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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Measuring Microfeatures with Dense Point Clouds
Scanning with tomography, microprobes and confocal or contrast variation systems
Dr.-Ing. Ingomar Schmidt
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Geometries smaller than 300 µm, which cannot be reached by
“standard“ probes
Part tolerances between 1 µm – 20 µm
Independent of workpiece size
Microfeature
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
No difference in the possibilities compared to standard geometries
(with the right sensor )
Dimensions
Position
Form / Shape
Roughness
Measure Microfeatures
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Standard sensors do not deliver enough point density, because feature form in relation to dimension is almost always worse.
Measure Microfeatures
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Solution: Create dense point clouds by using the right sensor
technology
Measure Microfeatures
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Measuring Point Clouds
VT-A-7-2-0301_E
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Color coded Presentation
VT-A-6-4-0250_E
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
-Highest precision and accuracy for measurements on MICROPARTS due to one
nanometer resolution and accuracy optimized design
- MPE E1 (unid./20x): (0.15 + L /900) µm
- MPE E (3D WFP): (0.25 + L /600) µm
Werth VideoCheck® UA 400x400
The “Microfeature CMM“
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Werth VideoCheck® UA 400x400 Multisensor Head
VT-A-6-6-0267_E
Highly accurate distance sensor
Werth Chromatic Focus Probe (CFP)
High precision,
telecentric optics
Werth Fiber Probe WFP
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Multisensor
VT-A-10-02-0065_E
Chromatic Focus Probe
IP in Picture
K
Z Z O
Focus Variation
Werth Laser Probe
IP Scanning
IP at Picture
Grid Scanning
Werth Fiber Probe
Werth Contour Probe
Trigger Probe
Scanning
Probe
Computer Tomography
Laser Line Probe
Nano Focus Probe
Werth
Interferometer
Probe
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Multisensor
VT-A-10-02-0065_E
K
Z Z O
Focus Variation
Werth Fiber Probe
Computer Tomography
Nano Focus Probe
Werth
Interferometer
Probe
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
3D-Patch – “Focus Variation“
VT-A-5-2-0072_E
Z2
Z0
Z1
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
3D-Patch – Micro Form Punch
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Nano Focus Probe - Principle
VT-A-8-6-00454_E
Z2
Z0
Z1
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Confocal Scanning of a Micro Form
Punch with NFP
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Werth Fiber Probe WFP (Pat.) – Principle
Ball Size down to 10µm Radius
Probe in
Zero
Probe
deflected
Moving Direction
DL
Sensor Chip
Workpiece
Probing Element
VT-A-9-02-0086_E
Developed in cooperation with PTB Braunschweig, Germany
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Scanning of Micro-gears with WFP
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Tooth Implant Measured
by WFP Scanning
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Fiber Probe in zero position
Fiber Probe deflected
Direction of movement
DL
Sensor Chip
Workpiece
Fiber Probe
x-/y- deflection, measured
with image processing sensor Distance
sensor
z- deflection, measured
with distance sensor
Spring leaf
suspension
Werth 3D Fiberprobe WFP Principle
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Werth 3D Fiberprobe WFP Design
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Werth 3D Fiber Probe WFP Results
• 3D – probing deviation: 0,15 µm* * measured on a reference sphere with VideoCheck UA and 3D correction of probing sphere form error
Error on a calibration sphere
-0,15
-0,075
0
0,075
0,15
1 9 17 25 33position
Err
or
in m
m
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Werth Interferometer Probe WIP
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de 23
125 µm
60°
0° 90°
Beam Former Unit
Fiber Carrier
Werth Interferometer Probe WIP
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Technical Data
● Sensor principle: interferometry
● Working distance: 0.01-3 mm
● Measuring range: ± 150 μm
● Probe diameter: 0.08-1 mm
● Probe length: 2.5-150 mm
● 0° up to 90° beam direction
● Probing error MPE for P1: 0.25 μm
Werth Interferometer Probe WIP
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
X-Ray Tomography
VT-A-6-3-0220_E
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
The Microfeature CT - CMM
Computer Tomography integrated in a Multisensor Coordinate Measuring Machine
Werth TomoCheck
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Measurement of an Injector Nozzle
with the Werth TomoScope®
Tomography result
VT-A-7-2-0305_E
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Measurement of an Injector Nozzle
with the Werth TomoScope®
Results can be displayed either color coded
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Measurement of an Injector Nozzle
with the Werth TomoScope®
… as values which can be measured in defined areas. This Example shows how to
measure the diameter devolution
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
SOFTWARE
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
WinWerth 3D CAD Module Online and Offline
3D CAD- Online – Control of the machine with CAD-data
Selection of an element
CNC measuring process is calculated automatically
Support of all sensors
Measuring points can be defined on patches, curves, and points
3D CAD- Offline - Programming without machine
The measuring process is shown in the graphic
VT-A-7-4-0383_E
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
WinWerth 3D BestFit color coded presentation of deviations
VT-A-8-11-0196_E
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Result Output
Meßprotokoll
Messung in Tiefe : Seite 4
Bericht Nr. :
Kreisformabweichung
-20,0-19,0-18,0-17,0-16,0-15,0-14,0-13,0-12,0-11,0-10,0-9,0-8,0-7,0-6,0-5,0-4,0-3,0-2,0-1,00,01,02,03,0
0°
90°
180°
270°
Kreisformabweichung
-4,0
-3,0
-2,0
-1,0
0,0
1,0
2,0
3,0
1 3 5 7 9 11 13 15 17 19 21 23 25 27 29 31
Numerical Output
First Article
Inspection Report
Graphical
Presentation
3D Nominal / Actual
Comparison
2D Nominal / Actual
Comparison
Formplot
Roughness Plot Statistics
VT-A-9-11-0285_E
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
The integration of “scanning sensors for dense point clouds“ in Multisensor CMM‘s opens new horizons in the metrology field.
For more information see www.werth.de
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Werth Messtechnik GmbH Siemensstr. 19 35394 Giessen Germany Tel. +49 (0)641 79380 Fax +49 (0)641 7938-719 www.werthmesstechnik.de
Questions ?