MARL Field-Emission Scanning Electron Microscope (FE-SEM) • Current JEOL SEM is over 20 years old and has a rated resolution of 4.0 nm • New FEI SEM uses a field-emission gun which provides a rated resolution of 1.2 nm. • The current SEM is routinely pushed to its limit (~50kx), but nanotechnology research demands better characterization tools • The new SEM would enable images to be taken at 150,000x and higher magnifications • It will also afford low voltage and high pressure (up to 20 Torr) modes of operation
MARL Field-Emission Scanning Electron Microscope (FE-SEM) Current JEOL SEM is over 20 years old and has a rated resolution of 4.0 nm New FEI SEM uses a.
Jan 02, 2016
Welcome message from author
This document is posted to help you gain knowledge. Please leave a comment to let me know what you think about it! Share it to your friends and learn new things together.
Transcript
MARL Field-Emission Scanning Electron Microscope (FE-SEM)
• Current JEOL SEM is over 20 years oldand has a rated resolution of 4.0 nm
• New FEI SEM uses a field-emission gun which provides a rated resolution of 1.2 nm.
• The current SEM is routinely pushed to its limit (~50kx), but nanotechnology research demands better characterization tools
• The new SEM would enable images to be taken at 150,000x and higher magnifications
• It will also afford low voltage and high pressure (up to 20 Torr) modes of operation
50kxJEOL FEI
Comparison of images from JEOL and FEI SEMs at 50kx
150kx image from FEI FE-SEM
50kxJEOL FEI
Comparison of images from JEOL and FEI SEMs at 50kx
150kx image from new FE-SEM
Low voltage capability of new FE-SEM
Note the absence of artifacts from gold coating
High voltage with gold coating Low voltage without coating
Related Documents
