AG Semiconductor Services • [email protected] • www.agsemiconductor.com 1 EQUIPMENT DATASHEET Tool ID AC02 OEM/Model Mattson Aspen II Serial Number 1010 Process ETCH - ASHING Vintage JANUARY, 2001 Wafer Size 200 mm Mattson – Aspen II
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AG Semiconductor Services • [email protected] • www.agsemiconductor.com 1
EQUIPMENT DATASHEET
Tool ID AC02 OEM/Model Mattson Aspen II
Serial Number 1010 Process ETCH - ASHING
Vintage JANUARY, 2001 Wafer Size 200 mm
Mattson – Aspen II
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