4-34 Piezo • Nano • Positioning The M-403 and M-404 lin ear translation stage series provide cost-ef fective solutions for pre- cision positioning of loads up to 20 kg over travel ranges to 200 mm. They are desi gned with high-value components and feature a precision- machined, high-density, stress- relieved aluminum base for exceptional stability with mini- mum weight. Th e high ly pr ecise M- 403 drive includes a preloaded lead screw , providin g a mini mum incremental motion of 0.2 μm. For higher velocities and long lif eti me, the M-404 versi ons feature a low-friction ball screw offering a minimum incremen- tal motion down to 0.1 μm. Three motor drive options allow easy adaptation to different au- tomation applications. Five travel ranges fro m 25 to 200 mm are offered. The stages can carry up to 20 kg and push/pull up to 50 N. Special versions for vacuum applica- tions are also available (see or- dering information). Maintenance-Free, High Guid- ing Precision All models are equi pped with high -precision linear guiding rails and recirculating ball bear- ings. The recirculating ball bear- ings are maintenance free and immune to cage migration. The choice of components and care- ful mounting guarantees high load capacity , longer lifetime and high guiding accuracy. Ad- diti onall y, in the M-404 series the bearin gs are pol ish ed to achi eve the opti mum guiding accuracy. Low Cost of System Owner - ship The combination of these stages with the networkable single-axis C-863 Mer cur y™ (see p. 4-114) and C-663 Mercury™ Step (see p. 4-112) controllers offers high performance for a very competi- tive price in both singl e and mul- tiaxis con fig uratio ns. Alt er - natively, the C-843 motion con- troller PCI card with on-board servo amplifiers is available. Three Motor Drive Options The top-of-the-line M-40x.xPD hi gh- sp eed versions come equipped with the high-perfor- mance Acti veDri ve™ syst em. The Acti veDr ive™ desi gn, de- veloped by PI, featur es a high - eff ici ency PWM (pulse wid th mod ulation) ser vo- amplif ier mounted side-by-side with the DC motor and off ers several advantages: Increased efficiency, by eliminating power losses between the amplifier and motor Reduced cost of ownership and improved reliability, because no external driver is required Elimination of PWM ampli- fier noise radiation, by mounting the amplifier and motor together in a single, electrically shielded case M-40x.xDG models are equipp- ed with a DC motor and a shaft- m ou nt ed o pt ic al e nc od er, providing a minimum incremen- tal motion of down to 0.1 μm. M-40x. x2S models featur e a c os t- effe ct i ve di r ec t- dr iv e, 2-phase stepper motor, provid- ing very smooth operation and a resolution of 0.16 μm. Limit and Reference Switches For the protection of your equip- ment, non-c ontac t Hall -effect limit and reference switches are installed. The direction-sensing refer ence swit ch supp orts ad- vanced automation applications with high precision. Other Family Members The M-403/M-413 and M-404/ M-414 ser ies of li near stages form a modular sys tem. The M-403 is the basic family, pro- viding travel ranges from 25 to 200 mm. M-413 is designed for higher loads with travel ranges from 100 to 300 mm. The M-404 and M-414 s ta ge s h av e t he same travel ranges and load ca- pacities, but offer higher preci- sion and more speed. M-403 · M-404 Precision Translation Stage Cost-Effective, Large Choice of Drives & T ravel Ranges Application Examples Automation R&D Semiconductor technology Metrology Quality assurance testing Ordering Information Ask about custom designs! M-40 . 1 Travel Range 25 mm 2 Travel Range 50 mm 4 Travel Range 100 mm 6 Travel Range 150 mm 8 Travel Range 200 mm 3 Linear Translation Stage with lead screw, 80 mm wide 4 Precision-Linear Stage with ball screw, 80 mm wide PD ActiveDrive TM DC Motor (includes 24 V power supply) DG DC Motor Gearhead 2S 2-Phase Stepper Motor VP ActiveDrive TM DC-Motor (includes 24 V power supply), Vacuum Compatible to 10 -6 hPa VG DC Motor Gearhead, Vacuum Compatible to 10 -6 hPa M-403 linear stage versions (from left) M-403.1PD, M-403.2PD, M-403.4PD, M-403.6PD und M-403.8PD provide travel ranges from 25 to 200 mm For Cost-Sensitive Precision Po sitioning Applications Travel Ranges 25 to 200 mm Resolution to 0.012 μm Min. Incremental Motion to 0.1 μm Preloaded Precision Leadscrew or Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes Stress-Relieved Aluminum Base for High est Stability V acuum-CompatibleVersions Available M-413 and M-414 V ersions for Higher Load Requirements © P h y s i k I n s t r u m e n t e ( P I ) G m b H & C o . K G 2 0 0 9 . S u b j e c t t o c h a n g e w i t h o u t n o t i c e . A l l d a t a a r e s u p e r s e d e d b y a n y n e w r e l e a s e . T h e n e w e s t r e l e a s e f o r d a t a s h e e t s i s a v a i l a b l e f o r d o w n l o a d a t w w w . p i . w s . R 1 0 9 / 0 8 / 1 0 . 0