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Metrology and Characterization Requirements and Challenges for
the Nano-World of Integrated CircuitsAnd Its Overlap with Nano
Technology and Science
Alain C. Diebold
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AGENDAThe ITRS ChallengeLitho MetrologyFEP & Interconnect
MetrologyMaterials Characterization
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ITRS:International Technology Roadmap for Semiconductors The
ITRS includes the roadmap for emerging NanoTechnology and
Electronics.
The ITRS is sponsored by the Semiconductor Industry Association
(SIA), the European Electronic Component Association (EECA), the
Japan Electronics & Information Technology Industries
Association (JEITA), the Korean Semiconductor Industry Association
(KSIA), and Taiwan Semiconductor Industry Association (TSIA)
International SEMATECH is the global communication center for
this activity. The ITRS team also coordinates the USA region
events.
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ITRS Challenge for Metrology In-Time Metrology and
CharacterizationLeading Edge ToolSpecifications set
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ITRS ChallengeNew Materials and Structures
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If Distribution is CenteredCP = CPKProcess control Is based on
Statistical Significance
Chart3
0.74789948240.74170226470.73170731710.70224688320.66404842710.6
0.99503719020.98058067570.95782628520.8944271910.81923192050.7071067812
1.24034734591.21267812521.1704114721.059997880.94072086840.7808688094
1.48340452931.43673942781.36788225781.21.03448275860.8320502943
1.72380331751.65175212361.549446331.31700921571.10665885730.8682431421
1.96116135141.85695338181.71498585141.41421356241.16247638740.894427191
2.19512195122.05182338661.86490951671.49481863741.20601830750.9138115486
2.42535625042.236067977521.56173761891.24034734590.9284766909
&LJ.E.SCHLESINGER&R&D
P/T=0.1
P/T=0.2
P/T=0.3
P/T=0.5
P/T=0.7
P/T=1.0
ACTUAL Cp
MEASURED Cp
EFFECT OF MEASUREMENT PRECISION (P/T RATIO) ON Cp AS
MEASURED
Chart2
0.74789948240.74170226470.73170731710.71836971390.70224688320.68394112890.66404842710.64311969430.62163650560.6
0.99503719020.98058067570.95782628520.92847669090.8944271910.85749292570.81923192050.78086880940.74329414620.7071067812
1.24034734591.21267812521.1704114721.11803398871.0599978810.94072086840.88388347650.83045479850.7808688094
1.48340452931.43673942781.36788225781.28623938861.21.11494121941.03448275860.96027659950.89284132590.8320502943
1.72380331751.65175212361.549446331.43365586091.31700921571.20689655171.10665885731.0171668390.93801423920.8682431421
1.96116135141.85695338181.71498585141.56173761891.41421356241.28036879931.16247638741.059997880.97128586240.894427191
2.19512195122.05182338661.86490951671.67241182911.49481863741.33926198891.20601830751.09269659520.9962557030.9138115486
2.42535625042.236067977521.7677669531.56173761891.38675049061.24034734591.11803398871.01534616510.9284766909
&LJ.E.SCHLESINGER
0.1
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ACTUAL Cp
MEASURED Cp
EFFECT OF P/T RATIO ON Cp
Chart1
0.74789948240.99503719021.24034734591.48340452931.72380331751.96116135142.19512195122.4253562504
0.74170226470.98058067571.21267812521.43673942781.65175212361.85695338182.05182338662.2360679775
0.73170731710.95782628521.1704114721.36788225781.549446331.71498585141.86490951672
0.71836971390.92847669091.11803398871.28623938861.43365586091.56173761891.67241182911.767766953
0.70224688320.8944271911.059997881.21.31700921571.41421356241.49481863741.5617376189
