MEMS Presentation By Mustafa G. Guvencheelinux.ee.usm.maine.edu/courses/ele343/MyProjects for 402-2005.pdf · MEMS Micromotors,” Invited Talk at the Electrical Manufacturing and

My ProjectsMy Projects@ USM@ USM

Mustafa G. GuvenchMustafa G. GuvenchProfessor, Electrical EngineeringProfessor, Electrical Engineering

My Interests & ExpertiseMy Interests & Expertise

•• CMOS Analog I.C. DesignCMOS Analog I.C. Design•• Silicon I.C. ProcessingSilicon I.C. Processing•• Micro Machining and MEMSMicro Machining and MEMS•• Optoelectronics (Optoelectronics (PhotosensorsPhotosensors))•• SENSORS (MEMS, Semiconductor)SENSORS (MEMS, Semiconductor)•• Instrumentation and MeasurementInstrumentation and Measurement

Courses I teachCourses I teach

•• CMOS Analog I.C. DesignCMOS Analog I.C. Design ELE 444ELE 444•• Silicon I.C. ProcessingSilicon I.C. Processing ELE 464ELE 464•• OptoelectronicsOptoelectronics ELE 467ELE 467•• Electronics I & IIElectronics I & II ELE 342&343ELE 342&343•• OthersOthers ELE 401ELE 401--403403

CMOS Analog Chip Design

CMOS Analog Chip Design (Operational Amplifier)CMOS Analog Chip Design (Operational Amplifier)

M.G.GuvenchM.G.Guvench

The Measurement System

MicroFab LaboratoryI-V Characterization System

The Measurement System is used forAutomated Measurement of Semi. Device Chs.

MicroFab LaboratoryHall-Effect Measurements

MicroFab Laboratory(Vacuum Deposition System)

Programmable Diffusion/Oxidation System’s Programmable Diffusion/Oxidation System’s Controller in The Controller in The MicroFabMicroFab LaboratoryLaboratory

MicroFab Laboratory(Plasma Asher/Cleaner)

MicroFab Laboratory(Clean Room/Mask Aligner)

MicroFab Laboratory(Clean Room: PR Spinner)

Testing of a DoubleTesting of a Double--Diffused PDiffused P++NNNN++ Junction Junction PhotoDiodePhotoDiode Fabricated in The Fabricated in The MicroFabricationMicroFabrication Lab.Lab.

Surface Micromachined

MEMS Sensors MEMS Sensors Multi_ProjectMulti_Project ChipChip

M.G.GuvenchM.G.Guvench

MEMS Sensors MEMS Sensors Multi_ProjectMulti_Project Chip Design: LayoutChip Design: Layout

M.G.GuvenchM.G.Guvench

Electrostatic Field SensorsElectrostatic Field Sensors

M.G.GuvenchM.G.Guvench

Electrostatic Field SensorsElectrostatic Field Sensors

M.G.GuvenchM.G.Guvench

A Mass (Absorption/Deposition) SensorA Mass (Absorption/Deposition) Sensor

M.G.GuvenchM.G.Guvench

Mass (Absorption/Deposition) Sensor: LayoutMass (Absorption/Deposition) Sensor: Layout

M.G.GuvenchM.G.Guvench

Mass (Absorption/Deposition) Sensor: LayoutMass (Absorption/Deposition) Sensor: Layout

M.G.GuvenchM.G.Guvench

Resonant MEMS Sensor Test SetupResonant MEMS Sensor Test Setup

M.G.GuvenchM.G.Guvench

MEMS MEMS MicromotorMicromotor

CMOS Intelligent CMOS Intelligent PhotoSensorPhotoSensor

Design, Fabrication and Testing of Design, Fabrication and Testing of Solar Cells (Solar Cells (National SemiconductorNational Semiconductor))

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NSCNSC--USM SOLAR CELLUSM SOLAR CELL

Finished Solar CellFinished Solar Cell Cross SectionCross Section

Recent Student ProjectsRecent Student Projects

•• Sputter Deposition and Characterization of Poly Silicon for MEMSSputter Deposition and Characterization of Poly Silicon for MEMS, , Greg DunbarGreg Dunbar

•• Solar Cell Fabrication from 8 inch Test Wafers and Redesign of aSolar Cell Fabrication from 8 inch Test Wafers and Redesign of a Solar Solar Simulator, Simulator, Caglar GurcanCaglar Gurcan

•• CMOS Interface Circuit Design for Capacitive MEMS Sensors, CMOS Interface Circuit Design for Capacitive MEMS Sensors, Roy WallerRoy Waller

•• Design of InDesign of In--Vacuum Substrate Heater Vacuum Substrate Heater Kris DurginKris Durgin

Current Student ProjectsCurrent Student Projects

•• Design and Fabrication of Solar Cell from 4Design and Fabrication of Solar Cell from 4--inch Fairchild Wafers, inch Fairchild Wafers, Alan Alan BlaistedBlaisted & Ahmed & Ahmed JamaJama

•• Design and Fabrication of FourDesign and Fabrication of Four--Quadrant Quadrant PhotoDiodePhotoDiode Sensor, Sensor, Tho Ngo SnowTho Ngo Snow

•• A Laser Optic Communication System for Wireless Video TransmissiA Laser Optic Communication System for Wireless Video Transmission, on, Hazem Hazem ZanoonZanoon

