Arias, N. Tessler, L. Burgi, J.A. Emerson, 2005,ISBN 1-55899-825-X
Volume 872— Micro- and Nanosystems—Materials and Devices, D. LaVan, M. McNie, S. Prasad, C.S. Ozkan,2005, ISBN 1-55899-826-8
Volume 873E—Biological and Bio-Inspired Materials and Devices, K.H. Sandhage, S. Yang, T. Douglas,A.R. Parker, E. DiMasi, 2005, ISBN 1-55899-827-6
Volume 874E—Structure and Mechanical Behavior of Biological Materials, P. Fratzl, W.J. Landis, R. Wang,F.H. Silver, 2005, ISBN 1-55899-828-4
Volume 875— Thin Films—Stresses and Mechanical Properties XI, T. Buchheit, R. Spolenak, K. Takashima,A. Minor, 2005, ISBN 1-55899-829-2
Volume 876E—Nanoporous and Nanostructured Materials for Catalysis, Sensor and Gas Separation Applications,S.W. Lu, H. Hahn, J. Weissmuller, J.L. Gole, 2005, ISBN 1-55899-830-6
Volume 877E—Magnetic Nanoparticles and Nanowires, D. Kumar, L. Kurihara, I.W. Boyd, G. Duscher,V. Harris, 2005, ISBN 1-55899-831-4
Volume 878E—Solvothermal Synthesis and Processing of Materials, S. Komarneni, M. Yoshimura, G. Demazeau,2005, ISBN 1-55899-832-2
Volume 879E—Chemistry of Nanomaterial Synthesis and Processing, X. Peng, X. Feng, J. Liu, Z. Ren,J.A. Voigt, 2005, ISBN 1-55899-833-0
Volume 880E—Mechanical Properties of Nanostructured Materials—Experiments and Modeling, J.G. Swadener,E. Lilleodden, S. Asif, D. Bahr, D. Weygand, 2005, ISBN 1-55899-834-9
Volume 88 IE—Coupled Nonlinear Phenomena—Modeling and Simulation for Smart, Ferroic and MultiferroicMaterials, R.M. McMeeking, M. Kamlah, S. Seelecke, D. Viehland, 2005, ISBN 1-55899-835-7
Volume 882E—Linking Length Scales in the Mechanical Behavior of Materials, T.J. Balk, R.E. Rudd,N. Bernstein, W. Windl, 2005, ISBN 1-55899-836-5
Volume 883— Advanced Devices and Materials for Laser Remote Sensing, F. Amzajerdian, A.A. Dyrseth,D. Killinger, L. Merhari, 2005, ISBN 1-55899-837-3
Volume 884E—Materials and Technology for Hydrogen Storage and Generation, G-A. Nazri, C. Ping,R.C. Young, M. Nazri, J. Wang, 2005, ISBN 1-55899-838-1
Prior Materials Research Society Symposium Proceedings available by contacting Materials Research Society
Cambridge University Press978-1-107-40894-4 - Micro- and Nanosystems—Materials and Devices: Materials Research SocietySymposium Proceedings: Volume 872Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie and Somuri PrasadFrontmatterMore information