0.68394112890.857492925711.11494121941.20689655171.28036879931.33926198891.3867504906
0.66404842710.81923192050.94072086841.03448275861.10665885731.16247638741.20601830751.2403473459
0.64311969430.78086880940.88388347650.96027659951.0171668391.059997881.09269659521.1180339887
0.62163650560.74329414620.83045479850.89284132590.93801423920.97128586240.9962557031.0153461651
0.60.70710678120.78086880940.83205029430.86824314210.8944271910.91381154860.9284766909
&LJ.E.SCHLESINGER
0.75
1
1.25
1.5
1.75
2
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2.5
P/T RATIO
MEASURED Cp
ACTUAL Cp
EFFECT OF P/T RATIO ON Cp
Chart4
0.99719930990.98893635290.97560975610.93632917760.88539790280.85749292570.8
0.99503719020.98058067570.95782628520.8944271910.81923192050.78086880940.7071067812
0.99227787670.97014250010.93632917760.8479983040.75257669470.70710678120.6246950476
0.98893635290.95782628520.91192150520.80.68965517240.64018439970.5547001962
0.98503046720.94385835640.88539790280.75257669470.63237648990.58123819370.4961389384
0.98058067570.92847669090.85749292570.70710678120.58123819370.529998940.4472135955
0.97560975610.91192150520.82884867410.66436383880.53600813670.48564293120.4061384661
0.97014250010.8944271910.80.62469504760.49613893840.44721359550.3713906764
P/T=0.1
P/T=0.2
P/T=0.3
P/T=0.5
P/T=0.7
P/T=0.8
P/T=1.0
ACTUAL Cp
MEASURED Cp/ACTUAL Cp
EFFECT OF P/T ON MEASURED Cp
Sheet1
ACTUAL Cp
P/T RATIO0.7511.251.51.7522.252.5
0.10.74789948240.99503719021.24034734591.48340452931.72380331751.96116135142.19512195122.4253562504
0.20.74170226470.98058067571.21267812521.43673942781.65175212361.85695338182.05182338662.2360679775
0.30.73170731710.95782628521.1704114721.36788225781.549446331.71498585141.86490951672
0.40.71836971390.92847669091.11803398871.28623938861.43365586091.56173761891.67241182911.767766953
0.50.70224688320.8944271911.059997881.21.31700921571.41421356241.49481863741.5617376189
0.60.68394112890.857492925711.11494121941.20689655171.28036879931.33926198891.3867504906
0.70.66404842710.81923192050.94072086841.03448275861.10665885731.16247638741.20601830751.2403473459
0.80.64311969430.78086880940.88388347650.96027659951.0171668391.059997881.09269659521.1180339887
0.90.62163650560.74329414620.83045479850.89284132590.93801423920.97128586240.9962557031.0153461651
10.60.70710678120.78086880940.83205029430.86824314210.8944271910.91381154860.9284766909
Cp meas/Cp Actual
ACTUAL Cp
P/T RATIO0.7511.251.51.7522.252.5
0.10.99719930990.99503719020.99227787670.98893635290.98503046720.98058067570.97560975610.9701425001
0.20.98893635290.98058067570.97014250010.95782628520.94385835640.92847669090.91192150520.894427191
0.30.97560975610.95782628520.93632917760.91192150520.88539790280.85749292570.82884867410.8
0.40.95782628520.92847669090.8944271910.85749292570.81923192050.78086880940.74329414620.7071067812
0.50.93632917760.8944271910.8479983040.80.75257669470.70710678120.66436383880.6246950476
0.60.91192150520.85749292570.80.74329414620.68965517240.64018439970.59522755060.5547001962
0.70.88539790280.81923192050.75257669470.68965517240.63237648990.58123819370.53600813670.4961389384
0.80.85749292570.78086880940.70710678120.64018439970.58123819370.529998940.48564293120.4472135955
0.90.82884867410.74329414620.66436383880.59522755060.53600813670.48564293120.44278031250.4061384661
10.80.70710678120.62469504760.55470019620.49613893840.44721359550.40613846610.3713906764
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-
test structure inside a dieDistribution of linewidths inside
test structureaveragesingle value from distribution of > 500
MillionWhat are you Measuring?
