Manufacturing Processes for Ceramic and Metal Microcomponents Hany Hassanin School of Mechanical and Automotive Engineering, Kingston University, Roehampton Vale Campus, SW15 3DW London, UK Mohamed Imbaby Department of Mechanical Design, Faculty of Engineering, Mataria, Helwan University, P.O. Box. 11718, Cairo, Egypt; Jubail University College, Mechanical Engineering, 35716, KSA Amr ElShaer Drug Discovery, Delivery and Patient Care (DDDPC), School of Life Sciences, Pharmacy and Chemistry, Kingston University London, Kingston Upon Thames, Surrey, KT1 2EE, UK Heba H. El-Mongy and Tamer A. El-Sayed Department of Mechanical Design, Faculty of Engineering, Mataria, Helwan University, P.O. Box. 11718, Cairo, Egypt CONTENTS 1. Introduction 2. Microfabrication Techniques 3. Ceramics, Metals and Their Composite Micro Parts 4. Conclusion Glossary References 1. INTRODUCTION The development of microfabrication techniques through the past years has led to a diversity of miniaturized mechan- ical and electromechanical components and systems. These microelectro-mechanical systems (MEMS) can vary from relatively simple structures to highly sophisticated systems. Typical applications of MEMS include accelerometers for automobile airbags, pressure and biomedical sensors, ink jet printers, drug delivery systems, blood analyzers, micromir- rors for high-definition optical displays, wireless electron- ics, and microheat exchangers for cooling of electronic circuits [1, 2]. This has been supported by the increase in the global market of MEMS devices. The global market for MEMS devices and production equipment was worth $11.7 billion in 2014. This market is expected to hit $12.8 bil- lion in 2015 and $21.9 billion by 2020 [3]. Probably the first allusion to the idea of MEMS was made by the physicist Dr Richard Feynman in his famous talk titled, “There’s plenty of room at the bottom” on 29th December 1959 [4]. Following this, Petersen [5] suggested the use of silicon as the material for micromechanical struc- tures, which is considered the foundation for the current MEMS technology. During the 1990s, the development of MEMS nourished significantly as a result of the innova- tions created during the integrated circuit (IC) revolution of the 1960s–1980s concerning processes, equipment, and materials. From this, MEMS technology has been applied ISBN: 1-58883-215-5 Copyright © 2019 by American Scientific Publishers All rights of reproduction in any form reserved. Encyclopedia of Nanoscience and Nanotechnology Edited by H. S. Nalwa Volume 28: Pages (185–212)
Manufacturing Processes for Ceramic and Metal Microcomponents
Jun 29, 2023
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