- 1. A Flexure-based MicroOptoElectromechanical
SystemLLNL-PRES-644130This work was performed under the auspices of
theU.S. Department of Energy by Lawrence LivermoreNational
Laboratory under contract DE-AC52-07NA27344.Lawrence Livermore
National Security, LLCRobert Panas and Jonathan Hopkins
2. Lawrence Livermore National Laboratory LLNL-PRES-6441301mm
Intent Light-field control Capabilities Closed loop
Tip/Tilt/PistonDegrees of Freedom Independent mirrors 99% fill
factor Array-able Up to 80 optical Up 100khz fine motion
BW1mm21mm500m 3. Fabrication Phase Hexapod flexures + mirror
Actuator paddles Base plate Near completion (end of 2013) Assembly
Phase BeginningHexapod Base plate500 m Array demonstration 1-2
yrsLawrence Livermore National Laboratory LLNL-PRES-64413031 mm 100
m1 mm100 mActuation paddles500 m 4. Requirements Control
Analog/Discrete Degrees of Freedom 1,2,3 Array 0D,1D,2D Fill Factor
>75%Lawrence Livermore National Laboratory LLNL-PRES-6441304 5.
Unique Features Stabilizing flexures Rotary Comb geometry Hexapod
flexures Constrained Design Via layout Faster more accuratemotion
and larger range Larger array Integrated light
sourceMirrorHexapodFlexuresActuatorPaddleCombsBase
PlateViaSolder-ballsPCBLawrence Livermore National Laboratory
LLNL-PRES-644130 5 6. Lawrence Livermore National Laboratory
LLNL-PRES-644130Confocal Microscopywikipedia.com Video rate
confocal microscopy High-speed, focusable LIDAR 3D Image Projection
Image stabilization High-energy beam direction6LIDARwikipedia.com3D
ImagesUS 2012/0194508 A1 7. Charity
[email protected] Livermore National Laboratory
LLNL-PRES-644130 7