•• Characterization and Modeling of MEMS Test Structures for ResidCharacterization and Modeling of MEMS Test Structures for Residual ual Stress (Stress (FairchildFairchild) ) Ryan GoodwinRyan Goodwin

New Student ProjectsNew Student Projects

•• Continuation of “Continuation of “Current ProjectsCurrent Projects” listed” listed•• Oscillator Circuit Design for Quartz Crystal Resonant Gas SensorOscillator Circuit Design for Quartz Crystal Resonant Gas Sensor•• Characterization and Modeling of MEMS Test Structures for ResidCharacterization and Modeling of MEMS Test Structures for Residual ual

Stress (Stress (FairchildFairchild))•• ReDesignReDesign of of LabViewLabView Controlled Semiconductor IControlled Semiconductor I--V Measurement V Measurement

SystemSystem•• LabViewLabView Controlled LED (or Laser Diode) Characterization SystemControlled LED (or Laser Diode) Characterization System•• Redesign of BodeRedesign of Bode--3 in 3 in LabViewLabView for C.I.E. Lab Experimentsfor C.I.E. Lab Experiments

Published Student ProjectsPublished Student Projects•• 1. Guvench, M.G., Denis, A.M. and Gurcan, C., “Automated Testing1. Guvench, M.G., Denis, A.M. and Gurcan, C., “Automated Testing and and

Parameter Extraction of Solar Cells Fabricated from 6Parameter Extraction of Solar Cells Fabricated from 6--8 inch Large Test 8 inch Large Test Wafers," abstract accepted, paper in preparation for presentatioWafers," abstract accepted, paper in preparation for presentation at n at U.G.I.M., Boise, Idaho, July 2003, and to appear in the U.G.I.M., Boise, Idaho, July 2003, and to appear in the Proceedings of Proceedings of U.G.I.M. 2003U.G.I.M. 2003..

•• 2. Guvench, M.G. and Wood, E.C., “A Waveform Generator and Drive2. Guvench, M.G. and Wood, E.C., “A Waveform Generator and Driver For r For MEMS MEMS MicromotorsMicromotors,” Invited Talk at the Electrical Manufacturing and ,” Invited Talk at the Electrical Manufacturing and Coil Winders Association’s EMCWA Expo 2002, Cincinnati, OH, Oct.Coil Winders Association’s EMCWA Expo 2002, Cincinnati, OH, Oct. 2002. 2002. The paper is published in the The paper is published in the Proceedings of EMCWAProceedings of EMCWA, pp 1, pp 1--4, 2002. 4, 2002.

•• 3. Wood, E.C. and Guvench, M.G., “A Programmable Controller/Driv3. Wood, E.C. and Guvench, M.G., “A Programmable Controller/Driver for er for Electrostatic MEMS Electrostatic MEMS MicromotorMicromotor," ," Proceedings of A.S.E.E.Proceedings of A.S.E.E. , s.2559, paper , s.2559, paper no.2436, 2002.no.2436, 2002.

•• 4. Guvench, M.G., 4. Guvench, M.G., GileGile, S., and , S., and QaziQazi, S., “Automated Measurement of , S., “Automated Measurement of Frequency Response of Electrical Networks, Filters and AmplifierFrequency Response of Electrical Networks, Filters and Amplifiers” s” Proceedings of A.S.E.E.Proceedings of A.S.E.E., s.1359, 7pp., 2001., s.1359, 7pp., 2001.

•• 5. Guvench, M.G., 5. Guvench, M.G., MiskeMiske, M. and Crain, E., “Design, Fabrication and , M. and Crain, E., “Design, Fabrication and Testing of CMOS Operational Amplifiers …" Testing of CMOS Operational Amplifiers …" Proceedings of U.G.I.M.Proceedings of U.G.I.M., v.14, , v.14, pp.118pp.118--122, 2001.122, 2001.

•• 6. Guvench, M.G., Rollins, M., Guvench, S. and Denton, M. , “Au6. Guvench, M.G., Rollins, M., Guvench, S. and Denton, M. , “Automated tomated Semiconductor Device Measurement System for Temperature and MagnSemiconductor Device Measurement System for Temperature and Magnetic etic Field Characterization” Field Characterization” Proceedings of A.S.E.E.Proceedings of A.S.E.E., s2259, 8pp., 2000., s2259, 8pp., 2000.

•• 7. Guvench, M.G., Stone, R., Pennell, S. and Worcester, R. , 7. Guvench, M.G., Stone, R., Pennell, S. and Worcester, R. , “Programmable PID Temperature Control of Multi“Programmable PID Temperature Control of Multi--Tube MultiTube Multi--Zone Zone Diffusion Furnaces”Diffusion Furnaces” Proceedings of A S E EProceedings of A S E E s1359 8pp 1998s1359 8pp 1998

If Interested in Working with MeIf Interested in Working with Me

•• Prepare a detailed CV highlighting Work and Prepare a detailed CV highlighting Work and Technical Experience, Technical Experience,

•• Attach a copy of your transcript, expected Attach a copy of your transcript, expected date of graduationdate of graduation

•• How many hours per week you can commit,How many hours per week you can commit,•• A statement of interest (what projects of mine A statement of interest (what projects of mine

interested you),interested you),•• Make an appointment with me ASAP.Make an appointment with me ASAP.

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