Microsystems Technology Office William C. Tang, Ph. D. MEMS Program Manager Microsystems Technology Office Defense Advanced Research Projects Agency (703) 696-2254 [email protected]http://www.darpa.mil/MTO/MEMS DARPA DARPA MTO MTO Approved for Public Release - Distribution Unlimited MEMS Programs at DARPA MEMS Programs at DARPA
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MEMS at DARPA - Portal IFSCdispoptic/Aulas2013/MEMS Programs at DARPA... · Microsystems Technology Office William C. Tang, Ph. D. MEMS Program Manager Microsystems Technology Office
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Microsystems Technology Office
William C. Tang, Ph. D.MEMS Program Manager
Microsystems Technology OfficeDefense Advanced Research Projects Agency
[MEMS at DARPA 3.ppt] Slide 29Microsystems Technology Office
DARPADARPA
MTOMTO
Approved for Public Release - Distribution Unlimited
Advanced Digital Receiver (ATO)Advanced Digital Receiver (ATO)Digital IF w/ Bandpass Sampling
SiGe ASIC
C6x DSP
VCSELInterconnect
High SpeedADCs
FilterTo
Modem
Filter
DSP
RF MEMS
FilterFilterRF
Input
Frequency Synthesis
A/D
[MEMS at DARPA 3.ppt] Slide 30Microsystems Technology Office
DARPADARPA
MTOMTO
Approved for Public Release - Distribution Unlimited
OutlineOutline
F IntroductionF Current ThrustsF New Programs
ä MEMS Power Sourceä Harsh-environment MEMSä BioFlips
F Conclusion
[MEMS at DARPA 3.ppt] Slide 31Microsystems Technology Office
DARPADARPA
MTOMTO
Approved for Public Release - Distribution Unlimited
HighHigh--EnergyEnergy--Density MEMS PowerDensity MEMS Power
Honeywell Knock Engine Concept (New Start)
MIT Thermoelectric Generator Concept (New Start)
Ene
rgy
Den
sity
(W-h
r/Kg)
MethaneTolueneTNTLithiumIon
125
4,000
12,000
15,000
CatalystPropane + Air
Sealing Plate
ThermopilesResistive Start-upHeater
Thin insulatingmembrane
Q
Q Q
[MEMS at DARPA 3.ppt] Slide 32Microsystems Technology Office
DARPADARPA
MTOMTO
Approved for Public Release - Distribution Unlimited
Integrated Fuel Cell and Fuel Processor for Integrated Fuel Cell and Fuel Processor for Microscale Power Generation (Microscale Power Generation (BattelleBattelle))
F Objectivesä Demonstrate a 10 milliwatt fuel processor operating with clean liquid fuels
(24 months)ä Demonstrate a 10 milliwatt fuel cell (24 months)ä Demonstrate a 50 milliwatt fuel processor operating with logistics fuels (36
months)
Alumina wafer
Anode catalyst
Cathode catalyst
Polymer Membrane
Carbon Fuel Distributor
Current Collector
laser milled gas channels
Glassy insulation
Fuel Manifold
Concept – Fuel ProcessorConcept – Fuel Cell
[MEMS at DARPA 3.ppt] Slide 33Microsystems Technology Office
DARPADARPA
MTOMTO
Approved for Public Release - Distribution Unlimited
Swiss Roll Combustor (USC)Swiss Roll Combustor (USC)
Products
Reactants
Combustionvolume
1600 1200 400 300 K500
1400 600 5007001600
(a) (b)
~ 5 mm
3-D toroidal Swiss rollmicrocombustor/generator
[MEMS at DARPA 3.ppt] Slide 34Microsystems Technology Office
DARPADARPA
MTOMTO
Approved for Public Release - Distribution Unlimited
Expanded View of SyntheticJet from GaTech
Pressure Contours40mm Grenade, M = 0.25
ARL Computational Fluid Dynamics Codes• Understand basic aerodynamic characteristics for flow control • Investigate “where” jets could be placed for various effects
40mm HE/PD M203
MEMS Flight Control for ProjectilesMEMS Flight Control for Projectiles
Weapons and MaterialsResearch Directorate
[MEMS at DARPA 3.ppt] Slide 35Microsystems Technology Office
DARPADARPA
MTOMTO
Approved for Public Release - Distribution Unlimited
Flow Sensor
Magnetic Beads with Dendrimer
Biofilter with Immunosensor Microvalve
Control System and Circuits75 mm
EmbeddedBiofluidic
Chips
70-80 µm
““BioFlipsBioFlips””––Integrated Microfluidic Integrated Microfluidic System for BioSystem for Bio--Chemical AssayChemical Assay
[MEMS at DARPA 3.ppt] Slide 36Microsystems Technology Office
DARPADARPA
MTOMTO
Approved for Public Release - Distribution Unlimited
OutlineOutline
F IntroductionF Current ThrustsF New ProgramsF Conclusion
[MEMS at DARPA 3.ppt] Slide 37Microsystems Technology Office
DARPADARPA
MTOMTO
Approved for Public Release - Distribution Unlimited
Technology Area
Typical Devices/ Applications
CompaniesMarket
Baseline ($Millions)
Market 2003 (Est.)
($Millions)
Inertial Measurement
Accelerometers, Rate Sensors, Vibration
Sensors
TI, Sarcos, Boeing, ADI, EG&G IC Sensors, AMMi, Motorola, Delco,
Breed, Systron Donner, Honeywell, Allied Signals
$350-$540 $700-$1400
Microfluidics and Chemical Testing/
Processing
Gene Chip, Lab on Chip, Chemical Sensors, Flow Controllers, Micronozzles,