-
e.g.150 nm lines300 nm pitchOne Aspect of the Solution:Average
over large area &Amplify Signal from Microscopic ChangesOptical
CD using Overlay SystemRapid Sampling of test structures
-
SENSOR based Integrated MetrologyAdvanced Process Control -
Advanced Equipment ControlComponents of SolutionAPC, including
Run-to-run controlFDC: Fault Detection and ClassificationIntegrated
Metrology
-
Metrology & New StructuresLogicMemory
STORAGE MECHANISM
BASELINE 2002 TECHNOLOGIES
MAGNETIC RAM
PHASE CHANGE MEMORY
NANO FLOATING GATE MEMORY
SINGLE/FEW ELECTRON MEMORIES
MOLECULAR MEMORIES
DEVICE TYPES
DRAM
NOR FLASH
PSEUDO- SPIN- VALVE
MAGNETIC TUNNEL JUNCTION
OUM
-ENGINEERED TUNNEL BARRIER -NANOCRYSTAL
SET
-BISTABLE SWITCH -MOLECULAR NEMS -SPIN BASED MOLECULAR
DEVICES
-
Messages from IC IndustryIn-Line Metrology must be linked to the
Manufacturing ProcessAdvanced Process Control and Advanced
Equipment Control will be Necessary for NanoManufacturing Process
ProductivityMetrology for NanoElectronics will also be more than
Dimensional and Mechanical Measurements Electrical Properties of
materials and Electrical Parametrics of devices must be
considered
-
AGENDAHow to control microscopic featuresLitho MetrologyExample
of Interaction between Manufacturing Process and MetrologyFEP &
Interconnect MetrologyMaterials Characterization
-
Litho Metrology for Volume Manufacturing CD Control Starts at
the MaskOverlay and CD Control after ExposureCD Control after
Etch
-
Investigate High Voltage CD-SEMComparison of conventional SE
(left) and Low Loss (right) images of copper interconnects. Note
the greatly enhanced surface detail and lack of edge brightness in
the Low Loss image.Micrograph courtesy of O C WellsFigures from
David JoyHigh Voltage CD-SEM100 200 keVe-Low loss detector
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Scatterometry for CD MeasurementsWhat are the LimitsReal Time
Calculation of line width & shapeEliminates Libraries
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Average vs IndividualCD-SEM measures one line at a
timeScatterometry gives an average over many linesReports indicate
a large number (80 different lines) CD-SEM measurements in test
area required to match scatterometry averageLose individual line
information
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CD Metrology: Status of scatterometryScatterometry works well
for gate controlRing Oscillators still (always will be?) key way to
access CD control.Closed Loop APC + scatterometry have resulted in
a tightening of range of Idsat for microprocessors.
Tight Idsat gives tight distribution of Transistor Delay t t ~ C
Vdd/(Ion*W) Ion units: A/mC = Cs/d + CL
Thanks to Peter Zeitzoff and Larry Larson
-
David Joy, Univ. of TNOpportunities for the distant
futureElectron Holography & Low Energy Electron Microscopy
(LEEM)New normal incidencePoint Projection
MicroscopeSi(111)LEEMTromp and Reuter IBM
-
AGENDAHow to control microscopic featuresLitho MetrologyFEP
& Interconnect MetrologyMaterials Characterization
-
Front End Process & Interconnect MetrologyNew Materials
& StructuresCMOS and non-Classical CMOSMetal GateHigh &
interfacesStrained Si & SOIor locally strained channels
-
Interconnect MetrologyVOID Detection in Copper linesKiller Pore
Detection in Low kBarrier / Seed Cu on sidewallsControl of each new
Low k
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Extra reflection from SOI Wafers Impacts Optical Measurements
and Light ScatteringQuantum confinement for sub 20 nm siliconNeed
SOI Optical Constants
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bulkSOIQuantum confinement effect on optical properties of very
thin SOI
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Double-Gate MOSFETBeyond Classical CMOSMetrology on SidewallsNew
Optical paths???
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X-ray Reflectivity
-
AGENDAHow to control microscopic featuresLitho MetrologyFEP
& Interconnect MetrologyMaterials Characterization
-
Materials Characterization NEEDSAtomic Resolution including
Interface AnalysisRapid Sample Preparation and AnalysisMove new
Materials Characterization into Manufacturing as soon as
possibleLocation of NanoFeatures to allow Characterization e.g.
Dual Column FIBOptical Metrology is part of total picture of
Off-line Characterization Trace Analysis Improvements
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The future : Aberration Correction Lens for TEM/STEMThe next
step in improving spatial resolution for HR-TEM and ADF-STEMPhil
Batsons demonstration of sub Angstrom resolution for STEMCommercial
TEMs with aberration correction lens now available.Next generation
TEM - TEAM project is critical to NanotechnologyTEAM = transmission
electron aberration corrected microscope
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Aberration Correction LENS for TEMAlso Improves Spatial
Resolution for ELS
-
Professor John Sinclair Cornell
-
SEM with Aberration Correction LENsCommercial SEM with
aberration corrections now availableWhat are pros and cons of use
in SEM?
