Mature Fabs – ISMI Program - SEMATECH for the environment, ... AEC/APC for mature fabs ... Mature fab, fab-wide topic space forums for benchmarking, member
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equipment teams portfolio Equipment Productivity Forums
Wet process team
Metrology team
PVD team
Ion implant team
CVD team
Thermal process team
Dry etch team
Litho team
CMP team
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ISMI Equipment Productivity Forums
2010 Equipment Productivity Forums:•
Thermal (RTP and furnace) March 2010•
Ion Implant April 2010•
CVD (single wafer) June 2010•
Dry Etch July 2010•
Litho (exposure) Sept 2010•
Wet Process Sept 2010•
Metrology Oct 2010•
PVD Oct 2010•
CMP Nov 2010
A series of workshops where equipment suppliers, component suppliers, industry experts and fab
equipment owners collaborate to improve the productivity of install base equipment
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Equipment Productivity Forum Core elements
•
3 day face-to-face meeting•
Member share–
Top issues, best known methods, equipment performance metrics
•
Multi OEM engagement–
Separate session with each OEM
•
Presentations–
Industry experts and alternate parts and services providers
•
Supplier exhibition
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Lens Cleaning to improve procedures and reduce potential damage
Value example200mm Scanner : Lens Cleaning to improve procedures and reduce potential damage
(frequency and process BKM)•
Issue: Lens contamination caused through resist outgassing
-
leeching cause lens fowling and impact local dose control, CD and defectivity. Lens cleaning
is periodically required with special care procedures and if not followed can damage the lens.
•
EPITeam solution: Supplier has implemented both improved lens enclosure “purge hoods”
as well as improved lens cleaning procedure BKMs
where proper training is required. Clear alignment with between OEM and lens suppliers has resulted.
•
Results: New purge hoods and improved cleaning procedures delay required cleaning periods. Frequency is now << less than once per year baseline (frequency user dependant: resist stacks, airborne contamination, etc.)
•
Cost benefit:•
Implementation Value: Variable ~ $100,000 -
$200,000 per tool / year•
Member only benefits: Presentations and feedback are available to member companies from supplier only. Insight to purge hood upgrades, procedures, and training
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CMP 300mm: Platen shield Value example
300mm CMP : Solution for CMP 300mm Platen shield failures•
Issue: Platen shield lift cylinder failures are occurring due to CMP slurry solutions leaking through the bellows.
•
EPITeam solution: Primary causes of slurry leaking through platen shields were identified due to seal installation, screw length variations, and bellows failures. Solutions of New Up & Down Platen Shield Sensors and new platen shield design and materials have eliminated lift cylinder failures.
•
Results: Beta testing successfully completed at member company site. Improved bellow units, new platen shield sensors, and shield designs have passed
a 14 month period with no failures.
•
Cost benefit:–
Implementation Value: Variable ~ $100,000 per tool / year
•
Member only benefits: Presentations and feedback are available to member companies from supplier only. Insight to new Up & Down Platen Shield Sensors and new platen shield design and materials
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Mature fabs workshops
•
Mature fab, fab-wide topic space forums for benchmarking, member sharing, expert learning, solving top issues and industry wide networking
Equipment component standards
Equipment alarms and message management
Other topics in development
Manufacturing costs
Maintenance practices
Alternates spares
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Mature fabs
workshops Core elements
•
1 day face-to-face meeting
•
Member share on specific topic using ISMI developed template
•
Presentations–
Industry experts, OEM’s and alternate parts and services providers
•
Workshops can be combined with equipment productivity forums
•
ISMI members determine the workshop topic
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Economic workshop -
example
•
March, in Austin–
38 attendees–
78 Golden nuggets were collected
–
Topics: Facilities, equipment, labor, process
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Maintenance of mature tools workshop -
example
•
19 attendees•
Major focus on mature tools: –
Spare Parts–
Documentation –
Training–
Success Stories
•
ISMI core, Project Updates
Common take aways•
58 golden nuggets
•
All companies had similar problems and solutions maintaining mature tools
•
Key concern was spare part availability
•
Detailed survey on tool types
•
AA Tour & presentation:–
Focus on maintenance–
Spare parts control was a major issues
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Alternative Parts and Services Project Objectives
•
Identifying and registering parts and service suppliers in a searchable database
•
Matching supplier capabilities to parts and services issues–
Quick Response Parts and Services Assistance–
Member Company Top 30 Issues
•
Introducing suppliers to member companies–
Equipment Productivity Forum Events–
ISMI Symposia
To provide parts and services solutions to member companies by:
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Alternative Parts and Services Project Achievements
•
Parts and services database currently contains 110 suppliers
•
In 1H 2010, sixty-one suppliers participated in the Equipment Productivity Forum events
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ISMI Mature Fabs
Program structure
Operationscouncils
Businesscouncils
Fab
productivity workshops
Installed based equipment forums
Alternate source spare parts Project
Manufacturing & methods
Yield
Assembly & packaging
Facilities
Test
Probe
Quality
Reliability
Failure analysis
Critical materials
Equipment procurement
Statistics
Semiconductor logistics
Manufacturing costs
Maintenance practices
Alternate spares
Equipment component standards
Equipment alarms and messages standards
Thermal (RTP and furnace)
Ion implant
CVD (single wafer)
Dry etch
Litho (exposure)
Wet Process
Metrology
PVD
CMP
Comprehensive Database
Experts may participate in over 25 separate forum areas, where each forum may meet multiple times a year
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Value and participation
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ISMI’s
unique value proposition
•
Members determine programs and deliverables•
Industry wide benchmarking–
Critical mass of industry participants–
Provides a legal safe haven for competitive benchmarking–
Tried and true methods and procedures
•
Facilitate shared learning–
Group discussions produce new and best known methods–
Learn from another company's ingenuity–
Share business process methodologies and approaches–
Secure member website for 24/7 IP access
•
Peer networking–
Create structured interactions for value creation•
Industry experts •
Key industry supply base
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ISMI model for participation
•
ISMI membership–
International SEMATECH Manufacturing Initiative–
Members participate only in manufacturing programs