MEMS: From Jewel to consumer Commodity BRUNO MURARI POVO 29-01-09 BENEDETTO VIGNA.

MEMS: From Jewel to consumer Commodity

BRUNO MURARI

POVO 29-01-09

BENEDETTO VIGNA

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Concentrated System in a Single Box

Bipolar, BCD, CMOSBiCMOS, VIP,µ-Machining

Power Management

InformationProcessing(Super Integration)

MultifunctionPeripheral (System

Oriented Tech.)

Data Acquisitionand Conversion

Bipolar, CMOS,RF-BiCMOS,µ-Machining

Central Processing(µP, DSP)

Digital CMOS

PowerActuators

Bipolar, BCD,CMOS, HVCMOS,VIP, µ-Machining

Memories

CMOS, Flash,DRAM, µ-Machining

Line, Batteries,Alternators, Solar Cells, Fuel Cells

Sensors

Antennas

Keyboards

LineInterfaces

Switches

Clock Clock

Clock

Lamps

Motors

Displays

Solenoids

Speakers

CRTs

Inkjets

Antennas

3

EV

OL

UT

ION

/RO

AD

MA

P (

*)

NO ROADMAP–CLUSTERS OF INVENTIONS(*)Room for Nobel Prize

(*) – Modified by Bruno Murari

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Outline

• MEMS in ST

• MEMS and Epiphany, what are they?

• MEMS Epiphany and:– Nintendo and Apple– STMicroelectronics

• What’s next on the horizon?

• Conclusions

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6

ST MEMS Growth and 8” Fab

0

20

40

60

80

100

120

140

160

180

200

220

240

2005 2006 2007 2008

0.0%

1.0%

2.0%

3.0%

4.0%

5.0%

6.0%

7.0%

8.0%

9.0%

10.0%

MEMS Revenues MEMS Market Share

> 10x

> 3x

> 2x96M

209M

30M8” Fab in Milan

ST leads the “MEMS Consumerization Wave”

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MEMS: A Look From the Inside• MEMS means Micro Electro Mechanical Systems … taking

advantage of the mechanical AND electrical properties of silicon

• Three key elements:– Micron-sized Transducer realized through a specific

process called Micro-Machining (THELMA)– An Advanced Analog Chip with embedded smart

functionalities– Dedicated package and calibration features

+ =

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….and from outside

7x55x5

3x54x4 3x3

Capacitive 3X accelerometers, analog and digital output

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Technology Epiphany:

the Manifestation of the essential and more powerful meaning of that

technology.

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Technology Epiphany = Carving out a quiescent meaning of that technology

“The Statue is already embedded in the marble block, I’m just removing the marble in excess”, Michelangelo Buonarroti

Technology Epiphany: ……visible only to few people.

Pieta’ Rondanini, Michelangelo’s last incomplete sculpture (1564). It is now patrimony of the Museo d’Arte Antica in the Sforza Castle in Milano, Italy.Source: Wikipedia

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Technology Epiphany as Innovation Strategy

OLD

MEANING

INCREMENTAL

RADICAL T E C H N O L O G Y

NEW

MARKET PULL (user cent ered )

TECHNOLOGY PUSH

DESIGN DRIVEN

TECHNOLOGY EPIPHANY

Technology Epiphany = Design Driven + Technology Push

Source: Prof. Verganti

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Wii is a MEMS Epiphany

Technology Push + Design Driven

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Kyoto,Early 2000’s

Milano,March 2000

“Throw away the button.Just move it”

“Let’s compete against nonconsumption”

Where, When and Why?

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Nintendo Starting point: “6th Generation” Controllers

Many people were intimidated by a two-handed remote controller and you’d need to be an octopus

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Nintendo Innovation Strategy

Adaptation to the evolution of

socio-cultural models

MEANINGS (languages)

Incremental Improvement

Radical Improvement

PERFORMANCE (technology)

Generation of new meanings

Playstation 3Microsoft Xbox

360

Nintendo Wii

GraphicsSpeed

MEMSAccelerometerfor EnhancedUser Interface

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Bulky Power Hungry

Expensive

MEMS before STMicroelectronics

ESP/EPB/ABS

Side Airbag Satellite

Occupancy Detection

Front Airbag

Seatbelt / Pre-safe

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Kyoto, March 2005: First MeetingNintendo said:“Your products are very good and may fit our innovative consoles…..….but we need right price, quality and security of supply….otherwise it’s useless”

I replied:“We are able to match your price thanks to our innovation in technology and product design. We can also guarantee the manufacturing capacity and the quality you need”

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ST MEMS in Wii Controller

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MEMS puts players into the action!