-
xyzVexVpulsebLocal Electrode Atom ProbeAtom Distribution
: < 100% detection Tom Kelly - Imago
-
LEAP Next StepsDevelop Infrastructure in Universities and
National LabsDevelop Applications Improve Detection to ~100%What to
do about insulators??
-
ConclusionsSemiconductor Industry is already Roadmapping the 15
year horizon for NanoElectronics.NanoElectronic Research already
requires characterization with atomic resolutionEconomically
feasible NanoElectronic Manufacturing requires rapid, statistically
significant MetrologyUS centric TEM [TEAM] project is critical to
NanoTechnology
-
Extra Overheads
-
p-Si core/i-Ge/SiOx/p-Ge GL = 1500 nm EOT ~ 0.4nmObserved range
of 1 to 5 A @ 1V
Diameter without metal connection to Ge gate is 50 nm1 milli-amp
of current/ m needed to meet performance requirements
1 x 10-3 amps = 200 nanowire transistors x 5000 nano
Amps/transistor
This would require 200 nanowires in 1 micron width = 50 nm /
nanowire with Idsat = ~ 5 A/m of each nanowire transistor @ 1VddOr
1000 nano Amps/transistor x 1000 nanowire transistors with 10 nm
spaceWith Idsat = ~ 1 A/m -------- an impossible pitch
-
SEM for CD Measurements
-
Ultra-Low Voltage CD-SEM- Line Edge Determination (Still)
requires a modelFigure courtesy Neil Sullivan
-
Metal IlluminationBorden, Smith, Diebold, Chism, IEEE
Transactions on Semiconductor Manufacturing16, August 2003
-
Metal Illumination:Detection of open viasBorden, Smith, Diebold,
Chism, IEEE Transactions on Semiconductor Manufacturing16, August
2003
-
Capacitance TestResistance TestR-C test structures of new low
Prior to manufacture
-
Pores are Difficult to see!!!Bryan Tracy AMDLow k Cross-section
Image from most advanced Lab SEM
-
XRR for low process control
-
Optical Models for Each New Low
-
p(r)Pore Size DistributionDiffuse (small angle) x-ray
scattering
-
p(r)dV/dRabPores Size Distribution via : a Diffuse X-ray
Scattering b Ellipsometric Porosimetry
-
Cu 270 MHzAcoustic Wavelength2 - Form grating and excite
acoustic wave 3 - Probe beam diffracted as wave travels parallel to
surfaceImpulsively Stimulated Thermal Scattering
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149.9306876033
171.8877459396
188.5317099256
198.1091242909
199.6304042313
192.9652905735
178.8467908371
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134.8956032486
109.6777615314
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40.497413868
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27.7502231567
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36.2682224585
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35.1654545297
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35.8238668314
38.2941474887
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12.7212789049
11.9994199338
11.9691267463
12.6186466236
13.8648569586
15.5628233331
17.521753624
19.5255965593
21.3560642984
22.8156287573
23.7480720036
24.0544559377
23.7028827742
22.7310897588
21.2416864979
19.3906196973
17.3701561606
15.3882370888
13.646417524
12.3187285152
11.5336759159
11.3612344929
11.8061492287
12.808177072
14.2491648257
15.966140665
17.7689732879
19.4606884703
20.8582748551
21.811783961
22.219733844
22.0392374407
21.2898497048
20.0508000668
18.4519766203
16.6596817973
14.85871792
13.2327295264
11.9448909133
11.1209672824
10.8365050426
11.1094523508
11.8989247451
13.1101759393
14.6051801719
16.2176487327
17.770850044
19.0963261777
20.051526027
20.534511852
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18.9168471271
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8.936040213
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5.7507560756
5.6754059549
5.6267066003
1
2
3
1 / Acoustic Frequency
Signal
Time (ns)
Signal (mV)
Sheet1
Parameters
TThTacFSthSacBaseline
4035260.00120805
(ns)(ns)(MHz)(mV)(mV)(mV)
TimeSignal
-255
-24.85
-24.65
-24.45
-24.25
-245
-23.85
-23.65
-23.45
-23.25
-235
-22.85
-22.65
-22.45
-22.25
-225
-21.85
-21.65
-21.45
-21.25
-215260
-20.85
-20.65
-20.45
-20.25
-205
-19.85
-19.65
-19.45
-19.25
-195
-18.85
-18.65
-18.45
-18.25
-185
-17.85
-17.65
-17.45
-17.25
-175
-16.85
-16.65
-16.45
-16.25
-165
-15.85
-15.65
-15.45
-15.25
-155
-14.85
-14.65
-14.45
-14.25
-145
-13.85
-13.65
-13.45
-13.25
