Chemical Microsystems Applications Fundamentals of Micromachining Dr. Bruce Gale With Special Thanks to Dr. Ron Besser Outline • Microfluidic Component Examples • Chemical Microsystems for Analysis • Chemical Microsystems for Synthesis Microchannels, Fluidic Vias KOH Etch vs. DRIE KOH Etched (100 µm channels) DRIE Etched (5 µm channels)
12
Embed
Lecture 24 Chemical Microsystemsgale/mems/Lecture 24 Chemical Microsystems.pdf1.0E-03 1.5E-03 2.0E-03 2.5E-03 3.0E-03 3.5E-03 020 40 60 80 100 PC6H10 (torr) STY A (g/cm^2/min) 0.3
This document is posted to help you gain knowledge. Please leave a comment to let me know what you think about it! Share it to your friends and learn new things together.
Transcript
Chemical Microsystems Applications
Fundamentals of MicromachiningDr. Bruce Gale
With Special Thanks to Dr. Ron Besser
Outline• Microfluidic Component Examples• Chemical Microsystems for Analysis• Chemical Microsystems for Synthesis
Microchannels, Fluidic Vias KOH Etch vs. DRIE
KOH Etched (100 µm channels) DRIE Etched (5 µm channels)
Microchannels Microchannel Reaction Zone
100 µm Channels 5 µm Channels
Reactor Cross Section
Inside Channel
Urea AmmoniaProduct
“First generation” PDMS Microreactors
5 cm 7.5 cm 10 cm
150 µµµµmScale = 1 mm
Scale = 100 µµµµm
PDMS MicroReactor
Flow characteristics of transverse mixing featuresFeatures
•Flow depicted by contrasting dark lines/light green areas
•Fluid mixing to bring soluble reactant into contact with catalyst surface
Scale Comparison
Nanoreactor or Micelle Macroscale, Industrial Scale
Applications of Microreactors1. Distributed Processing2. Toxic or Hazardous Chemicals3. Chemical Prototyping4. High-Value, Low-Volume Chemicals5. Bulk Production of Commodity Chemicals6. Special Environments7. Laboratory Systems8. Combinatorial Chemistry
C.M. for Synthesis• Definition• Conversion• Selectivity• Example: IfM Microreactor
IfM Microreactor for Synthesis Device Design
Inlet Via Outlet Via
Silicon Chip
Catalyst
Inlet ChannelPyrex Cover
Microchannels5µm or 100 µm
Manifold
Device Fabrication
Final 1 x 3 cm2 device
100 mm Si wafer, 18 reactors
topside via
inlet/outlet
bottom via
channels
anodic bond
starting wafer mask layer
[KOH or DRIE Etching]
Temperature Effect
0.00.10.20.30.40.50.60.70.80.91.0
0 50 100 150 200 250
Temperature (°C)
Cyclohexane Benzene
0.00.10.2
0.30.4
0.5
0.60.70.8
0.91.0
0 50 100 150 200
Temperature (ºC)
100 µm channels
Temperature holds1
2 3 4 5 67 8
109
Degradation of Conversion
hydrogenation dehydrogenation
Selectivity Reversal at T>150°C
Conversion near 100%
Activity at Troom
Both products at Troom
Benzene Space Time Yield-Effect of Composition
Benzene Space Time Yield (200ºC)
0.0E+00
5.0E-04
1.0E-03
1.5E-03
2.0E-03
2.5E-03
3.0E-03
3.5E-03
0 100 200 300 400 500 600
PH2 (torr)
STY A
(g/c
m^2
/min
)
0.3 sccm Ar (E) 0.6 sccm Ar (E) 1.0 sccm Ar (E)0.3 sccm Ar (F) 0.6 sccm Ar (F) 1.0 sccm Ar (F)
Space Time Yield =yield X flow rate / catalyst area
Increasing H2suppresses dehydrogenation
Increasing C6H10 favors dehydrogenation
Benzene Space Time Yield (200ºC)
0.0E+00
5.0E-04
1.0E-03
1.5E-03
2.0E-03
2.5E-03
3.0E-03
3.5E-03
0 20 40 60 80 100
PC6H10 (torr)
STY
A (g
/cm
^2/m
in)
0.3 sccm Ar (E) 0.6 sccm Ar (E) 1.0 sccm Ar (E) 0.3 sccm Ar (H)0.6 sccm Ar (H) 1.0 sccm Ar (H) 0.3 sccm H2 (D)
Features•6 channels•50 channel length•transverse mixing features in each straight section
Microreactor 2 Design
Observations•4-6 samples averaged for each data point
•critical influence of residence time evident
•microreactoroperated 48 hours with no substantial loss in enzyme activity
Flow rate (mL/min-channel)
Ure
a C
onve
rsio
n (X
)
Continous Microreactor Results50 cm channel with transverse features
Averaged data
Packaged Microreactor
Systems
Distributed Processing• Nature’s Model• Example: Oil Processing• An Analogy of Distributed vs. Centralized