ST MEMS in the Nintendo WiiTM:Playing is Believing

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One-Hand Interface in Mobile Phones

Portrait / Landscape

auto-detection

On-screen

map readjustment

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MEMS in Apple NanoPod

Source: www.apple.com

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Just as graphical icons and a mouse have transformed the way people use computers, today MEMS are revolutionizing

the way people use handheld devices

1960

Computational Power

Text

Multimedia

1980 2000

MEMS

User Interface

MEMS = Mouse for Handsets

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Low Supply VoltageLow Current

ConsumptionSmall Package

Easy to Integrate Embedded Smart

FunctionalityLow Cost

The ST path to radical innovation

Radical Innovation in Technology, Design, Package and Testing

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2 Chip Solution:Time-to-Voluume and Time-to-market

+

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3X 3x3x1 Digital Output Accelerometer

Source: iSupply Oct. 2008

Micromachined Transducer

High PerformanceASIC

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Ultra Low Power Accelerometers

10 - 250 uA6 – 12 Bits3x3x1 mm3

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Package of LIS3L02AL

MATRIX

Before injection molding

After injection molding

LIS3L02AL: 3X CapacitiveAccelerometer

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Packaging Manufacturing Challenges

Before STMicroelectronics, sensor packaging was taking most of the manufacturing cost

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Packaging Design Challenges: reduce stress

Sensor Die

Logic Die

BT

(b) ½ Package model (a) MC removed to display dice

X

Z Y

Moulding Comp

Cap

A B

C (a) Unit warpage (b) Sensor warpage

Before STMicroelectronics no LGA or QFN package was used for MEMS

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Calibration Challenge: High Accuracy Positioning in 3-Dim Space

High Accuracy, High Productivityhandlers and Rate Tables have beendeveloped @ low cost

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What’s next on the horizon?• Multiple axis Gyroscopes

• Pressure sensors

• Combo Modules

• Motes: Wireless Sensors

• Healthcare applications

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Yaw Gyro 5x5 with Analog and Digital ouput

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ST Multi Axis Coriolis’ Gyroscopes

+

Micromachined Transducer

High PerformanceASIC

5x5x1.5mm3

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Roll Gyroscope

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Pitch/Roll Gyroscope

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Pitch and Roll with some details

Pitch/Roll

Gyroscope

Roll Gyro

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Technological Innovation: Oxide isolation on air gap

Oxide Isolation simplifiesASIC architecture

V1

V2

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2X Coriolis Gyroscope ASIC Architecture

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HLGA fosters Miniaturization of pressure sensors

ST Approach

8x8x4 mm3

5x5x0.9 mm3

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HLGA for Pressure Sensors

After molding

Before Moulding

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Combo Module for……

3X Acc

3X Gyro

RF / uC

Touch Sensor

Microphone

Magnetometers

3X Acc

3X Gyro

RF / uC

Other

PressureMagnetometers

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Combo modules:Accelerometers + Gyroscopes

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Motes of the future

3D integrationSmall footprint

2D integration: Thin and flexible

Stick on skin, integrate in clothingSource: IMEC

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Miniature and Disposable Insulin Pump

• Small– Size: 6 mm x 10 mm– Flow range: up to 5 ml/h– Stroke Volume: 200 nl, 0.02 U

• Precise– Nominal Accuracy ±5%– Reproducibility ±2%

• Safe– Built-In failure detection– Anti Free-flow features

Source: Debiotech

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Disposable MicroPump for Insuline delivery

Pumping membrane

Outlet Check Valve

Through hole for electrical

connections

Through hole for outlet port flipping

Inlet check valve Detector Vent openingsThin layer patterning

Source: Debiotech

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Conclusions

• ST contributed to MEMS Epiphany and it’s leading the MEMS Consumerization Wave.

• “There is still a plenty of room” at Consumer market.

• When seeking new MEMS epiphanies ask:– “How can we expand consumption by reaching customers whom

we can’t adequately serve today?”

• When doing Innovation pls consider that:– Customer is not enough, imagination is needed to carve a

quiescent meaning from a technology– Proper network with research centers and acadamic institutions

is key

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Let’s continue to innovate!

Thank you

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Key Milestones of MEMS in STMicroelectronics

MEMS2006, Feb.

Sep. 2005Jan. 2009

TIME