MEMS Cosim+ MEMS Manufacturing Cost Simulation ToolC... · 2014. 11. 21. · MC050 - Discera DSC8002 MEMS Oscillator MC147 - Silicon labs Si104 MEMS Oscillator MC076 - Wispry A2101

• Due to their non-standard manufacturing process, the cost of MEMS devices can be

difficult to estimate. Components such as accelerometers, pressure sensors, inkjet

heads or micromirrors involve very different process steps.

• MEMS Cosim+ is a flexible tool ready to evaluate the cost of any MEMS process or

component, already used by manufacturers as well as end users.

• With the possibility to store steps and process flows in libraries, this new version

dramatically reduces the duration of the cost evaluation.

Evaluate the production cost of any MEMS process or device

From single chip to complex structures

MEMS Cosim+

MEMS Manufacturing Cost Simulation Tool

No admin privilege is required for setup

• MEMS Cosim+ is working from a single MS-

Excel™ file and an external and sharable data file.

• Requires only basic MS-Excel ™ or MS-Office™

suite (from 2007 to 2013 release)

Results are fully open-format

• You can modify or export final results, and build

reports your own style as with any Excel workbook.

Workgroup-compliant, safely

• All the data managed by MEMS CoSim+ are stored

in an external MS-Access™ database file. Data

cannot be read from the single Excel file and

access rights to the database are needed. Multiple

access, data sharing and data integrity are secured.

MEMS Cosim+ is able to estimate a cost with different levels of data inputs, allowing it

to be used in multiple applications.

• This tool is ideal for strategic marketing executives, process managers and R&D

engineers analyzing the economic feasibility of different MEMS manufacturing

approaches.

• MEMS equipment suppliers can use the tool to know the operating cost of their

equipment and to compare with their competitors.

• It is also of great help for purchasing managers who want to understand their

supplier’s costs.

Multiple process flows

• Any MEMS process flow can be simulated.

• Hierarchical description for multiple dies or

processes.

• Simulate cost for a variety of different conditions

(region, clean room class, process type, etc).

• Integrated equipment, wafer & materials databases.

• Possibility to store an unlimited number of process

steps or process flows in libraries.

• Simulation of up to five simultaneous scenarios

allowing the user to run sensitivity analysis and

compare results like yield improvement,

manufacturing location impact on cost, etc.

Multiple subcontracting operations

• Costs of usually externalized operations can be

precisely evaluated by setting their individual

regional and commercial parameters.

A TOOL DESIGNED FOR THE MEMS COMMUNITY

WHO SHOULD BUY THIS TOOL

MAIN FEATURES

WORKING WITH MEMS Cosim+

Step 1Set the project main data and the Bill of

material

Step 2Select processes of all

components or create a new process using the process

Flow Builder

Step 3Calculate project results and adjust values if needed

PRODUCT DESCRIPTION

BoM editorTree view hierarchical

structure

Flow builderStep by step description

Inputs / OutputsMEMS COSIM+ DATABASES

OPTIONAL LIBRARIES

Database EditorEquipment parameters for

multiple wafer sizes

Main databases included:

• Equipment

• Substrates

• Materials

• Wafer fab units

• Assembly units

MEMS Components:• Accelerometers:

MC071 - Kionix KXTE9 3-axis accelerometer MC054 - ADI ADXL278 2-axis accelerometer MC055 - STMicroelectronics LIS3DH 3-axis accelerometerMC074 - Bosch Sensortec BMA250 3-axis accelerometerMC112 - ADI ADXL362 2-axis accelerometerMC140 - mCube 3-axis accelerometerMC174 - Bosch Sensortec BMA355

• Gyroscopes: MC028 - InvenSense ITG-3200 MEMS 3-axis gyroscopeMC049 - STMicroelectronics L3G4200D 3-axis gyroscopeMC061 - VTI CMR3000 3-axis gyroscope MC071 - SensorDynamics SD746 3-axis gyroscope MC092 - STMicroelectronics L3G3250A3-axis gyroscopeMC108 - STMicroelectronics L3G4IS 3-axis gyroscopeMC148 - Bosch Sensortec BMG160 3-axis gyroscopeMC152 - Sensonor STIM210 3-axis gyroscopeMC144 - STMicroelectronics L3GD20H 3-Axis gyroscopeMC173 - Maxim MAX21000 3-axis gyroscopeMC187 - STMicroelectronics A3G4250D 3-Axis Gyroscope

• Compass:MC104 - Bosch BMC050 6-axis compassMC165 - Bosch BMC150 6-axis compassMC107 - STMicroelectronics LSM303D 6-axis compassMC141 - Yamaha YAS532B 3-axis compass