-135
-12.85
-12.65
-12.45
-12.25
-125
-11.85
-11.65
-11.45
-11.25
-115
-10.85
-10.65
-10.45
-10.25
-105
-9.85
-9.65
-9.45
-9.25
-95
-8.85
-8.65
-8.45
-8.25
-85
-7.85
-7.65
-7.45
-7.25
-75
-6.85
-6.65
-6.45
-6.25
-65
-5.85
-5.65
-5.45
-5.25
-55
-4.85
-4.65
-4.45
-4.25
-45
-3.85
-3.65
-3.45
-3.25
-35
-2.85
-2.65
-2.45
-2.25
-25
-1.85
-1.65
-1.45
-1.25
-15
-0.85
-0.65
-0.45
-0.25
-05
0.2149.9306876033
0.4171.8877459396
0.6188.5317099256
0.8198.1091242909
1199.6304042313
1.2192.9652905735
1.4178.8467908371
1.6158.7842313827
1.8134.8956032486
2109.6777615314
2.285.7393671176
2.465.525097487
2.651.0602479204
2.843.7423677866
344.2013241598
3.252.2417411163
3.466.8729359199
3.686.4222075478
3.8108.7186086924
4131.3270614206
4.2151.8076077204
4.4167.9722276021
4.6178.1122266596
4.8181.1725988529
5176.8556183413
5.2165.643563298
5.4148.739099353
5.6127.9305319709
5.8105.3969614109
683.474527313
6.264.4087838498
6.450.1194213534
6.642.0019531647
6.840.786816735
746.4700637666
7.258.3221195714
7.474.9728027343
7.694.5627916225
7.8114.944843398
8133.9130252907
8.2149.4355171224
8.4159.8664459947
8.6164.1146994095
8.8161.7524409909
9153.0525945632
9.2138.9521591935
9.4120.9460584866
9.6100.9234840636
9.880.9646087577
1063.1195123444
10.249.1927862409
10.440.5564193327
10.638.0103341393
10.841.7047080395
1151.1315518303
11.265.1856448273
11.482.2876259886
11.6100.5555815047
11.8118.0065210892
12132.7662013772
12.2143.2651212336
12.4148.4002209376
12.6147.6456588756
12.8141.1015870411
13129.4764970996
13.2114.0057496674
13.496.3155853939
13.678.2475478873
13.861.6622448443
1448.2433329768
14.239.3223514458
14.435.7426001915
14.637.7759439625
14.845.1006955827
1556.8422117922
15.271.6712170041
15.487.948852083
15.6103.9026532674
15.8117.8145909733
16128.2012435505
16.2133.9672351429
16.4134.516094741
16.6129.8073542431
16.8120.3544878386
17107.164581808
17.291.6267456148
17.475.3615896031
17.660.0480516324
17.847.2460535962
1838.2336975971
18.233.8759688898
18.434.5384043461
18.640.0543004015
18.849.7483028924
1962.5132556586
19.276.9316156958
19.491.4281515465
19.6104.4375005326
19.8114.5687834332
20120.7499871499
20.2122.3371514475
20.4119.1772696709
20.6111.6188101808
20.8100.4693465182
2186.9053560324
21.272.3442226677
21.458.2923429309
21.646.1855908557
21.837.2390171412
2232.3214941395
22.231.8682147057
22.435.8398227618
22.643.7319464896
22.854.6335581944
2367.3274646142
23.280.4218740282
23.492.4988418234
23.6102.2637813496
23.8108.6802944827
24111.0763000929
24.2109.2106183581
24.4103.293453417
24.693.9591427871
24.882.1945836263
2569.2313714223
25.256.4134140321
25.445.05423113
25.636.2990730784
25.831.0063140989
2629.6603820737
26.232.3250292643
26.438.6414029982
26.647.8706102633
26.858.9757914056
2770.7346171049
27.281.8700245225
27.491.1852276023
27.697.688745418
27.8100.6964048917
2899.8998454818
28.295.3946975452
28.487.665927327
28.677.5323775068
28.866.0568031485
2954.4312623304
29.243.850202203
29.435.3847358287
29.629.8713264973
29.827.8264298801
3029.3957815113
30.234.3432725339
30.442.0801344874
30.651.7309038825
30.862.2288069645
3172.4301927269
31.281.2357555891
31.487.7057139625
31.691.156892798
31.891.2316994672
3287.9320538247
32.281.6151001378
32.472.9515864182
32.662.8517152559
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1955.6267066003
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SampleRG-FilterPolarizersTi:SapphireLaserl=700-920nm,tp=100fs,Pav=400mWLensesPrismIrisPMTw2w@3eVUG-FilterRotationTableI(2w)(t)c(2)+c(3)E(t)2I(w)2SHG
Experimental SetupNorm Tolk - Vanderbilt University Mike Downer
University of Texas
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Laser Stimulated Electron InjectionExample of leakage current
measurements : Effect of X-Ray Induced Traps Before Irradiation
After IrradiationTraps have two functions: to trap electrons to
provide hopping centers for electron tunnelingNorm Tolk -
Vanderbilt University
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Coherent spin transport across GaAs/GaSb/InAs
heterostructureSpin-polarized electrons are excited in GaAs by
150-fs circularly polarized lightDue to coherent spin transport,
magnetization appears itself in InAs epilayerThe thermalization and
