MEMS Towards smart community… AKHIL GARG
MEMS
Towards smart community…
AKHIL GARG
• Micro - Small size, micro fabricated structures
• Electro - Electrical signal /control ( In / Out )
• Mechanical - Mechanical functionality ( In / Out )
• Systems - Structures, Devices, Systems Control
Accelerometer & Gyro Sensors
iMEMS ADXRS Angular Rate-Sensing Gyro
Hard Drive Magnetic Read/Write Heads
By incorporating MEMS actuation, the head can be positioned more quickly and to finer tolerances, this results in higher density data capability.
MEMS Fabrication
Surface Micro Machined Motor
HARMEMS
LIGA Fabrication Process
microstructures up to 1000 μm high.
Mass Storage - IBM
IBM’s “Millipede”100 Tera Bit per square inch!
CONCLUSIONMEMS would completely transform our lives and improve our comfort level tremendously
Thank You
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