Lesker U Basic Vacuum Technology Core Facilities Services Case Western Reserve University Vacuum Basics • Technical Resources for Basic Vacuum • Gas-solid Interactions • Flow Regimes • Conductance • Pumping Speed • Gas Load • Outgassing • Pump Throughput • System Modeling Physical Vapor Deposition • Book Resources • Major PVD Methods o Thermal Evaporation o E-Beam Evaporation o Sputtering • Deposition and Film Growth • Practical Technical Issues Course Schedule • Wednesday, June 10th, 2015 • RSVP to [email protected] by Monday, June 8th • Lunch will be provided to registered attendees • Vacuum Basics 10:00 a.m. to 12:00 p.m. • Physical Vapor Deposition 12:00 p.m. to 2:00 p.m. 9 Location: DeGrace Hall 312, Biology Building, Case Western Reserve University, (West side of Albert Road) Contact: Dr. Ina Martin, MORE Center Director of Operations, [email protected], 216-368-4007
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Lesker U Basic Vacuum Technology
Core Facilities Services Case Western Reserve University Vacuum Basics • Technical Resources for Basic Vacuum • Gas-solid Interactions • Flow Regimes • Conductance • Pumping Speed • Gas Load • Outgassing • Pump Throughput • System Modeling
Physical Vapor Deposition • Book Resources • Major PVD Methods
o Thermal Evaporation o E-Beam Evaporation o Sputtering
• Deposition and Film Growth • Practical Technical Issues
Course Schedule • Wednesday, June 10th, 2015 • RSVP to [email protected] by Monday, June 8th • Lunch will be provided to registered attendees • Vacuum Basics 10:00 a.m. to 12:00 p.m. • Physical Vapor Deposition 12:00 p.m. to 2:00 p.m.
9 Location: DeGrace Hall 312, Biology Building, Case Western Reserve University, (West side of Albert Road) Contact: Dr. Ina Martin, MORE Center Director of Operations, [email protected], 216-368-4007
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