cooling of electrons and holes within ~ 1 ps result in a charge
separation, thus creating interfacial electric fields
The resulting electric fields bend the initial band alignment
and confine spins at the interfaces, thus creating interfacial
magnetic fieldsNorm Tolk - Vanderbilt University
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Band offsets are crucial parameters in spin-carrier dynamics and
spin-polarized carrier transport across semiconductor
heterostructures. For many semiconductor interfaces under
investigation for spintronics application these band offsets are
experimentally not well characterized.
The external magnetic field, the surface and bulk states of the
insulator, electrical and structural stress and externally
introduced damage all affect the tunneling of spin carriers
Band offsets studies help us understand the photon- energy
dependent measurements of optically excited spin carrier tunneling
(Spin Leakage Currents) through thin insulators through the band
bending due to charge redistribution. Band Offset Measurement :
MotivationNorm Tolk - Vanderbilt University
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At Vanderbilt, we have successfully measured band offsets at
semiconductor interfaces using both IPE and SHG. We are now in the
process of applying these techniques to spin interesting
materials.Band Offset Measurement ApproachesNorm Tolk - Vanderbilt
University
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Objective lensGeneration laserProbe laserVision
systemDetectorDetail in waferNew Methods
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Infrastructure for Ion Beam analysisUS National Labs have great
InfrastructureDont forget to use ion beam analysis for
nano-technologyNumerous methods classified as Ion Beam
RBSNRAHIBSMEISPIXIEEtc.
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Scanned Probe Microscopy
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Advanced Optical MethodsOptical Second Harmonic Generation
(SHG)Spectroscopic determination of surface / interface dielectric
functionUltra-fast Optical MeasurementsSHG using ultra-fast pump
probe allows determination of carrier transport propertiesSpin
transport characterizationBand Offset DeterminationFaraday
Measurements for Spin Transport
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Metrology & New StructuresLogicMemory
STORAGE MECHANISM
BASELINE 2002 TECHNOLOGIES
MAGNETIC RAM
PHASE CHANGE MEMORY
NANO FLOATING GATE MEMORY
SINGLE/FEW ELECTRON MEMORIES
MOLECULAR MEMORIES
DEVICE TYPES
DRAM
NOR FLASH
PSEUDO- SPIN- VALVE
MAGNETIC TUNNEL JUNCTION
OUM
-ENGINEERED TUNNEL BARRIER -NANOCRYSTAL
SET
-BISTABLE SWITCH -MOLECULAR NEMS -SPIN BASED MOLECULAR
DEVICES
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ABCMetrology & Molecular ElectronicsPaul Weisss Group STM of
Conductance Switching
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Nanowire Transistors and InterconnectL.J.LAUHON, M.S.GUDIKSEN,
D.WANG & CHARLESM.LIEBERNature 420, 57 - 61 (2002)500 nm10 nm
p-Si core diameter & 10 nm i- Ge layer5 nm layer of Ge on top
of 4 nm SiOx
Describe what each line means. Technology Nodes defined by DRAM
pitchLogic gate length (isolated feature easier to pattern than
dense feature) smaller than DRAM pitch
DRAM at 65 nm node is 1 Gig 8 Gig at 22 nm node
Remember to state that tool suppliers, IC manufacturers, and
development organizations (for example universities) need to work
together. IC manufacturers need to provide ~20 nm features to these
organizations. This needs encouragement. Describe what each line
means. Technology Nodes defined by DRAM pitchLogic gate length
(isolated feature easier to pattern than dense feature) smaller
than DRAM pitch
DRAM at 65 nm node is 1 Gig 8 Gig at 22 nm node
Remember to state that tool suppliers, IC manufacturers, and
development organizations (for example universities) need to work
together. IC manufacturers need to provide ~20 nm features to these
organizations. This needs encouragement. The monopole RGA sold by
Ferran is also a MEMS sensor. MEMS is more than silicon based
miniaturization
Mini-SEMs have are in the demonstration of feasibility
stage.
