AFRL-IF-RS-TR-2004-76 Final Technical Report March 2004 MECHANICAL PROPERTIES OF MEMS MATERIALS Johns Hopkins University Sponsored by Defense Advanced Research Projects Agency DARPA Order No. J346 APPROVED FOR PUBLIC RELEASE; DISTRIBUTION UNLIMITED. The views and conclusions contained in this document are those of the authors and should not be interpreted as necessarily representing the official policies, either expressed or implied, of the Defense Advanced Research Projects Agency or the U.S. Government. AIR FORCE RESEARCH LABORATORY INFORMATION DIRECTORATE ROME RESEARCH SITE ROME, NEW YORK
MECHANICAL PROPERTIES OF MEMS MATERIALS
Jun 21, 2023
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