M-2800 Series - Inline Ultrasonic Flow Meter - Malema Sensors

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M-2800 SeriesInline Ultrasonic

Flow Meter

Key Features•Sensor and electronics in one

package•No dead legs, no obstructions•No moving parts in the flow path•Straight flow path•Minimal pressure loss•Accuracy ±1% F.S.•Repeatability ±0.5% F.S.•All wetted parts made of PFA •Free from ion or particle

contamination•Corrosion resistant•Wide rangeability•Easy installation with compact

meter body

DescriptionThe M-2800 consists of an inline flow sensor and electron-ics in one package. The flow sensor is a straight-through PFA tube with a pair of assemblies of angled wedges and piezoe-lectric crystals mounted on it. The M-2800 utilizes the latest digital signal processing (DSP) technology and provides flow measuring solutions with minimum compromise in perfor-mance. The compact integrated package includes sensor and electronics, and saves space and minimizes cabling, facilitat-ing an easier installation.

There are no moving parts or mechanical seals. The M-2800 is an ideal choice for use in the semiconductor industry where minimal footprint, high purity and corrosion resistant wetted parts are required.

Measurement PrincipleThe flow meter utilizes transit-time ultrasonic technolo-gy to determine flow rate of the liquid. Two piezoelec-tric crystals (transducers) are attached on the outer di-ameter of the flow tube (or on angled wedges attached on the outer diameter of the flow tube) and are excited producing ultrasound signals. Each transducer alternately transmits and receives ultrasound signals. The difference in transit time of the signals (transmitting upstream and downstream) is proportional to the velocity of the fluid allowing determination of flow rate.

Applications• CMP, ECD, Electroless Deposition, Wet Clean and

Track tools in semiconductor manufacturing

• Solar PV equipments

• Medical devices

• Wet process / Chemical distribution system

• Laser Equipment

• Cooling systems

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M-2800 Inline Ultrasonic Flow MeterOperationSpecifications• Measurable Fluid: Liquids• Fluid Temperature: 50° – 140°F (10° – 60°C)• Fluid Pressure: 0 – 70 psig• Ambient Temperature: 32° – 115°F (0° – 46°C)• PFA Tube End or others *• Enclosure Classification: IP64

* Consult Malema for any special requirements

PerformanceSpecifications

Tube Size/ End connections 1/4” 3/8” 1/2” 3/4” 1” 1 1/8 “

Standard Full Scale Range * 3 l/min 8 l/min 40 l/min 80 l/min 200 l/min 250 l/min

Accuracy ±1% F.S.*

Repeatability ±0.5% F.S.** Customflowrangesavailableuponrequest.Consultfactoryforanyotherspecialrequirements

ElectricalSpecifications

Output Options

Analog Output

Current O/p:Active: 4—20 mA (Max. Load < 900 ohms)

Passive: 4—20 mA (Max. Load < 1200 ohms @ 30 V max.)Voltage O/p: 0—10 Vdc (min. impedance > 10 K)

Digital Output

Open Collector / Max. 30 Vdc, 200 mA max.Configurable for Low flow rate, High flow rate, Totalizer greater than,

Totalizer less than, Signal strength less, Positive totalizer pulse *

Digital Input Zeroing – Momentary pull-up to 24 Vdc for activation

Power Supply 24 Vdc ±10%

Power Consumption 100 mA

Digital Communication MODBUS over RS-485

* Pulsefrequencyconfigurableupto10KHz;Pulseweightconfigurablefrom0.01ml

MaterialSpecifications

Enclosure Classification IP64

Optional Cable Consult factory for available cable lengths and configurations

Non-wetted Parts PEEK, PP, SS

Wetted Parts High Purity PFA

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M-2800 Inline Ultrasonic Flow MeterConnectororMatingCable(Optional)Specification

Pin # Wire Color Function

1 White Signal OUT (4—20 mA or 0—10 Vdc)

2 Brown Power IN (+24 Vdc)

3 Green Remote Zero IN *

4 Yellow Alarm or Pulse OUT

5 Gray RS-485 A, Data -

6 Pink RS-485 B, Data +

7 Blue Ground (Power and signal)

8 Red Not Used

* Momentary pull-up to 24 VdcNOTE:Consultfactoryforothercableandpinoutoptions

Front View

Dimensional DrawingsFOR REFERENCE ONLY

1/4” Tube Ends Version

8 PinTurck P/n FSFDV 8-0.5for I/O

B

d

D

.63

M3 x .30" Dp2 Places

G

H

A

F

E

C

.53

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M-2800 Inline Ultrasonic Flow Meter

Both endsFitting1/2" S300 Pillar

n

161074.20 .63

1264.97

Flow directionFlow direction

Mounting holeM3 x .25" dp2 places

.74

23

19

301.20

.90

11.43

68 2.68

411.60

1.9550

.8020

.5013

361.40

DimensionalDrawings(Continued)FOR REFERENCE ONLY

1/2” S300 Pillar Version

8 PinTurck P/n FSFDV 8-0.5for I/O

.63 B

D

L d

3.00

E

1.40

C

A

F

.73

M3 x .30" Dp2 Places

H

G

3/8” Tube End Version

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M-2800 Inline Ultrasonic Flow Meter

49.5

.7519.1

24.8.98

3.6592.7

1.9516.63

14.55

24.8.98

32mm GF connectionBoth ends

Flow direction

x 1.000 Tube ID1.125 Tube OD

9.75247.7

1756.89

Mounting Holefor M4 screw

2 Places58.2

1.4135.8

2.2958.42.30

1" Female S300 Pillar FittingBoth ends

Flow direction

1.125 Tube ODx 1.000 Tube ID

6.89175

266.910.51

14.55

24.8.98

3.6592.7

16.63

49.5

.7519.1

1.95

24.8.98

Mounting Holefor M4 screw

2 Places

1.4135.8

58.22.29

58.42.30

DimensionalDrawings(Continued)FOR REFERENCE ONLY

34mm GF Version

1” S300 Pillar Version

NOTE:Drawingsshowmatingcableoption.6’pigtailcablewithfreeleadsstandard.

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M-2800 Inline Ultrasonic Flow MeterOrderingInformation

Model CodeDescription

M-2800 - * - * * * - * * - ***

-

Electronics Type I Integrated Electronics

-

Wetted Parts F PFA

Connection Size (O.D.)

2 1/4”

3 3/8”

4 1/2”

6 3/4”

8 1”

S 1 1/8”

Fluid Connection

1 Tube Ends

2 Pillar S300 Union Ends

3 Pillar S300 Welded Ends

5 Flare Union Ends

6 Others

-

Local Display1 Yes ***

2 No

Analog Output

1 0—10 Vdc

2 4—20 mA active

3 4—20 mA passive

4 Others

-

XXX Unique PN Identifier*** Future versions

© 2015 Malema Engineering Corporation. All rights reserved.

Malema, Malema Sensors, and Malema Engineering Corporation are service marks of Malema Engineering Corpration. All other trademarks are property of their respective owners.

Malema supplies this publication for informational purposes only. While every effort has been made to ensure accuracy, this publication is not intended to make performance claims or process recommendations. Malema does not warrant, guarantee, or assume any legal liability for the accuracy, completeness, timeliness, reliability, or usefulness of any information, product, or process described herein. We reserve the right to modify or improve the designs or specifications of our products at any time without notice. For actual product information and recommendations, please contact your local Malema representative.

DS.M2800/518201

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