• IMU: MC071 - SensorDynamics SD746 6-axis inertial MEMS MC072 - InvenSense MPU-6000 6-axis inertial MEMS MC105 - STMicroelectronics LSM330D 6-axis inertial MEMS MC111 - InvenSense MPU9150 9-axis inertial MEMS MC142 - InvenSense MPU-6500 6-axis inertial MEMS MC153 - STMicroelectronics LSM9DS0 9-axis inertial MEMS MC163 - InvenSense MPU9250 9-axis inertial MEMSMC150 - Bosch Sensortec BMX055 9-axis inertial MEMS MC179 - Maxim MAX21100 6-Axis inertial MEMS

• Pressure/Humidity sensors: MC018 - Freescale MPXY8300A MEMS TPMS MC128 - STMicroelectronics LPS331 Pressure SensorMC131 - Infineon SP37 MEMS TPMS MC130 - Sensirion SHTC1 Humidity sensor

• Microphones: MC065 - STMicroelectronics MP45DT01 MEMS Microphone MC066 - Analog Devices ADMP421 MEMS Microphone MC070 - Akustica AKU230 MEMS Microphone MC077 - EPCOS T4060 MEMS Microphone MC159 - Knowles SPU0410LR5H MEMS Microphone MC164 - AAC Acoustic iPhone 5S MEMS Microphone MC189 - InvenSense ICS-43432 MEMS MicrophoneMC184 - Wolfson WM7121/WM7132 MEMS Microphone

• Oscillators/RF: MC024 - SiTime SiT8002 MEMS OscillatorMC050 - Discera DSC8002 MEMS OscillatorMC147 - Silicon labs Si104 MEMS OscillatorMC076 - Wispry A2101 MEMS Tunable CapacitorMC109 – Avago ACMD-7612 BAW Filter

• Display/Optics: MC090 - Qualcomm Mirasol DisplayMC106 - Texas Instruments DLP MEMS Digital Micro-mirror

MEMS Processes:• Accelerometers:

MP11 - STMicroelectronics THELMA process MP12 - Bosch surface micromachining process MP13 - Kionix dry micromachining process MP14 - Analog Devices iMEMS process MP34 - Analog Devices SOI micromachining process MP15 - MEMSIC CMOS/MEMS process MP16 - Freescale surface micromachining process MP36 - Freescale HARMEMS process MP17 - Murata (VTI) 3D-MEMS process for automotive MP37 - Murata (VTI) 3D-MEMS with SOI process for automotive MP18 - Murata (VTI) 3D-MEMS process for consumer MP19 - Sensonor bulk micromachining MP33 - mCube 3D MEMS process

• Gyroscopes:MP21 - STMicroelectronics THELMA process MP22 - Bosch surface micromachining process MP23 - InvenSense Nasiri ProcessMP24 - Epson Toyocom QMEMS process MP25 - Silicon Sensing bulk micromachining process MP26 - VTI 3D-MEMS with CSOI MP27 - Maxim PSM-X2 processMP28 - Sensonor bulk micromachining MP29 - Murata (VTI) 3D-MEMS (cSOI) process

• Pressure Sensors:MP41 - Freescale CMOS/MEMS process MP42 - Bosch APSM process MP43 - Sensonor bulk micromachining process MP44 - Denso bulk micromachining process MP45 - Infineon CMOS/MEMS processMP46 - STMicroelectronics VENSENS process

• Microphones:MP51 - Knowles SiSonic MEMS process MP52 - Omron micromachining process MP53 – InvenSense (Analog Devices) micromachining process MP54 - Akustica CMOS/MEMS processMP55 - Infineon micromachining processMP56 - Epcos micromachining processMP57 - Wolfson micromachining process

• Oscillators:MP61 - SiTime MEMS First processMP62 - Discera micromachining with Silex Microsystems TSI processMP63 - Silicon Labs CMEMS process

• DMDMP71 - Texas Instruments DLP process

• RF MEMSMP73 - Avago FBAR processMP74 - Wispry MEMS over CMOS process

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System Plus Consulting specializes in the cost analysis of electronics, from semiconductor devices to electronic systems, and has developed a complete range of services and costing tools to provide in-depth production cost studies and to estimate the objective selling price of a product.

COSTING SERVICES On demand Reverse Costing studies are performed on ICs, ASICs, MEMs, Power Devices, ECUs, electronic boards and full electronic systems. The catalog of available reports includes cost analyzes on MEMS, LEDs, Modules and Electronic systems.

All these analyses are performed using in-house developed, proprietary costing tools and their technological databases.

COSTING TOOLS« Purchaser » tools IC Price+ to estimate the cost of any integrated circuit PCB Price+ for printed circuit boards Power Price+ for any power component or module SYS.Cost+ for electronic boards and systems

Cost Simulation Tools, process flow basedMEMS CoSim+ Power CoSim+ Sapphire CoSim+ LED CoSim+ 3D Package CoSim+

Other costing models can be developed according to customer specifications

Our prices are subject to change. Please check our new releases and price changes on www.systemplus.fr

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Site license price : EUR 6,900* one year support : EUR 2,000**

___ Library process, each: EUR 400* ___ Library device, each : EUR 700*

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