Top Banner
Lecture 24 – Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku
26

Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

Apr 01, 2018

Download

Documents

phungngoc
Welcome message from author
This document is posted to help you gain knowledge. Please leave a comment to let me know what you think about it! Share it to your friends and learn new things together.
Transcript
Page 1: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

Lecture 24 –Semiconductor Nanowires

EECS 598-002 Winter 2006Nanophotonics and Nano-scale Fabrication

P.C.Ku

Page 2: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

2EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Size dependence (quantum confinement)

g(E) = Density of states

Eg E

g(E)

Eg E

g(E)

Eg E

g(E)

Eg E

g(E)

bulk sheet wire dot

3D 2D 1D 0D

Page 3: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

3EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Why nanowires?

Usually easier to fabricate than QD’sMore variety of materials available.Large surface area may be useful for some applications.Can also tolerate large lattice mismatch along the interface.More easily to be made uniformNew physics: exciton diffusion, …

Page 4: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

4EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Exciton diffusion

Science 273 (1996) 1351.

Page 5: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

5EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

VLS growth

Page 6: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

6EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

VLS growth (cont.)

Vapor supply combining with the catalyst (e.g. Au) to form an eutectic melt (at a much lower temperature compared to the melting point of the source materials.)

Supersaturation within the melting droplet leads to crystallization.

Page 7: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

7EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Phase diagram for Si nanowires growth

Page 8: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

8EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Nanowire heterostructure

J. Appl. Phys. 97 (2005) 114325.

Page 9: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

9EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Atomically abrupt interface

Gas sourceMBE

Nano Lett 2 (2002)87.

Page 10: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

10EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Si/SiGe

Wu et al., Nano Lett. 2 (2002) 83.

Page 11: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

11EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Multishell structure

Nature 420 (2002) 57.

Page 12: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

12EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Page 13: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

13EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Hybrid assembly

Langmuit-Blodgett method

Nano Lett3 (2003) 1255.

Page 14: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

14EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Hybrid assembly

Flow assembly

Science 291 (2001) 630.

Page 15: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

15EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Page 16: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

16EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Page 17: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

17EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Growth on patterned substrates

Adv. Mat. 17 (2005) 2098.

Page 18: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

18EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Appl. Phys. A 80 (2005) 1133.

Page 19: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

19EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Nanotubes

Other materials can also form tubular structures. Examples are BC2N and BC3 tubes, …

Carbon nanotubes Boron nitride nanotubes

Page 20: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

20EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Rolling

Zigzag face Armchair face

Page 21: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

21EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Cap structure

Nanotube descends from the fullerene (C60, C70, C78, …) family.

Page 22: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

22EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

SWNT vs. MWNT

MWNT’s have more defectsMWNT’s are easier and less expensive to produce

SWNT facility (Carbon Nanotechnology Inc)

Page 23: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

23EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Fabrication

Requires plasma state and metal catalystTo create the plasma state:

Arc discharge of a graphite rodLaser ablation of a graphite rodChemical vapor deposition

Metal catalyst: Cobalt, iron, or nickel keep the tube open and ensures the formation of hexagonal structure

To get SWNT, high pressure CO flow has been developed.Major difficulties:

Impurity can be removed from acid treatment can add other impuritiesDifferent tubes produced at the same time electrical heating can remove metallic MWNT; however, no way for SWNT.

30V, 100A

He

Page 24: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

24EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Electronic properties – Carbon tubes

SWNT: Either metal or semiconductor:Armchair : metaln-m = 3k (k ≠ 0) : semiconductor with tiny Eg

all others : semiconductor with Eg inversely proportional to tube diameter

MWNT: similar to SWNT due to weak interaction between walls

Page 25: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

25EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

C vs BN nanotubes

BN tubes are electrically uniformAll BN nanotubes are semiconductors and have same Egregardless of tube diameter, chirality, and number of walls.

Bulk BN is insulator cannot be used as an electrode

Bulk BN

Tungstun electrodeanode

Cu as cathode

He 650 torr

Page 26: Lecture 24 - nanowiresweb.eecs.umich.edu/~peicheng/teaching/EECS598_06... · Semiconductor Nanowires EECS 598-002 Winter 2006 Nanophotonics and Nano-scale Fabrication P.C.Ku. ...

26EECS 598-002 Nanophotonics and Nanoscale Fabrication by P.C.Ku

Review article

Law et al., Ann. Rep. Mat. Res. 34 (2004) 83.