NIST has done some work in the area of MEMS test structures for
interconnect stress (these structures would be placed in scribe
areas of the wafer)Metrology starts with understanding of the
process tools
Transistor gate length must fall with in a range of values. If
the CDs are within this range, the gate delay will be the same for
all the transistors provided other processes such as implant dose
are identical. This is a part of keeping the circuit operating at
the highest clock speed.Rigorous coupled wave theory (RCWT) is
simply a mathematical mechanism that allows for the direct solution
of the electromagnetic fields diffracted by a grating
WHY HOLOGRAPHY?
Why low beam energies?
To minimize artifacts due to beam penetration, to minimize
energy deposition and hence radiation damage in buried oxide
layers, to reduce chargingBut........ The performance of low energy
SEMs is limited by chromatic aberration, and diffraction effects,
in the probe forming lens to a spatial resolution that is not
adequate to achieve the performance required for 0. 10 micron
design rule devices.
A solutionUse a nanotip field emitter, operating at 100 volts or
so. This emits a highly coherent electron beam which is scattered
and reflected from a patch 20 30 micrometers in size on the surface
of the device. The unscattered and scattered waves interfere to
produce a hologram in the region downstream of the tip. A step and
repeat technique is used to observe the complete specimen area.
AdvantagesThis instrument uses no lenses so it has neither
aberration nor diffraction limitations. The resolution is limited
by the electron wavelength. The electron beam is divergent so the
beam dose rate is low, minimizing charging, contamination, and
radiation damage.
Special benefitsAll features in the illuminated patch contribute
to the hologram, so the repeat spacings (in both the horizontal and
vertical planes) that are determined from the hologram yield a
statistical analysis of the entire area simultaneously. The
hologram is self calibrating because the fringe spacing is only a
function of the electron energy. No high speed scanning is required
so the bandwidth and slew rate limiting artifacts characteristic of
conventional e beam tools are absent.
Historical NoteThis idea was first conceptualized by Russ Young
(the guy who really invented the scanning tunneling microscope) at
NBS in the 1970s. It was re discovered and demonstrated by Fink
(IBK Zurich) in the 1980s and by Spence (ASU).Other Uses?(1) The
hologram could be compared with a standard test hologram to yield
an interferogram. which identified all regions not identical with
the standard. It might thus be suitable for defect review.(2) By
placing "electron mirrors in the ray path interference patterns of
arbitrary form can be produced at the sample. This spatial
modulation of the beam intensity can be used for example for
resistless lithography. No mask is required, and the low beam
energy ensures a high rate of exposure at the surface.David
JoyFigure 5 Coaxially-gated nanowire transistors. a, Device
schematic showing transistor structure. The inset shows the
cross-section of the as-grown nanowire, starting with a p-doped Si
core (blue, 10nm) with subsequent layers of i-Ge (red, 10nm), SiOx
(green, 4nm), and p-Ge (5nm). The source (S) and drain (D)
electrodes are contacted to the inner i-Ge core, while the gate
electrode (G) is in contact with the outer p-Ge shell and
electrically isolated from the core by the SiOx layer. b, Scanning
electron micrograph (SEM) of a coaxial transistor. Source and drain
electrodes were deposited after etching the Ge (30% H2O2, 20s) and
SiOx layers (buffered HF, 10s) to expose the core layers. The
etching of these outer layers is shown clearly in the inset and is
indicated by the arrow. The gate electrodes were defined in a
second step without any etching before contact deposition. Scale
bar is 500nm. c, Gate response of the coaxial transistor at VSD =
1V, showing a maximum transconductance of 1,500nAV-1. Charge
transfer from the p-Si core to the i-Ge shell produces a highly
conductive and gateable channel.