ALD fHi h ALD fHi h LEO LEO dL YO dL YO Ui Mtl Ui Mtl ALD of High ALD of High-NN LaErO LaErO 3 andLaYO andLaYO 3 Using Metal Using Metal Amidinate Sources Amidinate Sources Huazhi Li, Daewon Hong, and Deo V. Shenai * Advanced Thin-Film Technologies Advanced Thin-Film Technologies, Rohm and Haas Electronic Materials LLC, North Andover, MA 01845 Yi Li d R GG d * Yiqun Liu and Roy G. Gordon * Department of Chemistry and Chemical Biology, Harvard University, Cambridge, MA 02138